CN101151397B - 用于工具的多层硬质材料涂层 - Google Patents

用于工具的多层硬质材料涂层 Download PDF

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CN101151397B
CN101151397B CN2006800102634A CN200680010263A CN101151397B CN 101151397 B CN101151397 B CN 101151397B CN 2006800102634 A CN2006800102634 A CN 2006800102634A CN 200680010263 A CN200680010263 A CN 200680010263A CN 101151397 B CN101151397 B CN 101151397B
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V·德弗林杰
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Abstract

一种用于切削用途的工具的多层硬质材料涂层，其具有多层构造，以提高工件的抗磨损性，所述涂层包括至少一个(AlyCr1-y)X层(0.2≤y≤0.7)。这里X是下列元素之一：N，C，B，CN，BN，CBN，NO，CO，BO，CNO，BNO，CBNO，但是优选是N或CN，和/或(TizSi1-z)X层(0.99≥z≥0.7)。另外硬质材料涂层包括至少一个叠层，所述叠层包括(AlCrTiSi)X混合层，接着是另外的(TizSi1-z)X层，接着另外的(AlCrTiSi)X混合层，接着是另外的(AlyCr1-y)X层。

Description

用于工具的多层硬质材料涂层 
技术领域
本发明涉及用于切削用途的工具-特别是用于钻孔用途的工具(硬质金属和高速钢)的多层硬质材料涂层。 
1a)经硬质材料涂覆的工具，依序具有若干不同的铝铬氮化物或者铝铬碳氮化物和硅氮化硅或者碳氮化硅层。 
1b)工具，特别是切削工具和成型加工工具(钻头，铣刀，丝锥，螺纹成型机，滚齿刀，凸模，阴模，拉伸凸模等等)，其依序具有多层的不同氮化铝铬，或者铝铬碳氮化物和硅氮化钛，或者是碳氮化钛层以及这些工具的用途。 
1c)一种用于生产具有限定层结构的连续多层的不同氮化铝铬或者碳氮化铝铬和硅氮化钛或者碳氮化钛层。 
现有技术
EP1174528A2描述了在工具上的由连续多个单层组成的涂层，其中第一层由元素Ti，Al和/或Cr的氮化物，碳化物，碳氮化物，硼化物，氧化物等组成，而第二层由Si和至少一个选自PSE(元素周期表)的4a，5a和6a族的元素的氮化物，碳化物，碳氮化物，硼化物，氧化物等组成。这涂层的优点据称为，通过在上层的Si显著改善了耐磨性和抗氧化性。尤其是在Cr-Si基底上的覆层在使用期限中显示出改善。选择TiAlN，CrAlN和TiN层作为下层。 
在EP1422311A2中，记载了在Al-Cr-(Si)-O基底上的硬质材料涂层，所述硬质材料涂层可以构造为氮化物，碳化物、氧化物、硼化物等。对于所有的涂层都适用的是，在涂层中含有少量的氧(1-25原子％)。另外还提及，可以在该发明中提及的涂层上涂覆其它的硬质材料涂层。作为例子特别给出了Ti-Si-N，Ti-B-N，BN，Cr-Si-N等。这个发明的优点尤其给出了结合入少量的氧或硅和氧，因为这导致更高的硬度并且提高了耐磨性和耐高温氧化性。 
在EP1219723A2中提出了在Ti-Al-Cr-X-N基底上的涂层，其中X可以为Si，B和/或C。该涂层的优点在于相对于传统的涂层，提高了耐磨性。另外，该发明描述了必须至少由Ti，Al和Cr构成的靶。
现有技术的缺点 
与新的优化的(Al1-xCrxX)-(Ti1-ySiy)X-硬质材料层(其中X＝N和/或CN)相比，根据现有技术的硬质材料涂覆的工具具有较短的使用期限。 
现有技术的缺点还在于，Al-Cr-N涂层在高温，在惰性气体环境下(例如氩气环境下)大约900℃时就已经开始发生涂层分解。如果在氧气环境下进行加热过程，这个分解过程推进到更高的温度范围。当在切削过程中观察连续切口时，在工具表面和工件之间的接触面局部可以达到非常高的温度(部分超过1000度)。如果现在这个接触面足够大，以致没有或很少氧气可以在涂层表面起稳定的作用，立方晶系CrN分解成六角晶系Cr2N和进一步在更高温度下分解成金属Cr。这种涂层分解过程导致在使用中涂层的过早磨损，特别是形成月牙洼磨损。 
本发明的任务 
本发明应当避免现有技术的缺点并且特别用于改善经涂覆的工件的使用期限，所述经涂覆工件是例如切削工具，冲裁模具&成型模具或者用于机械制造和模具制造的构件。本发明的另一任务是，提供用于沉积这些层的方法，特别是用于将这些层沉积在所述工件上的方法。 
任务的解决方案或者解决途径 
根据本发明，这项任务可以通过如下来解决： 
用于改善工件的耐磨性能的具有多层结构的硬质材料层，包括： 
-至少一个(AlyCr1-y)X层和/或(TizSi1-z)X层，在(AlyCr1-y)X层中0.2≤y≤0.7和X是下列要素之一：N，C，B，CN，BN，CBN，NO，CO，BO，CNO，BNO，CBNO；在(TizSi1-z)X中0.99≥z≥0.7，该硬质材料层的特征在于，该硬质材料层另外包括： 
-至少一个具有如下结构的叠层： 
(AlCrTiSi)X混合层， 
继之以另外的(TizSi1-z)X层， 
继之以另外的(AlCrTiSi)X混合层， 
继之以另外的(AlyCr1-y)X层；或者具有上述涂层的工件。其它根据本发明的实施方案在从属权利要求中记载。 
本发明描述了涂层的特殊多层结构，其应该防止涂层在使用期间快速破坏(磨损)。通过所述多层结构，AlCrN涂层内的CrN组分于较高温度的分解和后续扩散得到阻止或至少减缓。 
为了沉积Al-Cr-(X)-N/Ti-Si-N-硬层，提出Balzers公司 RCS型号的工业涂覆设备，其例如在EP1186681在图3到6，说明书第7栏，18行，至第9栏，第25行中描述。为此将经清洁的工件根据直径固定在2倍(zweifach)或者对于小于50毫米的直径固定到3倍(dreifach)的转动的基材载体上，和2个熔体冶金法制备的Ti-Si靶和四个粉末冶金法制备的Al-Cr-(X)合金靶嵌入到安装在涂覆装置壁上的六阴极电弧源中。靶设置的几何形状基本上通过RCS设备的八角形平面图确定，其中两个相对设置的加热区分离出两组，每组有三个连续的各安装有一个电弧阴极的区域。对于本实验而言，将各SiTi靶嵌入在相对放置的每个三元组的中间单元。然而，为制造这些层，也存在其它的靶设置可能性。原则上，这些层可以在如下的各种装置中沉积，其例如在1倍或者多倍旋转的基材夹持器上具有至少两个位于几何学等价位置的电弧阴极。本领域技术人员已知的是，根据装置类型，可以通过靶的排列或或者各基材平动或转动的调节或者工件旋转的教的速度的调节进一步影响各层的层厚。 
随后，首先由同样安装在设备中的辐射电热器在大约500℃温度加热工件，然后施加-100到-200V的DC-偏压在氩气环境，在0.2Pa压力下用氩离子对表面进行侵蚀清洁。 
随后，通过以3千瓦功率运行的Al-Cr源和并施加-50V的基体偏压，在大约5分钟时间内，沉积大约0.2微米厚的Al-Cr-N-粘附层。随后，有目的地构造多层涂层，其中首先打开同样均为3千瓦的4个Al-Cr-源及另外2个Ti-Si-源，并一起运行大约1分钟。随后，关闭4个Al-Cr-源，并沉积纯的Ti-Si-N-涂层大约3分钟。然后再打开4个Al-Cr-源大约1分钟。接下来，再关闭Ti-Si-源，并再沉积纯Al-Cr-N-涂层5分钟。在沉积过程中多次进行在本发明范围内的这种针对叠层(Schichtpaket)的顺序。最后再施加厚度大约0.5微米的仅以Ti-Si-源制备的覆层。或者，也可以施加较厚的AlCrN覆层。所有层在纯净的氮气氛下以大约3Pa压力和大约50V的负基材偏压沉积。原则上在每个步骤中处理压力可以为0.5到大约8Pa，但是优选的是0.8至5Pa，其中对于氮化物层，使用纯的氮气环境或者氮气和稀有气体例如氩气的混合物；对于碳氮化物层，使用氮气和含碳气体的混合物，需要时还可以混入稀有气体。对应地，低于沉积含氧层或含硼层，可以混入氧或已知的含硼气体。 
靶组成、层的晶体结构，和粘附性在表1中列出。工艺参数例如靶功率，负向基材偏压，处理压力和温度在表2中汇总。 
本发明的工件的特征在于，交替沉积立方晶系(AlyCr1-y)X涂层和立方晶系(TizSi1-z)X涂层，在立方晶系(AlyCr1-y)X涂层中，X＝N或者CN，但是优选N，并且0.2≤y＜0.7，优选0.3≤y≤0.5；在立方晶系(TizSi1-z)X涂层中X＝N或者CN，但是优选N，并且0.99≥z＞0.7，优选0.97≥z≥0.85(参见图1a)，其中施加至少一个叠层和至少一个另外的(AlyCr1-y)X或者(TizSi1-z)X层。其中层结构是在两层间的平均粒径为大约5-150纳米，但是更优选10-120纳米的微晶。对涂层有利的是，夹在纯净的(AlyCr1-y)X和(TizSi1-z)X之间的另外的中间层，在该中间层中运行所有涂料源并因而沉积(AlyCr1-yTizSi1-z)X层(参见图1b)。这些中间层可以根据需要，取决于各层系统的顺序或者组成和性能，实现在各层之间改善地粘附。由于在涂覆装置内的靶的几何安排，基于在该中间层沉积期间的工件旋转沉降了另外的具有非常好的层的多层结构，因为根据前述的各基于Al-Cr和Ti-Si的靶引入到涂层。在中间层内的各层宽度在几纳米范围内波动。 
另一种构造理想的多层系统的可能性可以通过类似于图1c周期性的开或者关涂料源来实施。在整个沉积过程期间运行针对涂层材料的涂料源，而周期性打开具有第二涂层材料的涂料源。在这种情况下，在一起操作电弧源期间，可以获得上述的额外的多层结构。 
本发明方法的特征在于，选择这样的方法过程，以沉积上述叠层。多层结构通过有目的地打开或者关闭涂层源来得到。该多层亚结构还可以通过在涂覆装置内转动或者移动待涂覆的工件而得到。 
在实施例1中对比了具有特定数量层或者叠层的涂层，其中叠层均由这样的层顺序构成：AlCrTiSiN层，继之以TiSiN层，继之以AlCrTiSiN层，以及AlCrN层。现在可以清楚地认识到，与根据现有技术沉积的第一个实验测试层相比，借助根据发明的涂层可以实现改善的使用期限。另外认识到，优选的由AlyCr1-yN和TizSi1-zN构成的各层的层厚对所需的使用期限延长而言是重要的。这种层对于AlyCr1-yN在75纳米和200纳米之间，优选120纳米到170纳米之间，和对于TizSi1-zN在50和150纳米之间，优选70到120纳米之间。在该实施例范围内，层厚随着涂覆时间如此变化，使得对于所有实验可以获得可比较的大约4微米的总 涂层厚度。对于这些实验，选择了如在图1b中记载的层结构。其中使用所有涂料源的层在各个实验中没有改变，并且得到均为大约20±10纳米的单层层厚。 
原则上可以用这类AlyCr1-yN/TizSi1-zN多层(Multilagenschicht)有利地涂覆完全不同的工件。对此的例子是切割工具如铣刀，滚齿刀，球头铣刀，平面铣刀和型材铣刀以及钻头、丝锥、拉刀，绞刀和用于车床加工和铣削加工的转位式刀片以及成型工具例如凸模，阴模，环形拉模、排除芯体(Auswurfkern)或者螺纹成型机。还可以使用例如用于金属注塑合金化、塑料树脂或者热塑性塑料的注塑模具，特别是尤其用于制造塑料模塑体或者数据载体的CD、DVD的注塑模具，可以有利地保护这类层。如果通过根据本发明的涂料没有为所有用途在各种工具上总是实现改善的结果，如在实施例中所展示的，其可以至少用于在特定用途中实现与迄今已知的层相比显著更高的耐磨性。 
此外，由于AlyCr1-yX/TizSi1-zX多层原则上近似的性质，当在下面层系统中选择如下的靶组成和涂覆参数时，也即X＝N，C，B，CN，BN，CBN，NO，CO，BO，CNO，BNO，CBNO，但是优选N或CN；0.2≤y≤0.7，优选0.40≤y≤0.68；且0.99≥z≥0.7，优选0.95≥z≥0.85，可以期望磨损性能的改善。 
已知改善AlyCr1-yN/TizSi1-zN多层的层性质的可能性在于，在合金中存在来自元素周期表IVb，Vb和/或VIb族的其它化学元素或硅。特别有利的是在叠层中的合金是AlyCr1-y-mMmN层，其中0≤m≤0.25，优选0≤m≤0.15，有利地，尤其是元素M＝W，V，Mo，Nb和Si(参见实施例5)。 
另一种改善层系统的层性质的可能性在于，在叠层上或者在对外部封闭硬质材料层的覆层施加额外的滑动层。滑动层系统可以由至少一种金属或至少一种金属和分散的碳的碳化物MeC/C组成，其中金属是IVb、Vb和/或VIb族的金属和/或硅。例如对此特别合适的是具有在1000和1500HV之间可调整的硬度的WC/C覆层，其具有优秀的进料特性。CrC/C层也显示相似的行为，然而有略高的摩擦系数。 
在这样涂覆的深孔钻头情况下，可以在制备钻孔之后就已经提供了切削表面的另外进料平整 ，而这现在要通过昂贵的机械加工才能达到。在钻孔期间，这导致改善的沿刃沟切屑传输 (Spantransport)和减少摩擦时间。这种性质特别是对于构件用途的滑动，摩擦或者滚动应力而言是有吸引力的，特别是在缺乏润滑或干燥操作下，或者当同时要保护未经涂覆的相接物时。 
另一种形成最后的滑动层的可能性为是无金属的金刚石状碳层，或者MoSx层，WSx层或含钛的MoSx层或者MoWx层。 
如上所述，滑动层可以直接施加到多层系统上，或在施加另一粘附层以后进行施加，以实现层结合的尽可能好的粘附。所述粘附层可以是金属，氮化物，碳化物，碳氮化物的或也可以作为梯度层。 
例如WC/C或者CrC/C层可以在施加溅射或者电弧放电Cr或者钛粘附层后有利地通过溅射在添加含碳气体的条件下由WC靶制造。其中要随时间增加含碳气体的含量，以在层中实现更高含量的游离碳。 
本发明的其它有利效果 
下面，本发明通过使用不同切削操作来示例性说明对于本发明有利的用途。 
实施例1 
用内部冷却的HM钻头在结构钢中钻孔 
工具：带有冷却通道的硬金属钻头 
      直径D＝6.8毫米 
工件：结构钢DIN1.1191(Ck45) 
钻孔参数：切削速度vc＝120米/分钟 
          每齿进给量fz＝0.2毫米/转 
          钻孔深度z＝34毫米(5xD) 
冷却：5％乳液 
过程：盲孔 
磨损标准：边角磨损VB＝0.2毫米 
Figure 200680010263400071
*(1x)叠层对应下面顺序：AlCrTiSiN+TiSiN+AlCrTiSiN+AlCrN″ 
**在此时达到了到达了VB＝0.2毫米磨损标记宽度。 
实施例1显示了有涂层的HM-钻头的使用期限的比较，其中施加有不同数量的具有均相同的粘附层(即AlCrN)和覆层(即TiSiN)的叠层。TiSiN和AlCrN层的涂覆时间均如此进行适配，以致最后达到可比较的总涂层厚度。总使用期限的最优化见于具有37层的总层数的实验4，其表现出对来自实验1的现有技术的显著改善。 
实施例2 
用内部冷却的HM钻头在结构钢中钻孔 
工具：带有冷却通道的硬金属钻头 
      直径D＝6.8毫米 
工件：结构钢DIN1.1191(Ck45) 
钻孔参数：切削速度vc＝120米/分钟 
          每齿进给量fz＝0.2毫米/转 
          钻孔深度z＝34毫米(5xD) 
冷却：5％乳液 
过程：盲孔 
磨损标准：边角磨损VB＝0.2毫米 
实施例2显示了经涂覆的HM-钻头的使用期限的比较。与工业上使用的TiAlN/TiN多层和TiAlN单层涂层的硬质材料层相比，在此具有AlCrN/TiSiN多层实现了工具使用期限的改善。 
实施例3 
用外部冷却的HM钻头在结构钢中钻孔 
工具：带有冷却通道的硬金属钻头 
      直径D＝6.8毫米 
工件：结构钢DIN1.1191(Ck45) 
钻孔参数：切削速度vc＝120米/分钟 
          每齿进给量fz＝0.2毫米/转 
          钻孔深度z＝23.8毫米(3.5xD) 
冷却：5％乳液 
过程：盲孔 
磨损标准：边角磨损VB＝0.15毫米 
实施例3显示了经涂覆的HM-钻头的使用期限的比较。与工业上 使用的基于Ti-Al-N的硬质材料层相比，在此AlCrN/TiSiN多层实现了工具使用期限的改善。 
实施例4 
用内部冷却的HM钻头在铸铁(GGG-50)中钻孔 
工具：带有冷却通道的硬金属钻头 
      直径D＝6.8毫米 
工件：含球状石墨的铸铁GGG-50 
钻孔参数：切削速度vc＝200米/分钟 
          每齿进给量fz＝0.3毫米/转 
          钻孔深度z＝34毫米(5xD) 
冷却：5％乳液 
过程：盲孔 
磨损标准：边角磨损VB＝0.1毫米 
Figure 200680010263400091
实施例4显示了经涂覆的HM-钻头的使用期限的比较。与工业上使用的TiAlN/TiN多层和TiAlN单层涂层的硬质材料层相比，在此具有AlCrN/TiSiN多层涂层也实现了工具使用期限的改善。 
实施例5 
用内部冷却的HM钻头在结构钢中钻孔 
工具：带有冷却通道的硬金属钻头 
      直径D＝6.8毫米 
工件：结构钢DIN1.1191(Ck45) 
钻孔参数：切削速度vc＝120米/分钟 
每齿进给量fz＝0.2毫米/转 
钻孔深度z＝34毫米(5xD) 
冷却：5％乳液 
过程：盲孔 
磨损标准：边角磨损VB＝0.2毫米 
Figure 200680010263400101
*(1x)叠层2*对应下面的一个层顺序：AlCrMTiSiN+TiSiN+AlCrMTiSiN+AlCrMN，这里M分别代表元素W，Nb，Mo，V或Si。 
实施例5显示了根据本发明的经涂覆的HM-钻头使用期限的比较，在所述钻头上沉积有不同化学组成但是相同的覆层(TiSiN)的多层系统。作为化学组成改变了靶组成，其中Al保持恒定和Cr被第三种元素部份地替换。在层沉积期间的工艺参数类似于其它实验被保持相同。 
制造对应的叠层的另一种可能性在于，类似于图1C，持续运行AlCr源或AlCrM源或一个或多个TiSi源，和在各种情况下在需要时启动其它的一个或者多个源。特别是在上述连续运行4个AlCr或AlCrM源时，可以由此增加沉积速率和例如沉积如下的层系统。 
-(AlCrTiSi)X混合层 
-继之以另外的(AlyCr1-y)X层 
-继之以另外的(AlCrTiSi)X混合层 
-继之以另外的(AlyCr1-y)X层 
附图说明
图1展示了不同的层的变化方案。在图1a-c中，谈论了三种可以 如何构造多层涂层的变化方案。 
在图1a示出了具有尖锐过渡的层顺序。层系统(2)直接地沉积在第二个层系统(1)上。重复该过程，直到达到期望的总层厚度。作为最后层可以沉积具有较高层厚的覆层(3)。 
在图1b中，在各层之间还沉积了混合层(4)，其中同时施加两个层系统。在此，也可以施加另外的覆层作为最终的单层。混合层可以较薄地作为滑动过渡层，或以恒定层组成范围较厚地施加。这样的层可以具有例如如下组成：Al＝40.7原子％，Cr＝21.2原子％，Ti＝32.8原子％和Si＝5.3原子％。这个组成以如下方式获得：同时运行组成为Al＝70原子％和Cr＝30原子％的AlCr靶和组成为Ti＝85原子％和Si＝15原子％的TiSi靶。最常见地，在以下范围有利地调节具有恒定组成的混合层的组成： 
(Al1-a-b-cCraTibSic)X 
其中0.18≤a≤0.48；0.28≤b≤0.4；0.004≤c≤0.12。铝含量有利地保持超过10原子％。如果另外添加上面提及的其它元素，那么为了达到相应的效果，取决于元素，应当添加最低0.5-1原子％的最低浓度和15-25原子％的最高浓度。 
在图1c中，如此沉积了多层涂层，在整个涂覆时间期间施加层系统(5)，并通过打开相应的涂覆源周期性混入第二层系统。 
图2以改变的图示出了图1叠层的结构。 
表1 
Figure 200680010263400111
表2 
Figure 200680010263400121

Claims (18)

1.用于改善工件的耐磨性能的具有多层结构的硬质材料层，包括：
-至少一个(AlyCr1-y)X层和/或(TizSi1-z)X层，在(AlyCr1-y)X层中0.2≤y≤0.7和X是下列要素之一：N，C，B，CN，BN，CBN，NO，CO，BO，CNO，BNO，CBNO；在(TizSi1-z)X中0.99≥z≥0.7，该硬质材料层的特征在于，该硬质材料层另外包括：
-至少一个具有如下结构的叠层：
(AlCrTiSi)X混合层，
继之以另外的(TizSi1-z)X层，
继之以另外的(AlCrTiSi)X混合层，
继之以另外的(AlyCr1-y)X层。
2.根据权利要求1的硬质材料层，其特征在于，所述X是N或者CN。
3.根据权利要求1的硬质材料层，其特征在于，至少一个(AlyCr1-y)X层、另外的(AlyCr1-y)X层以及(AlCrTiSi)X混合层包含至少一种来自元素周期表中IVb，Vb和/或VIb族的其它元素或者硅。
4.根据权利要求3的硬质材料层，其特征在于，至少一个(AlyCr1-y)X层以及另外的(AlyCr1-y)X层包含0.5到25原子％的所述其它元素或硅，藉以确定在另外的(AlCrTiSi)X混合层中所述其它元素和硅的浓度。
5.根据权利要求1或2的硬质材料层，其特征在于，叠层的层具有下述层厚：
-AlyCr1-yN，为75纳米至200纳米，
-TizSi1-zN，为50纳米至150纳米，
-(AlCrTiSi)X混合层，为20±10纳米。
6.根据权利要求1或2的硬质材料层，其特征在于，该层包括若干个叠置的叠层。
7.根据权利要求6的硬质材料层，其特征在于，其包含4个，8个或12个叠层。
8.根据权利要求7的硬质材料层，其特征在于，其包含8个叠层。
9.根据权利要求1或2的硬质材料层，其特征在于，将至少一个(AlyCr1-y)X层直接设置到工件上或到粘附层上。
10.根据权利要求1或2的硬质材料层，其特征在于，(AlyCr1-y)X覆层或(TizSi1-z)X覆层封闭硬质材料层。
11.根据权利要求1或2的硬质材料层，其特征在于，在硬质材料层上设置额外的滑动层。
12.根据权利要求1或2的硬质材料层，其特征在于，混合层包括多层结构。
13.用于改善工件的耐磨性能的具有多层结构的硬质材料层，包括：
-至少一个(AlyCr1-y)X层和/或(TizSi1-z)X层，在(AlyCr1-y)X层中0.2≤y≤0.7和X是下列要素之一：N，C，B，CN，BN，CBN，NO，CO，BO，CNO，BNO，CBNO；在(TizSi1-z)X中0.99≥z≥0.7，该硬质材料层的特征在于，该硬质材料层另外包括：
至少一个具有以下结构的叠层：
-(AlCrTiSi)X混合层，
-继之以另外的(AlyCr1-y)X层，
-继之以另外的(AlCrTiSi)X混合层，
-继之以另外的(AlyCr1-y)X层。
14.根据权利要求13的硬质材料层，其特征在于，混合层包括多层结构。
15.一种工件，其特征在于，该工件包括根据前述权利要求之一的涂层。
16.根据权利要求15的工件，其特征在于，所述工件是用于机械制造和模具制造的构件或工具。
17.根据权利要求16的工件，其特征在于，所述工件是切削工具，冲裁模具或成型模具。
18.根据权利要求16的工件，其特征在于，所述工件是钻头。
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Address before: Swiss Te Lui Bach

Patentee before: OERLIKON TRADING AG, TRuBBACH

CP02 Change in the address of a patent holder
CP02 Change in the address of a patent holder

Address after: Swiss hole

Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON

Address before: Swiss Te Lui Bach

Patentee before: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON