JP4850680B2 - 吐出ノズルの清掃装置 - Google Patents

吐出ノズルの清掃装置 Download PDF

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Publication number
JP4850680B2
JP4850680B2 JP2006338954A JP2006338954A JP4850680B2 JP 4850680 B2 JP4850680 B2 JP 4850680B2 JP 2006338954 A JP2006338954 A JP 2006338954A JP 2006338954 A JP2006338954 A JP 2006338954A JP 4850680 B2 JP4850680 B2 JP 4850680B2
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JP
Japan
Prior art keywords
cleaning
discharge nozzle
lip portion
sub
lip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006338954A
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English (en)
Japanese (ja)
Other versions
JP2008149247A (ja
Inventor
志丹 魏
正紀 甲田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP2006338954A priority Critical patent/JP4850680B2/ja
Priority to TW096144908A priority patent/TWI335245B/zh
Priority to CN2007101969991A priority patent/CN101204707B/zh
Priority to KR1020070131033A priority patent/KR100954472B1/ko
Publication of JP2008149247A publication Critical patent/JP2008149247A/ja
Application granted granted Critical
Publication of JP4850680B2 publication Critical patent/JP4850680B2/ja
Active legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B05B14/30—Arrangements for collecting, re-using or eliminating excess spraying material comprising enclosures close to, or in contact with, the object to be sprayed and surrounding or confining the discharged spray or jet but not the object to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
    • B05B15/68—Arrangements for adjusting the position of spray heads

Landscapes

  • Coating Apparatus (AREA)
  • Cleaning In General (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
JP2006338954A 2006-12-15 2006-12-15 吐出ノズルの清掃装置 Active JP4850680B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006338954A JP4850680B2 (ja) 2006-12-15 2006-12-15 吐出ノズルの清掃装置
TW096144908A TWI335245B (en) 2006-12-15 2007-11-27 Discharge nozzle cleaning apparatus
CN2007101969991A CN101204707B (zh) 2006-12-15 2007-12-07 排出管嘴清洗设备
KR1020070131033A KR100954472B1 (ko) 2006-12-15 2007-12-14 토출 노즐의 청소 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006338954A JP4850680B2 (ja) 2006-12-15 2006-12-15 吐出ノズルの清掃装置

Publications (2)

Publication Number Publication Date
JP2008149247A JP2008149247A (ja) 2008-07-03
JP4850680B2 true JP4850680B2 (ja) 2012-01-11

Family

ID=39565319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006338954A Active JP4850680B2 (ja) 2006-12-15 2006-12-15 吐出ノズルの清掃装置

Country Status (4)

Country Link
JP (1) JP4850680B2 (ko)
KR (1) KR100954472B1 (ko)
CN (1) CN101204707B (ko)
TW (1) TWI335245B (ko)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5258811B2 (ja) 2010-02-17 2013-08-07 東京エレクトロン株式会社 スリットノズル洗浄装置及び塗布装置
KR101205834B1 (ko) * 2010-08-24 2012-11-29 세메스 주식회사 세정 유닛 및 이를 가지는 처리액 토출 장치, 헤드 세정 방법
JP5138058B2 (ja) * 2011-03-07 2013-02-06 東レ株式会社 清掃部材と塗布器の清掃方法及び清掃装置並びにディスプレイ用部材の製造方法
JP5841449B2 (ja) * 2012-02-10 2016-01-13 東京エレクトロン株式会社 拭き取りパッド及びこのパッドを用いたノズルメンテナンス装置並びに塗布処理装置
KR101328721B1 (ko) 2012-03-28 2013-11-11 주식회사 디엠에스 슬릿코터
KR101379387B1 (ko) * 2012-07-12 2014-04-01 주식회사 진영이노텍 복층유리 제조용 티피에스 공급노즐 청소장치
CN103286030B (zh) * 2013-06-28 2016-08-31 深圳市华星光电技术有限公司 一种狭缝喷嘴清洁装置
KR102232661B1 (ko) * 2014-05-30 2021-03-29 세메스 주식회사 기판 처리 장치 및 헤드 세정 방법
JP6523100B2 (ja) * 2015-08-18 2019-05-29 東京応化工業株式会社 清掃部材、塗布装置及び塗布方法
JP6697324B2 (ja) * 2016-05-26 2020-05-20 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置およびノズル清掃方法
KR101884983B1 (ko) * 2016-07-19 2018-08-03 주식회사 프로텍 점성 용액 디스펜서용 노즐 세정 장치
JP6824673B2 (ja) * 2016-09-13 2021-02-03 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃部材、ノズル清掃装置、塗布装置
CN106733748A (zh) * 2016-12-13 2017-05-31 武汉华星光电技术有限公司 一种清洁系统
CN206425274U (zh) 2017-01-05 2017-08-22 惠科股份有限公司 一种喷嘴的清洁装置
JP6430056B1 (ja) * 2018-07-17 2018-11-28 中外炉工業株式会社 塗布用ノズルの清掃装置
JP7094635B2 (ja) * 2018-11-28 2022-07-04 東レエンジニアリング株式会社 清掃装置
JP7197525B2 (ja) * 2020-01-22 2022-12-27 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置、ノズル清掃方法、および、スクレーパー

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757992B2 (ja) * 1996-01-18 2006-03-22 東レ株式会社 塗布装置および塗布方法並びにカラーフィルタの製造方法および製造装置
JP2002177848A (ja) * 2000-12-15 2002-06-25 Toray Ind Inc 塗布用ダイの清掃装置および清掃方法並びにこれを用いたカラーフィルターの製造装置および製造方法
JP4168603B2 (ja) 2001-05-31 2008-10-22 凸版印刷株式会社 洗浄装置付大型塗布装置
JP4779234B2 (ja) * 2001-06-05 2011-09-28 東レ株式会社 塗布用ダイの清掃方法および清掃装置並びにカラーフィルターの製造方法および製造装置
KR100505180B1 (ko) * 2002-02-20 2005-08-01 엘지.필립스 엘시디 주식회사 노즐세정장치를 구비한 액정적하장치 및 액정적하방법
JP2004066164A (ja) * 2002-08-08 2004-03-04 Dainippon Printing Co Ltd 塗工ヘッドのクリーニング装置及びクリーニング方法
JP4188043B2 (ja) * 2002-09-18 2008-11-26 中外炉工業株式会社 塗布用ダイの清掃装置及び塗布装置
JP3940054B2 (ja) * 2002-10-07 2007-07-04 大日本スクリーン製造株式会社 ノズル清掃装置およびこのノズル清掃装置を備えた基板処理装置
JP2006167508A (ja) 2004-12-13 2006-06-29 Toray Ind Inc 塗布用ダイの清掃方法および清掃装置並びにディスプレイ用部材の製造方法および製造装置
JP4792787B2 (ja) * 2005-03-31 2011-10-12 凸版印刷株式会社 洗浄装置付塗布装置
JP4884038B2 (ja) * 2006-03-10 2012-02-22 東京応化工業株式会社 スリットノズル洗浄装置
JP4808147B2 (ja) * 2006-12-15 2011-11-02 中外炉工業株式会社 塗布用ダイの清掃装置

Also Published As

Publication number Publication date
TW200902163A (en) 2009-01-16
TWI335245B (en) 2011-01-01
CN101204707B (zh) 2010-06-02
CN101204707A (zh) 2008-06-25
KR20080055732A (ko) 2008-06-19
JP2008149247A (ja) 2008-07-03
KR100954472B1 (ko) 2010-04-22

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