JP5457131B2 - ブレード交換装置 - Google Patents
ブレード交換装置 Download PDFInfo
- Publication number
- JP5457131B2 JP5457131B2 JP2009233831A JP2009233831A JP5457131B2 JP 5457131 B2 JP5457131 B2 JP 5457131B2 JP 2009233831 A JP2009233831 A JP 2009233831A JP 2009233831 A JP2009233831 A JP 2009233831A JP 5457131 B2 JP5457131 B2 JP 5457131B2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- cutting
- nut
- gripping
- replacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005520 cutting process Methods 0.000 claims description 336
- 230000007246 mechanism Effects 0.000 claims description 74
- 238000000034 method Methods 0.000 description 32
- 230000008569 process Effects 0.000 description 32
- 239000004065 semiconductor Substances 0.000 description 32
- 235000012431 wafers Nutrition 0.000 description 32
- 238000001514 detection method Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 16
- 238000012545 processing Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 210000000078 claw Anatomy 0.000 description 9
- 238000003860 storage Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000003754 machining Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000004308 accommodation Effects 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000015654 memory Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Dicing (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009233831A JP5457131B2 (ja) | 2009-10-07 | 2009-10-07 | ブレード交換装置 |
CN201010507214.XA CN102029657B (zh) | 2009-10-07 | 2010-09-29 | 刀具更换装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009233831A JP5457131B2 (ja) | 2009-10-07 | 2009-10-07 | ブレード交換装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011079098A JP2011079098A (ja) | 2011-04-21 |
JP5457131B2 true JP5457131B2 (ja) | 2014-04-02 |
Family
ID=43883372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009233831A Active JP5457131B2 (ja) | 2009-10-07 | 2009-10-07 | ブレード交換装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5457131B2 (zh) |
CN (1) | CN102029657B (zh) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014143323A (ja) * | 2013-01-24 | 2014-08-07 | Disco Abrasive Syst Ltd | 加工装置 |
JP6202932B2 (ja) * | 2013-08-13 | 2017-09-27 | 株式会社ディスコ | ワッシャーブレード及びブレードケース |
JP2015090936A (ja) * | 2013-11-06 | 2015-05-11 | 株式会社ディスコ | 部品 |
JP6388547B2 (ja) * | 2015-01-26 | 2018-09-12 | 株式会社ディスコ | 切削装置 |
JP6410626B2 (ja) * | 2015-02-06 | 2018-10-24 | 株式会社ディスコ | 切削装置 |
JP6403595B2 (ja) * | 2015-02-06 | 2018-10-10 | 株式会社ディスコ | 位置調整治具及び位置調整方法 |
JP6557049B2 (ja) * | 2015-04-23 | 2019-08-07 | 株式会社ディスコ | 加工装置 |
JP2017168484A (ja) * | 2016-03-14 | 2017-09-21 | 株式会社東京精密 | ダイシング装置 |
JP6646221B2 (ja) * | 2016-05-09 | 2020-02-14 | 株式会社東京精密 | ダイシング装置及びダイシング方法 |
JP6769680B2 (ja) | 2016-11-11 | 2020-10-14 | 株式会社ディスコ | フランジ機構 |
JP6847729B2 (ja) * | 2017-03-28 | 2021-03-24 | 株式会社ディスコ | 切削装置 |
AT519561B1 (de) | 2017-04-25 | 2018-08-15 | Fill Gmbh | Bearbeitungsanlage und Verfahren zum Durchführen eines Werkzeugwechsels an der Bearbeitungsanlage |
JP6907027B2 (ja) * | 2017-05-30 | 2021-07-21 | 株式会社ディスコ | 切削装置 |
JP6998159B2 (ja) * | 2017-09-07 | 2022-01-18 | 株式会社ディスコ | 切削ブレード供給装置 |
KR102582732B1 (ko) * | 2017-09-19 | 2023-09-27 | 주식회사 탑 엔지니어링 | 스크라이빙 장치 |
JP6612372B2 (ja) * | 2018-01-30 | 2019-11-27 | Towa株式会社 | フランジ交換機構、切断装置、フランジ交換方法および切断品の製造方法 |
JP7165510B2 (ja) * | 2018-05-25 | 2022-11-04 | 株式会社ディスコ | 搬送用治具及び交換方法 |
JP7206065B2 (ja) * | 2018-07-26 | 2023-01-17 | 株式会社ディスコ | 切削装置 |
JP7295702B2 (ja) * | 2019-05-29 | 2023-06-21 | 株式会社ディスコ | 通信システム |
JP2021041492A (ja) * | 2019-09-11 | 2021-03-18 | 株式会社ディスコ | ブレード交換装置 |
JP7397615B2 (ja) * | 2019-10-08 | 2023-12-13 | 株式会社ディスコ | 切削ブレード及び加工装置 |
KR102267732B1 (ko) * | 2019-10-08 | 2021-06-22 | 주식회사 탑 엔지니어링 | 스크라이빙 휠 교체 장치 및 이를 포함하는 스크라이빙 장치 |
JP7316901B2 (ja) | 2019-10-09 | 2023-07-28 | 株式会社ディスコ | 切削ブレードの識別方法及び加工装置 |
JP7285754B2 (ja) * | 2019-10-10 | 2023-06-02 | 株式会社ディスコ | 加工装置 |
CN113213745B (zh) * | 2021-03-24 | 2022-09-27 | 重庆惠科金渝光电科技有限公司 | 一种切割机及其切割方法 |
CN114888669B (zh) * | 2022-06-27 | 2024-01-12 | 株洲泰金机械有限责任公司 | 机床刀具收纳装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10340867A (ja) * | 1997-06-05 | 1998-12-22 | Tokyo Seimitsu Co Ltd | ブレード自動交換システム |
JP4387010B2 (ja) * | 1999-11-10 | 2009-12-16 | 株式会社ディスコ | 切削装置 |
JP2004066417A (ja) * | 2002-08-08 | 2004-03-04 | Mori Seiki Co Ltd | 工具管理方法及び工具管理装置 |
JP2007088028A (ja) * | 2005-09-20 | 2007-04-05 | Disco Abrasive Syst Ltd | 分割装置及びウェーハのアライメント方法 |
JP4837973B2 (ja) * | 2005-10-13 | 2011-12-14 | 株式会社ディスコ | 切削ブレードの交換装置 |
JP2007229843A (ja) * | 2006-02-28 | 2007-09-13 | Disco Abrasive Syst Ltd | 切削装置 |
TWI438163B (zh) * | 2007-06-06 | 2014-05-21 | Mitsuboshi Diamond Ind Co Ltd | Multi-stroke head loading scribing device and cutter wheel automatic replacement system |
-
2009
- 2009-10-07 JP JP2009233831A patent/JP5457131B2/ja active Active
-
2010
- 2010-09-29 CN CN201010507214.XA patent/CN102029657B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011079098A (ja) | 2011-04-21 |
CN102029657A (zh) | 2011-04-27 |
CN102029657B (zh) | 2014-09-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5457131B2 (ja) | ブレード交換装置 | |
JP4837970B2 (ja) | 切削ブレードの交換装置 | |
JP4837973B2 (ja) | 切削ブレードの交換装置 | |
JP2007229843A (ja) | 切削装置 | |
EP1099511B1 (en) | Rotary tool including a cutting blade and cutting apparatus comprising the same | |
JP2006156809A (ja) | 切削装置 | |
KR102598368B1 (ko) | 절삭 장치 | |
JP2007208114A (ja) | 切削装置 | |
KR20180037116A (ko) | 절삭 장치 | |
JP5892831B2 (ja) | 切削装置 | |
JP5148925B2 (ja) | フレームクランプ | |
JP6327954B2 (ja) | 加工装置 | |
JP4837974B2 (ja) | 切削ブレードの交換装置 | |
JP7316901B2 (ja) | 切削ブレードの識別方法及び加工装置 | |
TWI742263B (zh) | 切割裝置 | |
JP2021167033A (ja) | 切削装置、切削ブレードの交換方法及びボードの交換方法 | |
KR20060121551A (ko) | 피씨비 어셈블리의 절단장치 | |
TW202145324A (zh) | 刀片交換裝置以及刀片交換裝置之調整方法 | |
JP4342861B2 (ja) | 半導体ウエーハの加工装置 | |
JP2000021820A (ja) | 半導体ウェーハの分割加工方法 | |
JP2014154633A (ja) | 加工装置 | |
JP2007081317A (ja) | 切削装置 | |
JP7397615B2 (ja) | 切削ブレード及び加工装置 | |
CN212780552U (zh) | 一种钻咀刃面检测机 | |
JP6422805B2 (ja) | 切削装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120918 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130918 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131008 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131203 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131224 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140109 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5457131 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |