JP2013546181A - Iii−v族半導体におけるp型ドーピングを強化する方法 - Google Patents
Iii−v族半導体におけるp型ドーピングを強化する方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 64
- 239000004065 semiconductor Substances 0.000 title claims abstract description 44
- 230000002708 enhancing effect Effects 0.000 title description 4
- 239000002019 doping agent Substances 0.000 claims abstract description 70
- 239000004094 surface-active agent Substances 0.000 claims abstract description 63
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 54
- 239000001257 hydrogen Substances 0.000 claims abstract description 31
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 10
- 230000001965 increasing effect Effects 0.000 claims abstract description 4
- 239000011777 magnesium Substances 0.000 claims description 46
- 229910052749 magnesium Inorganic materials 0.000 claims description 25
- 229910052793 cadmium Inorganic materials 0.000 claims description 22
- 229910052790 beryllium Inorganic materials 0.000 claims description 14
- 238000000137 annealing Methods 0.000 claims description 6
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 5
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 5
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 abstract 1
- 239000010408 film Substances 0.000 description 66
- 239000011701 zinc Substances 0.000 description 51
- 230000000694 effects Effects 0.000 description 28
- 239000000539 dimer Substances 0.000 description 24
- 125000004429 atom Chemical group 0.000 description 23
- 230000008569 process Effects 0.000 description 22
- 229910052787 antimony Inorganic materials 0.000 description 17
- 150000001768 cations Chemical class 0.000 description 16
- 230000009977 dual effect Effects 0.000 description 13
- 239000000126 substance Substances 0.000 description 13
- 229910052725 zinc Inorganic materials 0.000 description 13
- 238000004364 calculation method Methods 0.000 description 11
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 11
- 230000008859 change Effects 0.000 description 9
- 230000009471 action Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910017885 Cu—Pt Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Abstract
【選択図】 図2
Description
表面におけるSbおよびHの影響下で(001)GaP膜でのZn、Mg、Be、およびCd導入の第一原理計算を行った。Sb単独では、GaP膜中の全ドーパントの膜ドーピングエネルギーにほとんど影響がなく、Hも存在する場合のみ、Sbにより前記膜ドーピングエネルギーが実質的に低下することがわかった。また、Sbなしで表面のHだけでは、同様な効果が得られなかった。本発明のいかなる特定の作用理論にも拘束される意図はないが、本願発明者らは、これがP型ドーピング工程を熱力学的に好適なものにするSbおよびHの相乗効果(デュアル界面活性剤効果)であると考えている。デュアル界面活性剤をもたらす上で、Sbの役割は、電子を再分布させる電子だめとして作用することであり、これは金属元素を伴う半導体表面用に一般化されたECRに類似している[14]。Hの役割は、P型ドーパントに不足している電子1つを供給して、当該系がECRを満たせるようにすることである[15]。実験的にIII−V族系でMgおよびZnのドーピングを高レベルで達成することは困難である[8、16]。本発明は、III−V族化合物のエピタキシャル成長中にP型ドーピングを改善する上で共通の戦略をもたらす重大なブレークスルーとなる。
ΔEdoping=Edoped−Eundoped+μGa−μDopant
式中、Edoped[(E]undoped)はドープされた(ドープされていない)系、すなわちスーパーセルの全エネルギー、μGa(μDopant)はGa(ドーパント)の化学ポテンシャルである。一般に、μGaはμGa[bulk]+ΔHf[GaP](P含有量の高い条件)からμGa[bulk](Ga含有量の高い条件)まで異なり[21]、式中、ΔHf[GaP]はGaPの生成エンタルピーで、μDopantはμDopant[bulk]に等しい。界面活性剤Sbによる膜ドーピングエネルギーの変化を計算する際、μGaおよびμZnは現れない。Hの場合、膜ドーピングエネルギーは、ドーピング時にHが1つ当該系に追加される場合、H[(μ]H)の化学ポテンシャルに依存する。Hの化学ポテンシャルは、成長条件に依存して大きく変化する。ここでは、典型的な値μH=−.67eVと、T=900K、p=1気圧におけるH2分子のエネルギーの半分とが選択された[22]。これは、OMVPE成長では非現実的に低い10−10気圧のH部分圧力に対応したZhuらによるPhys.Rev.Lett.101(2008年)196103の分析で使用された値とは異なる。また、OMVPE成長では、前駆体の分解時にリン化物表面の触媒作用が強く働く[23]。したがって、表面での非平衡条件により、原子状Hの実際の化学ポテンシャルを推定することは難しい。表面吸着および前駆体分解により実際のHの化学ポテンシャルがより高い可能性もあるため、ここで与えられる気相の化学ポテンシャルは下限と見なせる[23]。この場合、我々の推定よりHが多くなるため、ドーピングエネルギーはより大幅に低下する可能性がある。
以上の背景技術および詳細な説明では、種々の参考文献を引用している。これら参考文献については、その完全なリストを以下に含め、その各々を参照により本明細書に組み込むものとする。本明細書で引用するすべての特許、出願、参考文献、および出版物は、個別の参照により組み込まれた場合と同じ度合いで、この参照によりその全体が本明細書に組み込まれる。
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Claims (20)
- III−V族半導体膜をドープする方法であって、
P型ドーパントをエピタキシャル成長工程に導入する工程と、
電子だめとして作用可能な界面活性剤を前記エピタキシャル成長工程に導入する工程と、
水素を前記エピタキシャル成長工程に導入する工程と、
P型ドープされたIII−V族半導体膜の形成を促進する条件下でIII−V族半導体膜を成長させる工程と
を有する方法。 - 請求項1記載の方法において、前記P型ドーパントをエピタキシャル成長工程に導入する工程は、マグネシウムを導入する工程を有するものである方法。
- 請求項1記載の方法において、前記P型ドーパントをエピタキシャル成長工程に導入する工程は、ベリリウムを導入する工程を有するものである方法。
- 請求項1記載の方法において、前記P型ドーパントをエピタキシャル成長工程に導入する工程は、カドミウムを導入する工程を有するものである方法。
- 請求項1記載の方法において、前記電子だめとして作用可能な界面活性剤を前記エピタキシャル成長工程に導入する工程は、Sbを導入する工程を有するものである方法。
- 請求項1記載の方法において、前記電子だめとして作用可能な界面活性剤を前記エピタキシャル成長工程に導入する工程は、Biを導入する工程を有するものである方法。
- 請求項1記載の方法において、水素を前記エピタキシャル成長工程に導入する工程は、
第1の水素部分圧力で水素を導入する工程と、
前記水素部分圧力を前記第1の水素部分圧力から第2の水素部分圧力に高める工程と
を有するものである方法。 - 請求項1記載の方法において、この方法は、さらに、
前記P型ドープされたIII−V族半導体膜をアニールして、共ドープされた水素を除去する工程を含むものである方法。 - 請求項1記載の方法において、前記III−V族半導体膜を成長させる工程は、OMVPE成長工程を使用する工程を含むものである方法。
- 請求項1記載の方法において、前記III−V族半導体膜を成長させる工程は、MBE工程を使用する工程を含むものである方法。
- 請求項1記載の方法において、前記III−V族半導体膜を成長させる工程は、CBE工程を使用する工程を含むものである方法。
- 半導体膜半導体をドープする方法であって、
ドーパントと、
界面活性剤と、
水素源と
の存在下で半導体膜を成長させる工程と、
前記半導体膜の成長中に、前記P型ドーパントでドープされた半導体膜の形成を促進する条件を生成する工程と
を有する方法。 - 請求項12記載の方法において、前記ドーパントは、マグネシウム、ベリリウム、およびカドミウムから成る群から選択されるものである方法。
- 請求項13記載の方法において、前記界面活性剤は電子だめとして作用可能である方法。
- 請求項14記載の方法において、前記界面活性剤はBiである方法。
- 請求項14記載の方法において、前記界面活性剤はSbである方法。
- 請求項16記載の方法において、水素源の存在下で半導体膜を成長させる工程は、
第1の水素部分圧力で水素を導入する工程と、
前記水素部分圧力を前記第1の水素部分圧力から第2の水素部分圧力に変更する工程と
をさらに含むものである方法。 - III−V族半導体膜をドープする方法であって、
マグネシウム、ベリリウム、およびカドミウムから成る群から選択されるP型ドーパントと、電子だめとして作用可能な界面活性剤と、水素との存在下で、P型ドープされたIII−V族半導体膜の形成を促進する条件において、前記III−V族半導体膜をエピタキシャルに成長させる工程を有する方法。 - 請求項18記載の方法において、前記III−V族半導体膜をエピタキシャルに成長させる工程は、
前記成長中、第1の水素部分圧力を第1の時間長だけ維持する工程と、
前記成長中、第2の水素部分圧力を第2の時間長だけ維持する工程と
をさらに含むものである方法。 - 請求項18記載の方法において、この方法は、さらに、
前記P型ドープされたIII−V族半導体膜を、一定の温度で、前記P型ドープされたIII−V族半導体膜から水素を除去する上で十分な時間、アニールする工程を含むものである方法。
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CN103370782A (zh) | 2013-10-23 |
US20130203243A1 (en) | 2013-08-08 |
KR20140048072A (ko) | 2014-04-23 |
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