CN1974027B - Solution application device and metering method of supply volume, solution supply method - Google Patents

Abstract

The invention provides a coating apparatus which can enhance measure precision of the supply quantity of the solution ejected from a nozzle and can improve the measure efficiency. The apparatus supplying the solution to a substrate, comprises: a plurality of coating nozzles 22 aligned to predefined direction for supplying the solution to the substrates, a hold base 7 of the substrate arranged at the top, a first linear motor 8 for relatively moving the hold base and the coating nozzles in a direction crossed with the predefined direct, a balance 41 for measure of the weight of the solution supplied by the coating nozzles, and a second linear motor 44 for moving the balance independent form the hold base in the predefined direction and a direction crossed with that.

Description

The metering method of solution application device and solution quantity delivered, the supply method of solution

Technical field

The present invention relates to a kind of solution application device, metering to the metering method of the solution amount of substrate supply and the supply method of solution to coating of substrates solution.

Background technology

For example, in the manufacturing process of liquid crystal indicator, be useful on the film forming procedure that on the glass substrate, forms circuitous pattern.In this film forming engineering, on the plate face of substrate, for example form the functional film of alignment films and diaphragm etc.

Under the situation that forms functional film on the substrate, often use the solution that from nozzle, ejects this functional film of formation and it is coated in the applying device of the ink-jetting style on the plate face of substrate.

This applying device has carrying of conveyance substrate and puts platform, this year put platform above, along with respect to the conveyance direction of substrate almost the direction configuration of quadrature be formed with a plurality of coating heads of said nozzle.Thus, can on the substrate of conveyance, reach the solution that coating is ejected on the direction of intersecting with this direction in the conveyance direction from the nozzle of a plurality of coating heads with predetermined interval.

Apply in the head at each, in the face of each nozzle is provided with piezoelectric element across the flexible plate.When piezoelectric element was applied voltage, above-mentioned flexible plate distortion just can be supplied with solution from said nozzle.

Even each piezoelectric element that applies head is applied identical voltage, but characteristic is different with making precision, assembly precision etc. according to the pipe arrangement resistance from the supply source of solution because each applies head, so in the solution amount of supply, produce difference.Often there is the situation in uneven thickness of the so-called functional film that on substrate, forms in its result.

Therefore; In the past; After the voltage that is applied to each shower nozzle is set at predetermined value; The operator receives the solution of supplying with from nozzle with cup when each shower nozzle is applied voltage, measures this supply with the electronic scale that is arranged on the applying device diverse location, carries out so-calledly adjusting being applied to each voltage that applies on the head according to this measurement.Before the running of applying device begins, carry out such adjustment, and carry out such adjustment termly.

But liquid crystal indicator has the tendency of maximization recently, and following therewith, substrate also maximizes.When substrate maximized, the quantity that is arranged on the coating head in the applying device is 20～50 of Chang Duowei or more than this for example also.

When applying the quantity increase of head; Because the operator must be according to the quantity that applies head; Carry out repeatedly receiving from the liquid of each coating head supply and with the such operation of scale measurement, strengthen, have the remarkable situation about descending of so-called productivity ratio so bring operator's burden with cup.

As the solution of the functional film that forms alignment films etc., for example be under the situation of polyimide solution, in this solution, contain organic solvent.In the moment that from the nozzle that applies head, begins to eject the solution that comprises solvent, the beginning moisture absorption produces the time dependent situation of so-called weight.

For this reason; When the operator receives the solution of from apply head, supplying with cup; Under situation about being arranged on the scale check weighing amount of applying device diverse location, owing to need spended time to carrying out weight measurement from receiving solution, so; In this case, can not measure accurately from the weight of the solution that applies the head supply.

And, when scale and applying device are arranged on different places, usually measure the place and the place that the coating head is set of solution weight, in environment such as temperature and humidity, there are differences.Under this situation, even set the voltage that the coating head is applied, because it is poor not add environment, so can exist what is called can not set accurately from the situation of the solution amount that applies the head supply according to measurement structure.

Summary of the invention

The objective of the invention is to, a kind of certainty of measurement and solution application device, the measuring method of solution quantity delivered and supply method of solution of this measurements efficiency of operation raising of quantity delivered of the solution that can realize supplying with from nozzle is provided.

The present invention provides a kind of solution application device, and it is supplied with solution and is applied to substrate, it is characterized in that, comprising:

Supply with a plurality of nozzles that apply above-mentioned solution along the predetermined direction configuration, to aforesaid substrate;

Carry in the above and be equipped with carrying of aforesaid substrate and put platform;

Make and put the 1st driving mechanism that platform and said nozzle relatively move this year on the direction of intersecting with above-mentioned predetermined direction;

Measurement is from the scale of the weight of the solution of said nozzle supply; And

This scale is independent of put in above-mentioned year the 2nd mobile driving mechanism on the direction that platform intersects at above-mentioned predetermined direction and with this predetermined direction.

The present invention is a kind of metering method of solution quantity delivered, utilizes the solution amount of scale metering from supplying with to substrate along a plurality of nozzles of predetermined direction configuration, it is characterized in that, comprising:

The operation that above-mentioned scale is relatively moved on above-mentioned predetermined direction with respect to said nozzle; And

According to moving of the above-mentioned predetermined direction of above-mentioned scale, utilize above-mentioned scale to receive, measure the operation of the solution of supplying with from a plurality of nozzles successively.

The present invention provides a kind of solution supply method, has a plurality of nozzles, and solution is ejected from these nozzles, it is characterized in that, comprising:

Eject the operation of the solution of droplet-like simultaneously from a plurality of nozzles;

Only extract the solution that goes out from a nozzle ejection the solution of a plurality of droplet-like that eject simultaneously from each nozzle, measure its weight, and the solution that goes out from each nozzle ejection is carried out the operation of this measurement; And

The weight of the solution of the droplet-like that relatively goes out from a plurality of nozzle ejection is also set the weight of each solution so that the operation that they become identical.

The invention effect

According to the present invention, scale is set, make it be independent of to carry and put on the direction that platform can intersect at predetermined direction and with this predetermined direction mobilely, move by means of this, just can utilize above-mentioned scale to receive the solution of measurement successively from each nozzle supply.

For this reason, owing to measure the weight of the solution of supplying with from each nozzle in the position that nozzle supply with to apply solution to substrate, just can be the environment weight of measurement solution down of the environment that is used of solution shortly.

And, put platform and move because scale can be independent of to carry, so, scale is kept out of the way therefrom drive line position into and arranged even carry the substrate of putting on the platform and supply with when applying solution to being placed on.Thus, even during, also can walk abreast and carry out the maintenance of scale in the position of keeping out of the way to coating of substrates solution.Therefore, can realize the raising of certainty of measurement and operating efficiency.

Description of drawings

Fig. 1 is the front view of simple structure of the applying device of expression the 1st embodiment of the present invention.

Fig. 2 is the side view of the applying device shown in Fig. 1.

Fig. 3 is the longitudinal section that applies head.

Fig. 4 is the following figure that expression forms the nozzle that applies head.

Fig. 5 is the block diagram of expression control system.

Fig. 6 is the vertical view of scale.

Fig. 7 is arranged on the front view of the scale in the ways.

Fig. 8 is the vertical view of simple structure of the applying device of expression the 2nd embodiment of the present invention.

Fig. 9 is the side view of applying device shown in Fig. 8.

Figure 10 A shows the vertical view of shading member.

Figure 10 B is the cutaway view along the A-A line of the shading member shown in Figure 10 A.

Figure 11 is the control circuit figure that is used for making solution to eject from the nozzle that applies head.

The explanation of symbol

4 ... Ways, 7 ... Carry and put platform, 8 ... The 1st linear motor (the 1st driving mechanism), 22 ... Apply head, 40 ... Controlling organization; 41 ... Scale, 44 ... The 2nd linear motor (the 2nd driving mechanism), 48 ... Cup, 101 ... Substrate; 102 ... Guide rail, 103 ... Carry and put platform, 34 ... Nozzle, 128 ... Shading member; 129 ... Electronic balance (measuring mechanism), 131 ... Hydrops portion, 132 ... Through hole, 134 ... The 1st sensor (alignment sensor); 135 ... The 2nd sensor (alignment sensor), 137 ... Discharging tube, 139 ... The cleaning member, 171 ... Control device (controlling organization)

The specific embodiment

Below, with reference to description of drawings embodiment of the present invention.

Fig. 1 to Fig. 7 representes the 1st embodiment of the present invention, is suitable for the applying device of the present invention shown in Fig. 1 and Fig. 2 and has approximate rectangular-shaped substrate 1.Precalculated position below this substrate 1 is provided with pin 2 respectively, is flatly supporting above-mentioned substrate 1.

As shown in Figure 2, the width both ends on above-mentioned substrate 1 are provided with buck plate 3 respectively along long side direction.Along long side direction ways 4 is set respectively in this width one end above buck plate 3.At these above ways 4, the cross section that the width both sides below the X platform 5 that makes in rectangular plate shape laterally arrange is approximately a pair of the 1st of the word of falling U shape and bears member 6 and engage the X platform 5 of supporting rectangular plate shape slidably.On X platform 5, be provided with than 5 littler the carrying of this X platform and put platform 7.That is, carry and put platform 7 and can on directions X, move along above-mentioned ways 4 through above-mentioned X platform 5.

As shown in Figure 2, in above-mentioned ways 4, fixture 4a is set, bear the above-mentioned the 1st movable piece 6a is set in the member 6.That is, by above-mentioned fixing piece 4a and above-mentioned movable piece 6a form as the 1st driving mechanism the 1st linear motor 8.

For example, to putting platform 7 in above-mentioned year, supply with the substrate W of the glass of in the liquid crystal indicator of active matrix mode, using.By means of mechanisms such as vacuum suction and Electrostatic Absorption this substrate W absorption is remained on and to put on the platform 7 in above-mentioned year.Therefore, can utilize above-mentioned X platform 5 to remain on to carry and put the substrate W on the platform 7 in driving on the directions X.

At the long side direction middle part of above-mentioned substrate 1, vertically be provided with the support 11 of a type, so that stride across above-mentioned a pair of ways 4.Upper level sets up the mounting structure 12 that is made up of corner post in the both sides of this support 11.

In above-mentioned mounting structure 12, be provided with shower nozzle table top 19 make its can the edge with go up and move as the Y direction of the directions X quadrature of the driving direction of above-mentioned X platform 5 (among Fig. 2 shown in the arrow).The Y drive source 21 that constitutes by pulse motor in the width one side setting of above-mentioned support 11.This Y drive source 21 can drive above-mentioned shower nozzle table top 19 along the Y direction.Have, the driving of the Y direction of shower nozzle table top 19 substitutes pulse motor, also can carry out with linear motor again.

In a side of above-mentioned shower nozzle table top 19, dispose through ink-jetting style along the Y direction and to eject formation as a plurality of coatings of the solution (polyimide solution) of the for example alignment films of functional film 22 with point-like.In this embodiment, for example in two row, apply 22 with 7 of staggered configurations.

Like Fig. 3 and shown in Figure 4, above-mentioned each apply 22 and comprise head body 28.Form head body 28 with tubular, its lower aperture is with 29 sealings of flexible plate.These flexible plate 29 usefulness spray nozzle plates 31 cover, and between this spray nozzle plate 31 and above-mentioned flexible plate 29, form a plurality of liquid chambers 32.

Each liquid chamber 32 is communicated to the main line 31A that in spray nozzle plate 31, forms respectively through not shown tap road, through above-mentioned tap road each liquid chamber 32 is supplied with solution from above-mentioned main line 31A.Main line 31A, the feed flow hole 33 that an end is stated after connecting, the recovery holes 37 that the other end is stated after connecting.

In long side direction one end of above-mentioned head body 28, form the above-mentioned feed flow hole 33 that is communicated to above-mentioned liquid chamber 32.Supply with the above-mentioned solution that forms functional film from this feed flow hole 33 to above-mentioned each liquid chamber 32.Thus, be full of by solution in the above-mentioned liquid chamber 32.

As shown in Figure 4, in said nozzle dish 31, to be the Y direction wear a plurality of nozzles 34 with staggered to the direction of edge and the conveyance direction quadrature of substrate W.On above-mentioned flexible plate 29, as shown in Figure 3, with respect to above-mentioned each nozzle 34 a plurality of piezoelectric elements 35 are set respectively.

Each piezoelectric element 35 utilizes the drive division 36 that is arranged in the above-mentioned head body 28 to supply with driving voltage.Thus, piezoelectric element 35 is flexible, and flexible plate 29 be out of shape partly, from the nozzle 34 of these piezoelectric element 35 relative positions eject solution with point-like, and supply be coated in conveyance substrate W above.Therefore, on substrate W, form point-like solution and arrange the coating figure that forms with the ranks shape.Then, through each flow of solution that makes point-like, moistening expansion, this coating figure is bonding to become a film.

Have again,, just can change from the size of the drop of the solution that ejects with each piezoelectric element 35 relative nozzle 34 if change the actuating quantity that the intensity of the voltage that piezoelectric element 35 is applied is controlled piezoelectric element 35.That is, can control from the quantity delivered that applies 22 solution.

Long side direction the other end in above-mentioned head body 28 forms the above-mentioned recovery holes 37 that is communicated to above-mentioned liquid chamber 32.The solution of supplying with to liquid chamber 32 from above-mentioned feed flow hole 33 just can reclaim from above-mentioned recovery holes 37.That is, each 22 not only makes the solution that supplies to above-mentioned liquid chamber 32 from nozzle 34, eject, and also can reclaim solution from above-mentioned recovery holes 37 through above-mentioned liquid chamber 32.

As shown in Figure 5, utilize control device 40 control to drive to be arranged on each to apply a drive division 36 of 22.That is, for example each is being applied under 22 states that are installed on the shower nozzle table top 19, above-mentioned control device 40 just can be discerned X, the Y coordinate that is formed on each nozzle 34 in a plurality of coatings 22.Thus, can be along the position that above-mentioned Y direction control is ejected solution to substrate W.

Above-mentioned control device 40 not only can be controlled each driving that applies a drive division 36 of 22, can also be controlled at the 1st linear motor 8 that drives X platform 5 on the directions X, on the Y direction, drive the driving that is provided with the Y drive source 21 that applies a shower nozzle table top 19 of 22.

As shown in Figure 1, in an end of above-mentioned ways 4 electronic scale 41 is set.That is,, a pair of the 2nd bear member 43 (only illustrating 1) and engage above-mentioned each ways 4 respectively slidably through what make that width both ends below the 1st movable link 42 are provided with, thereby support the 1st movable link 42 in an end of ways 4.

As electronic scale 41; Can use through electromagnetic force equilibrium be measured thing weight, according to the size detection of electric current of this moment go out to be measured thing weight electromagnetic type scale and use output to detect the scale of pressure measuring unit formula of the weight of the thing that is measured corresponding to the load transition device (pressure measuring unit (ロ one De セ Le)) of the signal of weight.

Bear in the member 43 the above-mentioned the 2nd, as shown in Figure 7, be provided with the movable piece 43a that constitutes the 2nd linear motor 44 by the fixture 4a that is arranged on above-mentioned ways 4.Above-mentioned the 2nd linear motor 44 carries out drive controlling through above-mentioned control device 40.Thus, above-mentioned the 1st movable link 42 can on the directions X of above-mentioned ways 4, driven.

On above-mentioned the 1st movable link 42, the 2nd movable link 45 that the Y direction of edge and above-mentioned directions X quadrature can move is set.Long side direction one end at above-mentioned the 1st movable link 42 is provided with the Y drive source 46 that is made up of pulse motor.Through making this Y drive source 46 work, just can drive above-mentioned the 2nd movable link 45 along the Y direction.

On above-mentioned the 2nd movable link 45, above-mentioned scale 41 is set.Thus, can on directions X and Y direction, drive scale 41.That is, be formed in the 2nd driving mechanism that drives above-mentioned scale 41 on X, the Y direction with above-mentioned Y drive source 46 with above-mentioned the 2nd linear motor 44.

On the compression zone 47 of above-mentioned scale 41, releasably carry the cup 48 of opening above being equipped with.The top opening of this cup 48 forms to such an extent that to apply an area of plane of 22 than at least 1 big.

Have again; In this embodiment; Form cup 48 with following size, promptly opening has on directions X and applies the length dimension that a width dimensions of 2 parts of 22 adds margin value above it, on the Y direction, has the length dimension that the size that applies a length direction of 1 part of 22 adds margin value.In addition, cup 48 has, set from after during the quantity delivered of solution of the coating stated 22, store respectively a sufficient volume that applies 22 solution supplied with from 7.

Of the back, above-mentioned cup 48 receives from applying a solution of 22 supplies.When cup 48 received solution, scale 41 was exported this metering signal through the weight of compression zone 47 metering solution to above-mentioned control device 40.

Control device 40 relatively cup 48 receives before the solution and the metering signal that receives scale 41 behind the solution, obtains the solution weight that supplies to cup 48 according to both differences.Then, solution weight of relatively obtaining and predefined setting value according to this relatively, are set applying the voltage that a drive division 36 of 22 applies.Thus, can control from applying 22 solution weights supplied with and be predetermined value.

Be provided with the support member 49 of the L word shape that is installed in above-mentioned the 2nd movable link 45 in the side of above-mentioned scale 41.In the upper end of this support member 49, be provided with rod-free cylinder 51.One side of the coupling member 53 of L word shape is installed on the slide block 52 of this rod-free cylinder 51.Shutter 54 is installed on the another side of this coupling member 53.This shutter 54 drives above-mentioned coupling member 53 through utilizing above-mentioned rod-free cylinder 51 between the position shown in the position shown in the solid line and the dotted line in Fig. 6, top opening that just can the above-mentioned cup 48 of switch.Have again, above-mentioned shutter 54 is set, make between the top opening of itself and cup 48 to have small gap.

Through on directions X, driving above-mentioned the 1st movable link 42, above-mentioned scale 41 is arranged in the below of the coating 22 that is arranged on above-mentioned support 11.Through on the Y direction, driving above-mentioned the 2nd movable link 45, just can position so that to apply the below of 1 coating 22 in scale 41 and a plurality of coatings 22 of 22 below relative.

Have again,, on directions X, drive above-mentioned X platform 5 and above-mentioned scale 41 through movable piece 6a, 43a are switched on.But, drive that the 1st of X platform 5 bears member 6 and on directions X, drive the 2nd of scale 41 bears member 43 being arranged on the directions X with above-mentioned ways 4 different positions.Therefore, above-mentioned X platform 5 and above-mentioned scale 41 can through control respectively to the 1st, the 2nd bear the movable piece 6a of member 6,43, the energising of 43a controls respectively driving.

Be connected with guidance panel 56 (with reference to Fig. 5) on the above-mentioned control device 40.This guidance panel 56 be provided be used to set to aforesaid substrate W apply solution modes of application, apply the operated key of the adjustment modes etc. of 36 solution amount that eject through above-mentioned scale 41 adjustment from each.

Give above-mentioned control device 40 through applying a position teaching of 36 with 7 in advance,, just can locate above-mentioned scale 41, make it successively in the face of the below of each coating 22 by means of the key operation of aforesaid operations panel 56.

Through position detector 57 detected detection signals are outputed to the X that carries out above-mentioned scale 41 on the control device 40, the position teaching of Y direction.As position detector 57; Though there is not shown in detail in figs; For example; Through will being attached on the 2nd linear motor 44 position detector 57 (with reference to Fig. 5) that is provided with from directions X, each signal that the Y direction is attached to the position detector 57 (with reference to Fig. 5) that is provided with on the Y drive source 46 outputs to control device 40 and just can detect.

For example, the key operation of operator through guidance panel 56 makes the 2nd linear motor 44 and 46 work of Y drive source, makes the cup 48 of scale 41 be arranged in Fig. 2 and is in No. 1 of right-hand member and applies a below of 22.The position of scale 41 when control device 40 goes out this according to the input from position detector 57 outputs.Then, this position is stored as the position location of the scale 41 of the coating with respect to No. 1 22.

The position location of the scale 41 with respect to No. 2 to No. 7 applies a configuration space of 22 by control device 40 according to the position location of the scale 41 of the coatings with respect to No. 1 22 and known each and calculates.

Have again; As previously mentioned; Because cup 48 forms with following size, promptly the top opening of cup 48 has the length dimension that 2 parts the width dimensions that on directions X, has coating 22 adds margin value, so; During the position location of the scale 41 of the coating of teaching with respect to No. 1 22, the center of cup 48 also can be positioned at the centre with the coating of staggered two row configurations 22.If like this, just only make 46 work of Y drive source, just can be successively cup 48 be positioned at 7 coatings 22 below separately.

In addition; Although clear operator's teaching is with respect to the position location that applies a scale 41 of 22 for No. 1; Control device 40 calculates the position location of the scale 41 of the coating 22 with respect to the 2nd～No. 7, but also can be operator's teaching with respect to the position location of the scale 41 of all coatings 2.In addition, also can be control device 40 goes out the position location with respect to the scale 41 of all coatings 22 according to an allocation position information calculations that applies 22.

In the applying device of said structure, before substrate W begun to apply solution, if or make applying device by preset time work, apply 22 solution amount supplied with regard to energy measurement from each, this quantity delivered is set at necessarily.

Setting under the situation of the quantity delivered that applies 22 solution that eject, select adjustment modes through the key operation of aforesaid operations panel 56.When selecting this adjustment modes, as shown in Figure 1 on directions X, drive carrying put platform 7, and keep out of the way the below that makes the left end side of its substrate 1 from Fig. 1 promptly be arranged on the coating 22 on the support 11.Then, scale 41 is positioned at the below of the coating 22 of support 11 according to the teaching position.Scale 41 is positioned in a plurality of coatings 22 No. 1 at first and applies a below of 22.

Suppose location scale 41 on directions X; After driven opening device 54 makes the top opening of cup 48; From all nozzles 34 of No. 1 coating 22, according to cup 48 being supplied with solution as the voltage that imposes a condition, voltage application time and the injecting times set by control device 40.If supply solution is just through above the shutter 54 closed cups 48.Thus, owing to the solvent moisture absorption of the solution that can prevent to supply with cup 48 produces weight change, thereby can correctly carry out the weight measurement of solution through scale 41.

In addition, because through above the shutter 54 sealing cups 48, so even above applying device, supplying with under the such atmosphere that flows downward of pure air, the liquid level of the solution that also can prevent to accumulate in the cup 48 is confused.

For this reason, owing to can prevent the variation of the metering signal of the scale 41 that confusing of liquid level causes, even under the situation of using high-precision scale 41, also can correctly carry out the weight measurement of solution.The size of the drop of the solution that therefore, ejects from nozzle 34 is applicable to the applying device of small functional film.

Then, when cup 48 was supplied with solution, scale 41 was to the metering signal of the weight of control device 40 these solution of input.In this embodiment, in more detail, control device 40 relatively shutter 54 is opened the metering signal of preceding scale 41 and is supplied with the metering signal after solution are closed shutter 54 to cup 48, obtains the weight of the solution of supplying with to cup 48 according to this difference.Then, solution weight of relatively obtaining and predefined setting value are differentiated the solution weight measure whether in the allowed band of setting value, promptly whether have obtained the quantity delivered of target.If measured value in permissible value, just judges that No. 1 the quantity delivered of coating 22 is good.

Just be judged to be defectively if exceed permissible value, obtain the poor of measured value and setting value.Then, the adjustment injection conditions makes measured value and settings not have difference.Carry out this adjustment through increase and decrease at the voltage that the piezoelectric element 35 that is provided with by each nozzle 34 applies.For example, when the difference of measured value and setting value is D, injecting times is N, and applying a nozzle quantity of 22 is under the situation of n, just can obtain the excessive or not enough Δ W of each injecting times and solution each nozzle 34 through Δ W=D/ (Nn).Then, set the voltage that piezoelectric element 35 is applied, making Δ W is 0 or in allowed band.

The relation of the quantity delivered through the solution obtaining voltage in advance and eject from nozzle 34 just can be set the voltage that under this situation piezoelectric element 35 is applied.

So like this,, just carry out measurement once more, confirm whether to obtain the quantity delivered of target from the quantity delivered of the solution of this coating 22 if finish the adjustment of No. 1 coating 22.And, if it is just qualified to obtain the target quantity delivered, if just do not repeated above-mentioned adjustment.

Have again; Preestablish the upper limit of the number of repetition of adjustment; Even if adjust to the quantity delivered that upper limit number of times also fails to obtain target, can specificly should apply 22 information through in guidance panel 56, show applying a numbering of 22 etc., the person can not adjust to come the notifying operation.Situation about can not adjust is for example considered the situation that a nozzle 34 of 22 stops up etc. that applies.Therefore, under situation about can not adjust,, just can carry out the replacing etc. of cleaning and the coating 22 of nozzle 34 according to this affirmation because that the operator can confirm that this coatings 22 exists is unusual.

So like this, if finish the adjustment of No. 1 coating 22, likewise carry out the adjustment of the quantity delivered of solution to applying 22 for the 2nd～No. 7 successively from right-hand member.And, when finishing the adjustment of all coatings 22, can in guidance panel 56, show this situation.In addition, scale 41 moves to the position of readiness of the directions X right-hand member shown in Fig. 1.

Have again; Because control device 40 is according to the weight of before cup 48 is supplied with solution, obtaining this solution of supplying with to cup 48 with the difference of supplying with the metering signal behind the solution; Even do not removing the solution that supplies to cup 48 in the metering each time, also can carry out setting efficiently from the quantity delivered that applies 22 solution.

In addition; Also can this moment; To be set in the storage part (not shown) of control device 40 up to the higher limit that cup 48 becomes the metering number of times of the solution quantity delivered that brimmer carries out continuously; When each setting that finishes 1 quantity delivered that applies 22 solution, utilize control device 40 to arrive moment of higher limit in the count value of counting metering number of times, in guidance panel 56, show and urge the alarm of removing the solution in the cup 48.

In addition; Can measure the higher limit of the solution weight that does not overflow in the cup 48 and can store in advance; And be set in the storage part (not shown) of control device 40; Through control device 40 relatively actual weight, the upper weight limit value of solution in the cup 48, when actual weight reached the upper weight limit value, the setting of ending the solution quantity delivered shows in guidance panel 56 simultaneously urged the alarm of removing solution in the cup 48.

In addition, under this situation, control device 40 can be that condition ground carries out the actual weight of the solution in the cup 48 and the comparison of upper weight limit value to select above-mentioned adjustment modes also.The control device 40 of this moment; Whether judgement exists and allows when 7 being applied 22 and supply with the poor of the solution of envisioning total amount (below be called " setting desired solution amount ") when carrying out the setting of solution quantity delivered in to cup 48 between the higher limit of the weight of reality and weight.

And, exist above-mentionedly when poor when being judged to be, carry out the setting of the quantity delivered of solution, do not have above-mentionedly not carry out the setting of the quantity delivered of solution when poor when being judged to be, in guidance panel 56, show and urge the alarm of removing the solution in the cup 48.

In addition; Control device 40 is when having carried out above-mentioned judgement; The difference of the actual weight of the solution in the cup 48 and the higher limit of weight is during less than 2 times of the desired solution amount of setting; In the moment in the setting of the solution quantity delivered that finishes this, in display floater 56, show and urge the alarm of removing the solution in the cup 48.

Thus; Because after the quantity delivered of solution is set; In the solution coating of carrying out according to the selection of modes of application substrate W, can remove the solution of the cup 48 of the scale 41 that is positioned at position of readiness, so in adjustment modes; Need not interrupt the setting of solution quantity delivered in order to remove the solution in the cup 48, can carry out the setting of the quantity delivered of solution efficiently.

Have, control device 40 can be obtained the weight of the reality of the solution in the cup 48 according to the difference of the metering signals of the metering signal of the scale 41 when empty in the cup 48 and scale 41 current points again.

Like this; Applying device according to said structure; Owing to can automatically measure successively, revise from the weight of the solution of a plurality of coatings 22 supply; Even so maximize and apply under the situation that 22 quantity increases, also can carry out applying the setting of the quantity delivered of 22 solution efficiently from each at substrate W.

And, through on X, Y direction, driving scale 41, be located apply 22 below, just can measure then and there from applying 22 to the solution weight that carries cup 48 supplies of putting on scale 41.And, utilize shutter 54 sealings to supply with the cup 48 of solution.Thus, before the solvent moisture absorption that in solution, contains and weight change, owing to carry out from applying the weight measurement of 22 solution supplied with, because of this can improve certainty of measurement.

And, through on X, Y direction, driving scale 41, make it apply a position of 22 co-located basically with being provided with, just can measure from each and apply a weight of the solution of 22 supplies.That is and since the environment facies that use solution with reality with environment under carry out the weight measurement of solution and the correction of quantity delivered, so even also can set quantity delivered so accurately from the solution of each coating 22.

In addition; Because control device 40 is positioned at scale 41 position of teaching successively; And apply 22 corresponding positions owing to can scale 41 correctly be positioned at each; Because of this can correctly measure the weight of the solution of supply positively with being received in the cup 48 from applying a solution of 22 supplies.

In addition,, mobile scale 41 applies 22 corresponding positions because making it be positioned at each, because of the enough single scales 41 of this ability carry out the setting from the solution quantity delivered of a plurality of coatings 22, and can the simplification device structure.

By means of the 2nd linear motor 44, scale 41 is independent of lean on that the 1st linear motor 8 moves carries and put platform 7 and on directions X, move, when substrate W is applied solution, can make the position of readiness place standby of scale 41 at directions X right-hand member shown in Figure 1.

Thus, even when substrate W applied solution, also can remove the conservative spot check of the scale 41 of the solution that accumulates in the cup 48 of scale 41 etc. simultaneously.Therefore, can prevent to interrupt substrate W is applied the operation of solution in order to remove the solution in the cup 48, can carry out substrate W is applied the operation of solution efficiently.

The applying device of above-mentioned the 1st embodiment both can apply substrate W single pass with respect to applying 22, also can make substrate W many times through applying.

In addition; When repeatedly passing through; Each time through all utilizing Y drive source 22 that shower nozzle table top 19 is moved; For example transport to wait in Y direction (orientation of nozzle 34) one by one and carry out under the situation that spacing sends to applying 22, also can carry out setting respectively apart from sending the position at each from the quantity delivered of the solution of each coating 22 with 1/2 of the arrangement pitch of nozzle 34.

When carrying out like this; Owing under the environment of the environment (case of bending of the solution supply pipe of temperature, humidity or solution head 22 etc.) that adapts to the actual use of solution, set the quantity delivered of solution; So when carrying out actual solution coating, just can more correctly reproduce the quantity delivered of the solution of setting.Therefore, the precision that substrate W is applied solution can be improved, the homogenising of thickness of the functional film of formation can be improved further.

In above-mentioned the 1st embodiment,, also can be on directions X, to drive to apply the structure of head to coating of substrates solution though be that example describes with situation with respect to the coating head driving substrate on directions X that is positioned at the precalculated position.

Yet can not carry out and carry out from applying a weight measurement of the solution that ejects at each nozzle that applies head at every head that applies.Therefore, the invention is not restricted to have a plurality of applying devices that apply head, also can be applicable to single to apply in the applying device that is equipped with a plurality of nozzle arrangements in the head.In addition, under this situation, can be a group also with a plurality of nozzles, carry out the measurement of the quantity delivered of solution by each group.

In addition, can obtain the position of the nozzle location of relative scale this moment according to X, the Y coordinate of the nozzle of discerning by control device.In addition, the operator moves scale through the operation of guidance panel, and teaching also is fine with respect to the position location of each group of each nozzle and nozzle.

From the quantity delivered and the setting value condition of different of the solution that applies head, the adjustment that both can repeat quantity delivered also can give the alarm.Thus, the operator can the unusual coating head of spot check.That is, confirm from all nozzles of unusual coating head, whether to eject solution.Then, after getting rid of unusually, can also measure quantity delivered once more from the solution of this coating head.

In addition, although the example of a clear scale 41, but also a plurality of scales can be set.Because the quantity that a plurality of scales 41 can reduce coating that a scale 41 bears 22 is set, therefore can shorten the time set from a solution quantity delivered that applies 22 of carrying out, can carry out operation more efficiently.

In addition, be that coating head with ink-jetting style describes though apply 22, also can be suitable for the coating head of alternate manner, for example the coating head of piston mode and air pressurized mode.

In addition, though be move to carry to put platform 7 conveyance substrates, also can, for example carry and put platform 7 and have carrying devices such as roll shaft carrying mechanism, put conveyance substrate on the platform 7 carrying.

In addition, though be when measuring when applying the weight of 22 solution supplied with, the structure that scale 41 is moved on X, Y direction also can be to make scale 41 only at directions X, applies 22 structures that independently move separately in the Y direction.

Then, with reference to Fig. 8 to Figure 11 the 2nd embodiment of the present invention is described.

The applying device of solution shown in Figure 8 comprises substrate 101.The pair of guide rails 102 of separation also is set with predetermined space along predetermined direction in this substrate 101 abreast.On this guide rail 102, can advance be provided with to carry put platform 103, for example, can drive through not shown drive sources such as linear motors.Carry the driving direction of putting platform 103 and be the directions X shown in the arrow labeled among Fig. 8.Put above the platform 103 carrying, to supply with the glass substrate W that for example in liquid crystal indicator, uses, support substrate W through device absorption maintenance such as electrostatic chuck and vacuum suction.

At the middle part of the directions X of above-mentioned substrate 101, vertically establishing pillar 104 with the both ends of the Y direction of directions X quadrature.A side and upper edge, another side Y direction in pair of posts 104 are set up with respect to directions X with predetermined space opposed 2 packaged matching boards 105.At the inner face of each buck plate 105, maintain in a plurality of, this embodiment each 4 and apply 22.That is, add up to staggered at the inner face of 2 packaged matching boards 105 and be provided with 8 and apply 22.

Because it is 22 identical with Fig. 3 of the 1st embodiment structure shown in Figure 4 that each applies, so identical part is given identical mark and omitted its explanation.

On above-mentioned guide rail 102, be provided with put in above-mentioned year platform 103 the same, by means of the drive source of not shown linear motor etc. on directions X and can with put metering that platform opened driving in 103 minutes in above-mentioned year with platform 125.This metering with platform 125 on, along measure long side direction with platform 125 be the Y direction can move be provided with the 1st movable body 126 and the 2nd movable body 127.For example can on the Y direction, drive the 1st, the 2nd movable body 126,127 respectively by not shown drive sources such as linear motors.

1st, the 2nd movable body 126,127 is provided at predetermined intervals to upload on above-below direction and puts the 126a of portion, 127a and download and put the 126b of portion, 127b.Put the shading member 128 that rectangular shape is set among the 126a of portion, the 127a uploading, put in download electronic scale (to call " electronic balance " in the following text) 129 is set among the 126b of portion, the 127b.

Shown in Figure 10 A, 10B, above-mentioned shading member 128 is formed on the hydrops portion 131 of the rectangle concavity of top opening.Y direction middle part along an end of the directions X of this hydrops portion 131 is provided with cone shape protuberance 133, in this protuberance 133, connects its thickness direction and forms through hole 132.Size with solution that only can be through the droplet-like that from apply a nozzle 34 of 22, ejects forms this through hole 132.

For example, applying in 22 when forming the nozzle 34 of diameter 0.1mm at interval with 1mm, for example the diameter with 0.2～0.4mm forms above-mentioned through hole 132.Thus; Even when a plurality of nozzles 34 of Fig. 3 and coating shown in Figure 4 22 eject solution simultaneously; Also only from the solution that ejects in the face of the nozzle 34 of through hole 132 through through hole 132, the solution that ejects from other nozzle 34 can accumulate in the above-mentioned hydrops portion 131.Because through hole 132 is formed on protuberance 133, so can stop the solution that accumulates in the hydrops portion 131 to flow into through hole 132.

The size along the Y direction of above-mentioned hydrops portion 131 is set at along about 2 times or greater than the size of this size of the length dimension of the Y direction of the row of the nozzle 34 of above-mentioned coating 22.Thus; Even the nozzle 34 that is positioned at the end that applies a Y direction of 22 is opposite under the state of through hole 132; From applying all nozzles 34 of 22 solution L that spues, solution that the nozzle 34 beyond the nozzle 34 that is opposite to through hole 132 ejects is ejected the above-mentioned hydrops portion 131.

Through the solution of above-mentioned through hole 132, drip the acceptance division 129a (shown in Fig. 9) of above-mentioned electronic balance 129.Thus, even eject solution simultaneously from a plurality of nozzles 34, the weight of the solution that also can only eject from a nozzle 34 through 129 meterings of above-mentioned electronic balance.Here, in acceptance division 129a, can use the hypocraterimorphous reception ware of the cup 48 that is equivalent to the 1st embodiment.

On above-mentioned shading member 128, one side as alignment sensor along a pair of the 1st sensor 134 of being provided with of Y direction, one side along being provided with the 2nd sensor 135 in the directions X.1st, the 2nd sensor 134,135 for example is the reflection type optical sensor with light-projecting portion and light accepting part, apply 22 below when driving above-mentioned shading member 128, to detecting along a side of the Y direction of this coating 22 with along a side of directions X.Thus, can with respect to apply 22 on X, Y direction location the 1st, the 2nd movable body 126,127.

Position apart from above-mentioned through hole 132 preliminary dimensions of above-mentioned hydrops portion 131 is provided with outage 136.This outage 136 is connected to discharging tube 137 shown in Figure 10 B.Thus, the solution L that ejects to above-mentioned hydrops portion 131 with above-mentioned through hole 132 opposed nozzles 34 is discharged through above-mentioned discharging tube 137.

And, in an end of the Y direction of above-mentioned hydrops portion 131, the cleaning member of processing by the rubber elastomeric material to the outstanding height setting in top with opening above above-mentioned hydrops portion 131 along directions X, form with the braid shape 139.Apply 22 below drive the 1st, the 2nd movable body 126,127 o'clock along the Y direction, utilize the opening surface of above-mentioned cleaning member 139 wiping nozzles 34 promptly apply 22 below.Thus, can clean attached to the solution L below 22.Accumulate in the hydrops portion 131 through cleaning member 139 from applying the 22 solution L that clear out of, and discharge through discharging tube 137.

Figure 11 is the control circuit figure of solution feedway, and 171 is control device in scheming together.This control device 171 is in control head controller 172, nozzle controller 173; Also according on X, Y direction, locate, drive the 1st, the 2nd movable body 126,127, the through hole 132 that is arranged on shading member 128 is in successively and is arranged on a plurality of nozzles 34 opposed positions of 22 from the signal of the 1st, the 2nd sensor 134,135 that is arranged on above-mentioned the 1st, the 2nd movable body 126,127.

Above-mentioned controller 172,173 will drive signal according to the detection signal from the not shown encoder that detects the X that put platform 103 in above-mentioned year, Y coordinate and output to master unit 174.This master unit 174 has 1CPU the 175, the 1st transceiver 176, supplies with the power supply 177 of 24V DC voltage, and control is from the injection of the solution L of the nozzle 34 of a plurality of coatings 22.

Apply at each and to be provided with above-mentioned drive circuit portion 36 in 22.In this drive circuit portion 36, be provided with 2CPU 182.In the lock-out pulse of this 2CPU 182 inputs from above-mentioned 1CPU 175, also through the 2nd transceiver 183 of communicating by letter with above-mentioned the 1st transceiver 176 from said nozzle controller 173 to these 2CPU 182 input drive signals.

Above-mentioned 1CPU 175 can be according to the amount of movement of above-mentioned 103 directions X; With respect to a plurality of pulse signals, export a lock-out pulse to above-mentioned 2CPU 182 through above-mentioned control device 171 and above-mentioned coating head controller 172 from not shown X encoder.

In 2CPU 182, be connected with to preserve and apply memory of data 184.Through to the synchronization pulse of the 2CPU of drive circuit portion 36 182 inputs, just read this coating data at this 2CPU 182 from above-mentioned 1CPU 175.To output to serial parallel data converter section 185 in the coating data that 2CPU 182 reads.

In serial parallel data converter section 185, be connected with the 1st transformation portion 186.The 1st transformation portion 186 according to will becoming the voltage of 0～90V from the 24V voltage transformation of the power supply 177 of above-mentioned master unit 174 from the voltage instruction of above-mentioned 2CPU 182, and outputs to above-mentioned serial parallel data converter section 185.In this serial parallel data converter section 185, be connected be arranged on above-mentioned each apply a plurality of piezoelectric elements 35 in 22.

From 1CPU 175 when 2CPU 182 input sync signals, in above-mentioned serial parallel data converter section 185, from above-mentioned 2CPU 182 outputting oscillation signals.Thus, owing to predetermined piezoelectric element 35 is applied the voltage from the 1st transformation portion 186, just can from nozzle 34, eject solution corresponding to this piezoelectric element 35 according to coating data from memory 184.

Then, explain through measuring and apply the program that the emitted dose of the solution of 22 nozzle 34 is set from each of the applying device that is arranged on said structure.Under the situation that applies solution on the substrate W, make to upload to be equipped with carrying of substrate W and to put platform 103 and on directions X, move to the position shown in the dotted line from the position shown in Fig. 8 solid line at upper surface.And, when substrate W when applying a below of 22, carry out from each applies a nozzle 34 of 22, ejecting solution.

Under the situation of measurement from the emitted dose setting of the solution of said nozzle 34; At first; Shown in solid line among Fig. 8; Put platform 103 and keep out of the way if make to carry from a below that applies 22, through drive on the directions X stands for taking measurement 125 just can make the 1st, the 2nd movable body 126,127 be positioned at each coating 22 below.

Control device 171; If with 126,127 assortments of the 1st, the 2nd movable body each apply 22 below; At first, drive stands for taking measurement 125, making and being arranged on each movable body 126,127 is that the 1st sensor 134 of shading member 128 moves in the predetermined scope on directions X.Control device 171, the output signal of the 1st sensor 134 in moving according to this and the subsidiary output signal of measuring with the not shown position detector on the Y platform 125 that is arranged on detect along the position on the diagram right side of the Y direction of coating 22.

If obtain the end position that applies a Y direction of 22, this just drives each movable body 126,127 respectively, and the 2nd sensor 135 that is arranged on shading member 128 is moved in the predefined scope on the Y direction.Control device 171, the output signal of the 2nd sensor 135 in moving according to this and the subsidiary output signal that is arranged on the not shown position detector on each movable body 126,127 detect along the position of the end of the diagram upside that applies a directions X of 22.

Then, control device 171 is according to the end position and the end position of Y direction that apply 22 directions Xs obtained for each, obtains to apply 22 and concern with the position of each movable body 126,127.

Owing to apply the positional information of each nozzle 34 on 22 and the positional information of the through hole 132 on the shading member 128 is known according to design data; So control device 171 according to predefined this known positional information and above-mentioned in the position relation of the coating obtained 22 and each movable body 126,127, obtain the relative position of each nozzle 34 and through hole 132.

According to each nozzle 34 so obtained like this and the relative position of through hole 132, control device 171 positions the 1st, the 2nd movable body 126,127, makes the through hole 132 that is arranged on each shading member 128 mutually opposed with each 37 nozzle 34 of 22 successively.

Have again, in shading member 128,2 the 1st sensors 134 are set along the Y direction.Thus, owing to can detect with respect to apply the angle of inclination of 22 directions X, just can apply a location recognition of 22 in view of the above more accurately through 2 the 1st sensors 134.

When in above-mentioned through hole 132 and 7 37 nozzles 34 1 is mutually opposed, eject solution simultaneously from these 37 nozzles 34 of 22.Then, only from through hole 132 opposed 1 nozzle 34 solution that ejects splash into the acceptance division 129a of electronic balance 129 through above-mentioned through hole 132, carry out weight measurement.The solution weight of measuring is input in the control device 171, is stored in not shown storage part.Initial nozzle 34 is No. 1 nozzle 34.

Have, control device 171 is according to before No. 1 nozzle 34 ejects solution, calculating the weight that splashes into the solution the acceptance division 129a with the difference of the output valve that ejects the electronic balance 129 behind the solution again.For example, from each nozzle 34, eject for 1000 times under the situation of drop, just in acceptance division 129a, splash into 1000 solution.Before control device 171 is obtained this drop of 1000 and is dripped with after output valve poor of electronic balance 129, this difference is obtained as the weight of 1 the drop that from No. 1 nozzle 34, ejects according to 1000 parts of values of cutting apart.Then, in the weight of 1 part of this drop of storage portion stores of control device 171.

Have, the hydrops portion 131 that the solution that ejects 36 nozzles 34 outside 1 nozzle 34 that is opposite to through hole 1 32 ejects shading member 128 is discharged to the discharging tube 137 through outage 136 from that again.

Then, drive the 1st, the 2nd movable body 126,127, make through hole 132 mutually opposed, solution is ejected from 37 nozzles 34 of shower nozzle 22 simultaneously with No. 2 nozzle 34.Thus, the solution that only from No. 2 nozzle 34, ejects passes through through hole 132, and measures its weight by electronic balance 129.Below, likewise, measure weight from No. 3～No. 37 solution that nozzle 34 ejects.

So like this, when measuring the weight of the solution from 37 nozzles 34 of 1 stature 22, eject respectively, the not shown comparison portion through control device 171 compares the weight of these weight and desired value.When there is the difference more than the permissible value in the weight of the solution that from each nozzle 34, ejects with respect to target weight, it is outputed to 2CPU 182.Target weight is stored in the not shown storage part of control device 171 in advance.

Thus; The magnitude of voltage that 2CPU 182 control applies through 185 pairs of serial parallel data converter sections and each nozzle 34 opposed piezoelectric element 35 from the 1st transformation portion 186 or the pulse width of voltage are so that the solution that ejects from each nozzle 34 is in the permissible value as the weight of target.

For example, control is applied to magnitude of voltage on the piezoelectric element 35 and adjusts under the situation of amount of the solution that from nozzle 34, ejects, in advance storage voltage correction in the memory 184 of 2CPU 182.And; Owing to need reduce emitted dose during for just (the weight ratio target weight of measurement is big), so 2CPU 182 control the 1st transformation portions 185 are so that be applied to the magnitude of voltage drop-out voltage correction value only on the piezoelectric element 35 in the difference of the weight of the solution of seeing off from control device 171.On the contrary, owing to when the weight difference of solution is negative (the weight ratio target weight of measurement is little), need increase emitted dose, 2CPU 182 controls the 1st transformation portion 185 is so that the magnitude of voltage that is applied on the piezoelectric element 35 is only gone up the up voltage correction.

So like this,, just utilize mechanism same as described above, measure the weight of the solution that from each nozzle 34, ejects once more, carry out by control device 171 with the action of target weight comparison if revise from the emitted dose of the solution of each nozzle 34.Result relatively; If just finish adjustment in the permissible value of weight at target weight of the solution that in all nozzles 34, ejects; If exceed permissible value, just repeat adjustment, till the weight of the solution that from all nozzles 34, ejects is in the permissible value of target weight.

So like this, with regard to 1 each nozzle 34 that applies 22, after the setting work of end injection amount, the setting action of emitted dose is likewise carried out in other coating 22 through control device 171.

As stated; According to present embodiment; Make solution apply 22 the whole of a plurality of nozzles 34 and eject simultaneously from being arranged on 1, the solution L that only eject from through hole 132 opposed 1 nozzle 34 with shading member 128 this moment measures weight through above-mentioned through hole 132 by electronic balance 129.And, carry out this measurement successively to applying a nozzle 34 of 37 of 22.

Because each nozzle 32 is carried out the setting of the supply of solution, so can be suppressed at the deviation that applies an emitted dose of each nozzle 32 in 22.Thus, can make emitted dose homogenising, the further homogenising of thickness of the functional film that can realize forming from the solution of each nozzle 32.

As stated; Since can with reality in measure the weight of the solution that ejects from each nozzle 34 when substrate W applied solution under the identical condition; If so set the weight of the solution that ejects from each nozzle 34 according to this measurement, just can to substrate W coating solution the time, make the weight of the solution that ejects from each nozzle 34 is needed value.That is, can form the functional film of uniform desirable thickness to substrate W.

In shading member 128, cleaning member 139 is set along directions X.Thus; For the weight of measuring the solution from each nozzle 34, eject apply 22 below the Y direction drive the 1st, the 2nd movable body 126,127 o'clock; Move cleaning member 139 owing to can make the front end side polished of cleaning member 139 apply following one side of 22, just can clean solution attached to the opening surface of nozzle 34.

For example, in measuring the setting action of setting from the emitted dose of the solution of nozzle 34, every end is to the measurement of 1 nozzle 34, and movable body 126,127 is moved back and forth on the Y direction below wiping coating 22 whole.Have again; At this moment; Utilize not shown driving mechanisms such as air cylinder to make to upload put the 126a of portion, 127a can go up and down with respect to movable body 126,127; In above-mentioned reciprocal motion, go to action the time to make to upload put the 126a of portion, 127a moves to the end that rises, and makes the upper end of cleaning member 139 be positioned at the following wiping position that contacts with coating 22; Make when replying action upload put the 126a of portion, 127a moves to the end that descends, and the upper end of cleaning member 139 is positioned at not and a following position of readiness that contacts that applies 22.

After repeating the injection from the solution of nozzle 34, it is known below applying 22, being attached with solution.And, when the adhesion amount of solution increases, because the opening that this solution can plug nozzle 34, can hinder spuing from the solution of nozzle 34.

Therefore; As stated; In the setting work of emitted dose; Since utilize 139 wipings of cleaning member apply 22 below the time, can prevent because of situation, so just can carry out measurement and setting more accurately from the emitted dose of each nozzle 34 attached to the following solution plug nozzle 34 of coating 22.

In addition, owing to can directly measure the weight of the solution that from each nozzle 34, ejects,, can make injection output correctly meet necessary injection output from each nozzle 34 so just can measure the injection output accurately with electronic balance.Its result when substrate W is applied solution, can apply solution with uniform coating amount, can form the uniform functional film of the thickness that is speckless.

In the above-described embodiment, though can 2 movable bodys be set in platform in metering, measuring the weight of the solution that goes out from the nozzle ejection of 2 statures simultaneously, be not limited to the quantity of measuring with the movable body that is provided with in the platform, also can be more than 1 or 3.

In addition, make them become identical, also can each nozzle 34 be set at different weight though set the weight of the solution that ejects from each nozzle 34.

In addition, on one side although clear eject the example that solution is measured the weight of the solution that from each nozzle 34, ejects simultaneously from all nozzles 34 on one side, measure but the nozzle 34 that also can stop the part from all nozzles 34 ejects solution.For example; In the figure of the functional film that this forms on substrate W; Only from the beginning eject under the situation of solution in 30 nozzles 34 in 22 37 nozzles 34, Yi Bian on one side only from these 30 nozzles 34, eject the weight that solution is measured the solution that from these 30 nozzles 34, ejects respectively simultaneously.Even in this case, also can on one side from all nozzles 34 that when reality applies solution to substrate W, use, eject solution, measure the weight of the solution that from each nozzle 34 ejects on one side.Thus, make the injection output of the solution of adjusting according to this measurement become the coating amount that is fit to reality, can improve the quality of formed functional film.

In addition; Though the situation that through hole 132 is set in the shading member 129 of rectangular plate shape has been described as shading member; But mainly, because the solution that only from 1 nozzle 34, ejects is passed through, can be so for example separate through the interval of the solution that only from 1 nozzle 34, ejects; Dispose 2 rectangular slabs, the solution that from other nozzle 34, ejects with any reception in 2 rectangular slabs also is fine.

In addition, although clear example of from 1000 drop weight, calculating the weight of the drop that from nozzle 34, ejects, but also can be not the quantity of the drop that ejects not being limited to 1000 in order to measure weight, can be arbitrarily, even 1 also harmless.Although clear relatively one weight and the example of target weight of drop, adjust the injection output but also can compare 1000 etc. many weight.

Claims (15)

1. solution application device, it is supplied with solution and is applied to substrate, it is characterized in that, comprising:

Supply with a plurality of nozzles that apply above-mentioned solution along the predetermined direction configuration, to aforesaid substrate;

Carry in the above and be equipped with carrying of aforesaid substrate and put platform;

Make and put the 1st driving mechanism that platform and said nozzle relatively move this year on the direction of intersecting with above-mentioned predetermined direction;

Measurement is from the scale of the weight of the solution of said nozzle supply; And

This scale is independent of put in above-mentioned year the 2nd mobile driving mechanism on the direction that platform intersects at above-mentioned predetermined direction and with this predetermined direction.

2. solution application device according to claim 1; It is characterized in that; Has the ways that direction that edge and above-mentioned predetermined direction intersect is provided with; On this ways, be provided with above-mentioned year movably and put platform and the 1st movable link, above-mentioned predetermined direction is provided with the 2nd movable link movably in the 1st movable link upper edge, and the 2nd movable link is provided with above-mentioned scale.

3. solution application device according to claim 1 is characterized in that, above-mentioned weighing-appliance has the cup of reception from the solution of said nozzle supply, and this cup relies on shutter can open and close opening above it.

4. solution application device according to claim 1 is characterized in that, has according to the positional information that disposes the above-mentioned predetermined direction of above-mentioned a plurality of nozzles, and above-mentioned scale is positioned at and the corresponding control of position of each nozzle mechanism successively.

5. solution application device according to claim 4 is characterized in that, has to be provided with said nozzle, to be configured in a plurality of coating heads on the above-mentioned predetermined direction;

Above-mentioned controlling organization is positioned at above-mentioned scale with each successively according to above-mentioned a plurality of positional informations that apply the above-mentioned predetermined direction of head and applies on the corresponding position.

6. solution application device according to claim 1; It is characterized in that having the shading member that can be arranged on the below of said nozzle with locating, the solution that goes out from 1 nozzle ejection is passed through;

The weight of the solution of above-mentioned shading member has been passed through in above-mentioned scale measurement.

7. solution application device according to claim 1 is characterized in that, has the controlling organization that the weight of the solution that will from each nozzle, eject according to above-mentioned measurement is set identically.

8. solution application device according to claim 6; It is characterized in that; Have substrate, this substrate is provided with and can makes above-mentioned year and put the guide rail that platform leads in a predetermined direction movably, above-mentioned shading member of guiding and above-mentioned scale on above-mentioned guide rail; They are arranged to and can either move up in above-mentioned predetermined party, also can on the direction of intersecting with this predetermined direction, move.

9. solution application device according to claim 6; It is characterized in that; Be provided with the alignment sensor that the above-mentioned predetermined direction of detection reaches the position of the direction of intersecting with predetermined direction at above-mentioned shading member, locate above-mentioned shading member with respect to said nozzle according to the detection of this alignment sensor.

10. solution application device according to claim 6; It is characterized in that, be provided with when moving on the direction that this shading member is intersected below said nozzle, with above-mentioned predetermined direction at above-mentioned shading member, cleaning removes the cleaning member attached to the solution of the opening surface of said nozzle.

11. solution application device according to claim 6 is characterized in that, is formed with the hydrops portion that stores above-mentioned solution at above-mentioned shading member, is connected with the discharging tube of discharging solution in this hydrops portion.

12. a solution application device, it is supplied with solution and is applied to substrate, it is characterized in that, comprising:

Supply with a plurality of nozzles that apply above-mentioned solution along the predetermined direction configuration, to aforesaid substrate;

Carry in the above and be equipped with carrying of aforesaid substrate and put platform;

Make and put the 1st driving mechanism that platform and said nozzle relatively move this year on the direction of intersecting with above-mentioned predetermined direction;

Measurement is from the scale of the weight of the solution of said nozzle supply; And

Make this scale be independent of above-mentioned year and put the 2nd driving mechanism that platform moves on the direction with respect to said nozzle contact or separation.

13. the metering method of a solution quantity delivered is utilized the solution amount of scale metering from supplying with to substrate along a plurality of nozzles of predetermined direction configuration, it is characterized in that, comprising:

The operation that above-mentioned scale is relatively moved on above-mentioned predetermined direction with respect to said nozzle; And

According to moving of the above-mentioned predetermined direction of above-mentioned scale, utilize above-mentioned scale to receive, measure the operation of the solution of supplying with from a plurality of nozzles successively.

14. the metering method of solution quantity delivered according to claim 13 is characterized in that, has the operation according to the quantity delivered of being revised the solution that each nozzle supplies with by the quantity delivered of the solution of above-mentioned scale metering.

15. the supply method of a solution has a plurality of nozzles, and solution is ejected from these nozzles, it is characterized in that, comprising:

Eject the operation of the solution of droplet-like simultaneously from a plurality of nozzles;

Only extract the solution that goes out from a nozzle ejection the solution of a plurality of droplet-like that eject simultaneously from each nozzle, measure its weight, and the solution that goes out from each nozzle ejection is carried out the operation of this measurement; And

The weight of the solution of the droplet-like that relatively goes out from a plurality of nozzle ejection is also set the weight of each solution so that the operation that they become identical.

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