JP5289042B2 - 工具のための多層硬物質被覆 - Google Patents
工具のための多層硬物質被覆 Download PDFInfo
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- JP5289042B2 JP5289042B2 JP2008503344A JP2008503344A JP5289042B2 JP 5289042 B2 JP5289042 B2 JP 5289042B2 JP 2008503344 A JP2008503344 A JP 2008503344A JP 2008503344 A JP2008503344 A JP 2008503344A JP 5289042 B2 JP5289042 B2 JP 5289042B2
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- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 7
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- QQHSIRTYSFLSRM-UHFFFAOYSA-N alumanylidynechromium Chemical compound [Al].[Cr] QQHSIRTYSFLSRM-UHFFFAOYSA-N 0.000 description 4
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- 229910019590 Cr-N Inorganic materials 0.000 description 3
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- CYKMNKXPYXUVPR-UHFFFAOYSA-N [C].[Ti] Chemical compound [C].[Ti] CYKMNKXPYXUVPR-UHFFFAOYSA-N 0.000 description 3
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 3
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- 229910052782 aluminium Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
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- 229910018509 Al—N Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910019819 Cr—Si Inorganic materials 0.000 description 1
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- RQMIWLMVTCKXAQ-UHFFFAOYSA-N [AlH3].[C] Chemical compound [AlH3].[C] RQMIWLMVTCKXAQ-UHFFFAOYSA-N 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
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- 229910052720 vanadium Inorganic materials 0.000 description 1
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- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
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Description
(1a)窒化クロムアルミまたは窒化カーボンアルミ、及び、窒化シリコンチタンまたは窒化カーボンチタンの複数の異なる層からなる一つのシーケンスを備える、硬物質被覆された工作物。
(1b)窒化クロムアルミまたは窒化カーボンアルミ、及び、窒化シリコンチタンまたは窒化カーボンチタンの複数の異なる層からなる一つのシーケンスを備える、工具、特に切断及び成形工具(ドリル、フライス、タップ、スレッドフォーマー、ホブ、パンチ、ダイ、絞りポンチなど)、及び、これらの工具の応用。
(1c)窒化クロムアルミまたは窒化カーボンアルミ、及び、窒化シリコンチタンまたは窒化カーボンチタンの複数の異なる層からなる一つのシーケンスを、所与の層構造で作成する方法。
従来技術(Ti−Al−Nベースの被覆)により硬物質被覆された工具は、最適化された新しい(Al1−XCrXX)−(Ti1−ySiy)X硬物質層(X=NまたはCN)より寿命が短い。
Al−Cr−(X)−N/Ti−Si−N硬質膜を形成するために、たとえば特許文献4の図3から図6、明細書第7欄第18行から第9欄第25行にも記述されているように、コーティング装置(Balzers社製、RCS型)を用いた。そのために、洗浄した工作物を直径によって、2回、または、直径が50mm未満の場合は3回回転する基板ホルダに固定し、溶融冶金的に製造された2つのTi−Siターゲット、及び、Al−Cr−(X)合金から粉末冶金的に製造された4つのターゲットを、コーティング装置の壁面に取り付けられた陰極アーク源に取り付けた。このとき、ターゲットの幾何学的配置は、平面図が八角形である該RCS装置によりほぼ決定されるため、互いに向き合って配置された2つの加熱要素により、それぞれ一つのアーク陰極を備えて並んだ3つのセグメントからなる2つのグループに分けられた。本書の実験では、互いに向き合う3個一組の各グループの中央エレメントの部分に、それぞれ一つのSiTiターゲットを取り付けた。しかし、このような層を形成するための、他のターゲット配置方法も可能である。基本的にこのような層は、たとえば、1回または複数回回転する基板ホルダの被覆高さが同じなど、少なくとも2つのアーク陰極が幾何学的に同等の位置にあるすべての装置内で、形成することができる。同業者にとっては、装置のタイプに合わせて、個々の層またはレイヤーの層厚を、ターゲットの配置、または、それぞれの基板の動作や回転の設定、または、工作物回転の角速度によりさらに調整できることは公知である。
希望通りの多層システムを形成するためのさらなる可能性は、図1cと同様に、コーティング源を周期的にオン/オフにすることにより実現できる。このとき、コーティング源は、一つの被覆材料については成層プロセス全体にわたって運転されるが、第2の被覆材料については、コーティング源は周期的に追加的に運転される。この場合、アーク源を一緒に運転している間に、上述のような追加的な一つの多層構造を形成することができる。
本発明による方法の特徴は、上述の層パッケージを形成するための方法の実施法が選ばれることである。該多層構造は、コーティング源を意図的にオン/オフにすることにより形成できる。多層の下部構造は追加的に、被覆対象の工作物を被覆装置内で回転または動かすことにより得られる。
以下に、さまざまな切断作業に用いる場合を例として、本発明の好適な用途を説明する。
(実施例1)
例1:内部冷却した超硬合金ドリルで軟鋼に穴を開ける。
工具: 冷却水路を備える超硬合金ドリル
直径D=6.8mm
工作物: 軟鋼DIN1.1191(Ck45)
ドリル・パラメータ:切削速度vc=120m/min
送り速度fz=0.2mm/回転
ボアホール深さz=34mm(5xD)
冷却: エマルジョン5%
加工: 止まり穴
磨耗基準: 角の磨耗VB=0.2mm
例2:内部冷却した超硬合金ドリルで軟鋼に穴を開ける。
工具: 冷却水路を備える超硬合金ドリル
直径D=6.8mm
工作物: 軟鋼DIN1.1191(Ck45)
ドリル・パラメータ:切削速度Vc=120m/min
送り速度fz=0.2mm/回転
ボアホール深さz=34mm(5xD)
冷却: エマルジョン5%
加工: 止まり穴
磨耗基準: 角の磨耗VB=0.2mm
例3:外部冷却した超硬合金ドリルで軟鋼に穴を開ける。
工具: 冷却水路を備える超硬合金ドリル
直径D=6.8mm
工作物: 軟鋼DIN1.1191(Ck45)
ドリル・パラメータ:切削速度vc=120m/min
送り速度fz=0.2mm/回転
ボアホール深さz=23.8mm(3.5xD)
冷却: エマルジョン5%
加工: 止まり穴
磨耗基準: 角の磨耗VB=0.15mm
例4:内部冷却した超硬合金ドリルで鋳鉄(GGG−50)に穴を開ける。
工具: 冷却水路を備える超硬合金ドリル
直径D=6.8mm
工作物: 球状黒鉛鋳鉄GGG−50
ドリル・パラメータ:切削速度vc=200m/min
送り速度fz=0.3mm/回転
ボアホール深さz=34mm(5xD)
冷却: エマルジョン5%
加工: 止まり穴
磨耗基準: 角の磨耗VB=0.1mm
例5:内部冷却した超硬合金ドリルで軟鋼に穴を開ける。
工具: 冷却水路を備える超硬合金ドリル
直径D=6.8mm
工作物: 軟鋼DIN1.1191(Ck45)
ドリル・パラメータ:切削速度vc=120m/min
送り速度fz=0.2mm/回転
ボアホール深さz=34mm(5xD)
冷却: エマルジョン5%
加工: 止まり穴
磨耗基準: 角の磨耗VB=0.2mm
−一つの(AlCrTiSi)X混合層
−それに続く、さらなる一つの(AlyCr1−y)X層
−それに続く、さらなる一つの(AlCrTiSi)X混合層
−それに続く、さらなる一つの(AlyCr1−y)X層
図1は、さまざまな層バリエーションを示している。図1の(a)から(c)には、多層被覆の構成の3つのバリエーションの可能性が示されている。
図1aには、直接的に移行する層シーケンスが示されている。一つの層システム(2)が、第2の層システム(1)の上に直接形成される。この工程は、全体の層の厚さが希望の厚さに到達するまで繰り返される。最後の層として、より層厚の厚い表層(3)が形成される。
図1bには、個別層の間に混合層(4)が形成されており、該混合層内では2つの層システムが同時に形成される。ここでも最後の個別層として、追加的に一つの表層を形成することができる。該混合層は、徐々に移行する薄い移行層として、または、一定の層組成の領域を持つ、より厚い層のいずれかとして実施できる。そのような層の組成はたとえばAl=40.7原子%、Cr=21.2原子%、Ti=32.8原子%、Si=5.3原子%である。この組成は、Al=70原子%及びCr=30原子%という組成のAlCrターゲットと、Ti=85原子%及びSi=15原子%という組成のTiSiターゲットとを同時に運転した場合に生まれる。一般的にはその際、一定の組成を持つ混合層の組成は、以下の範囲で好適に調整される。
(Al1−a−b−cCraTibSic)X
ここで0.18≦a≦0.48、0.28≦b≦0.4、0.004≦c≦0.12である。アルミニウムの含有量は好適に10原子%より高く保たれる。上述のようなさらなる元素を追加的に加えてそれぞれ対応する作用を得るには、元素に応じて0.5〜1原子%の最低含有量、及び、15〜25%の最高含有量が追加される。
2 層システム
3 表層
4 混合層
5 層システム
Claims (12)
- 工作物の耐摩耗性を改善するための、多層構造を備えた硬物質層であって、
−0.2≦y≦0.7であり、かつXがN、C、B、CN、BN、CBN、NO、CO、BO、CNO、BNO、CBNOのうちの1種の元素である、少なくとも一つの(AlyCr1−y)X層、及び、0.99≧z≧0.7である一つの(TizSi1−z)X層からなる群から選択される少なくとも1つの層を備えた硬物質層において、
該硬物質層がさらに、
−一つの(AlCrTiSi)X混合層に次ぐ一つの(TizSi1−z)N層または(AlyCr1−y)N層、それに次ぐ一つの(AlCrTiSi)X混合層、それに次ぐ一つの(AlyCr1−y)N層という構成を備える、少なくとも一つの層パッケージを備え、
前記層パッケージの(AlyCr1−y)N層または複数の(Al y Cr 1−y )N層の1つの層厚が75nm〜200nmであり、または前記層パッケージの(TizSi1−z)N層の層厚が50〜150nmであり、かつ前記層パッケージの(AlCrTiSi)X混合層が、20±10nmの層厚を持つことを特徴とする、硬物質層。 - 前記少なくとも一つの(AlyCr1−y)X層、前記層パッケージの1つのまたは複数の(AlyCr1−y)N層、及び、該(AlCrTiSi)X混合層が、元素周期表のIVb、Vb及び/またはVIb族の少なくとも一種のさらなる元素またはシリコンを含むことを特徴とする、請求項1に記載の硬物質層。
- 前記少なくとも一つの(AlyCr1−y)X層及び前記層パッケージの1つのまたは複数の(AlyCr1−y)N層に、0.5〜25原子%のさらなる元素またはシリコンが含まれており、それにより、前記(AlCrTiSi)X混合層内における該元素及びシリコンの濃度が決定されることを特徴とする、請求項1または請求項2に記載の硬物質層。
- 前記硬物質層に、上下に重なる複数の層パッケージが含まれることを特徴とする、請求項1から請求項3のいずれかに記載の硬物質層。
- 4から11の層パッケージが備わっていることを特徴とする、請求項1から請求項4のいずれかに記載の硬物質層。
- 前記硬物質層が、4または8の層パッケージを含むことを特徴とする、請求項5に記載の硬物質層。
- 前記少なくとも一つの(AlyCr1−y)X層が、前記工作物または密着層の上に直接形成されることを特徴とする、請求項1から請求項6のいずれかに記載の硬物質層。
- 一つの(AlyCr1−y)X表層または一つの(TizSi1−z)X表層により前記硬物質層が閉じられることを特徴とする、請求項1から請求項7のいずれかに記載の硬物質層。
- 前記硬物質層の上に追加的に一つの移行層が形成されることを特徴とする、請求項1から請求項8のいずれかに記載の硬物質層。
- 請求項1から請求項9のいずれかに記載の被覆を備えることを特徴とする工作物。
- 前記工作物が、機械製造または金型製造のための部品、工具、切削工具、切断または成形工具であることを特徴とする、請求項10に記載の工作物。
- 前記工作物が、ドリルであることを特徴とする、請求項10に記載の工作物。
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JP2013176837A (ja) * | 2005-04-01 | 2013-09-09 | Oerlikon Trading Ag Truebbach | 工具のための多層硬物質被覆 |
US11014167B2 (en) | 2016-08-01 | 2021-05-25 | Mitsubishi Materials Corporation | Multilayer hard film-coated cutting tool |
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MX2007012099A (es) | 2008-01-28 |
CN101151397B (zh) | 2010-12-01 |
US20100012483A1 (en) | 2010-01-21 |
US20080131726A1 (en) | 2008-06-05 |
ES2418146T3 (es) | 2013-08-12 |
WO2006102780A1 (de) | 2006-10-05 |
BRPI0609661B1 (pt) | 2017-02-07 |
KR20080017000A (ko) | 2008-02-25 |
EP1863946B1 (de) | 2013-04-17 |
JP5648078B2 (ja) | 2015-01-07 |
US7348074B2 (en) | 2008-03-25 |
CN101151397A (zh) | 2008-03-26 |
USRE42491E1 (en) | 2011-06-28 |
JP2008534297A (ja) | 2008-08-28 |
US7718043B2 (en) | 2010-05-18 |
US7618720B2 (en) | 2009-11-17 |
BRPI0609661A2 (pt) | 2010-04-20 |
PL1863946T3 (pl) | 2013-09-30 |
US20060222893A1 (en) | 2006-10-05 |
EP1863946A1 (de) | 2007-12-12 |
PT1863946E (pt) | 2013-07-10 |
KR101227337B1 (ko) | 2013-01-28 |
JP2013176837A (ja) | 2013-09-09 |
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