JP4601535B2 - 低温度で液体原料を気化させることのできる気化器 - Google Patents
低温度で液体原料を気化させることのできる気化器 Download PDFInfo
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- JP4601535B2 JP4601535B2 JP2005300521A JP2005300521A JP4601535B2 JP 4601535 B2 JP4601535 B2 JP 4601535B2 JP 2005300521 A JP2005300521 A JP 2005300521A JP 2005300521 A JP2005300521 A JP 2005300521A JP 4601535 B2 JP4601535 B2 JP 4601535B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S261/00—Gas and liquid contact apparatus
- Y10S261/65—Vaporizers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0391—Affecting flow by the addition of material or energy
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
(24)…液体原料供給部
(26)…気化部
(60)…気化室
(62)…原料導出路
(64)…二次フィルタ
(66)…上段ブロックヒータ
(76)…中段ブロックヒータ
(78)…キャリアガス導入路
(80)…一次フィルタ
(81)…下段ブロックヒータ
Claims (5)
- ヒータにより加熱された気化室と、
前記気化室の下端部に配置され、ヒータにより加熱された一次フィルタと、
流量調節された液体原料を前記気化室の上方から前記一次フィルタに向けて滴下する液体原料供給部と、
キャリアガスを前記一次フィルタの下面へ導くキャリアガス導入路と、
前記キャリアガスおよび気化された前記液体原料との混合ガスを前記気化室の上部から排出するための原料導出路とを備える気化器において、
前記キャリアガス導入路は、前記一次フィルタが嵌め合わされる凹部と前記凹部の下面に形成された、前記キャリアガスが通流する流路とを有しており、
前記凹部の中心部には、前記一次フィルタと当接する突設部が形成されていることを特徴とする気化器。 - 前記気化室の上端部に配置され、ヒータにより加熱された二次フィルタを更に備えており、
前記二次フィルタを通過した、前記キャリアガスおよび気化された前記液体原料との混合ガスが、前記原料導出路を通って前記気化室の上部から排出されることを特徴とする請求項1に記載の気化器。 - 前記液体原料供給部と前記気化室とが隔離され、これらの間に熱隔離用接続管が設けられていることを特徴とする請求項1または2に記載の気化器。
- ヒータにより加熱された前記キャリアガスの予熱用フィルタが、前記キャリアガス導入路に備えられていることを特徴とする請求項1〜3のいずれかに記載の気化器。
- ヒータにより加熱された気化室と、
前記気化室の下端部に配置され、ヒータにより加熱された一次フィルタと、
流量調節された液体原料を前記気化室の上方から毛細管を通じて前記一次フィルタの表面近傍まで供給する液体原料供給部と、
キャリアガスを前記一次フィルタの下面へ導くキャリアガス導入路と、
前記キャリアガスおよび気化された前記液体原料との混合ガスを前記気化室から排出するための原料導出路とを備える気化器において、
前記キャリアガス導入路は、前記一次フィルタが嵌め合わされる凹部と前記凹部の下面に形成された、前記キャリアガスが通流する流路とを有しており、
前記凹部の中心部には、前記一次フィルタと当接する突設部が形成されていることを特徴とする気化器。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005300521A JP4601535B2 (ja) | 2005-09-09 | 2005-10-14 | 低温度で液体原料を気化させることのできる気化器 |
US11/577,634 US7975993B2 (en) | 2005-09-09 | 2006-09-06 | Method for vaporizing liquid material capable of vaporizing liquid material at low temperature and vaporizer using the same |
EP06797521.9A EP1923485B1 (en) | 2005-09-09 | 2006-09-06 | Vaporizer. |
CN2006800012464A CN101061257B (zh) | 2005-09-09 | 2006-09-06 | 能够在低温度下使液体原料气化的液体原料的气化方法与采用了该方法的气化器 |
PCT/JP2006/317625 WO2007029726A1 (ja) | 2005-09-09 | 2006-09-06 | 低温度で液体原料を気化させることのできる液体原料の気化方法および該方法を用いた気化器 |
TW095133089A TW200714740A (en) | 2005-09-09 | 2006-09-07 | Method for the vaporization of liquid raw material which enables low-temperature vaporization of liquid raw material and vaporizer for the method |
KR1020077008521A KR101343784B1 (ko) | 2005-09-09 | 2007-04-13 | 저온에서 액체 원료를 기화시킬 수 있는 액체 원료의기화방법 및 당해 방법을 사용하는 기화기 |
US13/094,425 US8162298B2 (en) | 2005-09-09 | 2011-04-26 | Method for vaporizing liquid material capable of vaporizing liquid material at low temperature and vaporizer using the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005262911 | 2005-09-09 | ||
JP2005300521A JP4601535B2 (ja) | 2005-09-09 | 2005-10-14 | 低温度で液体原料を気化させることのできる気化器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007100207A JP2007100207A (ja) | 2007-04-19 |
JP4601535B2 true JP4601535B2 (ja) | 2010-12-22 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005300521A Active JP4601535B2 (ja) | 2005-09-09 | 2005-10-14 | 低温度で液体原料を気化させることのできる気化器 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7975993B2 (ja) |
EP (1) | EP1923485B1 (ja) |
JP (1) | JP4601535B2 (ja) |
KR (1) | KR101343784B1 (ja) |
CN (1) | CN101061257B (ja) |
TW (1) | TW200714740A (ja) |
WO (1) | WO2007029726A1 (ja) |
Cited By (1)
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US11274367B2 (en) | 2018-07-24 | 2022-03-15 | Lintec Co., Ltd. | Vaporizer |
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JP6322746B1 (ja) | 2017-03-30 | 2018-05-09 | オリジン電気株式会社 | ワーク処理装置及び処理済ワークの製造方法 |
WO2019155851A1 (ja) * | 2018-02-12 | 2019-08-15 | 株式会社ノリタケカンパニーリミテド | 液体霧化装置 |
JP6694093B2 (ja) * | 2018-07-24 | 2020-05-13 | 株式会社リンテック | 気化器 |
WO2020213104A1 (ja) | 2019-04-17 | 2020-10-22 | 株式会社Welcon | 気化器およびその製造方法 |
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-
2005
- 2005-10-14 JP JP2005300521A patent/JP4601535B2/ja active Active
-
2006
- 2006-09-06 CN CN2006800012464A patent/CN101061257B/zh active Active
- 2006-09-06 EP EP06797521.9A patent/EP1923485B1/en not_active Expired - Fee Related
- 2006-09-06 US US11/577,634 patent/US7975993B2/en active Active
- 2006-09-06 WO PCT/JP2006/317625 patent/WO2007029726A1/ja active Application Filing
- 2006-09-07 TW TW095133089A patent/TW200714740A/zh unknown
-
2007
- 2007-04-13 KR KR1020077008521A patent/KR101343784B1/ko active IP Right Grant
-
2011
- 2011-04-26 US US13/094,425 patent/US8162298B2/en active Active
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JPS6319569U (ja) * | 1986-07-18 | 1988-02-09 | ||
JPH06181177A (ja) * | 1991-07-19 | 1994-06-28 | Leybold Ag | 液体蒸発装置 |
JPH1074746A (ja) * | 1996-05-23 | 1998-03-17 | Ebara Corp | 液体原料気化装置 |
JPH108255A (ja) * | 1996-06-20 | 1998-01-13 | Ebara Corp | 液体原料気化装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11274367B2 (en) | 2018-07-24 | 2022-03-15 | Lintec Co., Ltd. | Vaporizer |
Also Published As
Publication number | Publication date |
---|---|
KR20080042032A (ko) | 2008-05-14 |
CN101061257B (zh) | 2010-06-23 |
US8162298B2 (en) | 2012-04-24 |
US7975993B2 (en) | 2011-07-12 |
KR101343784B1 (ko) | 2013-12-20 |
TW200714740A (en) | 2007-04-16 |
EP1923485A1 (en) | 2008-05-21 |
CN101061257A (zh) | 2007-10-24 |
US20110197816A1 (en) | 2011-08-18 |
TWI406965B (ja) | 2013-09-01 |
JP2007100207A (ja) | 2007-04-19 |
EP1923485B1 (en) | 2015-10-28 |
US20090065066A1 (en) | 2009-03-12 |
EP1923485A4 (en) | 2009-07-15 |
WO2007029726A1 (ja) | 2007-03-15 |
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