JP4936670B2 - 電力用半導体装置 - Google Patents
電力用半導体装置 Download PDFInfo
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- JP4936670B2 JP4936670B2 JP2005003653A JP2005003653A JP4936670B2 JP 4936670 B2 JP4936670 B2 JP 4936670B2 JP 2005003653 A JP2005003653 A JP 2005003653A JP 2005003653 A JP2005003653 A JP 2005003653A JP 4936670 B2 JP4936670 B2 JP 4936670B2
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 46
- VMXJCRHCUWKQCB-UHFFFAOYSA-N NPNP Chemical compound NPNP VMXJCRHCUWKQCB-UHFFFAOYSA-N 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 description 22
- 238000009792 diffusion process Methods 0.000 description 17
- 239000012535 impurity Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 13
- 238000011084 recovery Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/87—Thyristor diodes, e.g. Shockley diodes, break-over diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Thyristors (AREA)
Description
図1は、本実施の形態1に係る電力用半導体装置の構成を示す断面図である。なお、以下では、サイリスタ(特に、NPNP型サイリスタ)の場合について言及するが、本発明は、IGBT(Insulated Gate Bipolar Transistor)等のパワートランジスタ等にも適用することができる。
本実施の形態に係る電力用半導体装置では、アノード電極領域4の断面幅を特定することを特徴とする。図9に、本実施の形態に係る電力用半導体装置の断面図を示す。
図12に、本実施の形態に係る電力用半導体装置の下部側面の断面構成を拡大して示す。
Claims (4)
- 断面視において、主面に対して略垂直で、半導体基板の下部側面端部及び上部側面端部に形成されている垂直部と、当該垂直部と両端が接続するように形成された傾斜部とで、構成されたメサ部を有しており、第一の導電型の半導体基板と、
前記半導体基板の第一の主面内に形成された、第一の導電型の第一の主電極領域と、
前記第一の主面内の一部に形成された、第二の導電型の制御電極領域と、
前記半導体基板の前記第一の主面と対向する第二の主面内に形成された、第二の導電型の第二の主電極領域と、
前記第二の主面内に形成され、前記第二の主電極領域を取り囲む環状のガードリングとを、備えており、
断面視において、複数の前記第一の主電極領域は水平方向に並んでおり、
前記断面視において、最も外側に存する2つの前記第一の主電極領域のうち、
一方の前記第一の主電極領域の外側端部と、前記第二の主電極領域の一方端とが平面視で一致しており、
他方の前記第一の主電極領域の外側端部と、前記第二の主電極領域の他方端とが平面視で一致している、
ことを特徴とする電力用半導体装置。 - 前記ガードリングは、
前記第二の主面の端部に形成されている、
ことを特徴とする請求項1に記載の電力用半導体装置。 - 前記ガードリングの高さが、前記傾斜部に達している、
ことを特徴とする請求項2に記載の電力用半導体装置。 - 前記第二の主電極領域の高さと、前記ガードリングとの高さが、略同一である、
ことを特徴とする請求項1に記載の電力用半導体装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005003653A JP4936670B2 (ja) | 2005-01-11 | 2005-01-11 | 電力用半導体装置 |
DE102005035732A DE102005035732B4 (de) | 2005-01-11 | 2005-07-29 | Leistungs-Halbleitervorrichtung |
CNB2005100882262A CN100479186C (zh) | 2005-01-11 | 2005-07-29 | 功率半导体器件 |
US11/194,593 US7244969B2 (en) | 2005-01-11 | 2005-08-02 | Power semiconductor device |
CH01462/05A CH695408A5 (fr) | 2005-01-11 | 2005-09-07 | Dispositif de puissance à semi-conducteur. |
KR1020050108416A KR100670212B1 (ko) | 2005-01-11 | 2005-11-14 | 전력용 반도체장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005003653A JP4936670B2 (ja) | 2005-01-11 | 2005-01-11 | 電力用半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006196502A JP2006196502A (ja) | 2006-07-27 |
JP4936670B2 true JP4936670B2 (ja) | 2012-05-23 |
Family
ID=36178983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005003653A Active JP4936670B2 (ja) | 2005-01-11 | 2005-01-11 | 電力用半導体装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7244969B2 (ja) |
JP (1) | JP4936670B2 (ja) |
KR (1) | KR100670212B1 (ja) |
CN (1) | CN100479186C (ja) |
CH (1) | CH695408A5 (ja) |
DE (1) | DE102005035732B4 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6026418B2 (ja) * | 2010-09-27 | 2016-11-16 | アーベーベー・テヒノロギー・アーゲー | バイポーラノンパンチスルー電力半導体デバイス |
EP3113219B1 (de) * | 2015-06-30 | 2020-03-11 | SEMIKRON Elektronik GmbH & Co. KG | Halbleiterbauelement und verfahren zu dessen herstellung |
JP2018044811A (ja) * | 2016-09-13 | 2018-03-22 | 株式会社村田製作所 | ピエゾ抵抗型センサ |
CN111834451B (zh) * | 2019-04-23 | 2023-04-07 | 株洲中车时代半导体有限公司 | 一种逆阻型门极换流晶闸管及其制造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126968A (en) * | 1980-03-10 | 1981-10-05 | Mitsubishi Electric Corp | Semiconductor device |
JPS61108170A (ja) * | 1984-10-31 | 1986-05-26 | ゼネラル・エレクトリツク・カンパニイ | 電力半導体装置に2重正ベベル溝を形成する方法 |
JP2755761B2 (ja) * | 1990-01-26 | 1998-05-25 | 株式会社東芝 | 半導体装置 |
JPH05343662A (ja) | 1992-06-04 | 1993-12-24 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JPH0888351A (ja) * | 1994-09-20 | 1996-04-02 | Meidensha Corp | ゲートターンオフサイリスタ |
JP3789580B2 (ja) * | 1996-12-25 | 2006-06-28 | 関西電力株式会社 | 高耐圧半導体装置 |
WO2000065661A1 (fr) * | 1999-04-22 | 2000-11-02 | Mitsubishi Denki Kabushiki Kaisha | Dispositif semi-conducteur |
-
2005
- 2005-01-11 JP JP2005003653A patent/JP4936670B2/ja active Active
- 2005-07-29 CN CNB2005100882262A patent/CN100479186C/zh active Active
- 2005-07-29 DE DE102005035732A patent/DE102005035732B4/de active Active
- 2005-08-02 US US11/194,593 patent/US7244969B2/en active Active
- 2005-09-07 CH CH01462/05A patent/CH695408A5/fr not_active IP Right Cessation
- 2005-11-14 KR KR1020050108416A patent/KR100670212B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US7244969B2 (en) | 2007-07-17 |
DE102005035732A1 (de) | 2006-07-20 |
CN1805150A (zh) | 2006-07-19 |
KR100670212B1 (ko) | 2007-01-16 |
CH695408A5 (fr) | 2006-04-28 |
DE102005035732B4 (de) | 2008-06-19 |
US20060151805A1 (en) | 2006-07-13 |
CN100479186C (zh) | 2009-04-15 |
KR20060082023A (ko) | 2006-07-14 |
JP2006196502A (ja) | 2006-07-27 |
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