JP4950188B2 - 層間絶縁膜のドライエッチング方法 - Google Patents
層間絶縁膜のドライエッチング方法 Download PDFInfo
- Publication number
- JP4950188B2 JP4950188B2 JP2008516618A JP2008516618A JP4950188B2 JP 4950188 B2 JP4950188 B2 JP 4950188B2 JP 2008516618 A JP2008516618 A JP 2008516618A JP 2008516618 A JP2008516618 A JP 2008516618A JP 4950188 B2 JP4950188 B2 JP 4950188B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- etching
- insulating film
- interlayer insulating
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011229 interlayer Substances 0.000 title claims description 50
- 238000000034 method Methods 0.000 title claims description 31
- 238000001312 dry etching Methods 0.000 title claims description 24
- 239000007789 gas Substances 0.000 claims description 163
- 238000005530 etching Methods 0.000 claims description 114
- 229920006254 polymer film Polymers 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 23
- 238000001228 spectrum Methods 0.000 claims description 10
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims description 9
- 239000004215 Carbon black (E152) Substances 0.000 claims description 8
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 claims description 8
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 claims description 8
- 229930195733 hydrocarbon Natural products 0.000 claims description 8
- 150000002430 hydrocarbons Chemical class 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 36
- 239000003990 capacitor Substances 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 4
- -1 NO x Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000002305 electric material Substances 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007348 radical reaction Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
Description
(1)CF4=20sccm、N2=30sccm
(2)CF4=32sccm、N2=48sccm
(3)CF4=48sccm、N2=72sccm
(4)CF4=60sccm、N2=90sccm
(5)CF4=80sccm、N2=120sccm
に設定して、エッチングガスの混合比を変化させた。なお、(4)のエッチングガス条件は、実施例2と同一である。各エッチングガス条件において、層間絶縁膜及びレジストのエッチングレートを測定し、選択比を求めた。結果を図4に示す。また、(1)、(2)、(3)、(5)の各場合における基板の断面SEM写真を、それぞれ図5(a)、(b)、(c)、(d)に示す。
(比較例1)
(a)C3F8/Ar/N2/CH4=16/50/20/26
(b)C3F8/Ar/N2/CH4=30/50/20/26
(c)C3F8/Ar/N2/CH4=16/100/20/26
(d)C3F8/Ar/N2/CH4=16/50/20/40
(e)C3F8/Ar/N2/CH4=16/50/50/26
各条件における基板の断面SEM写真を図6に示す。また、各条件における層間絶縁膜及びレジストのエッチングレートを測定し、この結果から、各条件における選択比を求めた。結果を図7に示す。
4 ガス導入手段 11 真空チャンバー
12 真空排気手段 13 基板処理室
14 プラズマ発生室 21 基板電極
22 絶縁体 23 支持台
24 ブロッキングコンデンサー 25 高周波電源
31 天板 32 可変コンデンサー
33 高周波電源 34 分岐点
41 ガス導入経路 42 ガス流量制御手段
43 ガス源 51 磁場コイル
52 アンテナコイル S 基板
Claims (10)
- CF系ガスと、N含有ガスと、低級炭化水素ガスとからなるエッチングガスにより、層間絶縁膜上に設けられたArFレジスト又はKrFレジスト上にポリマー膜を形成しながら、層間絶縁膜を微細加工する層間絶縁膜のドライエッチング方法であって、
前記エッチングガスを0.5Pa以下の圧力下で導入し、前記CF系ガスをエッチングガス総流量基準で20〜40%導入することにより、1200cm−1付近にC−F結合のピーク、1600cm−1付近にC−N結合のピーク及び3300cm−1付近にC−H結合のピーク(フーリエ変換赤外分光光度計で測定したスペクトル)を有するポリマー膜を形成しながらエッチングすることを特徴とする層間絶縁膜のドライエッチング方法。 - 前記CF系ガスをエッチングガス総流量基準で21〜28%導入することを特徴とする請求項1記載の層間絶縁膜のドライエッチング方法。
- 前記CF系ガスをエッチングガス総流量基準で25〜27%導入することを特徴とする請求項1記載の層間絶縁膜のドライエッチング方法。
- 前記CF系ガスが、CF4、C3F8、C2F6、C4F8、C5F8及びCxFyIから選ばれた少なくとも一種のガスであることを特徴とする請求項1〜3のいずれか1項に記載の層間絶縁膜のドライエッチング方法。
- 前記低級炭化水素がCH4、C2H6、C3H8、C4H10、またはC2H2であることを特徴とする請求項1〜4のいずれか1項に記載の層間絶縁膜のドライエッチング方法。
- C x F y H z ガスとN含有ガスとからなるエッチングガスにより、層間絶縁膜上に設けられたArFレジスト又はKrFレジスト上にポリマー膜を形成しながら、層間絶縁膜を微細加工する層間絶縁膜のドライエッチング方法であって、
前記エッチングガスを0.5Pa以下の圧力下で導入し、前記C x F y H z ガスをエッチングガス総流量基準で20〜40%導入することにより、1200cm −1 付近にC−F結合のピーク、1600cm −1 付近にC−N結合のピーク及び3300cm −1 付近にC−H結合のピーク(フーリエ変換赤外分光光度計で測定したスペクトル)を有するポリマー膜を形成しながらエッチングすることを特徴とする層間絶縁膜のドライエッチング方法。 - 前記CxFyHzガスが、CHF3ガスであることを特徴とする請求項6に記載の層間絶縁膜のドライエッチング方法。
- 前記N含有ガスが、窒素ガス、NOx、NH3、メチルアミン、ジメチルアミンから選ばれた少なくとも1種のガスであることを特徴とする請求項1〜7のいずれか1項に記載の層間絶縁膜のドライエッチング方法。
- 前記CxFyIガスが、C3F7Iガス又はCF3Iガスであることを特徴とする請求項4に記載の層間絶縁膜のドライエッチング方法。
- 前記層間絶縁膜が、SiOCH系材料からなることを特徴とする請求項1〜9のいずれか1項に記載の層間絶縁膜のドライエッチング方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008516618A JP4950188B2 (ja) | 2006-05-24 | 2007-05-16 | 層間絶縁膜のドライエッチング方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006143868 | 2006-05-24 | ||
JP2006143868 | 2006-05-24 | ||
PCT/JP2007/060010 WO2007135906A1 (ja) | 2006-05-24 | 2007-05-16 | 層間絶縁膜のドライエッチング方法 |
JP2008516618A JP4950188B2 (ja) | 2006-05-24 | 2007-05-16 | 層間絶縁膜のドライエッチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007135906A1 JPWO2007135906A1 (ja) | 2009-10-01 |
JP4950188B2 true JP4950188B2 (ja) | 2012-06-13 |
Family
ID=38723220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008516618A Active JP4950188B2 (ja) | 2006-05-24 | 2007-05-16 | 層間絶縁膜のドライエッチング方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100219158A1 (ja) |
JP (1) | JP4950188B2 (ja) |
KR (1) | KR101190137B1 (ja) |
CN (1) | CN101454878B (ja) |
DE (1) | DE112007001243B4 (ja) |
TW (1) | TWI437633B (ja) |
WO (1) | WO2007135906A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009193988A (ja) * | 2008-02-12 | 2009-08-27 | Tokyo Electron Ltd | プラズマエッチング方法及びコンピュータ記憶媒体 |
US7637269B1 (en) * | 2009-07-29 | 2009-12-29 | Tokyo Electron Limited | Low damage method for ashing a substrate using CO2/CO-based process |
JP2012096823A (ja) * | 2010-11-01 | 2012-05-24 | Takagi Seiko Corp | 液体貯蔵容器 |
KR101102495B1 (ko) * | 2011-08-11 | 2012-01-05 | 주식회사 미로 | 가로등 |
CN113614891A (zh) | 2019-03-22 | 2021-11-05 | 中央硝子株式会社 | 干蚀刻方法及半导体装置的制造方法 |
US11887814B2 (en) | 2020-02-10 | 2024-01-30 | Hitachi High-Tech Corporation | Plasma processing method |
US11798811B2 (en) * | 2020-06-26 | 2023-10-24 | American Air Liquide, Inc. | Iodine-containing fluorocarbon and hydrofluorocarbon compounds for etching semiconductor structures |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004071731A (ja) * | 2002-08-05 | 2004-03-04 | Ulvac Japan Ltd | エッチング方法 |
JP2005251814A (ja) * | 2004-03-02 | 2005-09-15 | Ulvac Japan Ltd | 層間絶縁膜のドライエッチング方法及びその装置 |
JP2006100628A (ja) * | 2004-09-30 | 2006-04-13 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2008512854A (ja) * | 2004-09-07 | 2008-04-24 | ラム リサーチ コーポレーション | 基板上のフォトレジストを除去する方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6635185B2 (en) * | 1997-12-31 | 2003-10-21 | Alliedsignal Inc. | Method of etching and cleaning using fluorinated carbonyl compounds |
JP4538209B2 (ja) * | 2003-08-28 | 2010-09-08 | 株式会社日立ハイテクノロジーズ | 半導体装置の製造方法 |
KR20070009729A (ko) * | 2004-05-11 | 2007-01-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 불화탄소 에칭 화학반응에서 H2 첨가를 이용한탄소-도핑-Si 산화물 에칭 |
US7794880B2 (en) * | 2005-11-16 | 2010-09-14 | California Institute Of Technology | Fluorination of multi-layered carbon nanomaterials |
-
2007
- 2007-05-15 TW TW096117249A patent/TWI437633B/zh active
- 2007-05-16 CN CN2007800189986A patent/CN101454878B/zh active Active
- 2007-05-16 WO PCT/JP2007/060010 patent/WO2007135906A1/ja active Application Filing
- 2007-05-16 DE DE112007001243.9T patent/DE112007001243B4/de active Active
- 2007-05-16 US US12/301,786 patent/US20100219158A1/en not_active Abandoned
- 2007-05-16 KR KR1020087028192A patent/KR101190137B1/ko active IP Right Grant
- 2007-05-16 JP JP2008516618A patent/JP4950188B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004071731A (ja) * | 2002-08-05 | 2004-03-04 | Ulvac Japan Ltd | エッチング方法 |
JP2005251814A (ja) * | 2004-03-02 | 2005-09-15 | Ulvac Japan Ltd | 層間絶縁膜のドライエッチング方法及びその装置 |
JP2008512854A (ja) * | 2004-09-07 | 2008-04-24 | ラム リサーチ コーポレーション | 基板上のフォトレジストを除去する方法 |
JP2006100628A (ja) * | 2004-09-30 | 2006-04-13 | Hitachi High-Technologies Corp | プラズマ処理方法 |
Also Published As
Publication number | Publication date |
---|---|
DE112007001243B4 (de) | 2015-01-22 |
KR101190137B1 (ko) | 2012-10-12 |
US20100219158A1 (en) | 2010-09-02 |
TWI437633B (zh) | 2014-05-11 |
TW200809961A (en) | 2008-02-16 |
WO2007135906A1 (ja) | 2007-11-29 |
KR20090012329A (ko) | 2009-02-03 |
JPWO2007135906A1 (ja) | 2009-10-01 |
DE112007001243T5 (de) | 2009-05-28 |
CN101454878B (zh) | 2011-03-23 |
CN101454878A (zh) | 2009-06-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6919274B2 (en) | LSI device etching method and apparatus thereof | |
JP4950188B2 (ja) | 層間絶縁膜のドライエッチング方法 | |
US7309448B2 (en) | Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material | |
KR100849707B1 (ko) | 탄소-도우핑된 저유전체들의 선택적 식각 | |
US6291356B1 (en) | Method for etching silicon oxynitride and dielectric antireflection coatings | |
US7601246B2 (en) | Methods of sputtering a protective coating on a semiconductor substrate | |
WO2003081645A2 (en) | An integrated in-situ etch process performed in a multichamber substrate processing system | |
CN101124661A (zh) | 碳氟化合物蚀刻化学剂中使用氢气添加剂的掺碳的硅氧化物蚀刻 | |
CN100423208C (zh) | 等离子体蚀刻方法和蚀刻工具以及蚀刻构件的方法 | |
JP2002510878A (ja) | 低k誘電体をエッチングする方法 | |
US8049335B2 (en) | System and method for plasma induced modification and improvement of critical dimension uniformity | |
KR20030051786A (ko) | 드라이 에칭 가스 및 드라이 에칭 방법 | |
US8404596B2 (en) | Plasma ashing method | |
US6647994B1 (en) | Method of resist stripping over low-k dielectric material | |
US6897154B2 (en) | Selective etching of low-k dielectrics | |
US6914004B2 (en) | Method for via etching in organo-silica-glass | |
WO2018037799A1 (ja) | プラズマエッチング方法 | |
JP2000340549A (ja) | エッチング方法及びそれを用いた半導体装置の製造方法 | |
CN1790667A (zh) | 通孔活性离子刻蚀方法 | |
KR20060107758A (ko) | 유기실리케이트 유리용 아산화질소 스트립 프로세스 | |
US7122479B2 (en) | Etching processing method | |
JP2005251814A (ja) | 層間絶縁膜のドライエッチング方法及びその装置 | |
JP2005033027A (ja) | 低誘電率層間絶縁膜のドライエッチング方法 | |
JP2005072352A (ja) | 層間絶縁膜のドライエッチング方法 | |
JPH03177022A (ja) | 半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110906 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111107 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120112 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120221 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120308 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150316 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4950188 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |