TW200631724A - Stage device, gantry-type stage device, and method for controlling stage device - Google Patents
Stage device, gantry-type stage device, and method for controlling stage deviceInfo
- Publication number
- TW200631724A TW200631724A TW095102107A TW95102107A TW200631724A TW 200631724 A TW200631724 A TW 200631724A TW 095102107 A TW095102107 A TW 095102107A TW 95102107 A TW95102107 A TW 95102107A TW 200631724 A TW200631724 A TW 200631724A
- Authority
- TW
- Taiwan
- Prior art keywords
- stage device
- gantry
- base
- controlling
- type
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/30—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members controlled in conjunction with the feed mechanism
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
- B23Q1/66—Worktables interchangeably movable into operating positions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
- B23Q11/0028—Arrangements compensating weight or flexion on parts of the machine by actively reacting to a change of the configuration of the machine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/20—Control of position or direction using feedback using a digital comparing device
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Machine Tool Units (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005044599A JP4927338B2 (ja) | 2005-02-21 | 2005-02-21 | ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200631724A true TW200631724A (en) | 2006-09-16 |
TWI297630B TWI297630B (zh) | 2008-06-11 |
Family
ID=36935381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095102107A TW200631724A (en) | 2005-02-21 | 2006-01-19 | Stage device, gantry-type stage device, and method for controlling stage device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4927338B2 (zh) |
KR (1) | KR100716050B1 (zh) |
CN (1) | CN1824458B (zh) |
TW (1) | TW200631724A (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4664142B2 (ja) * | 2005-07-21 | 2011-04-06 | 住友重機械工業株式会社 | ステージ装置 |
KR101338577B1 (ko) * | 2006-12-27 | 2013-12-06 | 주식회사 케이씨텍 | 약액 도포 장치 |
CN101020257B (zh) * | 2007-02-14 | 2011-03-02 | 吉林名门风电设备有限公司 | 一种移动式大口径工件切削方法及设备 |
CN102029525A (zh) * | 2011-01-04 | 2011-04-27 | 党金行 | 双工作台龙门式机床 |
KR101269987B1 (ko) * | 2012-02-16 | 2013-05-31 | 순환엔지니어링 주식회사 | 다축으로 구성된 스테이지 장치의 제어 장치 및 방법 |
JP6251559B2 (ja) * | 2013-02-28 | 2017-12-20 | 株式会社ニューフレアテクノロジー | 試料支持装置 |
CN104368992B (zh) * | 2014-11-07 | 2016-08-31 | 武汉法利普纳泽切割系统有限公司 | 实时高度模拟压脚装置 |
CN104965167A (zh) * | 2015-07-21 | 2015-10-07 | 深圳市汉匠自动化科技有限公司 | 电路板自动检测设备 |
CN107971926B (zh) * | 2017-11-16 | 2024-02-02 | 广东东箭汽车科技股份有限公司 | 加工件夹持装置以及加工件夹持系统 |
CN108838669B (zh) * | 2018-08-28 | 2023-05-02 | 江苏帅兢科技有限公司 | 精雕机的龙门架的调整装置 |
KR102178139B1 (ko) * | 2019-04-15 | 2020-11-12 | 주식회사 트임 | 기판 가압 적층 공정용 갠트리 장치 |
CN114340846B (zh) * | 2019-09-27 | 2022-11-29 | 株式会社东京精密 | 切割装置及方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5253492A (en) * | 1975-10-23 | 1977-04-30 | Keibuibii Ikuitsupumento Corp | Sighting device for fluiding gases |
JPS62153024A (ja) * | 1985-12-27 | 1987-07-08 | Yokohama Rubber Co Ltd:The | 粉体原料の搬送装置 |
FR2603217B1 (fr) * | 1986-08-28 | 1990-12-28 | Primat Didier | Procede de fabrication d'un bati de support et de guidage bidirectionnel. |
CN1012348B (zh) * | 1986-12-28 | 1991-04-17 | 湖南省岳阳机床厂 | 在龙门刨上周边磨削机床导轨的方法及装置 |
JPH02160440A (ja) * | 1988-12-12 | 1990-06-20 | Honda Motor Co Ltd | 工作機械 |
CN2101545U (zh) * | 1991-10-23 | 1992-04-15 | 北京市电加工研究所 | 大型环形工件精密电火花机床 |
JPH0671533A (ja) * | 1992-08-26 | 1994-03-15 | Kikukawa Tekkosho:Kk | マシニングセンタ− |
JP2952166B2 (ja) * | 1994-09-16 | 1999-09-20 | 株式会社三協精機製作所 | 門型駆動装置 |
JPH08229759A (ja) * | 1995-02-24 | 1996-09-10 | Canon Inc | 位置決め装置並びにデバイス製造装置及び方法 |
JPH1094928A (ja) * | 1996-09-24 | 1998-04-14 | Shin Nippon Koki Kk | 工作機械のテーブル移送装置 |
JP2000163130A (ja) * | 1998-11-30 | 2000-06-16 | Canon Inc | 自重補償装置 |
JP2002154028A (ja) * | 2000-11-20 | 2002-05-28 | Canon Inc | 加工装置の移動ステージ機構 |
JP3732763B2 (ja) * | 2001-07-13 | 2006-01-11 | 住友重機械工業株式会社 | ステージ装置 |
CN2535220Y (zh) * | 2002-03-22 | 2003-02-12 | 山推工程机械股份有限公司 | 铸件毛坯矫形压力机 |
CN2644060Y (zh) * | 2003-08-27 | 2004-09-29 | 江苏多棱数控机床股份有限公司 | 五轴联动龙门数控铣床 |
JP2005331402A (ja) | 2004-05-20 | 2005-12-02 | Sumitomo Heavy Ind Ltd | ステージ装置 |
-
2005
- 2005-02-21 JP JP2005044599A patent/JP4927338B2/ja active Active
-
2006
- 2006-01-19 TW TW095102107A patent/TW200631724A/zh not_active IP Right Cessation
- 2006-02-21 CN CN2006100094057A patent/CN1824458B/zh not_active Expired - Fee Related
- 2006-02-21 KR KR1020060016730A patent/KR100716050B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1824458B (zh) | 2011-01-19 |
CN1824458A (zh) | 2006-08-30 |
KR100716050B1 (ko) | 2007-05-08 |
TWI297630B (zh) | 2008-06-11 |
JP2006224285A (ja) | 2006-08-31 |
KR20060093303A (ko) | 2006-08-24 |
JP4927338B2 (ja) | 2012-05-09 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |