JP5067033B2 - 音叉型振動子、発振器 - Google Patents

音叉型振動子、発振器 Download PDF

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Publication number
JP5067033B2
JP5067033B2 JP2007163080A JP2007163080A JP5067033B2 JP 5067033 B2 JP5067033 B2 JP 5067033B2 JP 2007163080 A JP2007163080 A JP 2007163080A JP 2007163080 A JP2007163080 A JP 2007163080A JP 5067033 B2 JP5067033 B2 JP 5067033B2
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JP
Japan
Prior art keywords
film
electrode film
tuning fork
piezoelectric
arm portion
Prior art date
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Active
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JP2007163080A
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English (en)
Japanese (ja)
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JP2009005022A5 (enExample
JP2009005022A (ja
Inventor
司 舩坂
剛夫 舟川
隆 山崎
誠 古畑
知 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007163080A priority Critical patent/JP5067033B2/ja
Publication of JP2009005022A publication Critical patent/JP2009005022A/ja
Publication of JP2009005022A5 publication Critical patent/JP2009005022A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007163080A 2007-06-20 2007-06-20 音叉型振動子、発振器 Active JP5067033B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007163080A JP5067033B2 (ja) 2007-06-20 2007-06-20 音叉型振動子、発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007163080A JP5067033B2 (ja) 2007-06-20 2007-06-20 音叉型振動子、発振器

Publications (3)

Publication Number Publication Date
JP2009005022A JP2009005022A (ja) 2009-01-08
JP2009005022A5 JP2009005022A5 (enExample) 2010-07-29
JP5067033B2 true JP5067033B2 (ja) 2012-11-07

Family

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Family Applications (1)

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JP2007163080A Active JP5067033B2 (ja) 2007-06-20 2007-06-20 音叉型振動子、発振器

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JP (1) JP5067033B2 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH700716B1 (fr) * 2006-10-09 2010-10-15 Suisse Electronique Microtech Résonateur en silicium de type diapason.
JP4533934B2 (ja) 2008-01-15 2010-09-01 エプソントヨコム株式会社 振動片及び振動子の製造方法
JP2010187059A (ja) * 2009-02-10 2010-08-26 Epson Toyocom Corp ウォーク型振動片およびその製造方法
JP5347546B2 (ja) * 2009-02-12 2013-11-20 セイコーエプソン株式会社 振動片、振動片の製造方法および振動子
JP5381149B2 (ja) * 2009-02-20 2014-01-08 セイコーエプソン株式会社 振動片および振動子
JP2010226609A (ja) * 2009-03-25 2010-10-07 Seiko Epson Corp 振動片および振動子
JP2011004035A (ja) 2009-06-17 2011-01-06 Seiko Epson Corp 屈曲振動片および屈曲振動片の製造方法
JP2011155629A (ja) 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
JP5482250B2 (ja) 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
JP5633319B2 (ja) 2010-03-17 2014-12-03 セイコーエプソン株式会社 振動片、センサー素子、センサーおよび電子機器
JP2011199453A (ja) * 2010-03-18 2011-10-06 Seiko Epson Corp 振動体および振動デバイス
JP2011259120A (ja) 2010-06-08 2011-12-22 Seiko Epson Corp 振動片、周波数調整方法、振動子、振動デバイス、および電子機器
JP5533349B2 (ja) * 2010-06-30 2014-06-25 セイコーエプソン株式会社 屈曲振動片、屈曲振動子、発振器、および電子機器
JP5622173B2 (ja) 2010-07-29 2014-11-12 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP2012060355A (ja) * 2010-09-08 2012-03-22 Seiko Epson Corp 振動片、振動子、振動デバイスおよび電子機器
JP5581931B2 (ja) * 2010-09-17 2014-09-03 セイコーエプソン株式会社 振動片、振動片の製造方法、振動子、振動デバイスおよび電子機器
JP5685962B2 (ja) * 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6044222B2 (ja) * 2012-09-20 2016-12-14 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
SG11201508860QA (en) 2013-05-13 2015-11-27 Murata Manufacturing Co Vibrating device
CN105210295B (zh) 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
WO2021140944A1 (ja) * 2020-01-10 2021-07-15 京セラ株式会社 圧電共振デバイス

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150317A (ja) * 1982-03-02 1983-09-07 Citizen Watch Co Ltd 長さたて振動子
JPH0666631B2 (ja) * 1983-10-25 1994-08-24 シチズン時計株式会社 水晶振動子
JPH085382A (ja) * 1994-06-23 1996-01-12 Nippondenso Co Ltd 角速度センサ
JPH11257965A (ja) * 1998-03-09 1999-09-24 Hitachi Ltd 角速度検出センサ
JP2003051732A (ja) * 2001-08-08 2003-02-21 Murata Mfg Co Ltd 圧電共振子、フィルタおよび電子通信機器
JP4862639B2 (ja) * 2001-10-31 2012-01-25 有限会社ピエデック技術研究所 水晶振動子とその製造方法と水晶ユニットの製造方法
JP3896585B2 (ja) * 2001-12-18 2007-03-22 株式会社大真空 音叉型圧電振動子
JP2004251663A (ja) * 2003-02-18 2004-09-09 Fujitsu Media Device Kk 角速度センサ
JP2005249646A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車
JP2007096900A (ja) * 2005-09-29 2007-04-12 Seiko Epson Corp 圧電振動片および圧電デバイス

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JP2009005022A (ja) 2009-01-08

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