JP5137087B2 - L1o規則垂直記録媒体の製造方法 - Google Patents
L1o規則垂直記録媒体の製造方法 Download PDFInfo
- Publication number
- JP5137087B2 JP5137087B2 JP2009527329A JP2009527329A JP5137087B2 JP 5137087 B2 JP5137087 B2 JP 5137087B2 JP 2009527329 A JP2009527329 A JP 2009527329A JP 2009527329 A JP2009527329 A JP 2009527329A JP 5137087 B2 JP5137087 B2 JP 5137087B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- fept
- recording medium
- substrate
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229910005335 FePt Inorganic materials 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 55
- 239000000956 alloy Substances 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 26
- 238000000151 deposition Methods 0.000 claims description 18
- 239000000654 additive Substances 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 10
- 230000000996 additive effect Effects 0.000 claims description 9
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 8
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 5
- 239000006249 magnetic particle Substances 0.000 claims description 3
- 229910001149 41xx steel Inorganic materials 0.000 claims description 2
- 229910002367 SrTiO Inorganic materials 0.000 claims description 2
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 61
- 239000013078 crystal Substances 0.000 description 11
- 239000002131 composite material Substances 0.000 description 9
- 238000002441 X-ray diffraction Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 238000000137 annealing Methods 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 4
- 239000010952 cobalt-chrome Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910018979 CoPt Inorganic materials 0.000 description 2
- 229910003310 Ni-Al Inorganic materials 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910018936 CoPd Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910015187 FePd Inorganic materials 0.000 description 1
- 229910005347 FeSi Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US84335206P | 2006-09-08 | 2006-09-08 | |
| US60/843,352 | 2006-09-08 | ||
| PCT/SG2007/000301 WO2008030199A1 (en) | 2006-09-08 | 2007-09-07 | Chemically ordered perpendicular recording media |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010503139A JP2010503139A (ja) | 2010-01-28 |
| JP2010503139A5 JP2010503139A5 (enExample) | 2010-09-09 |
| JP5137087B2 true JP5137087B2 (ja) | 2013-02-06 |
Family
ID=39157524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009527329A Expired - Fee Related JP5137087B2 (ja) | 2006-09-08 | 2007-09-07 | L1o規則垂直記録媒体の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5137087B2 (enExample) |
| WO (1) | WO2008030199A1 (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8449730B2 (en) | 2009-07-20 | 2013-05-28 | Carnegie Mellon University | Buffer layers for L10 thin film perpendicular media |
| JP5616893B2 (ja) * | 2009-08-20 | 2014-10-29 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| JP5412216B2 (ja) * | 2009-09-07 | 2014-02-12 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| US9401170B1 (en) | 2009-11-24 | 2016-07-26 | WD Media, LLC | Perpendicular magnetic recording medium with epitaxial exchange coupling layer |
| US8173282B1 (en) | 2009-12-11 | 2012-05-08 | Wd Media, Inc. | Perpendicular magnetic recording medium with an ordering temperature reducing layer |
| JP5617112B2 (ja) * | 2010-01-14 | 2014-11-05 | 独立行政法人物質・材料研究機構 | 垂直磁気記録媒体及びその製造方法 |
| JP5561766B2 (ja) * | 2010-02-04 | 2014-07-30 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| US8945732B1 (en) | 2010-08-05 | 2015-02-03 | WD Media, LLC | Dual-magnetic layer high anisotropy media with orientation initialization layer |
| US8530065B1 (en) | 2010-08-10 | 2013-09-10 | WD Media, LLC | Composite magnetic recording medium |
| US8889275B1 (en) | 2010-08-20 | 2014-11-18 | WD Media, LLC | Single layer small grain size FePT:C film for heat assisted magnetic recording media |
| JP5506604B2 (ja) * | 2010-08-30 | 2014-05-28 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| JP5195868B2 (ja) | 2010-10-25 | 2013-05-15 | 富士電機株式会社 | 垂直磁気記録媒体の製造方法 |
| US8940418B1 (en) | 2010-12-23 | 2015-01-27 | WD Media, LLC | Dynamic spring media with multiple exchange coupled hard-soft magnetic layers |
| JP5787344B2 (ja) * | 2011-02-15 | 2015-09-30 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| JP5346348B2 (ja) * | 2011-02-23 | 2013-11-20 | 株式会社日立製作所 | 磁気記録媒体、磁気記録装置 |
| JP5787349B2 (ja) * | 2011-04-08 | 2015-09-30 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| JP2013149328A (ja) * | 2012-01-20 | 2013-08-01 | Showa Denko Kk | 磁気記録媒体及び磁気記録再生装置 |
| JP5923324B2 (ja) * | 2012-01-31 | 2016-05-24 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
| JP5880686B2 (ja) | 2012-03-22 | 2016-03-09 | 富士電機株式会社 | 熱アシスト磁気記録用の磁気記録媒体 |
| US9269480B1 (en) | 2012-03-30 | 2016-02-23 | WD Media, LLC | Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording |
| JP5961439B2 (ja) * | 2012-05-01 | 2016-08-02 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
| US8941950B2 (en) | 2012-05-23 | 2015-01-27 | WD Media, LLC | Underlayers for heat assisted magnetic recording (HAMR) media |
| US8993134B2 (en) * | 2012-06-29 | 2015-03-31 | Western Digital Technologies, Inc. | Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates |
| JP5961490B2 (ja) * | 2012-08-29 | 2016-08-02 | 昭和電工株式会社 | 磁気記録媒体及び磁気記録再生装置 |
| SG11201502573SA (en) | 2012-10-10 | 2015-05-28 | Fuji Electric Co Ltd | Magnetic recording medium |
| JP6163744B2 (ja) | 2012-12-06 | 2017-07-19 | 富士電機株式会社 | 垂直磁気記録媒体 |
| US8787130B1 (en) | 2013-03-15 | 2014-07-22 | WD Media, LLC | Systems and methods for providing heat assisted magnetic recording media configured to couple energy from a near field transducer |
| US8947987B1 (en) | 2013-05-03 | 2015-02-03 | WD Media, LLC | Systems and methods for providing capping layers for heat assisted magnetic recording media |
| US9177585B1 (en) | 2013-10-23 | 2015-11-03 | WD Media, LLC | Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording |
| US9159350B1 (en) | 2014-07-02 | 2015-10-13 | WD Media, LLC | High damping cap layer for magnetic recording media |
| US9378760B2 (en) * | 2014-07-31 | 2016-06-28 | Seagate Technology Llc | Data reader with tuned microstructure |
| US9685184B1 (en) | 2014-09-25 | 2017-06-20 | WD Media, LLC | NiFeX-based seed layer for magnetic recording media |
| US9990940B1 (en) | 2014-12-30 | 2018-06-05 | WD Media, LLC | Seed structure for perpendicular magnetic recording media |
| US9822441B2 (en) | 2015-03-31 | 2017-11-21 | WD Media, LLC | Iridium underlayer for heat assisted magnetic recording media |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6007623A (en) * | 1997-08-29 | 1999-12-28 | International Business Machines Corporation | Method for making horizontal magnetic recording media having grains of chemically-ordered FePt or CoPt |
| AU2003216441A1 (en) * | 2002-02-28 | 2003-09-16 | Seagate Technology Llc | Chemically ordered, cobalt-platinum alloys for magnetic recording |
| US20040191578A1 (en) * | 2003-03-24 | 2004-09-30 | Jingsheng Chen | Method of fabricating L10 ordered fePt or FePtX thin film with (001) orientation |
| JP3981732B2 (ja) * | 2003-03-27 | 2007-09-26 | 独立行政法人物質・材料研究機構 | 垂直磁気異方性を有するFePt磁性薄膜とその製造方法 |
| SG120182A1 (en) * | 2004-08-30 | 2006-03-28 | Agency Science Tech & Res | A recording medium |
| JP2006155865A (ja) * | 2004-10-29 | 2006-06-15 | Ken Takahashi | 垂直磁気記録媒体および垂直磁気記録再生装置 |
| JP4478834B2 (ja) * | 2004-12-28 | 2010-06-09 | 株式会社東芝 | 垂直磁気記録媒体、及びこれを用いた磁気記録再生装置 |
-
2007
- 2007-09-07 WO PCT/SG2007/000301 patent/WO2008030199A1/en not_active Ceased
- 2007-09-07 JP JP2009527329A patent/JP5137087B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010503139A (ja) | 2010-01-28 |
| WO2008030199A1 (en) | 2008-03-13 |
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