JP4927338B2 - ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法 - Google Patents

ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法 Download PDF

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Publication number
JP4927338B2
JP4927338B2 JP2005044599A JP2005044599A JP4927338B2 JP 4927338 B2 JP4927338 B2 JP 4927338B2 JP 2005044599 A JP2005044599 A JP 2005044599A JP 2005044599 A JP2005044599 A JP 2005044599A JP 4927338 B2 JP4927338 B2 JP 4927338B2
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JP
Japan
Prior art keywords
pair
axis
gantry
stage device
axis drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005044599A
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English (en)
Japanese (ja)
Other versions
JP2006224285A (ja
Inventor
雄二 小林
靖仁 中森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2005044599A priority Critical patent/JP4927338B2/ja
Priority to TW095102107A priority patent/TW200631724A/zh
Priority to KR1020060016730A priority patent/KR100716050B1/ko
Priority to CN2006100094057A priority patent/CN1824458B/zh
Publication of JP2006224285A publication Critical patent/JP2006224285A/ja
Application granted granted Critical
Publication of JP4927338B2 publication Critical patent/JP4927338B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/30—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members controlled in conjunction with the feed mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
    • B23Q1/66—Worktables interchangeably movable into operating positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0028—Arrangements compensating weight or flexion on parts of the machine by actively reacting to a change of the configuration of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
    • B23Q15/22—Control or regulation of position of tool or workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2005044599A 2005-02-21 2005-02-21 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法 Expired - Fee Related JP4927338B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005044599A JP4927338B2 (ja) 2005-02-21 2005-02-21 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法
TW095102107A TW200631724A (en) 2005-02-21 2006-01-19 Stage device, gantry-type stage device, and method for controlling stage device
KR1020060016730A KR100716050B1 (ko) 2005-02-21 2006-02-21 스테이지장치 및 갠트리형 스테이지장치 및 스테이지장치의제어방법
CN2006100094057A CN1824458B (zh) 2005-02-21 2006-02-21 载物台装置和龙门型载物台装置及载物台装置的控制方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005044599A JP4927338B2 (ja) 2005-02-21 2005-02-21 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011244380A Division JP5341165B2 (ja) 2011-11-08 2011-11-08 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法

Publications (2)

Publication Number Publication Date
JP2006224285A JP2006224285A (ja) 2006-08-31
JP4927338B2 true JP4927338B2 (ja) 2012-05-09

Family

ID=36935381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005044599A Expired - Fee Related JP4927338B2 (ja) 2005-02-21 2005-02-21 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法

Country Status (4)

Country Link
JP (1) JP4927338B2 (enrdf_load_stackoverflow)
KR (1) KR100716050B1 (enrdf_load_stackoverflow)
CN (1) CN1824458B (enrdf_load_stackoverflow)
TW (1) TW200631724A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664142B2 (ja) * 2005-07-21 2011-04-06 住友重機械工業株式会社 ステージ装置
KR101338577B1 (ko) * 2006-12-27 2013-12-06 주식회사 케이씨텍 약액 도포 장치
CN101020257B (zh) * 2007-02-14 2011-03-02 吉林名门风电设备有限公司 一种移动式大口径工件切削方法及设备
CN102029525A (zh) * 2011-01-04 2011-04-27 党金行 双工作台龙门式机床
KR101269987B1 (ko) * 2012-02-16 2013-05-31 순환엔지니어링 주식회사 다축으로 구성된 스테이지 장치의 제어 장치 및 방법
JP6251559B2 (ja) 2013-02-28 2017-12-20 株式会社ニューフレアテクノロジー 試料支持装置
CN104368992B (zh) * 2014-11-07 2016-08-31 武汉法利普纳泽切割系统有限公司 实时高度模拟压脚装置
CN104965167A (zh) * 2015-07-21 2015-10-07 深圳市汉匠自动化科技有限公司 电路板自动检测设备
CN107971926B (zh) * 2017-11-16 2024-02-02 广东东箭汽车科技股份有限公司 加工件夹持装置以及加工件夹持系统
CN108838669B (zh) * 2018-08-28 2023-05-02 江苏帅兢科技有限公司 精雕机的龙门架的调整装置
KR102178139B1 (ko) * 2019-04-15 2020-11-12 주식회사 트임 기판 가압 적층 공정용 갠트리 장치
WO2021059937A1 (ja) * 2019-09-27 2021-04-01 株式会社東京精密 ダイシング装置及び方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253492A (en) * 1975-10-23 1977-04-30 Keibuibii Ikuitsupumento Corp Sighting device for fluiding gases
JPS62153024A (ja) * 1985-12-27 1987-07-08 Yokohama Rubber Co Ltd:The 粉体原料の搬送装置
FR2603217B1 (fr) * 1986-08-28 1990-12-28 Primat Didier Procede de fabrication d'un bati de support et de guidage bidirectionnel.
CN1012348B (zh) * 1986-12-28 1991-04-17 湖南省岳阳机床厂 在龙门刨上周边磨削机床导轨的方法及装置
JPH02160440A (ja) * 1988-12-12 1990-06-20 Honda Motor Co Ltd 工作機械
CN2101545U (zh) * 1991-10-23 1992-04-15 北京市电加工研究所 大型环形工件精密电火花机床
JPH0671533A (ja) * 1992-08-26 1994-03-15 Kikukawa Tekkosho:Kk マシニングセンタ−
JP2952166B2 (ja) * 1994-09-16 1999-09-20 株式会社三協精機製作所 門型駆動装置
JPH08229759A (ja) * 1995-02-24 1996-09-10 Canon Inc 位置決め装置並びにデバイス製造装置及び方法
JPH1094928A (ja) * 1996-09-24 1998-04-14 Shin Nippon Koki Kk 工作機械のテーブル移送装置
JP2000163130A (ja) * 1998-11-30 2000-06-16 Canon Inc 自重補償装置
JP2002154028A (ja) * 2000-11-20 2002-05-28 Canon Inc 加工装置の移動ステージ機構
JP3732763B2 (ja) * 2001-07-13 2006-01-11 住友重機械工業株式会社 ステージ装置
CN2535220Y (zh) * 2002-03-22 2003-02-12 山推工程机械股份有限公司 铸件毛坯矫形压力机
CN2644060Y (zh) * 2003-08-27 2004-09-29 江苏多棱数控机床股份有限公司 五轴联动龙门数控铣床
JP2005331402A (ja) 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd ステージ装置

Also Published As

Publication number Publication date
KR100716050B1 (ko) 2007-05-08
TW200631724A (en) 2006-09-16
TWI297630B (enrdf_load_stackoverflow) 2008-06-11
CN1824458B (zh) 2011-01-19
KR20060093303A (ko) 2006-08-24
JP2006224285A (ja) 2006-08-31
CN1824458A (zh) 2006-08-30

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