JP4836661B2 - 電子部品の樹脂封止成形方法及び樹脂封止成形用金型 - Google Patents

電子部品の樹脂封止成形方法及び樹脂封止成形用金型 Download PDF

Info

Publication number
JP4836661B2
JP4836661B2 JP2006138022A JP2006138022A JP4836661B2 JP 4836661 B2 JP4836661 B2 JP 4836661B2 JP 2006138022 A JP2006138022 A JP 2006138022A JP 2006138022 A JP2006138022 A JP 2006138022A JP 4836661 B2 JP4836661 B2 JP 4836661B2
Authority
JP
Japan
Prior art keywords
mold
resin
cavities
cavity
electronic component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006138022A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007307766A (ja
JP2007307766A5 (https=
Inventor
慎二 高瀬
洋平 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Towa Corp
Original Assignee
Towa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Towa Corp filed Critical Towa Corp
Priority to JP2006138022A priority Critical patent/JP4836661B2/ja
Priority to PCT/JP2007/058150 priority patent/WO2007132611A1/ja
Priority to KR1020087014966A priority patent/KR100993086B1/ko
Priority to US12/096,568 priority patent/US20090291532A1/en
Priority to TW096113605A priority patent/TW200802639A/zh
Publication of JP2007307766A publication Critical patent/JP2007307766A/ja
Publication of JP2007307766A5 publication Critical patent/JP2007307766A5/ja
Application granted granted Critical
Publication of JP4836661B2 publication Critical patent/JP4836661B2/ja
Anticipated expiration legal-status Critical
Active legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/02Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C39/10Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/40Removing or ejecting moulded articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/46Means for plasticising or homogenising the moulding material or forcing it into the mould
    • B29C45/56Means for plasticising or homogenising the moulding material or forcing it into the mould using mould parts movable during or after injection, e.g. injection-compression moulding
    • B29C45/561Injection-compression moulding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/0198Manufacture or treatment batch processes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • H10W74/016Manufacture or treatment using moulds
    • H10W74/017Auxiliary layers for moulds, e.g. release layers or layers preventing residue
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • B29C2045/14663Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame the mould cavity walls being lined with a film, e.g. release film
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2791/00Shaping characteristics in general
    • B29C2791/004Shaping under special conditions
    • B29C2791/006Using vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/34Moulds having venting means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3406Components, e.g. resistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
JP2006138022A 2006-05-17 2006-05-17 電子部品の樹脂封止成形方法及び樹脂封止成形用金型 Active JP4836661B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006138022A JP4836661B2 (ja) 2006-05-17 2006-05-17 電子部品の樹脂封止成形方法及び樹脂封止成形用金型
PCT/JP2007/058150 WO2007132611A1 (ja) 2006-05-17 2007-04-13 電子部品の樹脂封止成形方法
KR1020087014966A KR100993086B1 (ko) 2006-05-17 2007-04-13 전자 부품의 수지 밀봉 성형 방법
US12/096,568 US20090291532A1 (en) 2006-05-17 2007-04-13 Method of resin encapsulation molding for electronic part
TW096113605A TW200802639A (en) 2006-05-17 2007-04-18 Method of resin encapsulation molding for electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006138022A JP4836661B2 (ja) 2006-05-17 2006-05-17 電子部品の樹脂封止成形方法及び樹脂封止成形用金型

Publications (3)

Publication Number Publication Date
JP2007307766A JP2007307766A (ja) 2007-11-29
JP2007307766A5 JP2007307766A5 (https=) 2009-04-23
JP4836661B2 true JP4836661B2 (ja) 2011-12-14

Family

ID=38693712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006138022A Active JP4836661B2 (ja) 2006-05-17 2006-05-17 電子部品の樹脂封止成形方法及び樹脂封止成形用金型

Country Status (5)

Country Link
US (1) US20090291532A1 (https=)
JP (1) JP4836661B2 (https=)
KR (1) KR100993086B1 (https=)
TW (1) TW200802639A (https=)
WO (1) WO2007132611A1 (https=)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101015585B1 (ko) 2008-06-26 2011-02-17 세크론 주식회사 전자 부품 몰딩 장치
JP4954171B2 (ja) * 2008-09-30 2012-06-13 Towa株式会社 電子部品の圧縮樹脂封止成形方法及び装置
JP4954172B2 (ja) * 2008-09-30 2012-06-13 Towa株式会社 電子部品の圧縮樹脂封止成形方法
KR101254860B1 (ko) 2008-09-30 2013-04-15 토와 가부시기가이샤 전자 부품의 압축 수지 밀봉 성형 방법 및 그를 위한 장치
JP5312897B2 (ja) 2008-10-20 2013-10-09 Towa株式会社 圧縮成形装置
TWI416674B (zh) * 2008-11-05 2013-11-21 日月光半導體製造股份有限公司 封膠模具與封膠方法
JP5682033B2 (ja) * 2011-03-14 2015-03-11 アピックヤマダ株式会社 樹脂封止装置
KR101850979B1 (ko) 2011-06-03 2018-04-20 서울반도체 주식회사 발광소자의 봉지재 성형장치 및 방법
US8616067B2 (en) * 2011-11-30 2013-12-31 General Electric Company Pressure sensor assembly
KR101219631B1 (ko) * 2012-06-07 2013-01-21 (주)에스엘케이 멀티 반도체 패키지 가압장치
US9310836B2 (en) * 2013-05-02 2016-04-12 Amazon Technologies, Inc. Resin-encapsulated portable media device
JP6115505B2 (ja) * 2013-06-21 2017-04-19 株式会社デンソー 電子装置
JP5934156B2 (ja) * 2013-08-20 2016-06-15 Towa株式会社 基板の搬送供給方法及び基板の搬送供給装置
JP5786918B2 (ja) * 2013-10-23 2015-09-30 第一精工株式会社 樹脂封止金型およびこれを用いた樹脂封止装置、樹脂封止方法
JP6152037B2 (ja) * 2013-10-24 2017-06-21 川崎重工業株式会社 繊維強化プラスチックの成形方法
FR3027835B1 (fr) * 2014-10-31 2017-09-01 Plastic Omnium Cie Moule pour la fabrication de piece en matiere plastique comportant un systeme d'etancheite optimise
NL2013978B1 (en) * 2014-12-15 2016-10-11 Besi Netherlands Bv Device and method for controlled moulding and degating of a carrier with electronic components and moulded product.
JP6560498B2 (ja) 2015-01-27 2019-08-14 Towa株式会社 樹脂封止方法及び樹脂成形品の製造方法
US9947561B2 (en) * 2016-03-07 2018-04-17 Asm Technology Singapore Pte Ltd Semiconductor encapsulation system comprising a vacuum pump and a reservoir pump
US10103478B1 (en) * 2017-06-23 2018-10-16 Amazon Technologies, Inc. Water resistant connectors with conductive elements
JP6482616B2 (ja) * 2017-08-21 2019-03-13 Towa株式会社 樹脂成形装置及び樹脂成形品製造方法
KR102036534B1 (ko) * 2018-02-06 2019-10-29 재이물산(주) 수지 이송 성형장치
JP7134926B2 (ja) * 2019-07-10 2022-09-12 Towa株式会社 樹脂成形装置、及び樹脂成形品の製造方法
CN114402431A (zh) * 2019-09-12 2022-04-26 株式会社村田制作所 半导体装置及其制造方法
CN217405408U (zh) * 2021-03-22 2022-09-09 意法半导体(格勒诺布尔2)公司 电子器件和电子系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2524955B2 (ja) * 1993-04-22 1996-08-14 トーワ株式会社 電子部品の樹脂封止成形方法及び装置
JP2706914B2 (ja) * 1995-12-13 1998-01-28 トーワ株式会社 電子部品の樹脂封止成形方法及び金型
JPH11168114A (ja) * 1997-12-03 1999-06-22 Matsushita Electron Corp 半導体チップ用の樹脂封止装置
JP3207837B2 (ja) * 1998-07-10 2001-09-10 アピックヤマダ株式会社 半導体装置の製造方法および樹脂封止装置
EP0971401B1 (en) * 1998-07-10 2010-06-09 Apic Yamada Corporation Method of manufacturing semiconductor devices and a resin molding machine therefor
JP3149409B2 (ja) * 1999-06-28 2001-03-26 株式会社日立製作所 半導体装置の製造方法
JP4416218B2 (ja) * 1999-09-14 2010-02-17 アピックヤマダ株式会社 樹脂封止方法及び樹脂封止装置
JP4336502B2 (ja) * 2003-01-30 2009-09-30 Towa株式会社 電子部品の樹脂封止成形方法及び装置
JP2005161695A (ja) * 2003-12-03 2005-06-23 Towa Corp 樹脂封止装置及び樹脂封止方法
JP4373237B2 (ja) * 2004-02-13 2009-11-25 Towa株式会社 半導体チップの樹脂封止成形方法および樹脂封止成形用金型
JP5004410B2 (ja) * 2004-04-26 2012-08-22 Towa株式会社 光素子の樹脂封止成形方法および樹脂封止成形装置
JP2007109831A (ja) * 2005-10-13 2007-04-26 Towa Corp 電子部品の樹脂封止成形方法

Also Published As

Publication number Publication date
TW200802639A (en) 2008-01-01
JP2007307766A (ja) 2007-11-29
KR100993086B1 (ko) 2010-11-08
KR20080096749A (ko) 2008-11-03
TWI350571B (https=) 2011-10-11
US20090291532A1 (en) 2009-11-26
WO2007132611A1 (ja) 2007-11-22

Similar Documents

Publication Publication Date Title
JP4836661B2 (ja) 電子部品の樹脂封止成形方法及び樹脂封止成形用金型
JP2007307766A5 (https=)
JP4373237B2 (ja) 半導体チップの樹脂封止成形方法および樹脂封止成形用金型
KR100822944B1 (ko) 전자부품의 수지 밀봉 성형 방법
KR101192547B1 (ko) 수지 밀봉 성형 장치
JP2007109831A5 (https=)
TWI645520B (zh) 樹脂密封裝置以及樹脂密封方法
KR100546191B1 (ko) 전자 부품의 수지 밀봉 성형 방법 및 상기 방법에이용되는 수지 밀봉 성형 장치
JP4262468B2 (ja) 樹脂モールド方法、樹脂モールド装置およびこれに用いる支持治具
KR101764525B1 (ko) 수지 밀봉 방법 및 수지 밀봉 장치
JP2005305954A5 (https=)
TWI679100B (zh) 樹脂成形裝置及樹脂成形品製造方法
JP6307374B2 (ja) 成形金型、成形装置および成形品の製造方法
JP2007237740A (ja) 光電子部品および光電子部品の製造方法
TWI656006B (zh) Resin forming device
JP2004200269A (ja) 電子部品の樹脂封止成形方法及び装置
JP2005225067A (ja) 樹脂モールド方法および樹脂モールド装置
JP5027451B2 (ja) 半導体チップの樹脂封止成形方法
JP2005236133A (ja) 樹脂封止成形方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090310

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090401

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110712

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110826

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110913

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110927

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141007

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4836661

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250