JP4189384B2 - 情報記録媒体用ガラス基板の製造方法と研磨装置 - Google Patents

情報記録媒体用ガラス基板の製造方法と研磨装置 Download PDF

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Publication number
JP4189384B2
JP4189384B2 JP2004562932A JP2004562932A JP4189384B2 JP 4189384 B2 JP4189384 B2 JP 4189384B2 JP 2004562932 A JP2004562932 A JP 2004562932A JP 2004562932 A JP2004562932 A JP 2004562932A JP 4189384 B2 JP4189384 B2 JP 4189384B2
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Japan
Prior art keywords
polishing
base plate
glass base
glass substrate
abrasive grains
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Expired - Fee Related
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JP2004562932A
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Japanese (ja)
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JPWO2004058450A1 (ja
Inventor
環樹 堀坂
弘一 鈴木
明秀 南
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Hoya Corp
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Hoya Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Magnetic Record Carriers (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP2004562932A 2002-12-26 2003-12-25 情報記録媒体用ガラス基板の製造方法と研磨装置 Expired - Fee Related JP4189384B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002378735 2002-12-26
JP2002378735 2002-12-26
PCT/JP2003/016671 WO2004058450A1 (fr) 2002-12-26 2003-12-25 Procede de production d'un substrat en verre pour support d'enregistrement d'informations, appareil de polissage et substrat en verre pour support d'enregistrement d'informations

Publications (2)

Publication Number Publication Date
JPWO2004058450A1 JPWO2004058450A1 (ja) 2006-04-27
JP4189384B2 true JP4189384B2 (ja) 2008-12-03

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JP2004562932A Expired - Fee Related JP4189384B2 (ja) 2002-12-26 2003-12-25 情報記録媒体用ガラス基板の製造方法と研磨装置

Country Status (5)

Country Link
US (1) US7429209B2 (fr)
JP (1) JP4189384B2 (fr)
CN (1) CN100513075C (fr)
AU (1) AU2003292786A1 (fr)
WO (1) WO2004058450A1 (fr)

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JP2011098426A (ja) * 2009-11-09 2011-05-19 Nitta Haas Inc 研磨パッド及び研磨パッドの製造方法

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JP4790973B2 (ja) * 2003-03-28 2011-10-12 Ｈｏｙａ株式会社 研磨パッドを使用した情報記録媒体用ガラス基板の製造方法及びその方法で得られた情報記録媒体用ガラス基板
JP4832789B2 (ja) * 2005-04-19 2011-12-07 富士紡ホールディングス株式会社 研磨布
JP2007160496A (ja) * 2005-11-15 2007-06-28 Shinshu Univ ワーク研磨装置およびワーク研磨方法
US9273356B2 (en) 2006-05-24 2016-03-01 Medtronic, Inc. Methods and kits for linking polymorphic sequences to expanded repeat mutations
JP2008024528A (ja) * 2006-07-18 2008-02-07 Asahi Glass Co Ltd 磁気ディスク用ガラス基板の製造方法
JP2009035461A (ja) * 2007-08-03 2009-02-19 Asahi Glass Co Ltd 磁気ディスク用ガラス基板の製造方法
JP5078527B2 (ja) * 2007-09-28 2012-11-21 富士紡ホールディングス株式会社 研磨布
JP2009146652A (ja) * 2007-12-12 2009-07-02 Citizen Electronics Co Ltd 操作キー照明装置及び電子機器
JP2009289925A (ja) * 2008-05-28 2009-12-10 Sumco Corp 半導体ウェーハの研削方法、研削用定盤および研削装置
JP5233621B2 (ja) * 2008-12-02 2013-07-10 旭硝子株式会社 磁気ディスク用ガラス基板及びその製造方法。
JP5177290B2 (ja) * 2009-06-04 2013-04-03 株式会社Ｓｕｍｃｏ 固定砥粒加工装置及び固定砥粒加工方法、並びに、半導体ウェーハ製造方法
JP5355310B2 (ja) * 2009-09-03 2013-11-27 富士紡ホールディングス株式会社 保持パッド
JP2011148082A (ja) * 2009-12-25 2011-08-04 Filwel:Kk 研磨布
DE102010005904B4 (de) * 2010-01-27 2012-11-22 Siltronic Ag Verfahren zur Herstellung einer Halbleiterscheibe
JP4858622B2 (ja) * 2010-02-26 2012-01-18 旭硝子株式会社 磁気記録媒体用ガラス基板の製造方法
JP5586293B2 (ja) * 2010-03-26 2014-09-10 昭和電工株式会社 磁気記録媒体用基板の製造方法
JP5624829B2 (ja) * 2010-08-17 2014-11-12 昭和電工株式会社 磁気記録媒体用ガラス基板の製造方法
JP2012089221A (ja) * 2010-10-22 2012-05-10 Showa Denko Kk 磁気記録媒体用ガラス基板の製造方法
WO2013099083A1 (fr) * 2011-12-27 2013-07-04 コニカミノルタ株式会社 Procédé de fabrication d'un substrat en verre pour un lecteur de disque dur
MY168037A (en) * 2011-12-29 2018-10-11 Hoya Corp Method for manufacturing magnetic-disk glass substrate
CN102581737B (zh) * 2012-03-27 2015-03-18 赫得纳米科技(昆山)有限公司 抛光用环氧板改装结构
US11352287B2 (en) 2012-11-28 2022-06-07 Vitro Flat Glass Llc High strain point glass
SG11201602990XA (en) * 2013-10-31 2016-05-30 Hoya Glass Disk Vietnam Ii Ltd Glass substrate for magnetic disk and magnetic disk for heat assisted magnetic recording
CN104616672B (zh) * 2015-01-22 2017-08-11 上海光和光学制造股份有限公司 一种玻璃母盘基片的制造工艺
US20210323116A1 (en) * 2020-04-18 2021-10-21 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Offset pore poromeric polishing pad
US20210323115A1 (en) * 2020-04-18 2021-10-21 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Leveraged poromeric polishing pad

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JP4947754B2 (ja) 2001-03-27 2012-06-06 日本板硝子株式会社 情報記録媒体用基板及びその製造方法、情報記録媒体、並びにガラス素板
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011098426A (ja) * 2009-11-09 2011-05-19 Nitta Haas Inc 研磨パッド及び研磨パッドの製造方法

Also Published As

Publication number Publication date
CN100513075C (zh) 2009-07-15
WO2004058450A1 (fr) 2004-07-15
US7429209B2 (en) 2008-09-30
CN1711153A (zh) 2005-12-21
JPWO2004058450A1 (ja) 2006-04-27
US20060002283A1 (en) 2006-01-05
AU2003292786A1 (en) 2004-07-22

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