JP4916090B2 - ドープiii−v族窒化物材料、ならびにそれを含む超小型電子デバイスおよびデバイス前駆体構造 - Google Patents
ドープiii−v族窒化物材料、ならびにそれを含む超小型電子デバイスおよびデバイス前駆体構造 Download PDFInfo
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- 239000000463 material Substances 0.000 title claims description 95
- 150000004767 nitrides Chemical class 0.000 title claims description 37
- 238000004377 microelectronic Methods 0.000 title claims description 21
- 239000002243 precursor Substances 0.000 title description 9
- 239000002019 doping agent Substances 0.000 claims description 59
- 239000000758 substrate Substances 0.000 claims description 16
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- 229910052594 sapphire Inorganic materials 0.000 claims description 10
- 239000010980 sapphire Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- 229910052790 beryllium Inorganic materials 0.000 claims description 5
- 229910052791 calcium Inorganic materials 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910052700 potassium Inorganic materials 0.000 claims description 5
- 229910052706 scandium Inorganic materials 0.000 claims description 5
- 229910052708 sodium Inorganic materials 0.000 claims description 5
- 229910052712 strontium Inorganic materials 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 4
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- 229910052744 lithium Inorganic materials 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910052701 rubidium Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
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- 229910002704 AlGaN Inorganic materials 0.000 claims 6
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- 238000000034 method Methods 0.000 description 37
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- 229910002601 GaN Inorganic materials 0.000 description 36
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 34
- 239000012535 impurity Substances 0.000 description 25
- 230000008569 process Effects 0.000 description 25
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 23
- 229910045601 alloy Inorganic materials 0.000 description 22
- 239000000956 alloy Substances 0.000 description 22
- 229910052782 aluminium Inorganic materials 0.000 description 20
- 238000010586 diagram Methods 0.000 description 19
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- 238000006243 chemical reaction Methods 0.000 description 15
- 239000011777 magnesium Substances 0.000 description 15
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 13
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
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- MHYQBXJRURFKIN-UHFFFAOYSA-N C1(C=CC=C1)[Mg] Chemical compound C1(C=CC=C1)[Mg] MHYQBXJRURFKIN-UHFFFAOYSA-N 0.000 description 2
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- -1 MRS Nitride Chemical class 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
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- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
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- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
- H01L29/7784—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material with delta or planar doped donor layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/151—Compositional structures
- H01L29/152—Compositional structures with quantum effects only in vertical direction, i.e. layered structures with quantum effects solely resulting from vertical potential variation
- H01L29/155—Comprising only semiconductor materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
- H01L29/365—Planar doping, e.g. atomic-plane doping, delta-doping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
- H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
- Bipolar Transistors (AREA)
Description
発明の分野
本発明は、ドープIII−V族窒化物材料、例えば窒化アルミニウムガリウム(AlGaN)、窒化ガリウム(GaN)および窒化インジウムガリウム(InGaN)材料、このような材料の形成方法、ならびにこのような材料を含む超小型電子デバイスおよびデバイス前駆体構造に関する。
III−V族窒化物半導体は、そのワイドバンドギャップ、高熱伝導率および大きな降伏電界のため、高温、高周波数および高出力超小型電子工学ならびに紫外線/青/緑光電子工学において有用な材料として大きな可能性がある。
a)高キャリア移動度
b)広ドーピング範囲
c)低ドーパント活性エネルギー
d)高キャリア移動度および広ドーピング範囲の同時改善に関連する低抵抗率
e)特性a)〜d)の高再現性
f)ドーパント不純物を活性化する必要性の排除または代替的にドーパント活性化に必要な温度/時間の低減
g)不純物の組込みを通して生じる窒化物材料に対する活性区域変化の排除
h)ドーパント不純物の組込みに起因する窒化物材料に対する変化の最小化、および
i)ドープIII−V窒化物材料の性質、例えば抵抗率(上記(d)とは対照的に、ある用途においては抵抗率を上昇させるかまたは他の材料特性を変動させることが望ましい)を選択的に変動させる能力。
本発明は、ドープIII−V族窒化物材料、例えば窒化アルミニウムガリウム(AlGaN)、窒化インジウムガリウム(InGaN)および窒化ガリウム(GaN)材料、このような材料の形成方法、ならびにこのような材料を含む超小型電子デバイスおよびデバイス前駆体構造に関する。
ここに以下の参考文献のそれぞれ全体を本明細書に引用して援用する。ザオ(Zhao)ら著、応用物理レター(Applied Physics Letters)77巻(14)2000年10月2日、2195〜2197頁、キム(Kim)ら著、MRS窒化系半導体インターネット論文誌(MRS Internet Journal of Nitride Semiconductors)、Res4S1、G3.49(1999)、「オプトエレクトロニックおよびエレクトロニックデバイス用自立窒化(アルミニウム、インジウム、ガリウム)((Al、In、Ga)N)基板上で改善エピタキシ品質(表面テクスチャおよび欠陥密度)を達成するための方法(METHOD FOR ACHIEVING IMPROVED EPITAXY QUALITY (SURFACE TEXTURE AND DEFECT DENSITY) ON FREE−STANDING (ALUMINUM,INDIUM,GALLIUM) NITRIDE ((Al、In、Ga)N) SUBSTRATES FOR OPTO−ELECTRONIC AND ELECTRONIC DEVICES)」に対してジェフリーS.フリン(Jeffrey S.Flynn)らの名において2000年6月28日に出願された米国特許出願第09/605,195号明細書、「低欠陥密度(Al、In、Ga)Nおよびそれを作製するためのHVPEプロセス(LOW DEFECT DENSITY (Al、In、Ga)N AND HVPE PROCESS FOR MAKING SAME)」に対してロバートP.ボード(Robert P.Vaudo)らの名において1998年10月26日に出願された米国特許出願第09/179,049号明細書、および「(Ga,Al,In)Nベース層を用いたGaNベースデバイス(GaN−BASED DEVICES USING (Ga,Al,In)N BASED LAYERS)」に対してロバートP.ボード(Robert P.Vaudo)らの名において2000年12月5日に発行された米国特許第6,156,581号明細書。
従来のバルクドープ均一性は成長速度ならびに前駆体均一性、気相流均一性およびドーパント前駆体均一性の関数である。デルタドーピングにおいて、成長速度均一性変動を排除することにより、均一且つ再生可能なドーピング特性を達成する可能性を向上する。さらにドーピング均一性に影響を与える他の要因にはドーパント濃度、デルタドーピングプロセス条件およびデルタドーピング時間があるが、本明細書の開示に基づいて当該技術範囲内で容易に最適化して、格子内への所望の組込み速度をもたらすドーピング飽和条件を提供することができる。
母体格子に対するドーパント原子サイズの結果としてデルタドープ層と母体半導体マトリックスとの間に歪みがある場合、デルタドーピングレベルに依存するGaN材料系などのIII−V窒化物材料系での圧電効果は、デルタドープ構造およびそれを備えたデバイス構造を最適化する際に大きな役割を果たすことができる。デルタドープ層から得られる圧電特性の適正な技術のために、複数のタイプの不純物の組み合わせ(異なる格子サイズ、格子配置類似性および活性エネルギー)を、Si、Ge、Mg、C、O、Ca、Zn、Li、Mn、Na、K、Cd、Rb、Sr、ScおよびBeを含むデルタドープ層に採用することができる。さらに圧電特性のさらなる最適化は、デルタドープ層との混合AlInGaN四元合金を作ることにより達成することができる。
AlGaN HEMTのシート電荷は概して、AlGaNアルミニウム含有量を増加させるおよび/または厚さを増加させることにより対応して増加する歪みによって増加する。しかし1013cm−3程度の適度なシート電荷を達成するためには、一般にAlGaNバリア層の臨界厚さを超えなければならない。これにより緩和の可能性のある不安定なデバイス構造になる。この欠陥を排除する1つの方法は、チャネル領域(層14に最も近接した領域16)に高Al含有量を有するAlGaN層を用いて構造を成長させた後、それを徐々に研磨してチャネルから(層14/層16界面から)離間した低Al含有AlGaNにすることである。シート電荷を増加させる他の方法は、バリア層のバルクドーピングなどの従来の技術の利用があるが、バリア層の厚さを相当厚くするかまたはドーピングレベルを非常に高くして材料劣化しなければならない。
SiまたはMgなどのドーパント種でGaNおよびAlGaN層をバルクドーピングすると、デバイス構造の光ルミネセンス特性によって明らかであるようにさらに深いレベルが生じる。これらの深いレベルは、一般に、III−V族窒化物材料で重要なエネルギー出射および伝達用途において所望されるよりはるかに少ないエネルギーであるため、その結果これらの深いレベルは、エミッタに対して非常に低い光取出し効率と、検出器に対して非常に遅い応答性と、フィルタに対して非常に悪い光伝達をもたらす恐れがある。デルタドーピングは選択実質的単一層等価体積のドープ材料を提供するため、本発明においてデルタドーピングを採用してこれらの光学的活性欠陥の影響を軽減することができる。またデルタドーピングは、半導体のバンドギャップより低いエネルギーの光に対する層またはデバイス構造感度を低減するのに有用であるため、対応する半導体デバイスのノイズ特性の改善をもたらす。
前述の段落において説明したように、GaNおよびAlGaNなどのIII−V窒化物材料のバルクドーピングは材料内に深いレベルを生じる。デルタドーピングを利用してこれらの深いレベルを含むデバイス層の断面(体積)を低減することは、温度安定性、寿命、リークおよび降伏特性を始めとするデバイス特性の大幅な改善をもたらすことになる。
デルタドープ層をデバイス内のその配置と関連して設計することにより、例えば、デルタドープコンタクト層、分離層および配線層のデバイス構造内での設置を始めとする改善デバイス製造を可能にする。例えば、デルタドープコンタクト層をHEMTデバイス構造(領域16)の上部付近に配置して、ソースまたはドレインコンタクトのオーミック接触動作を改善することができる。その結果得られるデバイスは、注入エネルギーおよび時間が低減されるため、等価抵抗率のバルクドープ層より注入分離により容易且つ再現可能に分離されることになる。その結果、注入量および注入損傷が大幅に低減することにより、分離、降伏およびリーク特性を始めとする改善デバイス特性をもたらすことになる(図26および27)。
a)コンタクトおよび分離構造
b)高周波AlGaN FETまたはHEMT
c)一般的なデルタドープ構造および光学的機能
d)光電トランジスタ検出構造
e)トンネルドープ構造
f)デルタドープベースHBT(NPN)
g)光学フィルタ
h)検出器
超格子構造は、合金組成が材料厚さまたは材料厚さの一部分にわたって規則的または周期的に変化する構造である。合金組成は通常2つの組成間で変化し、その変化は通常急峻であり、さらに合金組成のその変化は、通例、図7に示すようにバンドギャップの変化をもたらす。急峻度は用いたデバイス製造技術の結果である。原則的に、超格子は図8に示すように3つ以上の合金を有することも可能であるが、説明を容易にするため超格子構造は以下に2つの領域、以下領域1および領域2として表示する領域を有するものとして例示的に説明する。
デルタドープHEMTデバイス構造
サファイア基板をH2雰囲気で、100mbarの圧力で10分間1170℃に加熱した。デルタドーピング構造成長の他の部分に対して圧力を一定にした状態で、反応物を500℃まで冷却するとともに、低温AlN核生成バッファを従来の方法で堆積した。バッファ層をサファイア基板上に堆積した後、2.5slmのNH3および20slmのH2下で1220℃のサセプタ温度まで反応物を加熱して、温度を2分間安定させた。
デルタドープ超格子構造
サファイア基板をH2雰囲気で、100mbarの圧力で10分間1170℃に加熱した。デルタドーピング構造成長の他の部分に対して圧力を一定にした状態で、反応物を500℃まで冷却するとともに、低温AlN核生成バッファを従来の方法で堆積した。バッファ層をサファイア基板上に堆積した後、2.5slmのNH3および20slmのH2の流量下で1220℃まで基板を加熱して、温度を2分間安定させた。
光電陰極構造
サファイア基板をH2周囲雰囲気で、100mbarの圧力で10分間1170℃に加熱した。デルタドーピング構造成長の他の部分に対して圧力を一定にした状態で、反応物を500℃まで冷却するとともに、低温AlN核生成バッファを従来の方法で堆積した。AlNのバッファ層をサファイア基板上に堆積した後、2.5slmのNH3および20slmのH2の流量下で1220℃のサセプタ温度まで基板を加熱して、温度を2分間安定させた。トリメチルガリウム(TMG)およびトリメチルアルミニウム(TMA)を反応物に導入してAl0.3Ga0.7N層を成長させた。その後反応物へのTMGおよびTMAを止めることによりプレポーズステップを開始して、界面は1220℃のサセプタ温度でNH3およびH2周囲雰囲気下に置いた。プレポーズは10秒続いた。プレポーズステップの後、ビス−シクロペンタジエニルマグネシウム(Cp2Mg)を反応物内に75秒間導入してデルタドーピングを提供することによりポーズステップが開始された。ポーズテップの後、反応物へのCp2Mgを止めると同時に、デルタドーピングステップの前にAlGaN膜の堆積に用いたものと同じプロセス条件で反応物へTMAおよびTMGを出すことによりポストポーズステップを開始して、さらに厚くAl0.3Ga0.7Nを成長させた。その後TMAフラックスを変えることによりAlGaN膜の化学量論を変化させて、Al0.15Ga0.85N層を作製した。その後トリメチルアルミニウム(TMA)フラックスを増加させてAl0.3Ga0.7N層を成長させた。最後にこの構造にMgバルクドープGaN層を被せた。これらの構造内でのGaNおよびAlGaN層に対してV/III比はおよそ2500であった。反応物へのTMGおよびTMAを止めることにより材料の成長を止めるとともに、成長した材料をNH3およびH2過剰圧力下で500℃未満に冷却し、反応物圧力を900mbarの圧力まで傾斜させて、光電陰極構造を完成させた。
Claims (11)
- 高電子移動度トランジスタ(HEMT)を含む、III−V族窒化物超小型電子デバイス構造であって、
小さなバンドギャップを有するIII−V族窒化物材料を含むチャネル層と、
前記チャネル層に隣接して配置され、前記チャネル層の小さなバンドギャップよりも大きなバンドギャップを有するIII−V族窒化物材料を含み、そして、この大きなバンドギャップ材料内にデルタドープ層を有するバリア層と、
を含有し、
前記バリア層は、前記デルタドープ層を有することを除いて実質的に均質であり、
前記大きなバンドギャップ材料と前記小さいバンドギャップ材料の組み合わせは、両者間の界面に沿ってチャネルを形成するように配置され、前記デルタドープ層は前記チャネル層から30オングストロームと等しいかこれより小さいゼロでない距離だけ離間している、デバイス構造。 - 前記バリア層は、前記デルタドープ層の存在以外では非ドープである、請求項1に記載の超小型電子デバイス構造。
- 前記バリア層は、非ドープAlGaNを含む、請求項2に記載の超小型電子デバイス構造。
- 前記チャネル層は、非ドープGaNを含む、請求項1に記載の超小型電子デバイス構造。
- 前記デルタドープ層は、Si、Ge、Mg、C、O、Ca、Zn、Li、Mn、Na、K、Cd、Rb、Sr、ScおよびBeからなる群から選択された少なくとも1つのドーパント種を含む、請求項1に記載の超小型電子デバイス構造。
- 前記高電子移動度トランジスタは、AlGaN/GaN高電子移動度トランジスタであり、前記チャネル層はGaNを含み、前記バリア層はAlGaNを含む、請求項1に記載の超小型電子デバイス構造。
- 前記デルタドープ層は、前記AlGaN/GaN高電子移動度トランジスタの前記バリア層内で、前記デルタドープ層とチャネル層とが前記デバイス構造の動作における電荷キャリアのトンネル距離未満の距離だけ離間するような前記トランジスタの前記チャネル層に対する位置に配置される、請求項6に記載の超小型電子デバイス構造。
- 前記デルタドープ層は、シリコンを含む、請求項1に記載の超小型電子デバイス構造。
- サファイア基板と、該基板上のAlNバッファ層と、該AlNバッファ層上のGaN層と、該GaN層上のAlGaN層とを含み、該AlGaN層は内部にデルタドープ層を有し、該AlGaN層は前記デルタドープ層を有することを除いて実質的に均質であり、そして、前記デルタドープ層は前記GaN層から30オングストロームと等しいかこれより小さいゼロでない距離だけ離間している、HEMTデバイス。
- 前記デルタドープ層は、Si、Ge、Mg、C、O、Ca、Zn、Li、Mn、Na、K、Cd、Rd、Sr、ScおよびBeからなる群から選択されたドーパントを含む、請求項9に記載のHEMTデバイス。
- 前記デルタドープ層は、シリコンドーパントを含む、請求項9に記載のHEMTデバイス。
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PCT/US2003/008355 WO2003083950A1 (en) | 2002-03-25 | 2003-03-19 | Doped group iii-v nitride materials, and microelectronic devices and device precursor structures comprising same |
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Families Citing this family (178)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003094240A1 (en) | 2002-04-30 | 2003-11-13 | Cree, Inc. | High voltage switching devices and process for forming same |
US7112830B2 (en) * | 2002-11-25 | 2006-09-26 | Apa Enterprises, Inc. | Super lattice modification of overlying transistor |
JP4469139B2 (ja) * | 2003-04-28 | 2010-05-26 | シャープ株式会社 | 化合物半導体fet |
KR100616516B1 (ko) * | 2003-12-18 | 2006-08-29 | 삼성전기주식회사 | 질화갈륨계 반도체 발광소자 및 그 제조방법 |
US20050133816A1 (en) * | 2003-12-19 | 2005-06-23 | Zhaoyang Fan | III-nitride quantum-well field effect transistors |
JP4801325B2 (ja) * | 2004-04-08 | 2011-10-26 | パナソニック株式会社 | Iii−v族窒化物半導体を用いた半導体装置 |
US7514759B1 (en) * | 2004-04-19 | 2009-04-07 | Hrl Laboratories, Llc | Piezoelectric MEMS integration with GaN technology |
JP4682541B2 (ja) * | 2004-06-15 | 2011-05-11 | 豊田合成株式会社 | 半導体の結晶成長方法 |
KR100616619B1 (ko) * | 2004-09-08 | 2006-08-28 | 삼성전기주식회사 | 질화물계 이종접합 전계효과 트랜지스터 |
US7860137B2 (en) | 2004-10-01 | 2010-12-28 | Finisar Corporation | Vertical cavity surface emitting laser with undoped top mirror |
CN101432936B (zh) * | 2004-10-01 | 2011-02-02 | 菲尼萨公司 | 具有多顶侧接触的垂直腔面发射激光器 |
EP1805805A4 (en) * | 2004-10-08 | 2011-05-04 | Univ California | HIGH POWER LEDS |
GB0424957D0 (en) * | 2004-11-11 | 2004-12-15 | Btg Int Ltd | Methods for fabricating semiconductor devices and devices fabricated thereby |
JP2006190988A (ja) * | 2004-12-06 | 2006-07-20 | Matsushita Electric Ind Co Ltd | 半導体装置 |
KR100661709B1 (ko) * | 2004-12-23 | 2006-12-26 | 엘지이노텍 주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
KR100662191B1 (ko) * | 2004-12-23 | 2006-12-27 | 엘지이노텍 주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
KR100580751B1 (ko) * | 2004-12-23 | 2006-05-15 | 엘지이노텍 주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
KR100580752B1 (ko) | 2004-12-23 | 2006-05-15 | 엘지이노텍 주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
US7525248B1 (en) | 2005-01-26 | 2009-04-28 | Ac Led Lighting, L.L.C. | Light emitting diode lamp |
KR100631971B1 (ko) * | 2005-02-28 | 2006-10-11 | 삼성전기주식회사 | 질화물 반도체 발광 소자 |
JP2006253224A (ja) * | 2005-03-08 | 2006-09-21 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
US8272757B1 (en) | 2005-06-03 | 2012-09-25 | Ac Led Lighting, L.L.C. | Light emitting diode lamp capable of high AC/DC voltage operation |
EP1916704A4 (en) * | 2005-08-05 | 2011-06-08 | Sekisui Chemical Co Ltd | METHOD FOR FORMING GROUP III NITRIDE FILMS SUCH AS GALLIUM NITRIDE |
KR100679235B1 (ko) * | 2005-12-07 | 2007-02-06 | 한국전자통신연구원 | 반도체 발광소자 및 그 제조방법 |
CN100435281C (zh) * | 2006-01-17 | 2008-11-19 | 北京大学 | 制备GaN基稀磁半导体材料的方法 |
KR100809243B1 (ko) * | 2006-04-27 | 2008-02-29 | 삼성전기주식회사 | 질화물막 제조방법 및 질화물 구조 |
PL1883119T3 (pl) * | 2006-07-27 | 2016-04-29 | Osram Opto Semiconductors Gmbh | Półprzewodnikowa struktura warstwowa z supersiecią |
DE102006046227A1 (de) * | 2006-07-27 | 2008-01-31 | Osram Opto Semiconductors Gmbh | Halbleiter-Schichtstruktur mit Übergitter |
EP1883141B1 (de) * | 2006-07-27 | 2017-05-24 | OSRAM Opto Semiconductors GmbH | LD oder LED mit Übergitter-Mantelschicht |
EP1883140B1 (de) * | 2006-07-27 | 2013-02-27 | OSRAM Opto Semiconductors GmbH | LD oder LED mit Übergitter-Mantelschicht und Dotierungsgradienten |
GB2444279A (en) * | 2006-11-30 | 2008-06-04 | Bookham Technology Plc | Optoelectronic device |
CN100438083C (zh) * | 2006-12-23 | 2008-11-26 | 厦门大学 | δ掺杂4H-SiC PIN结构紫外光电探测器及其制备方法 |
US20090072269A1 (en) * | 2007-09-17 | 2009-03-19 | Chang Soo Suh | Gallium nitride diodes and integrated components |
TWI485642B (zh) * | 2008-02-26 | 2015-05-21 | Epistar Corp | 光電元件之客製化製造方法 |
US8519438B2 (en) | 2008-04-23 | 2013-08-27 | Transphorm Inc. | Enhancement mode III-N HEMTs |
JP2009289826A (ja) * | 2008-05-27 | 2009-12-10 | Toyota Central R&D Labs Inc | へテロ接合を有する半導体装置とその製造方法 |
US8289065B2 (en) | 2008-09-23 | 2012-10-16 | Transphorm Inc. | Inductive load power switching circuits |
US7898004B2 (en) | 2008-12-10 | 2011-03-01 | Transphorm Inc. | Semiconductor heterostructure diodes |
US8742459B2 (en) * | 2009-05-14 | 2014-06-03 | Transphorm Inc. | High voltage III-nitride semiconductor devices |
US8390000B2 (en) * | 2009-08-28 | 2013-03-05 | Transphorm Inc. | Semiconductor devices with field plates |
US8421162B2 (en) | 2009-09-30 | 2013-04-16 | Suvolta, Inc. | Advanced transistors with punch through suppression |
US8273617B2 (en) | 2009-09-30 | 2012-09-25 | Suvolta, Inc. | Electronic devices and systems, and methods for making and using the same |
US8592309B2 (en) * | 2009-11-06 | 2013-11-26 | Ultratech, Inc. | Laser spike annealing for GaN LEDs |
US8658451B2 (en) | 2009-11-06 | 2014-02-25 | Ultratech, Inc. | Activating GaN LEDs by laser spike annealing and flash annealing |
US9634183B2 (en) * | 2009-12-04 | 2017-04-25 | Sensor Electronic Technology, Inc. | Semiconductor material doping |
US9287442B2 (en) * | 2009-12-04 | 2016-03-15 | Sensor Electronic Technology, Inc. | Semiconductor material doping |
US8426225B2 (en) * | 2009-12-04 | 2013-04-23 | Sensor Electronic Technology, Inc. | Semiconductor material doping based on target valence band discontinuity |
US10497829B2 (en) | 2009-12-04 | 2019-12-03 | Sensor Electronic Technology, Inc. | Semiconductor material doping |
US9368580B2 (en) | 2009-12-04 | 2016-06-14 | Sensor Electronic Technology, Inc. | Semiconductor material doping |
US8389977B2 (en) | 2009-12-10 | 2013-03-05 | Transphorm Inc. | Reverse side engineered III-nitride devices |
US8536615B1 (en) | 2009-12-16 | 2013-09-17 | Cree, Inc. | Semiconductor device structures with modulated and delta doping and related methods |
US8604461B2 (en) | 2009-12-16 | 2013-12-10 | Cree, Inc. | Semiconductor device structures with modulated doping and related methods |
KR20130007557A (ko) | 2010-01-27 | 2013-01-18 | 예일 유니버시티 | GaN 소자의 전도도 기반 선택적 에칭 및 그의 응용 |
US8558234B2 (en) * | 2010-02-11 | 2013-10-15 | California Institute Of Technology | Low voltage low light imager and photodetector |
US8530286B2 (en) | 2010-04-12 | 2013-09-10 | Suvolta, Inc. | Low power semiconductor transistor structure and method of fabrication thereof |
US8569128B2 (en) | 2010-06-21 | 2013-10-29 | Suvolta, Inc. | Semiconductor structure and method of fabrication thereof with mixed metal types |
US8759872B2 (en) | 2010-06-22 | 2014-06-24 | Suvolta, Inc. | Transistor with threshold voltage set notch and method of fabrication thereof |
JP5548904B2 (ja) * | 2010-08-30 | 2014-07-16 | 古河電気工業株式会社 | 窒化物系化合物半導体および窒化物系化合物半導体素子 |
US8377783B2 (en) | 2010-09-30 | 2013-02-19 | Suvolta, Inc. | Method for reducing punch-through in a transistor device |
JP5569321B2 (ja) * | 2010-10-07 | 2014-08-13 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
JP2013546181A (ja) * | 2010-10-28 | 2013-12-26 | ユニバーシティ オブ ユタ リサーチ ファウンデーション | Iii−v族半導体におけるp型ドーピングを強化する方法 |
US8404551B2 (en) | 2010-12-03 | 2013-03-26 | Suvolta, Inc. | Source/drain extension control for advanced transistors |
US8742460B2 (en) | 2010-12-15 | 2014-06-03 | Transphorm Inc. | Transistors with isolation regions |
US8643062B2 (en) | 2011-02-02 | 2014-02-04 | Transphorm Inc. | III-N device structures and methods |
US8461875B1 (en) | 2011-02-18 | 2013-06-11 | Suvolta, Inc. | Digital circuits having improved transistors, and methods therefor |
SG183608A1 (en) * | 2011-03-02 | 2012-09-27 | Soitec Silicon On Insulator | Methods of forming iii/v semiconductor materials, and semiconductor structures formed using such methods |
US8148252B1 (en) | 2011-03-02 | 2012-04-03 | S.O.I. Tec Silicon On Insulator Technologies | Methods of forming III/V semiconductor materials, and semiconductor structures formed using such methods |
US8525271B2 (en) | 2011-03-03 | 2013-09-03 | Suvolta, Inc. | Semiconductor structure with improved channel stack and method for fabrication thereof |
US8716141B2 (en) | 2011-03-04 | 2014-05-06 | Transphorm Inc. | Electrode configurations for semiconductor devices |
US8772842B2 (en) | 2011-03-04 | 2014-07-08 | Transphorm, Inc. | Semiconductor diodes with low reverse bias currents |
JP5361925B2 (ja) * | 2011-03-08 | 2013-12-04 | 株式会社東芝 | 半導体発光素子およびその製造方法 |
TW201238043A (en) * | 2011-03-11 | 2012-09-16 | Chi Mei Lighting Tech Corp | Light-emitting diode device and method for manufacturing the same |
US8400219B2 (en) | 2011-03-24 | 2013-03-19 | Suvolta, Inc. | Analog circuits having improved transistors, and methods therefor |
US8748270B1 (en) | 2011-03-30 | 2014-06-10 | Suvolta, Inc. | Process for manufacturing an improved analog transistor |
US8354689B2 (en) * | 2011-04-28 | 2013-01-15 | Palo Alto Research Center Incorporated | Light emitting devices having dopant front loaded tunnel barrier layers |
CN102254779B (zh) * | 2011-05-10 | 2012-12-26 | 中国电子科技集团公司第五十五研究所 | 无需Cs激活的异质结型GaN负电子亲和势光电阴极 |
US8999861B1 (en) | 2011-05-11 | 2015-04-07 | Suvolta, Inc. | Semiconductor structure with substitutional boron and method for fabrication thereof |
US8796048B1 (en) | 2011-05-11 | 2014-08-05 | Suvolta, Inc. | Monitoring and measurement of thin film layers |
US8811068B1 (en) | 2011-05-13 | 2014-08-19 | Suvolta, Inc. | Integrated circuit devices and methods |
US8569156B1 (en) | 2011-05-16 | 2013-10-29 | Suvolta, Inc. | Reducing or eliminating pre-amorphization in transistor manufacture |
US8735987B1 (en) | 2011-06-06 | 2014-05-27 | Suvolta, Inc. | CMOS gate stack structures and processes |
US8995204B2 (en) | 2011-06-23 | 2015-03-31 | Suvolta, Inc. | Circuit devices and methods having adjustable transistor body bias |
US8629016B1 (en) | 2011-07-26 | 2014-01-14 | Suvolta, Inc. | Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer |
KR101891373B1 (ko) | 2011-08-05 | 2018-08-24 | 엠아이이 후지쯔 세미컨덕터 리미티드 | 핀 구조물을 갖는 반도체 디바이스 및 그 제조 방법 |
US8748986B1 (en) | 2011-08-05 | 2014-06-10 | Suvolta, Inc. | Electronic device with controlled threshold voltage |
US8614128B1 (en) | 2011-08-23 | 2013-12-24 | Suvolta, Inc. | CMOS structures and processes based on selective thinning |
US8645878B1 (en) | 2011-08-23 | 2014-02-04 | Suvolta, Inc. | Porting a circuit design from a first semiconductor process to a second semiconductor process |
US8901604B2 (en) | 2011-09-06 | 2014-12-02 | Transphorm Inc. | Semiconductor devices with guard rings |
US9257547B2 (en) | 2011-09-13 | 2016-02-09 | Transphorm Inc. | III-N device structures having a non-insulating substrate |
US8713511B1 (en) | 2011-09-16 | 2014-04-29 | Suvolta, Inc. | Tools and methods for yield-aware semiconductor manufacturing process target generation |
US8803242B2 (en) * | 2011-09-19 | 2014-08-12 | Eta Semiconductor Inc. | High mobility enhancement mode FET |
US9236466B1 (en) | 2011-10-07 | 2016-01-12 | Mie Fujitsu Semiconductor Limited | Analog circuits having improved insulated gate transistors, and methods therefor |
US8598937B2 (en) | 2011-10-07 | 2013-12-03 | Transphorm Inc. | High power semiconductor electronic components with increased reliability |
JP2013120936A (ja) | 2011-12-07 | 2013-06-17 | Ultratech Inc | パターン効果を低減したGaNLEDのレーザーアニール |
US8895327B1 (en) | 2011-12-09 | 2014-11-25 | Suvolta, Inc. | Tipless transistors, short-tip transistors, and methods and circuits therefor |
US8819603B1 (en) | 2011-12-15 | 2014-08-26 | Suvolta, Inc. | Memory circuits and methods of making and designing the same |
US8883600B1 (en) | 2011-12-22 | 2014-11-11 | Suvolta, Inc. | Transistor having reduced junction leakage and methods of forming thereof |
US8599623B1 (en) | 2011-12-23 | 2013-12-03 | Suvolta, Inc. | Circuits and methods for measuring circuit elements in an integrated circuit device |
US8970289B1 (en) | 2012-01-23 | 2015-03-03 | Suvolta, Inc. | Circuits and devices for generating bi-directional body bias voltages, and methods therefor |
US8877619B1 (en) | 2012-01-23 | 2014-11-04 | Suvolta, Inc. | Process for manufacture of integrated circuits with different channel doping transistor architectures and devices therefrom |
US9093550B1 (en) | 2012-01-31 | 2015-07-28 | Mie Fujitsu Semiconductor Limited | Integrated circuits having a plurality of high-K metal gate FETs with various combinations of channel foundation structure and gate stack structure and methods of making same |
US9165766B2 (en) | 2012-02-03 | 2015-10-20 | Transphorm Inc. | Buffer layer structures suited for III-nitride devices with foreign substrates |
US9406567B1 (en) | 2012-02-28 | 2016-08-02 | Mie Fujitsu Semiconductor Limited | Method for fabricating multiple transistor devices on a substrate with varying threshold voltages |
US8863064B1 (en) | 2012-03-23 | 2014-10-14 | Suvolta, Inc. | SRAM cell layout structure and devices therefrom |
JP5874495B2 (ja) * | 2012-03-29 | 2016-03-02 | 豊田合成株式会社 | Gaを含むIII族窒化物半導体の製造方法 |
CN103367417A (zh) * | 2012-03-31 | 2013-10-23 | 稳懋半导体股份有限公司 | 三族氮化物高电子迁移率晶体管 |
WO2013155108A1 (en) | 2012-04-09 | 2013-10-17 | Transphorm Inc. | N-polar iii-nitride transistors |
KR20130139707A (ko) * | 2012-06-13 | 2013-12-23 | 삼성전자주식회사 | 반도체 소자 및 이에 사용되는 초격자층 |
US9299698B2 (en) | 2012-06-27 | 2016-03-29 | Mie Fujitsu Semiconductor Limited | Semiconductor structure with multiple transistors having various threshold voltages |
US9184275B2 (en) | 2012-06-27 | 2015-11-10 | Transphorm Inc. | Semiconductor devices with integrated hole collectors |
US9583353B2 (en) * | 2012-06-28 | 2017-02-28 | Yale University | Lateral electrochemical etching of III-nitride materials for microfabrication |
KR101376976B1 (ko) * | 2012-06-29 | 2014-03-21 | 인텔렉추얼디스커버리 주식회사 | 반도체 발광 디바이스 |
US8637955B1 (en) | 2012-08-31 | 2014-01-28 | Suvolta, Inc. | Semiconductor structure with reduced junction leakage and method of fabrication thereof |
JP6002508B2 (ja) * | 2012-09-03 | 2016-10-05 | 住友化学株式会社 | 窒化物半導体ウェハ |
US9112057B1 (en) | 2012-09-18 | 2015-08-18 | Mie Fujitsu Semiconductor Limited | Semiconductor devices with dopant migration suppression and method of fabrication thereof |
US9041126B2 (en) | 2012-09-21 | 2015-05-26 | Mie Fujitsu Semiconductor Limited | Deeply depleted MOS transistors having a screening layer and methods thereof |
CN102903615B (zh) * | 2012-10-18 | 2018-02-06 | 中山大学 | 一种p型GaN与AlGaN半导体材料的制备方法 |
CN104854698A (zh) | 2012-10-31 | 2015-08-19 | 三重富士通半导体有限责任公司 | 具有低变化晶体管外围电路的dram型器件以及相关方法 |
US8816754B1 (en) | 2012-11-02 | 2014-08-26 | Suvolta, Inc. | Body bias circuits and methods |
US9093997B1 (en) | 2012-11-15 | 2015-07-28 | Mie Fujitsu Semiconductor Limited | Slew based process and bias monitors and related methods |
US9070477B1 (en) | 2012-12-12 | 2015-06-30 | Mie Fujitsu Semiconductor Limited | Bit interleaved low voltage static random access memory (SRAM) and related methods |
US9112484B1 (en) | 2012-12-20 | 2015-08-18 | Mie Fujitsu Semiconductor Limited | Integrated circuit process and bias monitors and related methods |
US9818907B2 (en) * | 2013-01-23 | 2017-11-14 | Ushio Denki Kabushiki Kaisha | LED element |
WO2014127150A1 (en) | 2013-02-15 | 2014-08-21 | Transphorm Inc. | Electrodes for semiconductor devices and methods of forming the same |
US9268885B1 (en) | 2013-02-28 | 2016-02-23 | Mie Fujitsu Semiconductor Limited | Integrated circuit device methods and models with predicted device metric variations |
US8994415B1 (en) | 2013-03-01 | 2015-03-31 | Suvolta, Inc. | Multiple VDD clock buffer |
US8988153B1 (en) | 2013-03-09 | 2015-03-24 | Suvolta, Inc. | Ring oscillator with NMOS or PMOS variation insensitivity |
US9087718B2 (en) | 2013-03-13 | 2015-07-21 | Transphorm Inc. | Enhancement-mode III-nitride devices |
US9299801B1 (en) | 2013-03-14 | 2016-03-29 | Mie Fujitsu Semiconductor Limited | Method for fabricating a transistor device with a tuned dopant profile |
US9112495B1 (en) | 2013-03-15 | 2015-08-18 | Mie Fujitsu Semiconductor Limited | Integrated circuit device body bias circuits and methods |
US9245992B2 (en) | 2013-03-15 | 2016-01-26 | Transphorm Inc. | Carbon doping semiconductor devices |
US9449967B1 (en) | 2013-03-15 | 2016-09-20 | Fujitsu Semiconductor Limited | Transistor array structure |
US9478571B1 (en) | 2013-05-24 | 2016-10-25 | Mie Fujitsu Semiconductor Limited | Buried channel deeply depleted channel transistor |
WO2015009514A1 (en) | 2013-07-19 | 2015-01-22 | Transphorm Inc. | Iii-nitride transistor including a p-type depleting layer |
US9041060B2 (en) | 2013-07-25 | 2015-05-26 | International Business Machines Corporation | III-V FET device with overlapped extension regions using gate last |
US9443728B2 (en) * | 2013-08-16 | 2016-09-13 | Applied Materials, Inc. | Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing |
WO2015029578A1 (ja) * | 2013-08-27 | 2015-03-05 | 富士電機株式会社 | 半導体装置の製造方法および半導体装置 |
US8976575B1 (en) | 2013-08-29 | 2015-03-10 | Suvolta, Inc. | SRAM performance monitor |
US20150137179A1 (en) * | 2013-11-19 | 2015-05-21 | Huga Optotech Inc. | Power device |
US9640650B2 (en) * | 2014-01-16 | 2017-05-02 | Qorvo Us, Inc. | Doped gallium nitride high-electron mobility transistor |
US11095096B2 (en) | 2014-04-16 | 2021-08-17 | Yale University | Method for a GaN vertical microcavity surface emitting laser (VCSEL) |
WO2015181648A1 (en) | 2014-05-27 | 2015-12-03 | The Silanna Group Pty Limited | An optoelectronic device |
JP6636459B2 (ja) | 2014-05-27 | 2020-01-29 | シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッドSilanna Uv Technologies Pte Ltd | 半導体構造と超格子とを用いた高度電子デバイス |
WO2015181656A1 (en) | 2014-05-27 | 2015-12-03 | The Silanna Group Pty Limited | Electronic devices comprising n-type and p-type superlattices |
US11322643B2 (en) | 2014-05-27 | 2022-05-03 | Silanna UV Technologies Pte Ltd | Optoelectronic device |
US9318593B2 (en) | 2014-07-21 | 2016-04-19 | Transphorm Inc. | Forming enhancement mode III-nitride devices |
US9710006B2 (en) | 2014-07-25 | 2017-07-18 | Mie Fujitsu Semiconductor Limited | Power up body bias circuits and methods |
DE102014111058A1 (de) * | 2014-08-04 | 2016-02-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zur Herstellung |
US9231064B1 (en) | 2014-08-12 | 2016-01-05 | Raytheon Company | Double heterojunction group III-nitride structures |
US9319013B2 (en) | 2014-08-19 | 2016-04-19 | Mie Fujitsu Semiconductor Limited | Operational amplifier input offset correction with transistor threshold voltage adjustment |
JP7016259B6 (ja) | 2014-09-30 | 2023-12-15 | イェール ユニバーシティー | 多孔質窒化ガリウム層およびそれを含む半導体発光デバイス |
US9876143B2 (en) | 2014-10-01 | 2018-01-23 | Rayvio Corporation | Ultraviolet light emitting device doped with boron |
US11018231B2 (en) | 2014-12-01 | 2021-05-25 | Yale University | Method to make buried, highly conductive p-type III-nitride layers |
US9536967B2 (en) | 2014-12-16 | 2017-01-03 | Transphorm Inc. | Recessed ohmic contacts in a III-N device |
US9536966B2 (en) | 2014-12-16 | 2017-01-03 | Transphorm Inc. | Gate structures for III-N devices |
US9580304B2 (en) * | 2015-05-07 | 2017-02-28 | Texas Instruments Incorporated | Low-stress low-hydrogen LPCVD silicon nitride |
WO2016187421A1 (en) | 2015-05-19 | 2016-11-24 | Yale University | A method and device concerning iii-nitride edge emitting laser diode of high confinement factor with lattice matched cladding layer |
TWI552948B (zh) * | 2015-06-05 | 2016-10-11 | 環球晶圓股份有限公司 | 半導體元件 |
CN105070801B (zh) * | 2015-08-18 | 2018-03-06 | 西安电子科技大学 | 非Si掺杂无InGaN黄光LED材料及其制作方法 |
CN105429001B (zh) * | 2015-10-27 | 2019-06-25 | 西安电子科技大学 | Si/Ge超晶格量子级联激光器及其制备方法 |
WO2017079168A1 (en) * | 2015-11-04 | 2017-05-11 | The Regents Of The University Of California | Iii-nitride tunnel junction with modified p-n interface |
US9941363B2 (en) | 2015-12-18 | 2018-04-10 | International Business Machines Corporation | III-V transistor device with self-aligned doped bottom barrier |
US11322599B2 (en) | 2016-01-15 | 2022-05-03 | Transphorm Technology, Inc. | Enhancement mode III-nitride devices having an Al1-xSixO gate insulator |
CN107230709A (zh) * | 2016-03-25 | 2017-10-03 | 北京大学 | AlGaN/GaN MIS-HEMT的制作方法 |
US10224401B2 (en) | 2016-05-31 | 2019-03-05 | Transphorm Inc. | III-nitride devices including a graded depleting layer |
JP7019942B2 (ja) * | 2016-09-28 | 2022-02-16 | 富士通株式会社 | 化合物半導体基板及びその製造方法、化合物半導体装置及びその製造方法、電源装置、高出力増幅器 |
TWI762467B (zh) * | 2017-02-22 | 2022-05-01 | 晶元光電股份有限公司 | 氮化物半導體磊晶疊層結構及其功率元件 |
WO2019010173A1 (en) * | 2017-07-07 | 2019-01-10 | Skyworks Solutions, Inc. | SUBSTITUTED ALUMINUM NITRIDE FOR ENHANCED ACOUSTIC WAVE FILTERS |
US10916424B2 (en) * | 2017-12-05 | 2021-02-09 | King Abdullah University Of Science And Technology | Methods for forming graded wurtzite III-nitride alloy layers |
JP6668316B2 (ja) * | 2017-12-25 | 2020-03-18 | 株式会社サイオクス | 窒化物半導体積層物および半導体装置 |
WO2019227100A1 (en) * | 2018-05-25 | 2019-11-28 | The Regents Of The University Of Michigan | Enhanced doping efficiency of ultrawide bandgap semiconductors by metal-semiconductor assisted epitaxy |
CN108899403B (zh) * | 2018-07-20 | 2020-09-22 | 西安电子科技大学 | 基于ScAlN/AlGaN超晶格p型层的高效发光二极管及制备方法 |
CN109742203A (zh) * | 2019-01-14 | 2019-05-10 | 江西兆驰半导体有限公司 | 一种氮化物发光二极管 |
CN110364606A (zh) * | 2019-07-26 | 2019-10-22 | 佛山市国星半导体技术有限公司 | 一种紫外发光二极管外延结构及其制作方法 |
CN112522781B (zh) * | 2021-02-18 | 2021-04-23 | 中芯集成电路制造(绍兴)有限公司 | 碳化硅衬底上的缓冲层及其形成方法 |
CN113555462B (zh) * | 2021-07-05 | 2023-01-17 | 浙江芯科半导体有限公司 | 一种双结型Ga2O3器件及其制备方法 |
CN114000199B (zh) * | 2021-08-27 | 2023-01-31 | 深圳市汇芯通信技术有限公司 | 单晶氮化铝薄膜及其制作方法、体声波滤波器的制作方法 |
CN114094976B (zh) * | 2022-01-24 | 2022-04-15 | 湖南大学 | 一种氮化铝薄膜及其制备方法和薄膜体声波滤波器 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0841704A1 (en) * | 1996-11-07 | 1998-05-13 | Paul-Drude-Institut für Festkörperelektronik | Semiconductor transistor device and method of manufacturing the same |
JPH10284507A (ja) * | 1997-04-04 | 1998-10-23 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2000138368A (ja) * | 1998-10-29 | 2000-05-16 | Hitachi Cable Ltd | Iii−v族化合物半導体の気相成長方法及び高電子移動度トランジスタの製造方法 |
JP2000323704A (ja) * | 1999-05-13 | 2000-11-24 | Nippon Telegr & Teleph Corp <Ntt> | 電界効果トランジスタ |
JP2001077353A (ja) * | 1999-06-30 | 2001-03-23 | Toshiba Corp | 高電子移動度トランジスタ及び電力増幅器 |
JP2001274375A (ja) * | 2000-03-28 | 2001-10-05 | Nec Corp | ヘテロ接合電界効果トランジスタ |
JP2001284576A (ja) * | 2000-03-30 | 2001-10-12 | Toshiba Corp | 高電子移動度トランジスタ及びその製造方法 |
EP1172859A2 (en) * | 2000-07-14 | 2002-01-16 | TRW Inc. | Partially relaxed channel HEMT device |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060234A (en) * | 1984-11-19 | 1991-10-22 | Max-Planck Gesellschaft Zur Forderung Der Wissenschaften | Injection laser with at least one pair of monoatomic layers of doping atoms |
US4780748A (en) * | 1986-06-06 | 1988-10-25 | American Telephone & Telegraph Company, At&T Bell Laboratories | Field-effect transistor having a delta-doped ohmic contact |
US5965931A (en) * | 1993-04-19 | 1999-10-12 | The Board Of Regents Of The University Of California | Bipolar transistor having base region with coupled delta layers |
US5679152A (en) | 1994-01-27 | 1997-10-21 | Advanced Technology Materials, Inc. | Method of making a single crystals Ga*N article |
JP3412128B2 (ja) | 1997-03-06 | 2003-06-03 | 株式会社島津機械製作所 | 自動巻き寿司製造装置 |
US5831277A (en) * | 1997-03-19 | 1998-11-03 | Northwestern University | III-nitride superlattice structures |
CN1131548C (zh) * | 1997-04-04 | 2003-12-17 | 松下电器产业株式会社 | 半导体装置 |
JPH10294452A (ja) | 1997-04-22 | 1998-11-04 | Sony Corp | ヘテロ接合電界効果トランジスタ |
JPH10335637A (ja) * | 1997-05-30 | 1998-12-18 | Sony Corp | ヘテロ接合電界効果トランジスタ |
US6316793B1 (en) * | 1998-06-12 | 2001-11-13 | Cree, Inc. | Nitride based transistors on semi-insulating silicon carbide substrates |
JP3609661B2 (ja) * | 1999-08-19 | 2005-01-12 | 株式会社東芝 | 半導体発光素子 |
US6342411B1 (en) * | 1999-09-03 | 2002-01-29 | Motorola Inc. | Electronic component and method for manufacture |
US6498360B1 (en) * | 2000-02-29 | 2002-12-24 | University Of Connecticut | Coupled-well structure for transport channel in field effect transistors |
JP3527496B2 (ja) | 2000-03-03 | 2004-05-17 | 松下電器産業株式会社 | 半導体装置 |
JP4186032B2 (ja) * | 2000-06-29 | 2008-11-26 | 日本電気株式会社 | 半導体装置 |
JP4022708B2 (ja) * | 2000-06-29 | 2007-12-19 | 日本電気株式会社 | 半導体装置 |
US6992319B2 (en) * | 2000-07-18 | 2006-01-31 | Epitaxial Technologies | Ultra-linear multi-channel field effect transistor |
JP2002057158A (ja) * | 2000-08-09 | 2002-02-22 | Sony Corp | 絶縁性窒化物層及びその形成方法、半導体装置及びその製造方法 |
JP2002314072A (ja) | 2001-04-19 | 2002-10-25 | Nec Corp | 高誘電体薄膜を備えた半導体装置及びその製造方法並びに誘電体膜の成膜装置 |
US6849882B2 (en) * | 2001-05-11 | 2005-02-01 | Cree Inc. | Group-III nitride based high electron mobility transistor (HEMT) with barrier/spacer layer |
-
2002
- 2002-03-25 US US10/107,001 patent/US7919791B2/en not_active Expired - Fee Related
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2003
- 2003-03-19 KR KR10-2004-7015208A patent/KR20040104959A/ko active Search and Examination
- 2003-03-19 JP JP2003581267A patent/JP4916090B2/ja not_active Expired - Lifetime
- 2003-03-19 WO PCT/US2003/008355 patent/WO2003083950A1/en active Application Filing
- 2003-03-19 AU AU2003224709A patent/AU2003224709A1/en not_active Abandoned
- 2003-03-19 EP EP03721392A patent/EP1488460B1/en not_active Expired - Lifetime
- 2003-03-19 CA CA002479657A patent/CA2479657A1/en not_active Abandoned
- 2003-03-19 CN CNB038071312A patent/CN100375292C/zh not_active Expired - Lifetime
- 2003-03-25 TW TW092106607A patent/TW200306016A/zh unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0841704A1 (en) * | 1996-11-07 | 1998-05-13 | Paul-Drude-Institut für Festkörperelektronik | Semiconductor transistor device and method of manufacturing the same |
JPH10284507A (ja) * | 1997-04-04 | 1998-10-23 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP2000138368A (ja) * | 1998-10-29 | 2000-05-16 | Hitachi Cable Ltd | Iii−v族化合物半導体の気相成長方法及び高電子移動度トランジスタの製造方法 |
JP2000323704A (ja) * | 1999-05-13 | 2000-11-24 | Nippon Telegr & Teleph Corp <Ntt> | 電界効果トランジスタ |
JP2001077353A (ja) * | 1999-06-30 | 2001-03-23 | Toshiba Corp | 高電子移動度トランジスタ及び電力増幅器 |
JP2001274375A (ja) * | 2000-03-28 | 2001-10-05 | Nec Corp | ヘテロ接合電界効果トランジスタ |
JP2001284576A (ja) * | 2000-03-30 | 2001-10-12 | Toshiba Corp | 高電子移動度トランジスタ及びその製造方法 |
EP1172859A2 (en) * | 2000-07-14 | 2002-01-16 | TRW Inc. | Partially relaxed channel HEMT device |
Also Published As
Publication number | Publication date |
---|---|
CN1643696A (zh) | 2005-07-20 |
EP1488460B1 (en) | 2013-01-02 |
WO2003083950A1 (en) | 2003-10-09 |
AU2003224709A1 (en) | 2003-10-13 |
JP2005526384A (ja) | 2005-09-02 |
CN100375292C (zh) | 2008-03-12 |
KR20040104959A (ko) | 2004-12-13 |
US7919791B2 (en) | 2011-04-05 |
EP1488460A4 (en) | 2008-02-20 |
EP1488460A1 (en) | 2004-12-22 |
US20030178633A1 (en) | 2003-09-25 |
CA2479657A1 (en) | 2003-10-09 |
TW200306016A (en) | 2003-11-01 |
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