JP4815051B2 - 低切替磁界磁性トンネル接合 - Google Patents
低切替磁界磁性トンネル接合 Download PDFInfo
- Publication number
- JP4815051B2 JP4815051B2 JP2000560586A JP2000560586A JP4815051B2 JP 4815051 B2 JP4815051 B2 JP 4815051B2 JP 2000560586 A JP2000560586 A JP 2000560586A JP 2000560586 A JP2000560586 A JP 2000560586A JP 4815051 B2 JP4815051 B2 JP 4815051B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- vector
- tunnel junction
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
- G11C11/5607—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using magnetic storage elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2211/00—Indexing scheme relating to digital stores characterized by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C2211/56—Indexing scheme relating to G11C11/56 and sub-groups for features not covered by these groups
- G11C2211/561—Multilevel memory cell aspects
- G11C2211/5615—Multilevel magnetic memory cell using non-magnetic non-conducting interlayer, e.g. MTJ
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Hall/Mr Elements (AREA)
- Semiconductor Memories (AREA)
- Mram Or Spin Memory Techniques (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/118,979 | 1998-07-20 | ||
| US09/118,979 US5953248A (en) | 1998-07-20 | 1998-07-20 | Low switching field magnetic tunneling junction for high density arrays |
| PCT/US1999/016314 WO2000004552A1 (en) | 1998-07-20 | 1999-07-19 | Low switching field magnetic tunneling junction usable for multi-state magnetic memory cell |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002520873A JP2002520873A (ja) | 2002-07-09 |
| JP2002520873A5 JP2002520873A5 (enExample) | 2006-09-21 |
| JP4815051B2 true JP4815051B2 (ja) | 2011-11-16 |
Family
ID=22381922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000560586A Expired - Lifetime JP4815051B2 (ja) | 1998-07-20 | 1999-07-19 | 低切替磁界磁性トンネル接合 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5953248A (enExample) |
| EP (1) | EP1038299B1 (enExample) |
| JP (1) | JP4815051B2 (enExample) |
| DE (1) | DE69932589T2 (enExample) |
| TW (1) | TW451192B (enExample) |
| WO (1) | WO2000004552A1 (enExample) |
Families Citing this family (60)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6215695B1 (en) * | 1998-12-08 | 2001-04-10 | Canon Kabushiki Kaisha | Magnetoresistance element and magnetic memory device employing the same |
| US6611405B1 (en) * | 1999-09-16 | 2003-08-26 | Kabushiki Kaisha Toshiba | Magnetoresistive element and magnetic memory device |
| DE19946490A1 (de) * | 1999-09-28 | 2001-04-19 | Infineon Technologies Ag | Magnetoresistiver Schreib/Lese-Speicher sowie Verfahren zum Beschreiben und Auslesen eines solchen Speichers |
| US6172904B1 (en) * | 2000-01-27 | 2001-01-09 | Hewlett-Packard Company | Magnetic memory cell with symmetric switching characteristics |
| JP3515940B2 (ja) | 2000-02-17 | 2004-04-05 | シャープ株式会社 | 磁気トンネル接合素子及びそれを用いた磁気メモリ |
| DE10106860A1 (de) * | 2000-02-17 | 2001-08-30 | Sharp Kk | MTJ-Element und Magnetspeicher unter Verwendung eines solchen |
| US6727105B1 (en) * | 2000-02-28 | 2004-04-27 | Hewlett-Packard Development Company, L.P. | Method of fabricating an MRAM device including spin dependent tunneling junction memory cells |
| US6911710B2 (en) * | 2000-03-09 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Multi-bit magnetic memory cells |
| US6469926B1 (en) * | 2000-03-22 | 2002-10-22 | Motorola, Inc. | Magnetic element with an improved magnetoresistance ratio and fabricating method thereof |
| DE10113853B4 (de) * | 2000-03-23 | 2009-08-06 | Sharp K.K. | Magnetspeicherelement und Magnetspeicher |
| US6538921B2 (en) | 2000-08-17 | 2003-03-25 | Nve Corporation | Circuit selection of magnetic memory cells and related cell structures |
| US6544801B1 (en) | 2000-08-21 | 2003-04-08 | Motorola, Inc. | Method of fabricating thermally stable MTJ cell and apparatus |
| US6767655B2 (en) * | 2000-08-21 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistive element |
| FR2817999B1 (fr) * | 2000-12-07 | 2003-01-10 | Commissariat Energie Atomique | Dispositif magnetique a polarisation de spin et a empilement(s) tri-couche(s) et memoire utilisant ce dispositif |
| JP3576111B2 (ja) | 2001-03-12 | 2004-10-13 | 株式会社東芝 | 磁気抵抗効果素子 |
| JP4458703B2 (ja) | 2001-03-16 | 2010-04-28 | 株式会社東芝 | 磁気抵抗効果素子、その製造方法、磁気ランダムアクセスメモリ、携帯端末装置、磁気ヘッド及び磁気再生装置 |
| US6730949B2 (en) * | 2001-03-22 | 2004-05-04 | Kabushiki Kaisha Toshiba | Magnetoresistance effect device |
| JP2002334971A (ja) * | 2001-05-09 | 2002-11-22 | Nec Corp | 磁性メモリ及びその動作方法 |
| US6657888B1 (en) | 2001-05-11 | 2003-12-02 | Board Of Regents Of The University Of Nebraska | Application of high spin polarization materials in two terminal non-volatile bistable memory devices |
| US6744086B2 (en) | 2001-05-15 | 2004-06-01 | Nve Corporation | Current switched magnetoresistive memory cell |
| US6963543B2 (en) | 2001-06-29 | 2005-11-08 | Qualcomm Incorporated | Method and system for group call service |
| US6430085B1 (en) | 2001-08-27 | 2002-08-06 | Motorola, Inc. | Magnetic random access memory having digit lines and bit lines with shape and induced anisotropy ferromagnetic cladding layer and method of manufacture |
| US6545906B1 (en) * | 2001-10-16 | 2003-04-08 | Motorola, Inc. | Method of writing to scalable magnetoresistance random access memory element |
| US6633498B1 (en) * | 2002-06-18 | 2003-10-14 | Motorola, Inc. | Magnetoresistive random access memory with reduced switching field |
| US6693824B2 (en) | 2002-06-28 | 2004-02-17 | Motorola, Inc. | Circuit and method of writing a toggle memory |
| US6850433B2 (en) * | 2002-07-15 | 2005-02-01 | Hewlett-Packard Development Company, Lp. | Magnetic memory device and method |
| US7095646B2 (en) | 2002-07-17 | 2006-08-22 | Freescale Semiconductor, Inc. | Multi-state magnetoresistance random access cell with improved memory storage density |
| JP3837102B2 (ja) * | 2002-08-20 | 2006-10-25 | Tdk株式会社 | 電磁変換素子、薄膜磁気ヘッド、磁気ヘッドアセンブリおよび磁気再生装置、ならびに電磁変換素子の製造方法 |
| JP2004128237A (ja) * | 2002-10-03 | 2004-04-22 | Sony Corp | 磁気抵抗効果素子および磁気メモリ装置 |
| US6873542B2 (en) | 2002-10-03 | 2005-03-29 | International Business Machines Corporation | Antiferromagnetically coupled bi-layer sensor for magnetic random access memory |
| US6870758B2 (en) * | 2002-10-30 | 2005-03-22 | Hewlett-Packard Development Company, L.P. | Magnetic memory device and methods for making same |
| JP3863484B2 (ja) * | 2002-11-22 | 2006-12-27 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
| DE10258860A1 (de) * | 2002-12-17 | 2004-07-15 | Robert Bosch Gmbh | Magnetoresistives Schichtsystem und Sensorelement mit diesem Schichtsystem |
| US6714446B1 (en) * | 2003-05-13 | 2004-03-30 | Motorola, Inc. | Magnetoelectronics information device having a compound magnetic free layer |
| US6956763B2 (en) | 2003-06-27 | 2005-10-18 | Freescale Semiconductor, Inc. | MRAM element and methods for writing the MRAM element |
| JP4253225B2 (ja) * | 2003-07-09 | 2009-04-08 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
| US6956764B2 (en) * | 2003-08-25 | 2005-10-18 | Freescale Semiconductor, Inc. | Method of writing to a multi-state magnetic random access memory cell |
| US6967366B2 (en) | 2003-08-25 | 2005-11-22 | Freescale Semiconductor, Inc. | Magnetoresistive random access memory with reduced switching field variation |
| US7310265B2 (en) * | 2003-10-14 | 2007-12-18 | Agency For Science, Technology And Research | Magnetic memory device |
| US6985383B2 (en) * | 2003-10-20 | 2006-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reference generator for multilevel nonlinear resistivity memory storage elements |
| JP4581394B2 (ja) * | 2003-12-22 | 2010-11-17 | ソニー株式会社 | 磁気メモリ |
| KR100528341B1 (ko) * | 2003-12-30 | 2005-11-15 | 삼성전자주식회사 | 자기 램 및 그 읽기방법 |
| US7105372B2 (en) | 2004-01-20 | 2006-09-12 | Headway Technologies, Inc. | Magnetic tunneling junction film structure with process determined in-plane magnetic anisotropy |
| DE102005004126B4 (de) * | 2004-02-06 | 2008-05-08 | Qimonda Ag | MRAM-Speicherzelle mit schwacher intrinsisch anisotroper Speicherschicht |
| US7436700B2 (en) * | 2004-02-06 | 2008-10-14 | Infineon Technologies Ag | MRAM memory cell having a weak intrinsic anisotropic storage layer and method of producing the same |
| FR2869445B1 (fr) * | 2004-04-26 | 2006-07-07 | St Microelectronics Sa | Element de memoire vive magnetique |
| US7372116B2 (en) * | 2004-06-16 | 2008-05-13 | Hitachi Global Storage Technologies Netherlands B.V. | Heat assisted switching in an MRAM cell utilizing the antiferromagnetic to ferromagnetic transition in FeRh |
| US7477490B2 (en) * | 2004-06-30 | 2009-01-13 | Seagate Technology Llc | Single sensor element that is naturally differentiated |
| US7187576B2 (en) * | 2004-07-19 | 2007-03-06 | Infineon Technologies Ag | Read out scheme for several bits in a single MRAM soft layer |
| US20060101111A1 (en) * | 2004-10-05 | 2006-05-11 | Csi Technology, Inc. | Method and apparatus transferring arbitrary binary data over a fieldbus network |
| US7355884B2 (en) * | 2004-10-08 | 2008-04-08 | Kabushiki Kaisha Toshiba | Magnetoresistive element |
| US7599156B2 (en) * | 2004-10-08 | 2009-10-06 | Kabushiki Kaisha Toshiba | Magnetoresistive element having specially shaped ferromagnetic layer |
| US7129098B2 (en) | 2004-11-24 | 2006-10-31 | Freescale Semiconductor, Inc. | Reduced power magnetoresistive random access memory elements |
| JP4388008B2 (ja) * | 2004-11-30 | 2009-12-24 | 株式会社東芝 | 半導体記憶装置 |
| JP4012196B2 (ja) * | 2004-12-22 | 2007-11-21 | 株式会社東芝 | 磁気ランダムアクセスメモリのデータ書き込み方法 |
| JP2007081280A (ja) * | 2005-09-16 | 2007-03-29 | Fujitsu Ltd | 磁気抵抗効果素子及び磁気メモリ装置 |
| TWI307507B (en) * | 2006-10-20 | 2009-03-11 | Ind Tech Res Inst | Magnetic tunnel junction devices and magnetic random access memory |
| FR2925747B1 (fr) | 2007-12-21 | 2010-04-09 | Commissariat Energie Atomique | Memoire magnetique a ecriture assistee thermiquement |
| US8242776B2 (en) * | 2008-03-26 | 2012-08-14 | Everspin Technologies, Inc. | Magnetic sensor design for suppression of barkhausen noise |
| KR102034210B1 (ko) * | 2013-03-15 | 2019-10-18 | 에스케이하이닉스 주식회사 | 반도체 장치 및 이의 제조 방법, 이 반도체 장치를 포함하는 마이크로프로세서, 프로세서, 시스템, 데이터 저장 시스템 및 메모리 시스템 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09251621A (ja) * | 1996-03-18 | 1997-09-22 | Toshiba Corp | 磁気抵抗効果素子及び磁気情報再生方法 |
| US5768181A (en) * | 1997-04-07 | 1998-06-16 | Motorola, Inc. | Magnetic device having multi-layer with insulating and conductive layers |
| US5768183A (en) * | 1996-09-25 | 1998-06-16 | Motorola, Inc. | Multi-layer magnetic memory cells with improved switching characteristics |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR960702148A (ko) * | 1994-02-21 | 1996-03-28 | 제이.에프.엠 페닝 | 자성재료의 몸체에서 자화방향의 국부적 변화를 위한 장치 및 방법 (A method and a device for locally altering the magnetization) |
| US5587943A (en) * | 1995-02-13 | 1996-12-24 | Integrated Microtransducer Electronics Corporation | Nonvolatile magnetoresistive memory with fully closed flux operation |
| JP3293437B2 (ja) * | 1995-12-19 | 2002-06-17 | 松下電器産業株式会社 | 磁気抵抗効果素子、磁気抵抗効果型ヘッド及びメモリー素子 |
| US5640343A (en) * | 1996-03-18 | 1997-06-17 | International Business Machines Corporation | Magnetic memory array using magnetic tunnel junction devices in the memory cells |
| US5764567A (en) * | 1996-11-27 | 1998-06-09 | International Business Machines Corporation | Magnetic tunnel junction device with nonferromagnetic interface layer for improved magnetic field response |
| US5650958A (en) * | 1996-03-18 | 1997-07-22 | International Business Machines Corporation | Magnetic tunnel junctions with controlled magnetic response |
| US5745408A (en) * | 1996-09-09 | 1998-04-28 | Motorola, Inc. | Multi-layer magnetic memory cell with low switching current |
| US5734605A (en) * | 1996-09-10 | 1998-03-31 | Motorola, Inc. | Multi-layer magnetic tunneling junction memory cells |
| US5894447A (en) * | 1996-09-26 | 1999-04-13 | Kabushiki Kaisha Toshiba | Semiconductor memory device including a particular memory cell block structure |
| JP3392657B2 (ja) * | 1996-09-26 | 2003-03-31 | 株式会社東芝 | 半導体記憶装置 |
| US5801984A (en) * | 1996-11-27 | 1998-09-01 | International Business Machines Corporation | Magnetic tunnel junction device with ferromagnetic multilayer having fixed magnetic moment |
| US5729410A (en) * | 1996-11-27 | 1998-03-17 | International Business Machines Corporation | Magnetic tunnel junction device with longitudinal biasing |
| US5828598A (en) * | 1997-05-23 | 1998-10-27 | Motorola, Inc. | MRAM with high GMR ratio |
-
1998
- 1998-07-20 US US09/118,979 patent/US5953248A/en not_active Expired - Lifetime
-
1999
- 1999-07-19 WO PCT/US1999/016314 patent/WO2000004552A1/en not_active Ceased
- 1999-07-19 JP JP2000560586A patent/JP4815051B2/ja not_active Expired - Lifetime
- 1999-07-19 EP EP99935700A patent/EP1038299B1/en not_active Expired - Lifetime
- 1999-07-19 DE DE69932589T patent/DE69932589T2/de not_active Expired - Fee Related
- 1999-11-16 TW TW088112229A patent/TW451192B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09251621A (ja) * | 1996-03-18 | 1997-09-22 | Toshiba Corp | 磁気抵抗効果素子及び磁気情報再生方法 |
| US5768183A (en) * | 1996-09-25 | 1998-06-16 | Motorola, Inc. | Multi-layer magnetic memory cells with improved switching characteristics |
| US5768181A (en) * | 1997-04-07 | 1998-06-16 | Motorola, Inc. | Magnetic device having multi-layer with insulating and conductive layers |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1038299A1 (en) | 2000-09-27 |
| EP1038299B1 (en) | 2006-08-02 |
| DE69932589D1 (de) | 2006-09-14 |
| TW451192B (en) | 2001-08-21 |
| WO2000004552A1 (en) | 2000-01-27 |
| DE69932589T2 (de) | 2006-12-07 |
| US5953248A (en) | 1999-09-14 |
| JP2002520873A (ja) | 2002-07-09 |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| EXPY | Cancellation because of completion of term |