JP4527437B2 - マルチチップbgaパッケージ及びその製造方法 - Google Patents
マルチチップbgaパッケージ及びその製造方法 Download PDFInfo
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- JP4527437B2 JP4527437B2 JP2004126079A JP2004126079A JP4527437B2 JP 4527437 B2 JP4527437 B2 JP 4527437B2 JP 2004126079 A JP2004126079 A JP 2004126079A JP 2004126079 A JP2004126079 A JP 2004126079A JP 4527437 B2 JP4527437 B2 JP 4527437B2
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- chip
- pad
- electrode plate
- rewiring
- bga package
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Description
図2は、本発明の第1実施例による、マルチチップBGAパッケージM2を示した断面図である。図2に示したように、マルチチップBGAパッケージM2は、第1及び第2再配線チップ30、40、第1相互接続バンプ5、基板1、導電性ボール2、ボンディングワイヤー3及び封止材4を含む。
図4は、本発明の一実施例によるマルチチップBGAパッケージM3を示した断面図である。本発明の実施例を説明するにあたって、先に説明され図示されたマルチチップBGAパッケージの構成要素と同じ構成及び機能を有する構成要素については重複説明を省略する。
図6は、本発明の一実施例によるマルチチップBGAパッケージM4を示した断面図である。本発明の実施例を説明するにあたって、先に説明し図示されたマルチチップBGAパッケージの構成要素と同じ構成及び機能を有する構成要素に対しては同様の参照符号を与えて引用する。
図9Aは、本発明の第4実施例によるマルチチップBGAパッケージの第6再配線チップ60の再配線を示した平面図であり、図9Bは、本発明の第4実施例によるマルチチップBGAパッケージの第7再配線チップ70の再配線を示した平面図である。
図10Aは、本発明の第5実施例によるマルチチップBGAパッケージ中から第8再配線チップ80の再配線を概略的に示した平面図であり、図10Bは、本発明の第5実施例によるマルチチップBGAパッケージ中から第9再配線チップ90の再配線を概略的に示した平面図である。
図11Aは、本発明の一実施例によるマルチチップBGAパッケージのうち第10再配線チップ150の再配線を概略的に示した平面図であり、図11Bは、本発明の一実施例によるマルチチップBGAパッケージのうち第11再配線チップ160の再配線を概略的に示した平面図である。
図12Aは、本発明の第7実施例によるマルチチップBGAパッケージ中から第12再配線チップ170の再配線を概略的に示した平面図であり、図12Bは、本発明の第7実施例によるマルチチップBGAパッケージ中から第13再配線チップ180の再配線を概略的に示した平面図である。
図13は、本発明の第8実施例によるマルチチップBGAパッケージM5を概略的に示した断面図である。
2 導電性ボール
3 ボンディングワイヤー
4 封止材
5 第1バンプ
6 第2バンプ
102 第3チップパッド
105 第3電極板
109 第3バンプパッド
110 第2ボンディングパッド
200 第4再配線チップ
208 第3再配線
209 第4バンプパッド
300 第5再配線チップ
302 第5チップパッド
304 第4再配線
305 第5バンプパッド
306 第6バンプパッド
307 第6電極板
Claims (31)
- 第1電極板と結合された第1半導体チップと、第2電極板と結合された第2半導体チップと、前記第1半導体チップと結合された第1再配線と、前記第2半導体チップと結合された第2再配線と、前記第1及び第2再配線を電気的に接続する複数個の第1相互接続バンプとを含むマルチチップパッケージにおいて、
前記第1及び第2電極板は、前記第1及び第2半導体チップ間にデカップリングコンデンサを提供するように配置され、前記第1電極板は前記第1再配線と同一平面上に形成され、前記第1半導体チップ、第1電極板及び第1再配線は第1再配線チップを構成し、前記第2半導体チップ、第2電極板及び第2再配線は第2再配線チップを構成することを特徴とするマルチチップBGAパッケージ。 - 前記第1半導体チップは第1チップパッドをさらに含むことを特徴とする請求項1に記載のマルチチップBGAパッケージ。
- 前記第1チップパッドは、第1電源チップパッドを含むことを特徴とする請求項2に記載のマルチチップBGAパッケージ。
- 前記第1チップパッドは第1接地チップパッドを含むことを特徴とする請求項2に記載のマルチチップBGAパッケージ。
- 前記第1再配線は前記第1半導体チップ上に形成され、前記第1チップパッドと電気的に接続されていることを特徴とする請求項2に記載のマルチチップBGAパッケージ。
- 前記第1電極板は、前記第1半導体チップ上に形成され、前記第1チップパッドと電気的に接続されることを特徴とする請求項5に記載のマルチチップBGAパッケージ。
- 前記第2半導体チップは、前記第1チップパッドと電気的に接続される第2チップパッドをさらに含むことを特徴とする請求項6に記載のマルチチップBGAパッケージ。
- 前記第1電極板は第1電源チップパッドと接続され、前記第2電極板は第2接地チップパッドと接続されることを特徴とする請求項7に記載のマルチチップBGAパッケージ。
- 第1電極板は第1接地チップパッドと接続され、前記第2電極板は第2電源チップパッドと接続されることを特徴とする請求項7に記載のマルチチップBGAパッケージ。
- 前記第1再配線チップを支持固定する基板を更に含むことを特徴とする請求項7に記載のマルチチップBGAパッケージ。
- 前記第1再配線と前記基板とを電気的に接続する複数個のボンディングワイヤーを更に含むことを特徴とする請求項10に記載のマルチチップBGAパッケージ。
- 前記基板下部に配置され前記基板を外部と電気的に接続させる導電性ボールをさらに含むことを特徴とする請求項11に記載のマルチチップBGAパッケージ。
- 前記第1再配線チップは、前記半導体チップ上に形成され前記第1電極板を有する第1絶縁層をさらに含むことを特徴とする請求項12に記載のマルチチップBGAパッケージ。
- 前記第1絶縁層は、前記第1チップパッドと第1電極板とが互いに接触するようにする第1露出部を含むことを特徴とする請求項13に記載のマルチチップBGAパッケージ。
- 前記第1電極板は、第1スロットを含むことを特徴とする請求項14に記載のマルチチップBGAパッケージ。
- 前記第1再配線は前記第1スロット内に配置されることを特徴とする請求項15に記載のマルチチップBGAパッケージ。
- 前記第1再配線は、インピーダンスを制御するコプラナー導波管を含むことを特徴とする請求項16に記載のマルチチップBGAパッケージ。
- 前記インピーダンスは、前記第1スロットの幅と前記第1再配線の幅との比率により制御されることを特徴とする請求項17に記載のマルチチップBGAパッケージ。
- 前記第2再配線チップは前記第2半導体チップ上に形成され、前記第2電極板を含む第2絶縁層をさらに含むことを特徴とする請求項12に記載のマルチチップBGAパッケージ。
- 前記第2絶縁層は、前記第2チップパッドと第2電極板とが互いに接触するようにする第2露出部を含むことを特徴とする請求項19に記載のマルチチップBGAパッケージ。
- 前記第2電極板は、前記第2再配線と同一平面上に形成されることを特徴とする請求項12に記載のマルチチップBGAパッケージ。
- 前記第2電極板は第2スロットを含むことを特徴とする請求項21に記載のマルチチップBGAパッケージ。
- 前記第2再配線は、前記第2スロット内に配置されることを特徴とする請求項22に記載のマルチチップBGAパッケージ。
- 前記第2再配線はインピーダンスを制御するコプラナー導波管を含むことを特徴とする請求項23に記載のマルチチップBGAパッケージ。
- 前記インピーダンスは、前記第2スロットの幅と前記第2再配線との幅の比率によって制御されることを特徴とする請求項24に記載のマルチチップBGAパッケージ。
- 前記第1再配線チップは、前記第1電極板を基準に前記第2電極板の反対側に配置され、前記第1チップパッドと電気的に接続される第3電極板をさらに含むことを特徴とする請求項12に記載のマルチチップBGAパッケージ。
- 前記第2再配線チップは、前記第2電極板を基準に前記第1電極板の反対側に配置され、前記第2チップパッドと電気的に接続される第4電極板をさらに含むことを特徴とする請求項12に記載のマルチチップBGAパッケージ。
- 前記第1相互接続バンプから離隔して配置され、前記第1及び第2再配線を電気的に接続する複数個の第2相互接続バンプをさらに含むことを特徴とする請求項12に記載のマルチチップBGAパッケージ。
- 第1チップパッドを含み第1電極板と結合された第1半導体チップと、前記第1半導体チップ上に形成され、第1バンプパッド、第3バンプパッド及びボンドパッドを備え、前記第1チップパッドと電気的に接続され、前記第1電極板と同一平面上に形成される第1再配線と、を含む第1再配線チップと、
第2チップパッドを含み第2電極板と結合された第2半導体チップと、前記第2半導体チップ上に形成され、第2バンプパッド及び第4バンプパッドを含み、前記第2チップパッドと電気的に接続される第2再配線と、を含み、前記第1再配線チップと対向して前記第1及び第2電極板が、前記第1及び第2半導体チップ間にデカップリングコンデンサを提供するように配置される第2再配線チップと、
前記第1及び第2バンプパッド間に介され前記第1及び第2バンプパッドを電気的に接続する複数個の第1相互接続バンプと、
前記第3及び第4バンプパッド間に介され前記第3及び第4バンプパッドを電気的に接続する複数個の第2相互接続バンプと、
前記第1再配線チップを支持固定する基板と、
前記ボンドパッドにそれぞれ配置され前記第1再配線と基板とを電気的に接続する複数個のボンディングワイヤーと、
前記基板の下部に配置され前記基板と外部とを電気的に接続する複数個の導電性ボールと、
を含むことを特徴とするマルチチップBGAパッケージ。 - 前記第1及び第2再配線チップ間に複数個のダミーボールをさらに含むことを特徴とする請求項29に記載のマルチチップBGAパッケージ。
- 第1チップパッドが露出されるように、第1半導体チップ上に第1絶縁層を形成する段階と、
前記第1絶縁層上に第1金属基底層をスパッタリングする段階と、
前記第1金属基底層の同一平面上に第1電極板及び第1再配線をメッキする段階と、
前記第1金属基底層を部分的に除去する段階と、
前記第1金属基底層を介して前記第1再配線とそれに対応する第1チップパッドとを接続する段階と、
第1チップパッドのうち、第1接地チップパッドを第1電極板と接続して第1再配線チップを形成する段階と、
第2チップパッドが露出されるように、第2半導体チップ上に第2絶縁層を形成する段階と、
前記第2絶縁層上に第2金属基底層をスパッタリングする段階と、
前記第2金属基底層の同一平面上に第2電極板及び第2再配線をメッキする段階と、
前記第2金属基底層を部分的に除去する段階と、
前記第2金属基底層を介して前記第2再配線とそれに対応する第2チップパッドとを接続する段階と、
第2チップパッドのうち、第2電源チップパッドを第2電極板と接続して第2再配線チップを形成する段階と、
第1半導体チップに結合された第1電極板と、第2半導体チップに結合された第2電極板とを、第1及び第2半導体チップ間にデカップリングコンデンサを提供するように前記第1及び第2再配線間に第1相互接続バンプを介して配置する段階と、
を含むことを特徴とする、マルチチップBGAパッケージ製造方法。
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- 2004-04-21 JP JP2004126079A patent/JP4527437B2/ja not_active Expired - Fee Related
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US7064444B2 (en) | 2006-06-20 |
US20060194366A1 (en) | 2006-08-31 |
JP2004327993A (ja) | 2004-11-18 |
KR20040092304A (ko) | 2004-11-03 |
KR100541393B1 (ko) | 2006-01-10 |
US20040251529A1 (en) | 2004-12-16 |
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