JP5762626B2 - 切削工具用硬質被膜及び硬質被膜被覆切削工具 - Google Patents
切削工具用硬質被膜及び硬質被膜被覆切削工具 Download PDFInfo
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- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Milling, Broaching, Filing, Reaming, And Others (AREA)
- Physical Vapour Deposition (AREA)
Description
・工具形状:φ8.3超硬ドリル
・被削材:インコネル(登録商標)718
・切削機械:立型M/C
・切削速度:10m/min
・送り速度:0.1mm/rev
・加工深さ:33mm(止まり)
・ステップ量:ノンステップ
・切削油:油性
Claims (2)
- 切削工具の表面に被覆して設けられる切削工具用硬質被膜であって、
Agである第1被膜層と、
Al1−a−bCraMbの窒化物、酸化物、炭化物、炭窒化物、又は硼化物である第2被膜層とが、交互に44層以上積層した多層膜であり、
前記第2被膜層に係るMはSi、V、Wのうち少なくとも1種類を含むものであり、
前記第2被膜層に係る原子比aは0.2以上0.5以下の範囲内、bは0より大きく0.3以下の範囲内であり、
前記第1被膜層と前記第2被膜層との積層周期は0.2nm以上100nm以下の範囲内であり、
且つ、総膜厚は0.2μm以上10.0μm以下の範囲内である
ことを特徴とする切削工具用硬質被膜。 - 請求項1に記載の切削工具用硬質被膜が表面に被覆して設けられた硬質被膜被覆切削工具。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/058450 WO2013145233A1 (ja) | 2012-03-29 | 2012-03-29 | 切削工具用硬質被膜及び硬質被膜被覆切削工具 |
Publications (2)
Publication Number | Publication Date |
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JPWO2013145233A1 JPWO2013145233A1 (ja) | 2015-08-03 |
JP5762626B2 true JP5762626B2 (ja) | 2015-08-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014507199A Active JP5762626B2 (ja) | 2012-03-29 | 2012-03-29 | 切削工具用硬質被膜及び硬質被膜被覆切削工具 |
Country Status (3)
Country | Link |
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EP (1) | EP2832479B1 (ja) |
JP (1) | JP5762626B2 (ja) |
WO (1) | WO2013145233A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110373640A (zh) * | 2019-09-05 | 2019-10-25 | 蓬莱市超硬复合材料有限公司 | 一种CrAlXN基PVD涂层硬质合金材料的制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000178720A (ja) * | 1998-12-14 | 2000-06-27 | Sumitomo Metal Mining Co Ltd | 固体潤滑膜付き部材 |
AT6792U1 (de) * | 2002-10-14 | 2004-04-26 | Plansee Tizit Ag | Werkzeug oder bauteil mit niedrigem reibwert |
US7348074B2 (en) * | 2005-04-01 | 2008-03-25 | Oc Oerlikon Balzers Ag | Multilayer hard coating for tools |
JP2008173756A (ja) * | 2007-01-22 | 2008-07-31 | Mitsubishi Materials Corp | 耐熱合金の高速重切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
JP2010076082A (ja) | 2008-09-29 | 2010-04-08 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
JP2011240438A (ja) * | 2010-05-19 | 2011-12-01 | Mitsubishi Materials Corp | 耐熱性および耐溶着性にすぐれた表面被覆切削工具 |
-
2012
- 2012-03-29 EP EP12873015.7A patent/EP2832479B1/en not_active Not-in-force
- 2012-03-29 JP JP2014507199A patent/JP5762626B2/ja active Active
- 2012-03-29 WO PCT/JP2012/058450 patent/WO2013145233A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP2832479B1 (en) | 2016-07-13 |
WO2013145233A1 (ja) | 2013-10-03 |
EP2832479A1 (en) | 2015-02-04 |
JPWO2013145233A1 (ja) | 2015-08-03 |
EP2832479A4 (en) | 2015-11-11 |
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