DE69932589T2 - Magnetischer tunnelübergang mit geringer umschaltfeldstärke für magnetische mehrzustandsspeicherzelle - Google Patents
Magnetischer tunnelübergang mit geringer umschaltfeldstärke für magnetische mehrzustandsspeicherzelle Download PDFInfo
- Publication number
- DE69932589T2 DE69932589T2 DE69932589T DE69932589T DE69932589T2 DE 69932589 T2 DE69932589 T2 DE 69932589T2 DE 69932589 T DE69932589 T DE 69932589T DE 69932589 T DE69932589 T DE 69932589T DE 69932589 T2 DE69932589 T2 DE 69932589T2
- Authority
- DE
- Germany
- Prior art keywords
- magnetic
- magnetoresistive
- layer
- switching
- tunnel junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 156
- 230000015654 memory Effects 0.000 title claims description 54
- 230000005540 biological transmission Effects 0.000 title 1
- 239000013598 vector Substances 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 26
- 230000005415 magnetization Effects 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 239000012777 electrically insulating material Substances 0.000 claims description 8
- 230000004907 flux Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 210000004027 cell Anatomy 0.000 description 79
- 239000000696 magnetic material Substances 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 5
- 230000005290 antiferromagnetic effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- FQMNUIZEFUVPNU-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co] FQMNUIZEFUVPNU-UHFFFAOYSA-N 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 210000000352 storage cell Anatomy 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 101001094044 Mus musculus Solute carrier family 26 member 6 Proteins 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005090 crystal field Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
- G11C11/5607—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using magnetic storage elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2211/00—Indexing scheme relating to digital stores characterized by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C2211/56—Indexing scheme relating to G11C11/56 and sub-groups for features not covered by these groups
- G11C2211/561—Multilevel memory cell aspects
- G11C2211/5615—Multilevel magnetic memory cell using non-magnetic non-conducting interlayer, e.g. MTJ
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Hall/Mr Elements (AREA)
- Semiconductor Memories (AREA)
- Mram Or Spin Memory Techniques (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US118979 | 1998-07-20 | ||
| US09/118,979 US5953248A (en) | 1998-07-20 | 1998-07-20 | Low switching field magnetic tunneling junction for high density arrays |
| PCT/US1999/016314 WO2000004552A1 (en) | 1998-07-20 | 1999-07-19 | Low switching field magnetic tunneling junction usable for multi-state magnetic memory cell |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69932589D1 DE69932589D1 (de) | 2006-09-14 |
| DE69932589T2 true DE69932589T2 (de) | 2006-12-07 |
Family
ID=22381922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69932589T Expired - Fee Related DE69932589T2 (de) | 1998-07-20 | 1999-07-19 | Magnetischer tunnelübergang mit geringer umschaltfeldstärke für magnetische mehrzustandsspeicherzelle |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5953248A (enExample) |
| EP (1) | EP1038299B1 (enExample) |
| JP (1) | JP4815051B2 (enExample) |
| DE (1) | DE69932589T2 (enExample) |
| TW (1) | TW451192B (enExample) |
| WO (1) | WO2000004552A1 (enExample) |
Families Citing this family (60)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6215695B1 (en) * | 1998-12-08 | 2001-04-10 | Canon Kabushiki Kaisha | Magnetoresistance element and magnetic memory device employing the same |
| US6611405B1 (en) * | 1999-09-16 | 2003-08-26 | Kabushiki Kaisha Toshiba | Magnetoresistive element and magnetic memory device |
| DE19946490A1 (de) * | 1999-09-28 | 2001-04-19 | Infineon Technologies Ag | Magnetoresistiver Schreib/Lese-Speicher sowie Verfahren zum Beschreiben und Auslesen eines solchen Speichers |
| US6172904B1 (en) * | 2000-01-27 | 2001-01-09 | Hewlett-Packard Company | Magnetic memory cell with symmetric switching characteristics |
| JP3515940B2 (ja) | 2000-02-17 | 2004-04-05 | シャープ株式会社 | 磁気トンネル接合素子及びそれを用いた磁気メモリ |
| DE10106860A1 (de) * | 2000-02-17 | 2001-08-30 | Sharp Kk | MTJ-Element und Magnetspeicher unter Verwendung eines solchen |
| US6727105B1 (en) * | 2000-02-28 | 2004-04-27 | Hewlett-Packard Development Company, L.P. | Method of fabricating an MRAM device including spin dependent tunneling junction memory cells |
| US6911710B2 (en) * | 2000-03-09 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Multi-bit magnetic memory cells |
| US6469926B1 (en) * | 2000-03-22 | 2002-10-22 | Motorola, Inc. | Magnetic element with an improved magnetoresistance ratio and fabricating method thereof |
| DE10113853B4 (de) * | 2000-03-23 | 2009-08-06 | Sharp K.K. | Magnetspeicherelement und Magnetspeicher |
| US6538921B2 (en) | 2000-08-17 | 2003-03-25 | Nve Corporation | Circuit selection of magnetic memory cells and related cell structures |
| US6544801B1 (en) | 2000-08-21 | 2003-04-08 | Motorola, Inc. | Method of fabricating thermally stable MTJ cell and apparatus |
| US6767655B2 (en) * | 2000-08-21 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistive element |
| FR2817999B1 (fr) * | 2000-12-07 | 2003-01-10 | Commissariat Energie Atomique | Dispositif magnetique a polarisation de spin et a empilement(s) tri-couche(s) et memoire utilisant ce dispositif |
| JP3576111B2 (ja) | 2001-03-12 | 2004-10-13 | 株式会社東芝 | 磁気抵抗効果素子 |
| JP4458703B2 (ja) | 2001-03-16 | 2010-04-28 | 株式会社東芝 | 磁気抵抗効果素子、その製造方法、磁気ランダムアクセスメモリ、携帯端末装置、磁気ヘッド及び磁気再生装置 |
| US6730949B2 (en) * | 2001-03-22 | 2004-05-04 | Kabushiki Kaisha Toshiba | Magnetoresistance effect device |
| JP2002334971A (ja) * | 2001-05-09 | 2002-11-22 | Nec Corp | 磁性メモリ及びその動作方法 |
| US6657888B1 (en) | 2001-05-11 | 2003-12-02 | Board Of Regents Of The University Of Nebraska | Application of high spin polarization materials in two terminal non-volatile bistable memory devices |
| US6744086B2 (en) | 2001-05-15 | 2004-06-01 | Nve Corporation | Current switched magnetoresistive memory cell |
| US6963543B2 (en) | 2001-06-29 | 2005-11-08 | Qualcomm Incorporated | Method and system for group call service |
| US6430085B1 (en) | 2001-08-27 | 2002-08-06 | Motorola, Inc. | Magnetic random access memory having digit lines and bit lines with shape and induced anisotropy ferromagnetic cladding layer and method of manufacture |
| US6545906B1 (en) * | 2001-10-16 | 2003-04-08 | Motorola, Inc. | Method of writing to scalable magnetoresistance random access memory element |
| US6633498B1 (en) * | 2002-06-18 | 2003-10-14 | Motorola, Inc. | Magnetoresistive random access memory with reduced switching field |
| US6693824B2 (en) | 2002-06-28 | 2004-02-17 | Motorola, Inc. | Circuit and method of writing a toggle memory |
| US6850433B2 (en) * | 2002-07-15 | 2005-02-01 | Hewlett-Packard Development Company, Lp. | Magnetic memory device and method |
| US7095646B2 (en) | 2002-07-17 | 2006-08-22 | Freescale Semiconductor, Inc. | Multi-state magnetoresistance random access cell with improved memory storage density |
| JP3837102B2 (ja) * | 2002-08-20 | 2006-10-25 | Tdk株式会社 | 電磁変換素子、薄膜磁気ヘッド、磁気ヘッドアセンブリおよび磁気再生装置、ならびに電磁変換素子の製造方法 |
| JP2004128237A (ja) * | 2002-10-03 | 2004-04-22 | Sony Corp | 磁気抵抗効果素子および磁気メモリ装置 |
| US6873542B2 (en) | 2002-10-03 | 2005-03-29 | International Business Machines Corporation | Antiferromagnetically coupled bi-layer sensor for magnetic random access memory |
| US6870758B2 (en) * | 2002-10-30 | 2005-03-22 | Hewlett-Packard Development Company, L.P. | Magnetic memory device and methods for making same |
| JP3863484B2 (ja) * | 2002-11-22 | 2006-12-27 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
| DE10258860A1 (de) * | 2002-12-17 | 2004-07-15 | Robert Bosch Gmbh | Magnetoresistives Schichtsystem und Sensorelement mit diesem Schichtsystem |
| US6714446B1 (en) * | 2003-05-13 | 2004-03-30 | Motorola, Inc. | Magnetoelectronics information device having a compound magnetic free layer |
| US6956763B2 (en) | 2003-06-27 | 2005-10-18 | Freescale Semiconductor, Inc. | MRAM element and methods for writing the MRAM element |
| JP4253225B2 (ja) * | 2003-07-09 | 2009-04-08 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
| US6956764B2 (en) * | 2003-08-25 | 2005-10-18 | Freescale Semiconductor, Inc. | Method of writing to a multi-state magnetic random access memory cell |
| US6967366B2 (en) | 2003-08-25 | 2005-11-22 | Freescale Semiconductor, Inc. | Magnetoresistive random access memory with reduced switching field variation |
| US7310265B2 (en) * | 2003-10-14 | 2007-12-18 | Agency For Science, Technology And Research | Magnetic memory device |
| US6985383B2 (en) * | 2003-10-20 | 2006-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reference generator for multilevel nonlinear resistivity memory storage elements |
| JP4581394B2 (ja) * | 2003-12-22 | 2010-11-17 | ソニー株式会社 | 磁気メモリ |
| KR100528341B1 (ko) * | 2003-12-30 | 2005-11-15 | 삼성전자주식회사 | 자기 램 및 그 읽기방법 |
| US7105372B2 (en) | 2004-01-20 | 2006-09-12 | Headway Technologies, Inc. | Magnetic tunneling junction film structure with process determined in-plane magnetic anisotropy |
| DE102005004126B4 (de) * | 2004-02-06 | 2008-05-08 | Qimonda Ag | MRAM-Speicherzelle mit schwacher intrinsisch anisotroper Speicherschicht |
| US7436700B2 (en) * | 2004-02-06 | 2008-10-14 | Infineon Technologies Ag | MRAM memory cell having a weak intrinsic anisotropic storage layer and method of producing the same |
| FR2869445B1 (fr) * | 2004-04-26 | 2006-07-07 | St Microelectronics Sa | Element de memoire vive magnetique |
| US7372116B2 (en) * | 2004-06-16 | 2008-05-13 | Hitachi Global Storage Technologies Netherlands B.V. | Heat assisted switching in an MRAM cell utilizing the antiferromagnetic to ferromagnetic transition in FeRh |
| US7477490B2 (en) * | 2004-06-30 | 2009-01-13 | Seagate Technology Llc | Single sensor element that is naturally differentiated |
| US7187576B2 (en) * | 2004-07-19 | 2007-03-06 | Infineon Technologies Ag | Read out scheme for several bits in a single MRAM soft layer |
| US20060101111A1 (en) * | 2004-10-05 | 2006-05-11 | Csi Technology, Inc. | Method and apparatus transferring arbitrary binary data over a fieldbus network |
| US7355884B2 (en) * | 2004-10-08 | 2008-04-08 | Kabushiki Kaisha Toshiba | Magnetoresistive element |
| US7599156B2 (en) * | 2004-10-08 | 2009-10-06 | Kabushiki Kaisha Toshiba | Magnetoresistive element having specially shaped ferromagnetic layer |
| US7129098B2 (en) | 2004-11-24 | 2006-10-31 | Freescale Semiconductor, Inc. | Reduced power magnetoresistive random access memory elements |
| JP4388008B2 (ja) * | 2004-11-30 | 2009-12-24 | 株式会社東芝 | 半導体記憶装置 |
| JP4012196B2 (ja) * | 2004-12-22 | 2007-11-21 | 株式会社東芝 | 磁気ランダムアクセスメモリのデータ書き込み方法 |
| JP2007081280A (ja) * | 2005-09-16 | 2007-03-29 | Fujitsu Ltd | 磁気抵抗効果素子及び磁気メモリ装置 |
| TWI307507B (en) * | 2006-10-20 | 2009-03-11 | Ind Tech Res Inst | Magnetic tunnel junction devices and magnetic random access memory |
| FR2925747B1 (fr) | 2007-12-21 | 2010-04-09 | Commissariat Energie Atomique | Memoire magnetique a ecriture assistee thermiquement |
| US8242776B2 (en) * | 2008-03-26 | 2012-08-14 | Everspin Technologies, Inc. | Magnetic sensor design for suppression of barkhausen noise |
| KR102034210B1 (ko) * | 2013-03-15 | 2019-10-18 | 에스케이하이닉스 주식회사 | 반도체 장치 및 이의 제조 방법, 이 반도체 장치를 포함하는 마이크로프로세서, 프로세서, 시스템, 데이터 저장 시스템 및 메모리 시스템 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR960702148A (ko) * | 1994-02-21 | 1996-03-28 | 제이.에프.엠 페닝 | 자성재료의 몸체에서 자화방향의 국부적 변화를 위한 장치 및 방법 (A method and a device for locally altering the magnetization) |
| US5587943A (en) * | 1995-02-13 | 1996-12-24 | Integrated Microtransducer Electronics Corporation | Nonvolatile magnetoresistive memory with fully closed flux operation |
| JP3293437B2 (ja) * | 1995-12-19 | 2002-06-17 | 松下電器産業株式会社 | 磁気抵抗効果素子、磁気抵抗効果型ヘッド及びメモリー素子 |
| JP3691898B2 (ja) * | 1996-03-18 | 2005-09-07 | 株式会社東芝 | 磁気抵抗効果素子、磁気情報読み出し方法、及び記録素子 |
| US5640343A (en) * | 1996-03-18 | 1997-06-17 | International Business Machines Corporation | Magnetic memory array using magnetic tunnel junction devices in the memory cells |
| US5764567A (en) * | 1996-11-27 | 1998-06-09 | International Business Machines Corporation | Magnetic tunnel junction device with nonferromagnetic interface layer for improved magnetic field response |
| US5650958A (en) * | 1996-03-18 | 1997-07-22 | International Business Machines Corporation | Magnetic tunnel junctions with controlled magnetic response |
| US5745408A (en) * | 1996-09-09 | 1998-04-28 | Motorola, Inc. | Multi-layer magnetic memory cell with low switching current |
| US5734605A (en) * | 1996-09-10 | 1998-03-31 | Motorola, Inc. | Multi-layer magnetic tunneling junction memory cells |
| US5768183A (en) * | 1996-09-25 | 1998-06-16 | Motorola, Inc. | Multi-layer magnetic memory cells with improved switching characteristics |
| US5894447A (en) * | 1996-09-26 | 1999-04-13 | Kabushiki Kaisha Toshiba | Semiconductor memory device including a particular memory cell block structure |
| JP3392657B2 (ja) * | 1996-09-26 | 2003-03-31 | 株式会社東芝 | 半導体記憶装置 |
| US5801984A (en) * | 1996-11-27 | 1998-09-01 | International Business Machines Corporation | Magnetic tunnel junction device with ferromagnetic multilayer having fixed magnetic moment |
| US5729410A (en) * | 1996-11-27 | 1998-03-17 | International Business Machines Corporation | Magnetic tunnel junction device with longitudinal biasing |
| US5768181A (en) * | 1997-04-07 | 1998-06-16 | Motorola, Inc. | Magnetic device having multi-layer with insulating and conductive layers |
| US5828598A (en) * | 1997-05-23 | 1998-10-27 | Motorola, Inc. | MRAM with high GMR ratio |
-
1998
- 1998-07-20 US US09/118,979 patent/US5953248A/en not_active Expired - Lifetime
-
1999
- 1999-07-19 WO PCT/US1999/016314 patent/WO2000004552A1/en not_active Ceased
- 1999-07-19 JP JP2000560586A patent/JP4815051B2/ja not_active Expired - Lifetime
- 1999-07-19 EP EP99935700A patent/EP1038299B1/en not_active Expired - Lifetime
- 1999-07-19 DE DE69932589T patent/DE69932589T2/de not_active Expired - Fee Related
- 1999-11-16 TW TW088112229A patent/TW451192B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP1038299A1 (en) | 2000-09-27 |
| EP1038299B1 (en) | 2006-08-02 |
| JP4815051B2 (ja) | 2011-11-16 |
| DE69932589D1 (de) | 2006-09-14 |
| TW451192B (en) | 2001-08-21 |
| WO2000004552A1 (en) | 2000-01-27 |
| US5953248A (en) | 1999-09-14 |
| JP2002520873A (ja) | 2002-07-09 |
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