JP5259059B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5259059B2 JP5259059B2 JP2006183993A JP2006183993A JP5259059B2 JP 5259059 B2 JP5259059 B2 JP 5259059B2 JP 2006183993 A JP2006183993 A JP 2006183993A JP 2006183993 A JP2006183993 A JP 2006183993A JP 5259059 B2 JP5259059 B2 JP 5259059B2
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- Prior art keywords
- wiring board
- wiring
- chip
- semiconductor device
- memory chip
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/48—Arrangements in static stores specially adapted for testing by means external to the store, e.g. using direct memory access [DMA] or using auxiliary access paths
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- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/1201—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details comprising I/O circuitry
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- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15192—Resurf arrangement of the internal vias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/1533—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
- H01L2924/15331—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Description
図1は本発明の実施の形態1の半導体装置の構造の一例を模式的に示す断面図、図2は図1に示す半導体装置の等長配線構造を模式的に示す部分構造図、図3は図1に示す半導体装置を基板ごとに展開して構造を示す平面図、図4は本発明の実施の形態1の変形例の半導体装置の構造を模式的に示す断面図である。また、図5は図1に示す半導体装置の上段側パッケージの構造を示す断面図、図6は図1に示す半導体装置の下段側パッケージの構造を示す断面図、図7は図4に示す半導体装置の下段側パッケージの構造を示す断面図、図8は本発明の実施の形態1の変形例の半導体装置の構造を模式的に示す断面図、図9は本発明の実施の形態1の変形例の半導体装置の構造を模式的に示す断面図である。さらに、図10は図8に示す半導体装置を基板ごとに展開して構造を示す平面図、図11は本発明の実施の形態1の変形例の半導体装置の構造を模式的に示す断面図、図12は本発明の実施の形態1の変形例の半導体装置の構造を模式的に示す断面図である。
図40は本発明の実施の形態2の半導体装置の構造の一例を模式的に示す断面図、図41は図40に示す半導体装置の上段側パッケージの構造を示す断面図、図42は図41に示す上段側パッケージの基板の内部構造の一例を示す部分断面図である。
図43は本発明の実施の形態3の半導体装置の構造の一例を模式的に透過して示す平面図、図44は図43に示す半導体装置の断面図、図45乃至図48はそれぞれ本発明の実施の形態3の変形例の半導体装置の構造を模式的に透過して示す平面図と断面図である。
2 第1メモリチップ
2a 主面
2b 裏面
2c 第1電極パッド
2d 貫通孔
3 マイコンチップ
3a 主面
3b 裏面
4 第1配線基板
4a 主面
4b 裏面
4c 第1ボンディングリード
4d 端子
4e 第1内部配線
4f 第2内部配線
5 第2配線基板
5a 主面
5b 裏面
5c 第2ボンディングリード
5d 内部配線
5e 第1距離
5f 第2距離
5g 端子
5h 他の内部配線
6 第2メモリチップ
6a 主面
6b 裏面
6c 第2電極パッド
6d 貫通孔
7 Siベース
8 デバイス層
9 ヒューズ
10 パッシベーション膜
11 絶縁層
12 シード層
13 レジスト膜
14 Cu電極
15 第1ベース基板
16 キャビティ
17 樹脂層
18 ダイボンド材
19 絶縁材
20 導体パターン
21 第2ベース基板
22 充填材
23 スルーホール配線
24 ビアパッド
25 中継パターン
26 パッド
27 レジスト膜
28 スペーサ基板
28a 段差部
29 導体
30 第3メモリチップ
30a 主面
30b 裏面
30c 貫通孔
31,32 SIP(半導体装置)
33 薄膜化デバイス
34 第1はんだバンプ(第1バンプ電極)
35 第2はんだバンプ(第2バンプ電極)
36 金バンプ
37 アンダーフィル
38 ワイヤ
39 封止体
40 メモリチップ
41 放熱板
42 接着剤
43 第3配線基板
44 第3はんだバンプ
45 マイコンチップ
46 はんだペースト
Claims (6)
- 第1主面、前記第1主面に形成された第1ボンディングリード、及び前記第1主面とは反対側の第1裏面を有する第1配線基板と、
演算処理機能を有し、前記第1配線基板の前記第1主面に搭載されたマイコンチップと、
第2主面、前記第2主面に形成された端子、前記第2主面とは反対側の第2裏面、及び前記第2裏面に形成された第2ボンディングリードを有し、前記マイコンチップが搭載された前記第1配線基板上に配置された第2配線基板と、
前記第1配線基板の前記第1ボンディングリードと前記第2配線基板の前記第2ボンディングリードとを電気的に接続する第1バンプ電極と、
前記第1配線基板の前記第1裏面に配置された第2バンプ電極と、
前記第2配線基板の前記第2主面と前記第2配線基板の前記第2裏面との間に配置された第1メモリチップと、
前記第2配線基板の前記第2主面と前記第2配線基板の前記第2裏面との間において、前記第1メモリチップ上に配置された第2メモリチップと、を含み、
前記マイコンチップは、前記第1配線基板の内部に形成された第1内部配線を介して前記第1ボンディングリードと電気的に接続され、
前記マイコンチップは、前記第1配線基板の内部に形成された第2内部配線を介して前記第2バンプ電極と電気的に接続され、
前記第1メモリチップは、前記第2配線基板の内部に形成された第3内部配線を介して前記第2ボンディングリードと電気的に接続され、
前記第2メモリチップは、前記第2配線基板の内部に形成された第4内部配線を介して前記第2ボンディングリードと電気的に接続されており、
前記マイコンチップは、前記第1及び第2メモリチップと外部機器とのインタフェースであり、
前記第1及び第2メモリチップのそれぞれは、外部クロック信号の立ち上がりと立ち下がりの両方に同期してデータを転送するダブル・データ・レート・シンクロナスDRAMであることを特徴とする半導体装置。 - 請求項1記載の半導体装置において、前記マイコンチップと前記第1及び第2メモリチップのそれぞれは、前記第1ボンディングリード、前記第1バンプ電極、及び前記第2ボンディングリードを介して電気的に接続されていることを特徴とする半導体装置。
- 請求項2記載の半導体装置において、前記第1メモリチップの第1電極パッドから前記第2ボンディングリードまでの第1距離と、前記第2メモリチップの第2電極パッドから前記第2ボンディングリードまでの第2距離は等しいことを特徴とする半導体装置。
- 請求項3記載の半導体装置において、前記第1距離と前記第2距離の差の許容範囲は、±1mm以内であることを特徴とする半導体装置。
- 請求項1記載の半導体装置において、前記端子は、前記第2配線基板の内部に形成された第5内部配線を介して、前記第1配線基板と前記第2配線基板との間に設けられた第3バンプ電極と電気的に接続されていることを特徴とする半導体装置。
- 請求項5記載の半導体装置において、前記端子は、前記第5内部配線、前記第3バンプ電極、及び前記第1配線基板の内部に形成された第6内部配線を介して、前記第1配線基板の前記第1裏面に形成された第4バンプ電極と電気的に接続されていることを特徴とする半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2006183993A JP5259059B2 (ja) | 2006-07-04 | 2006-07-04 | 半導体装置 |
US11/798,737 US7847413B2 (en) | 2006-07-04 | 2007-05-16 | Semiconductor device and method of manufacturing the same |
TW096118100A TW200816435A (en) | 2006-07-04 | 2007-05-22 | Semiconductor device and method of manufacturing the same |
CNA2007101101300A CN101101909A (zh) | 2006-07-04 | 2007-06-18 | 半导体器件及其制造方法 |
KR1020070065074A KR20080004356A (ko) | 2006-07-04 | 2007-06-29 | 반도체 장치 및 그 제조 방법 |
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JP2006183993A JP5259059B2 (ja) | 2006-07-04 | 2006-07-04 | 半導体装置 |
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JP2008016519A JP2008016519A (ja) | 2008-01-24 |
JP2008016519A5 JP2008016519A5 (ja) | 2009-08-20 |
JP5259059B2 true JP5259059B2 (ja) | 2013-08-07 |
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US (1) | US7847413B2 (ja) |
JP (1) | JP5259059B2 (ja) |
KR (1) | KR20080004356A (ja) |
CN (1) | CN101101909A (ja) |
TW (1) | TW200816435A (ja) |
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2006
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-
2007
- 2007-05-16 US US11/798,737 patent/US7847413B2/en not_active Expired - Fee Related
- 2007-05-22 TW TW096118100A patent/TW200816435A/zh unknown
- 2007-06-18 CN CNA2007101101300A patent/CN101101909A/zh active Pending
- 2007-06-29 KR KR1020070065074A patent/KR20080004356A/ko not_active Application Discontinuation
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Publication number | Publication date |
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JP2008016519A (ja) | 2008-01-24 |
US20080006947A1 (en) | 2008-01-10 |
TW200816435A (en) | 2008-04-01 |
US7847413B2 (en) | 2010-12-07 |
KR20080004356A (ko) | 2008-01-09 |
CN101101909A (zh) | 2008-01-09 |
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