CN1824458B - 载物台装置和龙门型载物台装置及载物台装置的控制方法 - Google Patents

载物台装置和龙门型载物台装置及载物台装置的控制方法 Download PDF

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Publication number
CN1824458B
CN1824458B CN2006100094057A CN200610009405A CN1824458B CN 1824458 B CN1824458 B CN 1824458B CN 2006100094057 A CN2006100094057 A CN 2006100094057A CN 200610009405 A CN200610009405 A CN 200610009405A CN 1824458 B CN1824458 B CN 1824458B
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CN
China
Prior art keywords
mentioned
workbench
pair
objective table
table device
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Expired - Fee Related
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CN2006100094057A
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English (en)
Chinese (zh)
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CN1824458A (zh
Inventor
小林雄二
中森靖仁
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Publication of CN1824458A publication Critical patent/CN1824458A/zh
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Publication of CN1824458B publication Critical patent/CN1824458B/zh
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/30—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members controlled in conjunction with the feed mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
    • B23Q1/66—Worktables interchangeably movable into operating positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0028—Arrangements compensating weight or flexion on parts of the machine by actively reacting to a change of the configuration of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
    • B23Q15/22—Control or regulation of position of tool or workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN2006100094057A 2005-02-21 2006-02-21 载物台装置和龙门型载物台装置及载物台装置的控制方法 Expired - Fee Related CN1824458B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP044599/2005 2005-02-21
JP2005044599A JP4927338B2 (ja) 2005-02-21 2005-02-21 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法

Publications (2)

Publication Number Publication Date
CN1824458A CN1824458A (zh) 2006-08-30
CN1824458B true CN1824458B (zh) 2011-01-19

Family

ID=36935381

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006100094057A Expired - Fee Related CN1824458B (zh) 2005-02-21 2006-02-21 载物台装置和龙门型载物台装置及载物台装置的控制方法

Country Status (4)

Country Link
JP (1) JP4927338B2 (enrdf_load_stackoverflow)
KR (1) KR100716050B1 (enrdf_load_stackoverflow)
CN (1) CN1824458B (enrdf_load_stackoverflow)
TW (1) TW200631724A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664142B2 (ja) * 2005-07-21 2011-04-06 住友重機械工業株式会社 ステージ装置
KR101338577B1 (ko) * 2006-12-27 2013-12-06 주식회사 케이씨텍 약액 도포 장치
CN101020257B (zh) * 2007-02-14 2011-03-02 吉林名门风电设备有限公司 一种移动式大口径工件切削方法及设备
CN102029525A (zh) * 2011-01-04 2011-04-27 党金行 双工作台龙门式机床
KR101269987B1 (ko) * 2012-02-16 2013-05-31 순환엔지니어링 주식회사 다축으로 구성된 스테이지 장치의 제어 장치 및 방법
JP6251559B2 (ja) 2013-02-28 2017-12-20 株式会社ニューフレアテクノロジー 試料支持装置
CN104368992B (zh) * 2014-11-07 2016-08-31 武汉法利普纳泽切割系统有限公司 实时高度模拟压脚装置
CN104965167A (zh) * 2015-07-21 2015-10-07 深圳市汉匠自动化科技有限公司 电路板自动检测设备
CN107971926B (zh) * 2017-11-16 2024-02-02 广东东箭汽车科技股份有限公司 加工件夹持装置以及加工件夹持系统
CN108838669B (zh) * 2018-08-28 2023-05-02 江苏帅兢科技有限公司 精雕机的龙门架的调整装置
KR102178139B1 (ko) * 2019-04-15 2020-11-12 주식회사 트임 기판 가압 적층 공정용 갠트리 장치
WO2021059937A1 (ja) * 2019-09-27 2021-04-01 株式会社東京精密 ダイシング装置及び方法

Citations (5)

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Publication number Priority date Publication date Assignee Title
CN86108903A (zh) * 1986-12-28 1987-08-26 湖南省岳阳机床厂 在龙门刨上周边磨削机床导轨的方法及装置
EP0260180A1 (fr) * 1986-08-28 1988-03-16 Up Systems Procédé de fabrication d'un bâti de support et de guidage pour un dispositif de positionnement d'un appareil dans un plan et bâti résultant
CN2101545U (zh) * 1991-10-23 1992-04-15 北京市电加工研究所 大型环形工件精密电火花机床
CN2535220Y (zh) * 2002-03-22 2003-02-12 山推工程机械股份有限公司 铸件毛坯矫形压力机
CN2644060Y (zh) * 2003-08-27 2004-09-29 江苏多棱数控机床股份有限公司 五轴联动龙门数控铣床

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JPS5253492A (en) * 1975-10-23 1977-04-30 Keibuibii Ikuitsupumento Corp Sighting device for fluiding gases
JPS62153024A (ja) * 1985-12-27 1987-07-08 Yokohama Rubber Co Ltd:The 粉体原料の搬送装置
JPH02160440A (ja) * 1988-12-12 1990-06-20 Honda Motor Co Ltd 工作機械
JPH0671533A (ja) * 1992-08-26 1994-03-15 Kikukawa Tekkosho:Kk マシニングセンタ−
JP2952166B2 (ja) * 1994-09-16 1999-09-20 株式会社三協精機製作所 門型駆動装置
JPH08229759A (ja) * 1995-02-24 1996-09-10 Canon Inc 位置決め装置並びにデバイス製造装置及び方法
JPH1094928A (ja) * 1996-09-24 1998-04-14 Shin Nippon Koki Kk 工作機械のテーブル移送装置
JP2000163130A (ja) * 1998-11-30 2000-06-16 Canon Inc 自重補償装置
JP2002154028A (ja) * 2000-11-20 2002-05-28 Canon Inc 加工装置の移動ステージ機構
JP3732763B2 (ja) * 2001-07-13 2006-01-11 住友重機械工業株式会社 ステージ装置
JP2005331402A (ja) 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd ステージ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260180A1 (fr) * 1986-08-28 1988-03-16 Up Systems Procédé de fabrication d'un bâti de support et de guidage pour un dispositif de positionnement d'un appareil dans un plan et bâti résultant
CN86108903A (zh) * 1986-12-28 1987-08-26 湖南省岳阳机床厂 在龙门刨上周边磨削机床导轨的方法及装置
CN2101545U (zh) * 1991-10-23 1992-04-15 北京市电加工研究所 大型环形工件精密电火花机床
CN2535220Y (zh) * 2002-03-22 2003-02-12 山推工程机械股份有限公司 铸件毛坯矫形压力机
CN2644060Y (zh) * 2003-08-27 2004-09-29 江苏多棱数控机床股份有限公司 五轴联动龙门数控铣床

Also Published As

Publication number Publication date
JP4927338B2 (ja) 2012-05-09
KR100716050B1 (ko) 2007-05-08
TW200631724A (en) 2006-09-16
TWI297630B (enrdf_load_stackoverflow) 2008-06-11
KR20060093303A (ko) 2006-08-24
JP2006224285A (ja) 2006-08-31
CN1824458A (zh) 2006-08-30

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