TW200732046A - Apparatus for applying solution and method of measuring quantity of solution - Google Patents

Apparatus for applying solution and method of measuring quantity of solution

Info

Publication number
TW200732046A
TW200732046A TW095138195A TW95138195A TW200732046A TW 200732046 A TW200732046 A TW 200732046A TW 095138195 A TW095138195 A TW 095138195A TW 95138195 A TW95138195 A TW 95138195A TW 200732046 A TW200732046 A TW 200732046A
Authority
TW
Taiwan
Prior art keywords
solution
applying
predetermined direction
substrate
placing table
Prior art date
Application number
TW095138195A
Other languages
Chinese (zh)
Other versions
TWI311500B (en
Inventor
Shinji Kajiwara
Daisuke Matsushima
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006146472A external-priority patent/JP4887076B2/en
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200732046A publication Critical patent/TW200732046A/en
Application granted granted Critical
Publication of TWI311500B publication Critical patent/TWI311500B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention is to provide an apparatus for applying a solution, in which the precision when the amount of the solution to be supplied from a nozzle is measured can be improved and the efficiency when the measuring work is done can also be improved. The apparatus for applying the solution onto a substrate is provided with: a plurality of application heads 22 which are arranged along the predetermined direction and each of which has the nozzle for applying the solution onto the substrate; a placing table 7 on the upper surface of which the substrate is placed; a first linear motor 8 for relatively moving the placing table and the plurality of application heads to the direction crossing the predetermined direction; a scale 41 for measuring the weight of the solution to be supplied from the plurality of application heads; and a second linear motor 44 for moving the scale independently of the placing table to the predetermined direction or the direction crossing the predetermined direction.
TW095138195A 2005-10-20 2006-10-17 Apparatus for applying solution and method of measuring quantity of solution TWI311500B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005305532 2005-10-20
JP2006146472A JP4887076B2 (en) 2006-05-26 2006-05-26 Solution supply apparatus and method

Publications (2)

Publication Number Publication Date
TW200732046A true TW200732046A (en) 2007-09-01
TWI311500B TWI311500B (en) 2009-07-01

Family

ID=38178047

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095138195A TWI311500B (en) 2005-10-20 2006-10-17 Apparatus for applying solution and method of measuring quantity of solution

Country Status (3)

Country Link
KR (1) KR100845880B1 (en)
CN (1) CN1974027B (en)
TW (1) TWI311500B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI581324B (en) * 2013-07-09 2017-05-01 東京威力科創股份有限公司 Substrate processing system, method of controlling substrate processing system, and storage medium

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5280702B2 (en) * 2008-02-18 2013-09-04 武蔵エンジニアリング株式会社 Application method of liquid material, apparatus and program thereof
JP5606780B2 (en) * 2010-04-23 2014-10-15 芝浦メカトロニクス株式会社 Semiconductor device manufacturing equipment
CN103676226B (en) * 2012-08-31 2016-08-10 细美事有限公司 Liquid crystal discharge capacity measuring unit, discharge capacity measuring method and substrate board treatment
KR101403966B1 (en) * 2013-01-02 2014-06-10 주식회사 케이씨텍 Slit nozzle tuning system
JP5735035B2 (en) * 2013-05-13 2015-06-17 株式会社エナテック Coating apparatus and coating method
EP2832454A1 (en) 2013-07-30 2015-02-04 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Slot-die coating method and apparatus
KR20160107034A (en) 2015-03-03 2016-09-13 세메스 주식회사 Detecting mehtod and Apparatus for treating substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1227753A (en) * 1967-07-13 1971-04-07
GB1255090A (en) * 1969-03-26 1971-11-24 Nippon Kogei Kogyo Company Ltd Apparatus for electrostatically coating powders on a workpiece
US5830297A (en) * 1995-07-24 1998-11-03 Matsushita Electric Industrial Co., Ltd. Method and apparatus for application of adhesive
US6209479B1 (en) * 1998-12-30 2001-04-03 Aeromatic-Fielder Ag Apparatus for coating tablets
JP3876684B2 (en) * 2000-12-21 2007-02-07 セイコーエプソン株式会社 Color filter manufacturing method, color filter manufacturing device, liquid crystal device manufacturing method, liquid crystal device manufacturing device, EL device manufacturing method, EL device manufacturing device, material ejection method, head control device, electronic apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI581324B (en) * 2013-07-09 2017-05-01 東京威力科創股份有限公司 Substrate processing system, method of controlling substrate processing system, and storage medium
US9782807B2 (en) 2013-07-09 2017-10-10 Tokyo Electron Limited Substrate processing system, method for controlling substrate processing system, and storage medium

Also Published As

Publication number Publication date
CN1974027A (en) 2007-06-06
KR20070043642A (en) 2007-04-25
CN1974027B (en) 2012-06-13
TWI311500B (en) 2009-07-01
KR100845880B1 (en) 2008-07-14

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