JP3027457B2 - 多次元方向に関する力・加速度・磁気の検出装置 - Google Patents

多次元方向に関する力・加速度・磁気の検出装置

Info

Publication number
JP3027457B2
JP3027457B2 JP03306587A JP30658791A JP3027457B2 JP 3027457 B2 JP3027457 B2 JP 3027457B2 JP 03306587 A JP03306587 A JP 03306587A JP 30658791 A JP30658791 A JP 30658791A JP 3027457 B2 JP3027457 B2 JP 3027457B2
Authority
JP
Japan
Prior art keywords
force
detector
substrate
plane
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP03306587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05118942A (ja
Inventor
和廣 岡田
Original Assignee
和廣 岡田
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 和廣 岡田 filed Critical 和廣 岡田
Priority to JP03306587A priority Critical patent/JP3027457B2/ja
Priority to US07/960,545 priority patent/US5343765A/en
Priority to DE69219721T priority patent/DE69219721D1/de
Priority to EP92118221A priority patent/EP0538899B1/de
Publication of JPH05118942A publication Critical patent/JPH05118942A/ja
Priority to US08/249,817 priority patent/US5392658A/en
Application granted granted Critical
Publication of JP3027457B2 publication Critical patent/JP3027457B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP03306587A 1991-10-25 1991-10-25 多次元方向に関する力・加速度・磁気の検出装置 Expired - Lifetime JP3027457B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP03306587A JP3027457B2 (ja) 1991-10-25 1991-10-25 多次元方向に関する力・加速度・磁気の検出装置
US07/960,545 US5343765A (en) 1991-10-25 1992-10-13 Detector for force, acceleration or magnetism with respect to components in multi-dimensional directions
DE69219721T DE69219721D1 (de) 1991-10-25 1992-10-23 Detektor mit Komponenten in mehrdimensionalen Richtungen für Kraft, Beschleunigung oder Magnetfeld
EP92118221A EP0538899B1 (de) 1991-10-25 1992-10-23 Detektor mit Komponenten in mehrdimensionalen Richtungen für Kraft, Beschleunigung oder Magnetfeld
US08/249,817 US5392658A (en) 1991-10-25 1994-05-26 Detector for force, acceleration or magnetism with respect to components in multi-dimensional directions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03306587A JP3027457B2 (ja) 1991-10-25 1991-10-25 多次元方向に関する力・加速度・磁気の検出装置

Publications (2)

Publication Number Publication Date
JPH05118942A JPH05118942A (ja) 1993-05-14
JP3027457B2 true JP3027457B2 (ja) 2000-04-04

Family

ID=17958865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03306587A Expired - Lifetime JP3027457B2 (ja) 1991-10-25 1991-10-25 多次元方向に関する力・加速度・磁気の検出装置

Country Status (4)

Country Link
US (2) US5343765A (de)
EP (1) EP0538899B1 (de)
JP (1) JP3027457B2 (de)
DE (1) DE69219721D1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6257017B1 (ja) * 2017-09-26 2018-01-10 株式会社トライフォース・マネジメント 力覚センサ
JP2019060834A (ja) * 2017-11-30 2019-04-18 株式会社トライフォース・マネジメント 力覚センサ

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DE69019343T2 (de) 1989-12-28 1996-02-15 Wako Kk Beschleunigungssensoren.
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
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US5646346A (en) * 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
JP3256346B2 (ja) * 1993-07-29 2002-02-12 和廣 岡田 圧電素子を用いた力・加速度・磁気のセンサ
JP3451362B2 (ja) * 1994-01-19 2003-09-29 ニッタ株式会社 静電容量式センサー
SE9403188D0 (sv) * 1994-09-22 1994-09-22 Siemens Elema Ab Magnetfältsdetektor vid ett medicinskt implantat
JP3549590B2 (ja) * 1994-09-28 2004-08-04 和廣 岡田 加速度・角速度センサ
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JP3585980B2 (ja) * 1995-02-21 2004-11-10 株式会社ワコー 角速度センサ
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JPH0949856A (ja) * 1995-05-31 1997-02-18 Wako:Kk 加速度センサ
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JP4011626B2 (ja) * 1996-07-10 2007-11-21 株式会社ワコー 角速度センサ
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JP4295883B2 (ja) 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
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JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP4125931B2 (ja) * 2002-08-26 2008-07-30 株式会社ワコー 回転操作量の入力装置およびこれを利用した操作装置
JP3983638B2 (ja) * 2002-09-24 2007-09-26 ニッタ株式会社 センサシート
JP4907050B2 (ja) * 2003-03-31 2012-03-28 株式会社ワコー 力検出装置
JP4271475B2 (ja) * 2003-03-31 2009-06-03 株式会社ワコー 力検出装置
JP4387691B2 (ja) * 2003-04-28 2009-12-16 株式会社ワコー 力検出装置
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JP5267504B2 (ja) 2009-05-19 2013-08-21 ミツミ電機株式会社 操作入力装置及び操作入力検出装置
JP5439068B2 (ja) * 2009-07-08 2014-03-12 株式会社ワコー 力検出装置
WO2011022665A1 (en) * 2009-08-21 2011-02-24 Regents Of The University Of Minnesota Flexible sensors and related systems for determining forces applied to an object, such as a surgical instrument
CN102175892B (zh) * 2011-01-26 2013-05-01 边义祥 含芯压电棒多维加速度传感器及加速度测量方法
GB201219632D0 (en) * 2012-10-31 2012-12-12 Univ Southampton Apparatus for sensing and measuring pressure and shear components of a force at an interface between two surfaces
KR101470160B1 (ko) * 2013-05-29 2014-12-08 성균관대학교산학협력단 평판형 힘/토크 센서
JP5529328B1 (ja) 2013-09-04 2014-06-25 株式会社トライフォース・マネジメント 発電素子
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KR101477120B1 (ko) * 2014-04-14 2014-12-30 성균관대학교산학협력단 정전용량형 6축 힘/토크 센서
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Publication number Priority date Publication date Assignee Title
JP6257017B1 (ja) * 2017-09-26 2018-01-10 株式会社トライフォース・マネジメント 力覚センサ
JP2019060704A (ja) * 2017-09-26 2019-04-18 株式会社トライフォース・マネジメント 力覚センサ
JP2019060834A (ja) * 2017-11-30 2019-04-18 株式会社トライフォース・マネジメント 力覚センサ

Also Published As

Publication number Publication date
EP0538899B1 (de) 1997-05-14
EP0538899A2 (de) 1993-04-28
US5343765A (en) 1994-09-06
EP0538899A3 (en) 1993-07-07
DE69219721D1 (de) 1997-06-19
US5392658A (en) 1995-02-28
JPH05118942A (ja) 1993-05-14

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