JP4562358B2 - 導電パターン検査装置 - Google Patents

導電パターン検査装置 Download PDF

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Publication number
JP4562358B2
JP4562358B2 JP2003270954A JP2003270954A JP4562358B2 JP 4562358 B2 JP4562358 B2 JP 4562358B2 JP 2003270954 A JP2003270954 A JP 2003270954A JP 2003270954 A JP2003270954 A JP 2003270954A JP 4562358 B2 JP4562358 B2 JP 4562358B2
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JP
Japan
Prior art keywords
pattern
gate
conductive pattern
sensor electrode
target
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Expired - Lifetime
Application number
JP2003270954A
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English (en)
Japanese (ja)
Other versions
JP2005024518A5 (zh
JP2005024518A (ja
Inventor
徹 小原
卓男 板垣
昌幸 藤井
Original Assignee
株式会社ユニオンアロー・テクノロジー
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Application filed by 株式会社ユニオンアロー・テクノロジー filed Critical 株式会社ユニオンアロー・テクノロジー
Priority to JP2003270954A priority Critical patent/JP4562358B2/ja
Priority to TW093118973A priority patent/TWI289674B/zh
Priority to KR1020040050394A priority patent/KR101116164B1/ko
Priority to CNB2004100691699A priority patent/CN100552464C/zh
Publication of JP2005024518A publication Critical patent/JP2005024518A/ja
Publication of JP2005024518A5 publication Critical patent/JP2005024518A5/ja
Application granted granted Critical
Publication of JP4562358B2 publication Critical patent/JP4562358B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2003270954A 2003-07-04 2003-07-04 導電パターン検査装置 Expired - Lifetime JP4562358B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003270954A JP4562358B2 (ja) 2003-07-04 2003-07-04 導電パターン検査装置
TW093118973A TWI289674B (en) 2003-07-04 2004-06-29 Device for inspecting a conductive pattern
KR1020040050394A KR101116164B1 (ko) 2003-07-04 2004-06-30 도전패턴 검사장치
CNB2004100691699A CN100552464C (zh) 2003-07-04 2004-07-05 导电图案检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003270954A JP4562358B2 (ja) 2003-07-04 2003-07-04 導電パターン検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008148843A Division JP4856120B2 (ja) 2008-06-06 2008-06-06 導電パターン検査装置

Publications (3)

Publication Number Publication Date
JP2005024518A JP2005024518A (ja) 2005-01-27
JP2005024518A5 JP2005024518A5 (zh) 2007-03-01
JP4562358B2 true JP4562358B2 (ja) 2010-10-13

Family

ID=34190767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003270954A Expired - Lifetime JP4562358B2 (ja) 2003-07-04 2003-07-04 導電パターン検査装置

Country Status (4)

Country Link
JP (1) JP4562358B2 (zh)
KR (1) KR101116164B1 (zh)
CN (1) CN100552464C (zh)
TW (1) TWI289674B (zh)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4629531B2 (ja) * 2005-08-03 2011-02-09 日置電機株式会社 短絡検査装置および短絡検査方法
JP5276774B2 (ja) * 2005-11-29 2013-08-28 株式会社日本マイクロニクス 検査方法及び装置
JP5050394B2 (ja) 2006-04-20 2012-10-17 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4915776B2 (ja) * 2006-04-27 2012-04-11 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4730904B2 (ja) * 2006-04-28 2011-07-20 日本電産リード株式会社 基板検査装置及び基板検査方法
JP2008014918A (ja) * 2006-06-30 2008-01-24 Oht Inc 回路パターン検査装置及び回路パターン検査方法
KR100799161B1 (ko) * 2006-07-20 2008-01-29 마이크로 인스펙션 주식회사 비접촉 싱글사이드 프로브와 이를 이용한 패턴전극의 단선및 단락 검사장치 및 그 방법
JP4291843B2 (ja) * 2006-10-19 2009-07-08 株式会社東京カソード研究所 パターン検査装置
JP2009121894A (ja) * 2007-11-14 2009-06-04 Fujitsu Ltd 導電体パターンの欠陥検査方法及び欠陥検査装置
JP5387818B2 (ja) * 2008-12-11 2014-01-15 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5122512B2 (ja) * 2009-04-17 2013-01-16 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5391819B2 (ja) * 2009-05-14 2014-01-15 日本電産リード株式会社 タッチパネル検査装置
JP5438538B2 (ja) 2010-02-08 2014-03-12 日本碍子株式会社 異常判定機能付き装置、及び異常判定方法
JP5533169B2 (ja) * 2010-04-13 2014-06-25 日本電産リード株式会社 検査装置
JP5305111B2 (ja) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5580247B2 (ja) * 2011-04-27 2014-08-27 株式会社ユニオンアロー・テクノロジー パターン検査装置
JP2012238066A (ja) 2011-05-10 2012-12-06 Japan Display East Co Ltd 静電容量方式のタッチパネル、および表示装置
CN103308817B (zh) * 2013-06-20 2015-11-25 京东方科技集团股份有限公司 阵列基板线路检测装置及检测方法
KR101537563B1 (ko) * 2013-11-06 2015-07-20 마이크로 인스펙션 주식회사 비접촉 프로브를 이용한 패턴전극의 결함 위치 검출 방법
CN104122689A (zh) * 2014-07-29 2014-10-29 深圳市华星光电技术有限公司 一种测试装置及其测试方法
JP6674842B2 (ja) * 2016-05-24 2020-04-01 京セラ株式会社 センサ基板およびセンサ装置
KR101823317B1 (ko) * 2016-07-01 2018-03-14 로체 시스템즈(주) 패널의 배선패턴 검사장치 및 배선패턴 검사방법
CN108226695B (zh) * 2018-01-02 2021-10-15 京东方科技集团股份有限公司 邻近金属线短路的检测及定位装置和方法
CN111007432B (zh) * 2019-12-12 2022-06-17 芜湖伦丰电子科技有限公司 一种寻找银浆开短路位置的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000227452A (ja) 1999-02-04 2000-08-15 Hioki Ee Corp 回路基板検査装置
JP4450143B2 (ja) 2001-05-24 2010-04-14 オー・エイチ・ティー株式会社 回路パターン検査装置並びに回路パターン検査方法及び記録媒体

Also Published As

Publication number Publication date
CN1576870A (zh) 2005-02-09
KR101116164B1 (ko) 2012-03-06
KR20050004046A (ko) 2005-01-12
CN100552464C (zh) 2009-10-21
TW200508625A (en) 2005-03-01
JP2005024518A (ja) 2005-01-27
TWI289674B (en) 2007-11-11

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