TWI311500B - Apparatus for applying solution and method of measuring quantity of solution - Google Patents

Description

[Technical Field] The present invention relates to a method of measuring a solution applied to a substrate coating solution, measuring a solution amount supplied to the substrate, and a method of supplying a solution.

L·H Background Art For example, in the manufacturing process of a liquid crystal display device, there is a film forming process of forming a circuit pattern on a broken glass substrate. In the film formation process, a functional film such as an alignment film or a resist film is formed on the surface of the substrate. When a functional thin film is formed on a substrate, a coating apparatus which ejects a solution which forms the functional thin film from a nozzle and applies it to the ink jet method 15 of the substrate surface is used. The coating apparatus has a mounting table for transporting the substrate, and a plurality of coating heads are disposed above the mounting table in a direction perpendicularly intersecting the substrate conveying direction, and the nozzles are formed in the coating heads. In this manner, the solution ejected from the nozzles of the plurality of coating heads can be applied to the upper surface of the substrate to be conveyed at a predetermined interval in the conveying direction and in the direction intersecting the side. In each of the coating heads, a piezoelectric element is provided with respect to each nozzle via a flexible plate. When a voltage is applied to the piezoelectric element, the flexible plate can be deformed to supply the solution from the nozzle. However, even if the same voltage is applied to the piezoelectric elements of the respective coating heads, the 1311500 production accuracy or amount is different. As a result, the coating heads may still have different thicknesses due to the line resistance of the solution supply source, the combination precision, and the like, and the thickness of the functional film formed on the substrate may be uneven.

Therefore, in the past, the operator set the voltage applied to each head to a predetermined value of 5, and when a voltage is applied to each head, the solution supplied from the nozzle is received by the cup and used for coating and coating. The electronic scales at different positions of the apparatus measure the aforementioned supply amount, and then adjust the voltage applied to each coating head according to the measurement. The aforementioned adjustment needs to be performed before the coating device starts to operate or periodically. In the present invention, in recent years, the liquid crystal display device has a tendency to increase in size, and the substrate has also become large. After the substrate is gradually enlarged, the number of coating heads disposed on the coating device is also increased to, for example, 20 to 50 or more. 15 & After the number of coating heads is increased, the operator must carry out the work of receiving the solution supplied from each coating head with the cup body and measuring with the scale corresponding to the number of the coating heads, so that the burden on the operator becomes large, and production The problem of significantly reduced sex. ^ When a solution which forms a functional film such as an oriented film, for example, a polyphthalamide solution, an organic solvent is contained in the solution. The solution containing the solvent starts to absorb water after being ejected from the nozzle of the coating head, and the weight changes with time. Moreover, when the operator receives the solution supplied from the coating head with the cup and measures the weight by the scale installed at a different position from the coating device, it takes time from receiving/capacity to measuring the weight, so in this case In the case where the temperature cannot be as high as 1311500, the weight of the solution supplied from the coating head can be accurately measured. Further, if the scale is placed in a different place from the coating device, the environment where the weight of the solution is measured may be different from the environment such as the temperature or humidity at the place where the coating head is installed. At this time, even if the voltage applied to the coating head is set according to the measurement result, since the environmental difference is not taken into consideration, there is a case where the amount of the solution supplied from the coating head cannot be measured with high precision. π η 仏 仏 仏 杈 杈 杈 15 15 15 15 15 15 15 15 15 15 15 10 10 15 10 15 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 。 。 。 Solution to Problem The present invention relates to a coating device for a solution for supplying and coating a solution to a substrate, comprising: a plurality of nozzles arranged along a predetermined square & The substrate is supplied and coated with the solution; the mounting table is configured to mount the substrate thereon; and the first driving mechanism is configured such that the loading port and the coating head face in the direction of the pre-twisting direction Relatively moving; the scale is used to measure the weight of the solution supplied by the nozzle nozzle, and the driving mechanism is used to make the predetermined square stalk to the predetermined direction and the direction The direction of the 乂 is independent of ^ ^ for the case where the mover is placed. The invention system, the m type, and the measurement method are used for weighing. The plurality of sprayers arranged in the forward direction include the following steps: the amount of the solution to the substrate is 20; and the _4 scale is relatively moved relative to the nozzle in the predetermined direction to move in the predetermined direction, using the foregoing The solution supplied by the nozzles in sequence. And from the method of supplying the money, the method of setting a plurality of nozzles, and the method of "healing the solution" includes the following steps: only two nozzles simultaneously eject a droplet-like solution; In the plurality of droplets of the solution, the solution from i is finely corrected; and the weight of the droplet-like solution of the nozzle (4) is the same as the weight of each solution. Advantageous Effects of Invention The second embodiment is arranged to be movable in the predetermined direction and independently of the pre-w direction with respect to the mounting table by the amount of S. 'The above-mentioned scales are sequentially subjected to the solution supplied by each nozzle, and then: 'the position where the nozzle can be supplied to the substrate and the solution is applied. The weight of the button supplied by the pump is used. Use (iv) the ambient m solution weight. Further, since the scale can be independently moved with respect to the mounting table, even when the solution is supplied and applied to the substrate, the scale can be put in place from the sweat and > In this way, even when the solution is applied to the substrate, the scale can be maintained at the same position as the post-retraction. Therefore, the measurement accuracy of 1311500 degrees and work efficiency can be improved. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. 5 to 7 are views showing a first embodiment of the present invention, and the coating device used in the first and second figures of the present invention has a base having a rectangular parallelepiped shape at a predetermined position below the base 1. The legs 2 are respectively provided and the aforementioned base 1 is horizontally supported. As shown in Fig. 2, the shock plate 3 is provided along the longitudinal direction at 10 ends in the width direction of the upper surface of the base 1, and is respectively elongated along the width direction of the upper surface of the mounting plate 3. The direction is provided with a guiding member core, and the rectangular plate-shaped Χ σ 5 is slidably engaged and supported by the supporting member 6 by the two sides of the rectangular shape which are disposed in parallel in the width direction of the bottom surface thereof. The top. Further, on the X stage 5, a mounting table 15 7 smaller than the X stage 5 is provided. That is, the mounting table 7 can be moved in the X direction along the guiding member 4 by the X stage 5. As shown in Fig. 2, the guide member 4 is provided with a stator 4a, and the first bearing member 6 is provided with a mover 6a. In other words, the first linear motor 8 as the first drive mechanism can be formed by the stator 4a and the mover. 20 W is available as a glass substrate W for an active matrix type liquid crystal display device. The substrate W is mounted on the mounting table 7 and can be adsorbed and held by the mounting table 7 by vacuum adsorption or f-electrosorption. Therefore, the substrate W held by the mounting table 7 can be driven in the X direction by the opening port 5. A gate-shaped support body n spanning the pair of 1311500 guide members 4 is erected in the middle portion in the longitudinal direction of the base of the Persian base 1, and a mounting member composed of square columns is horizontally placed on the upper portions of both sides of the support body u. 12. The mounting member 12 is provided with a head unit 19 that is movable along the γ direction (indicated by an arrow in Fig. 2) in the driving direction of the cymbal 5, that is, in the X direction. A Y drive source 21 composed of a pulse motor is disposed on a side of the width direction of the support body 11, and the γ drive source 21 can drive the head load σ 19 in the γ direction. Alternatively, a linear motor can be used instead of the pulse motor. The stage 19 is driven in the γ direction. On one side of the head stage 19, a plurality of coated cloth heads 22 are disposed along the γ direction, and the coating heads 22 are ejected in a dot-like manner by an ink jet method to form a function such as an orientation film. A solution of the film (polyimine solution). In the present embodiment, two rows, for example, seven serrated coating heads 22 are disposed. As shown in Figs. 3 and 4, each of the coating heads 22 includes a head body. The head body 28 is formed in a cylindrical shape, and the lower surface opening of the body is closed by a flexible plate 29. The flexible plate 29 is covered by the mouthpiece 31, and a plurality of liquid chambers 32 are formed between the nozzle platen and the flexible plate 29. Each of the liquid chambers 32 is communicated to the main pipe 31A formed in the nozzle plate 31 through a branch pipe (not shown), and the solution is supplied from the main pipe 31Α to the respective liquid chambers 32 via the branch pipes. Further, the main pipe 31 is connected to a liquid supply hole 33 which will be described later, and the other end is connected to a recovery hole 37 which will be described later. The liquid supply hole 33 that communicates with the liquid to 32 is formed at one end portion in the longitudinal direction of the head body 28, and the solution of the 幵/successful film is supplied from the liquid supply hole 33 to the liquid chamber 32. In this way, the liquid chamber 32 can be filled with the solution. 1311500. As shown in Fig. 4, a plurality of nozzles 34 that are pierced are provided in the shape of the nozzle plate Μ in the direction of the conveyance side of the substrate W, i.e., in the direction of the ¥. As shown in Fig. 3, tf' is provided on the surface of the money flexible plate 29 with a plurality of piezoelectric elements 35 respectively opposed to the respective nozzles 34. 5 The voltage is supplied to each of the piezoelectric elements by the driving unit 36 provided in the head body 28 of the head. As a result, since the piezoelectric element 35 expands and contracts and the flexible plate 29 is partially deformed, the solution can be ejected from the nozzle 34 at the position opposite to the piezoelectric element % φ and applied to the substrate W to be transported. . Therefore, a coating pattern in which the dot-like solutions are arranged in a matrix form can be formed on the surface of the substrate W. Then, the respective coatings are flowed and expanded, and the coating patterns are adhered to each other to form an integrated film. Further, if the amount of operation of the piezoelectric element 35 is controlled by changing the voltage applied to the piezoelectric element 35, the droplet size of the solution ejected by the (four) 34 opposed to each piezoelectric element 35 can be changed. That is, the amount of the solution supply of the coating head 22 can be controlled. The recovery hole 37 connected to the liquid chamber 32 is formed at the other end in the longitudinal direction of the head (4), and the solution supplied from the liquid supply hole 33 to the liquid chamber 32 can be recovered by the recovery hole 37. That is, each of the heads 22 can not only discharge the solution supplied to the liquid chamber 32 from the nozzles 34, but can also be recovered from the recovery holes 37 via the liquid chamber 32. As shown in Fig. 5, the drive of the drive unit % provided in each of the coating heads 22 can be controlled by the control device 40. That is, for example, in a state where the coating head 22 is attached to the head stage 19, the control device 4A can recognize the X and Y coordinates of the respective nozzles 34 formed in the plurality of coating heads 22. In this way, the discharge position of the solution of the 1311500 substrate W along the aforementioned γ direction can be controlled. The control device 40 controls not only the driving unit 36 of each of the coating heads 22 but also the third motor 5 that drives the X stage 5 in the X direction, and the head stage 19 on which the coating head 22 is provided to be driven in the x direction. The γ drive source is driven by the continent. 5 As shown in the 'Old', at the 4-terminal end of the guiding member, there is an electronic scale 4, that is, 'at the end of the guiding member 4, and the second movable member 42 is provided at the opposite ends of the width direction of the second member. The second receiving members 43 (only i are shown in the drawing) are slidably engaged with the branch members in the respective guide members 4. The monthly electronic scale 4 can use an electromagnetic scale, which balances the weight of the measured object with the electric force of 1 ,, and detects the weight of the measured object by the current current; or uses the force measuring method. The scale is used to detect the weight of the object measured by a load converter (dynamometer) that outputs a signal corresponding to the weight. As shown in Fig. 7, the second receiving member 43 is provided with the movers 43a, 15 and the mover 43 is configured to form the second linear motor 44 together with the stator 4a provided in the guide member 4. The driving operation of the second linear motor 44 is controlled by the control device 4, so that the first movable member 42 can be driven along the guiding member 4 in the X direction. The second movable member 45 is movable on the upper surface of the first movable member 42 so as to be movable in the Y direction perpendicularly intersecting the X direction described above. Further, a γ drive source 46 composed of a pulse motor is provided at one end of the first moving member 42 in the longitudinal direction. By operating the γ drive source 46, the second movable member shirt can be driven in the Υ direction. The scale 41 is provided on the upper surface of the second movable member 45. In this way, 12 1311500 kinds of 41 can be driven in the X direction and the Y direction. In other words, the second driving unit 46 can be configured to form the second driving mechanism that drives the scale 4_ and the γ direction. The pressure receiving portion 47 of the scale 41 is placed on the upper surface and is openable and mountable

5 The cup 48 is removed, and the upper opening of the cup 38 is formed to be larger than the planar area of at least one coating head 22. In addition, in this embodiment, the upper opening of the cup 48 is sized to have a length dimension greater than the width dimension of the two coating heads 22 in the Χ direction and more than i coating heads in the Υ direction. In addition, the cup-shaped body 48 has a sufficient volume to store the solution supplied from the seven coating heads 22 when the solution supply amount of the coating head 22 described below is set. As described below, after the cup 48 receives the solution supplied from the coating head 22 and receives the solution in the cup 48, the scale 41 measures the weight of the solution through the pressure receiving portion 47, and the measurement signal is rotated to the foregoing. Control device 40. Φ compares the signal output from the scale 41 before the cup 48 is received by the cup and after receiving the solution. The control device 4 求出 determines the weight of the solution supplied to the cup 48 from the difference between the two. Then, compare The obtained solution weight is set to a previously set value ', and the voltage applied to the driving portion 36 2 of the coating head 22 is set in accordance with the comparison. In this way, the weight of the solution supplied from the coating head 22 can be controlled to a predetermined value. An L-shaped support member 49' attached to the second movable member 45 is provided on the side of the scale 41, and a rodless cylinder 51 is provided at the upper end of the support member 49. Further, one of the L-shaped connecting members 53 is attached to the slider 52 of the rodless cylinder 51, and 13 1311500 is attached to the other side of the connecting member 53 with a shutter 54. The link member 53 can be driven between the solid line indicated by the solid line and the position indicated by the broken line in Fig. 6 by the above-described rodless cylinder 51, thereby opening and closing the upper opening of the cup 48. Further, the shutter 54 is attached to the upper opening 5 of the cup 48 to have a slight gap. By driving the first movable member 42 in the X direction, the scale 41 can be positioned below the coating head 22 provided on the support 11. Further, by driving the second movable member 45 in the γ• direction, the scale 41 positioned below the coating head 22 can be positioned below one of the coating heads 22 of the plurality of coating heads 22. Further, by energizing the movers 6a and 43a at the same time, the X stage 5 and the scale 41 can be driven in the X direction. However, the first receiving member 6 that drives the platform 5 in the direction of the direction and the second receiving member 43 that drives the scale 41 in the X direction are disposed at different positions on the guiding member 4. Therefore, the X stage 5 and the scale 41 can be separately driven by the energization of the movers 6a and 43a of the first and second receiving members 6 and 43 by individual control. An operation panel 56 (see FIG. 5) is connected to the control device 4, and an operation key is provided in the operation panel 56, and the operation key is used to set a coating mode of the coating solution on the substrate W, and An adjustment mode or the like of the amount of solution discharged from each of the coating heads 36 is adjusted by the balance 41. 2〇 ++ By teaching the above-mentioned control device 4 to seven coating heads 36 and positions, the aforementioned scales can be positioned through the key operation of the operation panel 56 to sequentially face the respective coating heads 22. The teaching position of the scale γ in the γ direction is determined based on the detection signal detected by the position detector 57 output to the control unit 4〇. In the figure, although the position detector 57 is not shown in detail in the case of 14 1311500, for example, the position detector S7 (refer to the figure #) additionally provided to the second linear motor 44 and the Y drive source 46 are additionally provided. The signal input control device 40 generated by the position detector 57 (see Fig. 5) can detect the x direction and the gamma direction, respectively. 5 For example, the operator operates the second linear motor 44 and the cymbal drive source 46' via the key operation of the operation panel 56 to position the cup 48 of the scale 41 below the jth coating head 22 at the right end in Fig. 2 . Based on the signal output from the position detector 57, the control unit 40 can detect the position of the scale 41 at this time. Then, the position is memorized as a positioning position with respect to the scale 41 of the first coating head 22. The control device 40 calculates the positioning position of the scale 41 with respect to the second to seventh coating heads 22 based on the positioning position of the scale 41 with respect to the first coating head 22 and the arrangement interval of each of the known coating heads 22. Further, as described above, since the upper opening of the cup 48 is formed to have a length dimension of more than two coating heads 22 in the X direction, the scale of the teaching 15 with respect to the second to seventh coating heads 22 is taught. In the positioning position of 41, the center of the cup 48 may be placed in the middle of the coating head 22 arranged in a zigzag pattern. In this manner, the cup-shaped body 即可 can be sequentially positioned below each of the seven coating heads 22 by operating only the γ-drive source 46. Further, although it has been explained that the operator positions the positioning position of the scale 41 with respect to the second coating head 2 2 20, the control unit 40 calculates the positioning position with respect to the 枰 41 of the second to seventh coating heads 22, However, it is also possible for the operator to teach the position of the scale 41 relative to all of the coating heads 22. Further, the positioning position of the scale 41 with respect to all of the coating heads 22 can be calculated by the control device 4A based on the arrangement position information of the coating head 22. 15!3115 In the coating apparatus of the above-described structure, before the coating solution is evaluated on the substrate, or after the coating device has been operated for a predetermined time, the supply amount of the solution supplied from each coating head 22 is measured and set to be fixed. The amount of supply. When the supply amount of the solution ejected from the coating head 22 is set, the adjustment mode is transmitted through the key operation of the above-mentioned 5 operation © plate 56. When the adjustment mode is selected, as shown in Fig. 1, the mounting table 7 is driven in the X direction to the left end of the bottom of the figure, i.e., from the lower side of the coating head 22 mounted on the support u. Next, the scale 41 is positioned below the coating head of the support body according to the teaching position. First, the scale 41 is positioned below the second coating head 22 10 of the plurality of coating heads 22. After the scale 41 is positioned in the X direction, the shutter 54 is driven to open the upper surface of the cup 48, and then all the nozzles 34 of the first coating head 22 are set according to the setting conditions of the control device 4, that is, voltage, The voltage application time and the number of ejections are supplied to the cup 48. After the solution is supplied, the upper surface of the 15-cup 48 is closed by the shutter 54. In this way, since the solvent of the solution supplied to the cup 48 can be prevented from changing in weight after water absorption, the weight of the solution can be measured with the scale 41. Further, since the upper surface of the cup 48 is closed by the shutter 54, the liquid which is stored in the cup 48 can be prevented even if it is supplied from the upper side of the coating device such as the downward flowing ambient gas of the cleaning gas. The surface is corrugated. In this way, since the liquid level ripple can be prevented from causing the measurement signal of the scale 41 to change, even if the high-precision scale 41 is used, the solution weight can be accurately measured. Therefore, it is suitable for a coating device for a functional film, and in the above coating device, the droplet size of the solution ejected from the nozzle 34 is extremely small. 16 1311500 Next, after supplying the solution to the cup 48, the scale 41 will input the measurement signal of the solution weight into the control device 4〇. To put it more succinctly, in this embodiment, the internal control device 40 compares the measurement signal of the front door 41 with the shutter 54 opened and the measurement signal of the scale 4 after the solution is supplied to the cup 4 8 and the door 54 is closed. No. 5, and the weight of the solution supplied to the cup 48 was determined from the difference between the former two. Then, the weight of the obtained solution is compared with a previously set value, and it is judged whether or not the measured solution weight is within the allowable range of the set value, that is, whether the target supply amount is obtained or not. If the measured value is within the allowable value, it is judged that the supply amount of the first coating head 22 is good. 10 If the measured value is not within the allowable value, it is judged as defective, and the difference between the measured value and the set value is obtained. Then, the ejection conditions are adjusted to remove the difference between the aforementioned measured value and the set value. The above adjustment is performed by increasing the voltage applied to the piezoelectric element 35 provided to be opposed to each nozzle 34. For example, when the difference between the measured value and the set value is D, the number of ejections is N, and the number of nozzles 15 of the coating head 22 is n, the equation of "W=D/(N·η) can be used. The solution of the number of times of ejection and the solution of each nozzle 34 are "when". Then, the voltage applied to the piezoelectric element 35 is set so that "w is 〇 or within an allowable range. In this case, since the relationship between the voltage and the supply amount of the solution 20 ejected from the nozzle 34 can be obtained in advance, the voltage applied to the piezoelectric element 35 can be set. After the adjustment of the first coating head 22 is completed as described above, the supply amount of the solution of the coating head 22 is measured again, and it is confirmed whether or not the target supply amount is obtained. Then, if the target supply amount is available, it is judged to be good, and if the target supply amount is not obtained, the above adjustment is repeated. 17 1311500 Further, if the upper limit of the number of adjustments is set, if the target supply amount cannot be obtained by the upper limit of the number of adjustments, the information indicating the coating head 22 can be indicated on the operation panel by the coating job horse or the like, and the operator is notified ^ Law adjustment. It is not possible to adjust _ ' attention to whether it is, for example, the coating head 22; 5 34 blockage or the like. In this way, since the operator confirms that the coating surface 22 is (4) abnormal when it is OK, it is confirmed that the cleaning nozzle 34 or the coating head 22 is replaced.

As mentioned, at the end of the! After the adjustment operation of the coating heads 22, the second to seventh coating adjustment solutions were supplied sequentially for 10 miles from the right side. Then, after the adjustment of all the coating heads a is completed, the aforementioned result is displayed on the operation panel 56, and (4) is moved to the standby position at the right end in the 第 direction of the i-th diagram. In addition, since the control device 40 determines the weight of the solution supplied to the cup 48 from the difference between the supply solution and the measurement signal after the front plate of the cup 48, it is not necessary to remove each measurement. The solution supplied to the cup body 48 can efficiently set the solution supply amount of the coating head 22 at night. The upper limit of the number of times the solution is continuously supplied before the cup 48 is filled in advance is set in the memory unit (not shown) of the control device 4 G, i poor ~ Θ 丹 each time When the supply of the solution to the one coating head 22 is completed, the number of measurement times is calculated by the control device, and when the calculated value reaches the upper limit value, the riding field, , & will be used to clear the cup 48 as it is awake. The alarm for the inner solution is displayed on panel 56. 4, w can also be measured in advance without overflowing the upper limit of the weight of the cold liquid that can be stored in the cup and set in the memory unit 18 1311500 (not shown) of the control device 4 'reuse control device 40 compares the actual weight and weight upper limit of the solution in the cup 48, and interrupts the setting of the solution supply amount when the actual weight reaches the upper limit of the weight, and displays an alarm for reminding to clear the solution in the cup 48. The operation panel 56. 5 In addition, the control device 40 can also compare the actual weight and the upper limit of the weight of the solution in the cup 48 under the condition that the adjustment mode has been selected. At this time, the control device 40 determines whether there is a difference between the actual weight and the upper limit of the weight when the solution supply amount is set with respect to the seven coating heads 22, and the difference is the total amount of the solution which is allowed to be supplied to the cup 48. (The following 10 is called "setting the amount of solution required"). Then, the solution supply amount is set when it is judged that the difference is present, and the solution supply amount is not set when it is judged that there is no such difference, and an alarm for promptly clearing the solution in the cup 48 is displayed on the operation panel %. Further, when the above determination is not made and the difference between the actual 15 weight of the solution in the cup 48 and the upper limit of the weight is less than twice the amount of the solution required for setting, the control device 40 ends the supply of the solution. At the time of setting, an alarm for prompting the removal of the solution in the cup 48 is displayed on the operation panel 56. According to the above operation, when the solution for applying the counter substrate is applied according to the selection of the coating mode after the solution supply amount is set, since the solution in the cup 48 of the scale 41 at the position of the shaft 2 can be removed, the adjustment mode is adopted. No. The solution supply amount is interrupted to remove the solution in the cup 48, and the solution supply amount can be set at a drinking rate. > Further, the control device 40 can obtain the actual 19 1311500 weight of the solution in the cup 48 from the difference between the measurement π of the scale 41 and the measurement signal of the scale 41 at the time of the clearance in the cup 48. As described above, according to the coating apparatus of the above configuration, since the weight of the solution supplied from the plurality of coating heads 22 can be automatically measured and corrected in order, the efficiency can be improved even if the substrate W is enlarged and the number of the coating heads 22 is increased. The solution supply amount of each coating head 22 is set well. Moreover, since the scale 41 can be driven in the X and Y directions and positioned below the coating head 22, the weight of the solution supplied from the coating head 22 to the cup 48 placed on the scale 41 can be measured immediately, and the shutter can be utilized. 54 closes the cup 48 of the supplied solution. Therefore, the weight of the solution supplied from the coating head 22 can be measured by the fact that the solvent contained in the solution absorbs water and changes its weight, so that the measurement accuracy can be improved. Further, since the scale 41 can be driven in the X and γ directions, the weight of the solution supplied from each of the coating heads 22 can be measured at substantially the same position as that at which the coating head 22 is provided. That is, the amount of the solution and the corrected supply amount can be measured in the same environment as the environment in which the solution is actually used, so that the supply amount of the solution of each of the coating heads 22 can be accurately set. Moreover, since the control device 40 can correctly position the scale 41 at the position corresponding to each of the coating heads 22 so that the scales 41 are sequentially positioned to teach the squatting position, the cup 48 can reliably receive the supply of the coating head 22. Solution, and the weight of the supplied solution can be measured correctly. Further, since the scale 41 is moved and positioned at a position corresponding to each of the coating heads 22, the solution supply amount of the plurality of coating heads 22 can be set by one scale 41, so that the apparatus structure can be simplified. The second linear motor 44 moves the scale 41 in the other direction independently of the mounting table 7 that is moved by the first line 20 1311500 motor 8 and, when applying the solution to the substrate w, as shown in Fig. 1 The standby position at the right end of the X direction is standby. Therefore, even when the solution is applied to the substrate W, the maintenance inspection of the scale W by removing the solution stored in the cup 48 of the scale 41 can be simultaneously performed. In this way, it is possible to prevent the operation of the substrate (four) cloth solution from being interrupted to remove the solution in the cup body 48, and the operation of the substrate to the coating solution can be performed efficiently. In the first embodiment, the coating apparatus is applied by coating the substrate 22 once, but the substrate w may be applied a plurality of times. Further, when the substrate W is passed through a plurality of times, the head stage 19 is moved by the γ driving source every time it passes, and the coating head 22 is moved to the nozzle 34 every time, for example, in the γ-axis direction (the direction in which the nozzles 34 are arranged). One-half, etc., in the case of pitch transportation, the solution supply amount of each coating head 2 15 may be set at each position where the pitch is transported. In this way, since the solution supply amount can be set in an environment compatible with the environment (temperature, humidity, or the bending state of the solution supply tube of the coating head 22) of the actual use solution, it is more correct when the solution is actually applied. The ground weight is now determined to supply the solution. Therefore, the coating accuracy of the solution 20 for the substrate w can be improved, and the uniformity of the thickness of the formed functional film can be further improved. In the first embodiment, although the substrate is positioned relative to the pre-twisted position. The case where the coating head is driven in the X direction will be described as an example, but the coating head may be driven in the X direction to apply a solution to the substrate. 21 i3ll5〇〇 The weight of the solution is measured for each of the coating heads, and for each nozzle of the coating head. As a result, the present invention is not limited to the right/multiple coating head coating device, and can also be used as a coating device for a single coating. Further, in this case, the plurality of nozzles are configured to be Η _ ' and the supply of each of the measurement solutions is set to 0 _ in addition, the control device can be used to determine the χ and γ coordinates of the identified nozzles. The position of the scale relative to the nozzle. Further, the operator can move the scale through the operation panel to teach the positioning position with respect to each nozzle or each nozzle group. When the supply amount of the solution to the coating head is different from the set value, the supply amount can be adjusted repeatedly, but an alarm can be issued. The operator checks the abnormal coating head accordingly, that is, whether or not the solution is ejected from all the nozzles of the abnormal coating head. Then, after the abnormality is removed, the supply amount of the solution head of the coating head can be measured again. Further, although an example in which one scale 41 is provided has been described, a plurality of scales 41 may be provided. Since the number of the coating heads 22 corresponding to one scale 41 can be reduced by providing a plurality of scales 41, the time for setting the solution supply amount of the coating head 22 can be shortened, and the work can be performed more efficiently. Further, although the coating head of the ink jet method is used as the coating head 22, other types of coating heads such as a piston type or a gas pressure type coating head may be used. Further, although the substrate 7 can be transported by the movable mounting table 7, the mounting table 7 can have a transport mechanism such as a transport mechanism, and the substrate can be transported on the mounting table 7. Further, when the weight of the solution supplied from the coating head 22 is measured, the crucible 41 is moved in the X and γ directions, but (4) can be moved only in the X direction, and the coating head 22 can be independently moved in the Y direction. 5 Next, a second embodiment of the present invention will be described with reference to Figs. 8 to 11 . The solution applying device of Fig. 8 has a base 1 〇, and a pair of divided guides 102 are provided in parallel on the base 1 〇 1 at predetermined intervals in a predetermined direction. A movable mounting table 1〇3 is provided on the guide rail 1〇2, and the mounting table 10〇3 is driven by a driving source such as a linear motor, which is not shown, and the driving direction is in FIG. The direction of the arrow indicated by the arrow. Further, a glass substrate W used for, for example, a liquid crystal display device can be supplied onto the mounting table 103, and can be adsorbed and supported by an electrostatic chuck or vacuum suction. In the middle of the X direction of the base 101, the pillars 104 are erected at both ends of the Y direction perpendicularly intersecting the X direction 15, and are disposed on the side of one of the pair of pillars 104 and the other side along the Y direction. Two sheets of ampoule plates 1〇5, and the mounting plates 105 are opposed at predetermined intervals with respect to the X direction. The inner faces of the respective mounting plates 1〇5 are respectively fixed in a plurality, and in this embodiment, four coating heads 22 are provided. That is, a total of eight coating heads 22 are provided in a zigzag shape on the inner surface of the two mounting plates 105. 2, the respective coating heads 22 have the same structures as those of the third embodiment and the fourth embodiment in the first embodiment, and the same reference numerals are given to the same portions, and the description thereof will be omitted. The measurement table 102 is provided in the guide 102, and the measurement table 125 can be driven in the X direction by a driving source such as a linear motor (not shown) similarly to the mounting table 103, and can be individually driven with respect to the mounting table 103. . Further, 23 1311500, the first movable body 126 and the second movable body 127 which are movable in the longitudinal direction of the measurement table 125, that is, in the Y direction, are provided on the measurement table 125, and the first and second movable bodies are provided. The bodies 126 and 127 can be individually driven in the Y direction by, for example, a driving source not shown, such as a linear motor. In the first and second movable bodies 126 and 127, the placing portions 126a and 127a and the downloading portions 126b and 127b are provided at predetermined intervals in the vertical direction. Further, the mounting portions 126a and 127a are provided with a rectangular shielding member 128, and the downloading portions 126b and 127b are provided with an electronic scale (hereinafter referred to as "electronic balance") 129. As shown in Figs. 10A and 10B, the shielding member 128 is formed with a rectangular concave liquid storage portion 131 that opens upward. Further, the liquid storage portion 131 is provided with a conical convex portion 133 at an intermediate portion in the γ direction of one end in the X direction, and the convex portion 133 is formed with a through hole 132 penetrating in the thick direction. The passage hole 132 is sized to allow passage of a droplet-like solution ejected by one of the 15 nozzles of the coating head 22. For example, after the coating head 22 is formed with the nozzles 34 having the diameter 〇1〇1111 at intervals of 1 mm, the diameter of the through holes 132 is formed to be, for example, 0.2 to 0.4 mm. As a result, even if the solution is simultaneously ejected from the plurality of nozzles 34 of the coating head 22 of FIGS. 3 and 4, only the solution ejected with respect to the nozzles 30 passing through the holes 132 can pass through the through holes 132. The solution ejected from the other nozzles 34 is stored in the liquid storage unit 131. Since the through hole 132 is formed in the convex portion 133', the solution stored in the liquid storage portion ι31 can be prevented from flowing into the through hole 132. The size of the liquid storage portion 131 in the Y direction is set to 24 1311500 2 times or more along the length dimension of the nozzle 34 of the coating head 22 in the γ direction. Thus, even in a state where the through hole 132 is opposed to the nozzle 34 located at the end of the coating head 22 in the direction of γ, the solution L' is ejected from all the nozzles 34 of the coating head 22 from the nozzle 34 opposed to the passage hole 132. The solution sprayed from the nozzle 34 can also be discharged to the liquid storage portion 131. The solution passing through the aforementioned passage hole 132 is dropped to the receiving portion 129a of the aforementioned electronic balance 129 (shown in Fig. 9). Therefore, even if the solution is simultaneously ejected from the plurality of nozzles 34, the weight of the solution ejected by only one nozzle 34 can be measured by the aforementioned electronic balance 29. Here, similarly to the cup-shaped body 48 of the first embodiment, the 10 receiving portion 129a is formed in a disk shape. On the upper surface of the shielding member 128, a pair of first sensors 134 are provided along one side in the γ direction, and a second sensor 135 is provided as a positioning sensor along one side in the X direction. Further, the first and second sensors 134 and 135 are, for example, reflective light sensors having an illumination unit and a light receiving unit, and are used to detect when the shielding member 15 128 is driven below the coating head 22 One side of the coating head 22 in the γ direction and one side along the X direction. As a result, the first and second movable bodies 126 and 127 can be positioned in the X and Y directions with respect to the coating head 22. A liquid discharge hole 136 is formed at a predetermined size from the aforementioned passage hole 132 of the liquid storage portion 131, and as shown in Fig. 10, the liquid discharge hole 12620 is connected to the liquid discharge pipe 137. In this manner, the solution 1 that has never been ejected from the nozzle 34 opposed to the through hole 132 to the liquid reservoir 131 can be discharged through the drain 137. Further, at one end in the γ direction of the liquid storage portion 131, a cleaning member 139 is provided along the X direction at a height protruding upward from the upper opening of the liquid storage portion 131, and the cleaning member 139 is made of an elastic material such as rubber. Formed as a wing. After the first and second movable bodies 126 and 127 are driven from the lower side of the coating head 22 in the γ direction, the opening surface of the nozzle 34, that is, the lower surface of the coating head 22, can be wiped through the cleaning member 139. In this way, the solution L attached to the underside of the head 22 can be removed. Further, the solution L removed from the coating head 22 is stored in the liquid storage portion 131 along the cleaning member 139, and is discharged through the liquid discharge tube 137. The πth diagram is a control circuit diagram of the solution supply device' and 171 in the same figure is a control device. The control device 171 can control the head control unit 172 and the nozzle control unit 173' and simultaneously emit signals based on the first and second sensors 134 and 135 provided in the first and second movable bodies 126 and 12710. Will be the first! The second movable bodies 126 and 127 are positioned and driven in the X and Y directions, and the through holes 132 provided in the shielding member 128 are sequentially placed at positions relative to the plurality of nozzles 34 provided on the head 22. The control units 172 and 173 output the driving signals to the main unit 174 based on the detection signals from the encoders (not shown), and the encoders can detect the X and Y coordinates of the mounting table 103. The main unit 174 has a first CPU 175, a first transceiver 176, and a power supply 177 for supplying a DC voltage of 24 V, and controls the injection of the solution L from the nozzles 34 of the plurality of coating heads 22. The drive circuit portion 36 is provided in each of the coating heads 22, and the second CPU 182 is provided in the drive circuit 20 portion 36. The synchronization pulse generated by the first CPU 175 is input to the second CPU 182, and the drive signal generated by the nozzle control unit 173 is input to the second transceiver 183 that communicates with the first transceiver 176. The 26th 1311500 1CPU 175 can be controlled by the control device 171 and the coating head described above with respect to the complex pulse signal generated by the X encoder not shown, and the X encoder is based on the X-direction movement amount of the table 103. The unit 172 outputs one synchronization pulse to the second CPU 182. The second CPU 182 is connected to a memory 184 that stores coated materials. Since the synchronization pulse signal generated by the first CPU 175 is input to the second CPU 182 of the drive circuit unit 36, the coating data can be read from the second CPU 175. The coating data read by the second CPU 175 is output to the serial parallel data conversion unit 185. The tandem parallel data conversion unit 185 is connected to the first transformer unit 186. The first transformer unit 186 converts the 24V voltage generated by the power source 177 of the first unit 174 to 0 to 90 V according to the voltage command generated by the second CPU 182, and outputs the voltage to the parallel data conversion unit. 185. Further, the tandem parallel data conversion unit 185 is connected to the plurality of piezoelectric elements 35 provided in the respective coating heads 22. After the synchronization signal is input from the first CPU 175 to the second CPU 182, the vibration signal is output from the second CPU 182 to the tandem parallel data conversion unit 185. In this manner, since the voltage generated by the first transformer unit 186 is applied to the predetermined piezoelectric element 35 based on the coating data of the memory 184, the solution is ejected from the nozzle 34 corresponding to the piezoelectric element 35. Next, the order of setting the amount of solution discharge of the nozzles 34 of each of the coating heads 22 provided in the coating apparatus of the above-described configuration will be described. When the solution is applied to the substrate W, the mounting table 103 on which the substrate w is placed is moved from the solid line position in Fig. 8 to the broken line position in the 乂 direction. Then, when the substrate ... passes under the coating head 22, the nozzles 34 of the respective coating heads 22 eject the solution. When the amount of solution discharge from the nozzle 34 is measured and set, as shown by the solid line in Fig. 8 27 1311500, first, the mounting table 103 is retracted from the lower side of the coating head 22, and the measuring table 125 is turned toward the X direction. The driving is such that the second movable bodies 126 and 127 are located below the different coating heads 22, respectively. After the first and second movable bodies 126 and 127 are positioned below the coating head 22, the control device 171 first drives the measuring table 125 to be placed on each of the movable bodies 126 and 127, that is, the first member of the shielding member 128. The sensor 134 moves within a predetermined range toward the X direction. According to the output signal of the first sensor 134 in the movement and the output signal of the position measuring device (not shown) attached to the measuring table 125, the control device 171 can detect the coating head 22 along the Y-direction 10 The position on the right side of the illustration. After the end position of the coating head 22 in the Y direction is obtained, each of the movers 126 and 127 is driven to move the second sensor 135 provided in the shield member 128 in the Y direction within a predetermined range. According to the output signal of the second sensor 135 in the movement and the output signal 'control device 171 attached to the position of each of the movers 126 and 127, which is not shown, the control unit 171 can detect the direction of the coating head 22 along the X direction. The position of the upper end is shown. Then, from the position of the end portion in the X direction and the position of the end portion in the γ direction of each of the obtained coating heads 22, the control device 171 can determine the positional relationship between the coating head 22 and each of the movable bodies 126 and 127. Since the position information of each nozzle 34 in the coating head 22 and the position information of the through hole 132 in the shielding member 128 can be known from the design data, the control device 171 can obtain the aforementioned known position information and the aforementioned The positional relationship between the coating head 22 and the movable bodies 126 and 127 is obtained, and the relative positions of the nozzles 34 and the passage holes 132 are obtained. 28 1311500 The first and second movable bodies 126 and 127 can be positioned by the control device 171 according to the relative position of each nozzle 34 and the through hole 132 obtained as described above to sequentially pass the through holes 132 provided in the different shielding members 128. 37 nozzles 34 relative to each head 22. Further, two first sensors 134 are provided on the shielding member 128 in the Y direction. In this way, since the inclination angle of the coating head 22 with respect to the X direction can be detected by the two first sensors 134, the position of the coating head 22 can be recognized with higher precision. After the passage hole 132 is aligned with one of the 37 nozzles 34 of the head 22, the 37 nozzles 34 of the head 22 simultaneously eject the solution. Then, only the solution ejected from one nozzle 34 with respect to the passage hole 132 passes through the aforementioned passage hole 13 and is dropped to the receiving portion 12 of the electronic balance 129, and the weight is measured. The weight of the measured solution is input to the control unit 171 and memorized in the memory portion of the figure, and the first nozzle 34 is taken as the first nozzle %. Further, the control device 171 can calculate the weight of the solution falling from the first nozzle to the receiving portion (10) from the difference between the output value of the solution before the discharge of the first nozzle and the output value of the #t subbalance 129 after the discharge. For example, after each nozzle 34 ejects 1000 droplets, 1000 drops of the solution are dropped onto the receiving portion 129a. On the other hand, the control unit 171 obtains the output value of the good balance 129 before and after the droplet drop, and (4) divides the difference by the value of the coffee as the weight of the droplet of the U droplet ejected from the i-th nozzle 34. Then, the weight of the one drop is memorized in the memory of the control device 171. Further, the solution ejected from the 36 nozzles other than the i nozzles 34 opposed to the through holes 132 is ejected to the liquid reservoir portion (3) of the shield member 128, and the liquid transfer tube is discharged from the liquid reservoir portion 131 via the ship hole 136. 29 1311500 Next, the first and second movable bodies 126 and 127 are driven to face the second nozzle 34 through the hole 132, and the solution is simultaneously ejected from the 37 nozzles 34 of the head 22. As such, only the solution ejected from the second nozzle 34 passes through the aforementioned passage hole 132 and is measured by the electronic balance 129. Hereinafter, the weight of the solution ejected from the nozzles 34 to 37 in the third step 37 is measured by the same procedure. In this manner, after measuring the weights of the solutions ejected from the 37 nozzles 34 of each of the coating heads 22, the weights of the weights and the target values are compared by a comparison unit not shown in the control unit 171. When the difference in weight between the solutions ejected from the respective nozzles 34 exceeds the allowable value with respect to the target weight, the output is output to the second CPU 182. The aforementioned target weight has been previously stored in the memory portion of the control device 171 not shown. Therefore, in order to make the solution discharged from each nozzle 34 within the allowable value of the target weight, the second CPU 182 controls the piezoelectric element 35 applied from the first transformation unit 186 to the respective nozzles 34 via the tandem parallel data conversion unit 185. Voltage 15 value or voltage pulse width. For example, when the voltage value applied to the piezoelectric element 35 is controlled to adjust the amount of the solution ejected from the nozzle 34, the voltage correction amount is previously stored in the memory unit 184 of the second CPU 182. Then, when the difference in the weight of the solution transmitted by the control device 171 is positive (the measured weight is greater than the target weight), since the amount of discharge must be reduced by 2, the second CPU 182 controls the first pressure changing portion 185 to be applied to The voltage value of the piezoelectric element 35 is only reduced by the voltage correction amount. On the other hand, when the difference in the weight of the solution is negative (the measured weight is smaller than the target weight), since the discharge amount must be increased, the second CPU 182 controls the first pressure changing portion 185 so that the voltage value applied to the piezoelectric element 35 is increased only. Voltage correction amount. 30 1311500 As described above, after correcting the amount of solution ejected from each nozzle 34, the weight of the solution ejected from each nozzle 34 is again measured by the control device 171 in the same manner as described above, and compared with the target weight. As a result of the comparison, if the weight of the solution ejected from all the nozzles 34 is within the allowable value of the target weight, the adjustment is completed, and if the allowable value is exceeded, the adjustment is repeated until the weight of the solution ejected from all the nozzles 34 is at the target weight. Within the value. In the same manner, the operation of setting the discharge amount to the other coating heads 22 by the transmission control device 171 is similarly performed after the operation of setting the discharge amount for each of the nozzles 34 of the one coating head 22 is completed. 10 As described above, according to the present embodiment, the solution can be simultaneously ejected from all of the plurality of nozzles 34 disposed in one coating head 22, and at this time, only one nozzle 34 with respect to the passage hole 132 of the shielding member 128 is allowed. The ejected solution [measured by the aforementioned through hole 132' and then measured by the electronic balance 129", and the aforementioned measurement was performed on the 37 nozzles 34 of the coating head 22 in sequence. Since the setting of the solution supply is performed for each of the nozzles 34, it is possible to suppress the difference in the amount of solution ejected from each of the nozzles 34 of the coating head 22. Therefore, the amount of solution sprayed from each of the nozzles 34 can be uniformized, and the thickness of the formed functional film can be made more uniform. For example, since the weight of the solution ejected from each nozzle 34 can be measured under the same conditions as when the solution is actually applied to the substrate W, the weight of the solution sprayed by each nozzle 34 is set according to the measurement. When the solution is applied to the substrate, the weight of the solution (four) which is opposed to each nozzle is set, that is, the functional film of the desired thickness can be formed for the substrate. 31 1311500 A cleaning member 139 is provided in the shielding member 128 along the X direction. Therefore, when the first and second movers 126 and 127 are driven in the Y direction below the coating head 22 to measure the weight of the solution ejected from each nozzle 34, the tip end portion T of the cleaning member 139 rubs the lower side of the coating head 22. Moving, the solution attached to the open face of the nozzle 534 can be removed. For example, in the setting operation of measuring the amount of solution discharge of the nozzle 34 to perform setting, the movable body 126 and 127 are reciprocated in the Y direction to wipe the coating head 22 after the setting of one nozzle 34 is completed. The whole face below. In addition, at this time, the mounting units 10 126a and 127a are movable up and down with respect to the movable bodies 126 and 127 by a driving device such as a pneumatic cylinder (not shown), and the loading unit 126a is moved during the reciprocating movement. The 127a is moved toward the rising end to position the upper end of the cleaning member 139 to the wiping position under the contactable coating head 22, and, at the time of the double movement, the loading portions 126a, 127a are moved toward the lower end to position the upper end of the cleaning member 139 to It does not touch the standby 15 position below the coating head 22. It can be seen that when the solution is repeatedly ejected from the nozzle 34, the solution adheres to the underside of the coating head 22, and after the amount of solution adhesion gradually increases, the solution causes the nozzle 34 to be clogged, preventing the nozzle 34 from ejecting the solution. Therefore, as described above, in the setting operation of the discharge amount, the cleaning of the coating head 22 by the cleaning member 139 can prevent the solution adhering to the underside of the coating head from blocking the nozzle 34, so that the measurement can be performed more accurately. The discharge amount of each nozzle 34 is set. Further, since the weight of the solution ejected from each nozzle 34 is directly measured by the electronic balance, the discharge amount can be accurately measured, and the amount of discharge of each of the 32 1311500 nozzles 34 can be accurately matched with the required discharge amount. As a result, the coating solution can be applied in a uniform coating amount at the time of the relative coating solution, and a functional film having a thickness of a non-uniform portion can be formed. In the description of the embodiment, although in the measurement platform There are two - (at the same time) measuring the weight of the solution ejected from the nozzles of the two heads, but not limited to the number of movable bodies placed on the table, one or more than one. Although the setting is made such that the weight of the solution ejected by each nozzle % is the same 'but it can be set so that the weight of the solution of each nozzle 34 is different. In addition, although the solution is simultaneously taken out from all the nozzles by the side, the amount is from the respective The example of the weight of the solution sprayed from the nozzle 34 will be described. However, after stopping the discharge of the solution from a part of the nozzles 34 of all the nozzles 34, the liquid weight i can be measured, and the function of forming the substrate W in this time can be measured. In the pattern of the thin film, when only the solution is ejected from the 30 nozzles 34 of the 37 nozzles 34 of the head 22, the solution is simultaneously discharged from the 30 nozzles 34, and the measurement points I5 are not from the 30 nozzles 34. The weight of the sprayed solution. Even in this case Next, the weight of the solution ejected from each nozzle 34 can be measured while ejecting the solution from all the nozzles 34 used when the solution is actually applied to the substrate w. Thus, the amount of solution ejected according to the measurement is adjusted. The actual coating amount is the same, and the quality of the formed functional film can be improved. -0 In addition, although the case where the through hole 132 is provided in the rectangular plate-shaped shielding member 129 as the shield bonding key has been described, the most important one is Since only the solution discharged from one nozzle 34 is allowed to pass, for example, two rectangular plates may be arranged at intervals of allowing only the solution discharged from one nozzle 34 to pass, and the remaining nozzles may be taken by any one of two rectangular plates. 34. Dissolved 33 1311500 liquid. Further, although the weight of the droplets ejected from the nozzle 34 is calculated by taking the weight of the droplets of 1000 drops as an example, the number of droplets for measuring the weight is not limited to 1000 drops. It is also possible to use one drop, and it is also possible to compare the weight of 5 drops of one drop with the target weight, but it is also possible to compare the weight of multiple drops of 1000 drops or the like. The first embodiment is a front view showing the schematic structure of the first embodiment of the present invention. FIG. 2 is a front view of the coating device shown in FIG. Fig. 3 is a longitudinal sectional view of the coating head. Fig. 4 is a view showing the underside of the coating head in which the nozzle is formed. Fig. 5 is a block diagram showing the control system. Fig. 6 is a plan view of the scale. 7 is a front view of a scale provided on a guide member. Fig. 8 is a front view showing a schematic structure of a coating apparatus according to a second embodiment of the present invention. Fig. 9 is a side view of the coating apparatus shown in Fig. 8. Fig. 10A is a plan view of the shielding member. 20 Fig. 10B is a cross-sectional view taken along line AA of the shielding member shown in Fig. 10A. Figure 11 is a control circuit diagram for ejecting the nozzle of the coating head from the solution. 34 1311500 [Description of main component symbols] 卜101···Base 36...Drive unit 2...Seats 37"·Recovery holes 3,105··· Mounting plates 40, 17l···Control device 4... Guide member 4l·. Scale 4a... stator 4... first movable member 5... X stage 43... second receiving member 6... first receiving member 44... second linear motor 6a, 43a... mover 45... second movable member 7, 103 ...mounting table 46...Y driving source 8...first linear motor 47...pressure receiving portion ll···door type building body 48...cup body 12...mounting member 49...abutment member 19...head carrier 51...no Rod cylinder 21...Y drive source 52...slider 22...application head 53...connection member 28...head body 54...bank 29...flexible plate 56...operation panel 31·. nozzle plate 57...position detector 31A...supervisor 102...guide rail 32...liquid chamber 104...pillar 33...feeding liquid 125...measuring table 34...nozzle 126...first movable body 35...piezoelectric element 127...second movable body 35 1311500 126a, 127a”·upper part 126b, 127b... downloading portion 128...shading member 129...electronic balance 129a". receiving portion 131...liquid storage portion 132&quo t;·through hole 133...convex portion 134···first sensor 135···second sensor 136...drain hole 137...drain tube 139" cleaning cake 172...head controller 173...nozzle Controller 174...main unit 175 ...first CPU 176...first transceiver 177...power supply 182 ...second CPU 183...second transceiver 184...memory 185...serial parallel data conversion unit 186...first transformer unit W··. New 36

Claims (1)

1311500 X. Patent Application Range: 1. A coating device for a solution, comprising: a nozzle for supplying and coating a solution on a substrate, which is disposed along a predetermined direction and can be supplied to the substrate and coated before a immersed solution; a mounting table on which the substrate can be placed; a first: a moving mechanism ′ is configured such that the mounting table and the coating head move in a direction opposite to a predetermined direction of the month, And measuring a weight of the solution supplied by the nozzle; 10 and a second driving mechanism, wherein the scale is moved independently of the mounting table in the direction of the weir and the direction of the forward direction By. 2. The coating I of the solution of the first aspect of the patent of claim 4, further comprising a guiding member disposed along a direction parallel to the predetermined direction, and wherein the guiding member is provided with the movable mounting table And the first movable member, the first movable member is provided with a second movable member 'movable along the predetermined direction, and the second movable member is provided with the scale. 3. The coating apparatus of the solution of claim 1, wherein the scale has a cup-shaped body for receiving a solution supplied from the nozzle, and the opening of the cup is opened through the shutter. The coating device of the solution according to claim 1 of the patent scope of the invention further has a control mechanism, and the β-hai control mechanism can sequentially position the scales corresponding to the foregoing according to the position information of the aforementioned pre-twisting direction of the plurality of nozzles. 37 1311500 Position of the nozzle. 5. The coating device of the solution of claim 4, further comprising a plurality of coating heads arranged in the predetermined direction, wherein the nozzles are provided in the coating head, and wherein the control mechanism is applicable to the plurality of coating heads. In the position information of the predetermined direction, the scales are sequentially positioned to correspond to the positions of the respective coating heads. 6. The coating device of the solution of claim 1, further comprising a shielding member, and the shielding member is disposed to be positionable under the nozzle, 10 and only allows a plurality of droplets to be simultaneously ejected at the repetitive nozzle In the case where the solution ejected by one nozzle passes, the scale is used to measure the weight of the solution passing through the shielding member. 7. The coating device of the solution of claim 1 is further provided with a control mechanism, and the control mechanism can be set according to the above measurement so that the weight of the solution ejected by each of the nozzles is the same. 8. The coating device of the solution of claim 6 further comprising a base, and the guide rail is disposed on the base, and the guide rail can guide the table to move in the predetermined direction, and the shielding member and the measuring mechanism The 20 series is arranged to be guided by the aforementioned guide rail to move in the predetermined direction, and is movable in a direction crossing the predetermined direction. 9. The coating device of the solution of claim 6, wherein the shielding member is provided with a positioning sensor, and the positioning sensor can detect the predetermined direction and a position intersecting the predetermined direction, and The aforementioned 38 1311500 shielding member can be detected by the _ _ _ _ (4), the material positioning. The coating device of the solution of claim 6, wherein the shielding member is further provided with a cleaning member, and the cleaning member is immersed under the nozzle to face the predetermined direction Further, when moving, cleaning (4) the solution of the nozzle opening σ surface. The coating device of the solution of claim 6, wherein the shielding member forms a new storage portion for storing the solution, and the The liquid storage portion is connected to a drain pipe for discharging the aforementioned solution. " 1〇12.- A coating device for a solution, which can supply and apply a solution to a substrate, and includes: a plurality of nozzles, which are disposed in the direction of m-coin and which can supply (4) the substrate to the substrate and apply the solution; 15 The first drive mechanism is configured to move the mounting table and the coating head in a direction opposite to the predetermined direction; the scale is used to measure the nozzle The weight of the supplied solution; and > the second drive mechanism' is for moving the scale to move relative to the mounting table independently of the direction in which the applicator is approaching. The method for measuring the amount of the linger liquid L is to measure the amount of the solution supplied to the substrate by the plurality of nozzles disposed along the predetermined direction by using the scale, and includes the following steps: 39 1311500, the aforementioned scale is oriented in the predetermined direction with respect to the nozzle Relatively moving; and in response to the movement of the scale in the predetermined direction, the solution supplied by the plurality of nozzles is sequentially received by the scale. 5 14. The method for measuring the supply amount of the solution according to the thirteenth aspect of the patent application, and the step of correcting the supply amount of the solution supplied from each of the nozzles based on the supply amount of the solution measured by the scale. Φ 15. A solution supply method for providing a plurality of nozzles and discharging a solution from the nozzles comprises the steps of: 10 simultaneously ejecting a droplet-like solution from a plurality of nozzles; and simultaneously taking out each of the nozzles simultaneously In the plurality of droplet-like solutions, the solution ejected from one nozzle is measured for its weight, and the above-described measurement is performed on the solution ejected from each of the nozzles; and the droplet-like solution ejected from the plurality of nozzles is compared After the weight 15, the setting is made such that the weight of each of the above solutions is the same. 40