JP3027457B2 - 多次元方向に関する力・加速度・磁気の検出装置 - Google Patents
多次元方向に関する力・加速度・磁気の検出装置Info
- Publication number
- JP3027457B2 JP3027457B2 JP03306587A JP30658791A JP3027457B2 JP 3027457 B2 JP3027457 B2 JP 3027457B2 JP 03306587 A JP03306587 A JP 03306587A JP 30658791 A JP30658791 A JP 30658791A JP 3027457 B2 JP3027457 B2 JP 3027457B2
- Authority
- JP
- Japan
- Prior art keywords
- force
- detector
- substrate
- plane
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title claims description 63
- 230000005389 magnetism Effects 0.000 title claims description 9
- 238000001514 detection method Methods 0.000 claims description 134
- 239000000758 substrate Substances 0.000 claims description 125
- 238000006073 displacement reaction Methods 0.000 claims description 60
- 239000003990 capacitor Substances 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 description 9
- 230000007423 decrease Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000011896 sensitive detection Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03306587A JP3027457B2 (ja) | 1991-10-25 | 1991-10-25 | 多次元方向に関する力・加速度・磁気の検出装置 |
US07/960,545 US5343765A (en) | 1991-10-25 | 1992-10-13 | Detector for force, acceleration or magnetism with respect to components in multi-dimensional directions |
DE69219721T DE69219721D1 (de) | 1991-10-25 | 1992-10-23 | Detektor mit Komponenten in mehrdimensionalen Richtungen für Kraft, Beschleunigung oder Magnetfeld |
EP92118221A EP0538899B1 (de) | 1991-10-25 | 1992-10-23 | Detektor mit Komponenten in mehrdimensionalen Richtungen für Kraft, Beschleunigung oder Magnetfeld |
US08/249,817 US5392658A (en) | 1991-10-25 | 1994-05-26 | Detector for force, acceleration or magnetism with respect to components in multi-dimensional directions |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03306587A JP3027457B2 (ja) | 1991-10-25 | 1991-10-25 | 多次元方向に関する力・加速度・磁気の検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05118942A JPH05118942A (ja) | 1993-05-14 |
JP3027457B2 true JP3027457B2 (ja) | 2000-04-04 |
Family
ID=17958865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03306587A Expired - Lifetime JP3027457B2 (ja) | 1991-10-25 | 1991-10-25 | 多次元方向に関する力・加速度・磁気の検出装置 |
Country Status (4)
Country | Link |
---|---|
US (2) | US5343765A (de) |
EP (1) | EP0538899B1 (de) |
JP (1) | JP3027457B2 (de) |
DE (1) | DE69219721D1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6257017B1 (ja) * | 2017-09-26 | 2018-01-10 | 株式会社トライフォース・マネジメント | 力覚センサ |
JP2019060834A (ja) * | 2017-11-30 | 2019-04-18 | 株式会社トライフォース・マネジメント | 力覚センサ |
Families Citing this family (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6864677B1 (en) * | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
EP0461265B1 (de) | 1989-12-28 | 1995-05-10 | Wacoh Corporation | Beschleunigungssensoren |
US5421213A (en) * | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
US6314823B1 (en) * | 1991-09-20 | 2001-11-13 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
US6282956B1 (en) * | 1994-12-29 | 2001-09-04 | Kazuhiro Okada | Multi-axial angular velocity sensor |
US5646346A (en) * | 1994-11-10 | 1997-07-08 | Okada; Kazuhiro | Multi-axial angular velocity sensor |
JP3256346B2 (ja) * | 1993-07-29 | 2002-02-12 | 和廣 岡田 | 圧電素子を用いた力・加速度・磁気のセンサ |
JP3451362B2 (ja) * | 1994-01-19 | 2003-09-29 | ニッタ株式会社 | 静電容量式センサー |
SE9403188D0 (sv) * | 1994-09-22 | 1994-09-22 | Siemens Elema Ab | Magnetfältsdetektor vid ett medicinskt implantat |
JP3549590B2 (ja) * | 1994-09-28 | 2004-08-04 | 和廣 岡田 | 加速度・角速度センサ |
US6003371A (en) | 1995-02-21 | 1999-12-21 | Wacoh Corporation | Angular velocity sensor |
JP3585980B2 (ja) * | 1995-02-21 | 2004-11-10 | 株式会社ワコー | 角速度センサ |
DE19511110A1 (de) * | 1995-03-25 | 1996-09-26 | Haehne Elektronische Messgerae | Vorrichtung zur Bandzugmessung |
JPH0949856A (ja) * | 1995-05-31 | 1997-02-18 | Wako:Kk | 加速度センサ |
JPH09119943A (ja) * | 1995-10-24 | 1997-05-06 | Wako:Kk | 加速度センサ |
US5818227A (en) * | 1996-02-22 | 1998-10-06 | Analog Devices, Inc. | Rotatable micromachined device for sensing magnetic fields |
DE19627385A1 (de) * | 1996-07-06 | 1998-01-08 | Bayerische Motoren Werke Ag | Radmeßnabe |
US6367326B1 (en) | 1996-07-10 | 2002-04-09 | Wacoh Corporation | Angular velocity sensor |
US6076401A (en) * | 1996-07-10 | 2000-06-20 | Wacoh Corporation | Angular velocity sensor |
JP4176849B2 (ja) * | 1997-05-08 | 2008-11-05 | 株式会社ワコー | センサの製造方法 |
US6275034B1 (en) | 1998-03-11 | 2001-08-14 | Analog Devices Inc. | Micromachined semiconductor magnetic sensor |
US6621266B1 (en) | 1998-06-09 | 2003-09-16 | Analog Devices, Inc. | Rotatable micromachined device for sensing magnetic fields |
JP2000047811A (ja) * | 1998-07-27 | 2000-02-18 | Alps Electric Co Ltd | 入力装置 |
DE19934823C2 (de) * | 1999-07-24 | 2001-07-12 | Mtu Aero Engines Gmbh | Nachweisvorrichtung zum Nachweis von lokalen Magnetfeldern |
JP4295883B2 (ja) | 1999-12-13 | 2009-07-15 | 株式会社ワコー | 力検出装置 |
US6809529B2 (en) * | 2001-08-10 | 2004-10-26 | Wacoh Corporation | Force detector |
AU2003224982A1 (en) * | 2002-04-12 | 2003-10-27 | Fritz H. Obermeyer | Multi-axis joystick and transducer means therefore |
JP4216525B2 (ja) * | 2002-05-13 | 2009-01-28 | 株式会社ワコー | 加速度センサおよびその製造方法 |
JP4125931B2 (ja) * | 2002-08-26 | 2008-07-30 | 株式会社ワコー | 回転操作量の入力装置およびこれを利用した操作装置 |
JP3983638B2 (ja) * | 2002-09-24 | 2007-09-26 | ニッタ株式会社 | センサシート |
JP4271475B2 (ja) * | 2003-03-31 | 2009-06-03 | 株式会社ワコー | 力検出装置 |
JP4907050B2 (ja) * | 2003-03-31 | 2012-03-28 | 株式会社ワコー | 力検出装置 |
JP4387691B2 (ja) * | 2003-04-28 | 2009-12-16 | 株式会社ワコー | 力検出装置 |
WO2005116580A1 (en) * | 2003-05-08 | 2005-12-08 | Triad Sensors, Inc. | Force balanced piezoelectric rate sensor |
JP2006226858A (ja) * | 2005-02-18 | 2006-08-31 | Hiroshima Univ | 変動荷重センサ及びこれを用いた触覚センサ |
US7337671B2 (en) | 2005-06-03 | 2008-03-04 | Georgia Tech Research Corp. | Capacitive microaccelerometers and fabrication methods |
US7253616B2 (en) * | 2005-10-13 | 2007-08-07 | Lucent Technologies Inc. | Microelectromechanical magnetometer |
US20070247421A1 (en) * | 2006-04-25 | 2007-10-25 | Timothy James Orsley | Capacitive-based rotational positioning input device |
US7578189B1 (en) | 2006-05-10 | 2009-08-25 | Qualtre, Inc. | Three-axis accelerometers |
US7889176B2 (en) * | 2006-07-18 | 2011-02-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Capacitive sensing in displacement type pointing devices |
JP2008096229A (ja) * | 2006-10-11 | 2008-04-24 | Nitta Ind Corp | 静電容量式センサ |
US7509884B2 (en) | 2007-02-01 | 2009-03-31 | Nitta Corporation | Sensor sheet |
JP2008190931A (ja) * | 2007-02-02 | 2008-08-21 | Wacoh Corp | 加速度と角速度との双方を検出するセンサ |
US8232963B2 (en) * | 2007-08-27 | 2012-07-31 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Control and data entry apparatus |
US7978175B2 (en) * | 2007-11-23 | 2011-07-12 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Magnetic re-centering mechanism for a capacitive input device |
US20090135157A1 (en) * | 2007-11-27 | 2009-05-28 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Capacitive Sensing Input Device with Reduced Sensitivity to Humidity and Condensation |
JP5267504B2 (ja) | 2009-05-19 | 2013-08-21 | ミツミ電機株式会社 | 操作入力装置及び操作入力検出装置 |
JP5439068B2 (ja) * | 2009-07-08 | 2014-03-12 | 株式会社ワコー | 力検出装置 |
EP2467689B1 (de) | 2009-08-21 | 2019-12-25 | St. Jude Medical, Cardiology Division, Inc. | Biegsame sensoren und zugehörige systeme zur bestimmung von auf ein objekt, etwa ein chirurgisches instrument, angewandten kräften |
CN102175892B (zh) * | 2011-01-26 | 2013-05-01 | 边义祥 | 含芯压电棒多维加速度传感器及加速度测量方法 |
GB201219632D0 (en) * | 2012-10-31 | 2012-12-12 | Univ Southampton | Apparatus for sensing and measuring pressure and shear components of a force at an interface between two surfaces |
KR101470160B1 (ko) * | 2013-05-29 | 2014-12-08 | 성균관대학교산학협력단 | 평판형 힘/토크 센서 |
JP5529328B1 (ja) | 2013-09-04 | 2014-06-25 | 株式会社トライフォース・マネジメント | 発電素子 |
WO2015077102A1 (en) | 2013-11-25 | 2015-05-28 | Oil States Industries, Inc. | Method and system for health monitoring of composite elastomeric flexible elements |
KR101533920B1 (ko) * | 2014-04-14 | 2015-07-06 | 성균관대학교산학협력단 | 정전용량형 3축 힘 센서 |
KR101477120B1 (ko) * | 2014-04-14 | 2014-12-30 | 성균관대학교산학협력단 | 정전용량형 6축 힘/토크 센서 |
JP6053247B1 (ja) | 2015-01-26 | 2016-12-27 | 株式会社ワコーテック | 力覚センサ |
WO2016163033A1 (ja) | 2015-04-07 | 2016-10-13 | 株式会社トライフォース・マネジメント | 力覚センサおよびこれに用いる構造体 |
US9952252B2 (en) * | 2015-05-15 | 2018-04-24 | Invensense, Inc. | Offset rejection electrodes |
US11231441B2 (en) * | 2015-05-15 | 2022-01-25 | Invensense, Inc. | MEMS structure for offset minimization of out-of-plane sensing accelerometers |
JP5996078B1 (ja) | 2015-10-19 | 2016-09-21 | 株式会社トライフォース・マネジメント | 発電素子 |
JP2017203683A (ja) * | 2016-05-11 | 2017-11-16 | 内外ゴム株式会社 | 静電容量型の3軸加速度センサ |
CN107101755B (zh) * | 2017-06-15 | 2019-04-09 | 西安交通大学 | 一种应变式三维力传感器 |
CN109813483A (zh) * | 2019-03-28 | 2019-05-28 | 交通运输部公路科学研究所 | 一种开环可调式索力测量装置及其测量方法 |
CN113218559B (zh) * | 2021-05-28 | 2022-07-15 | 浙江工业大学 | 一种柔性三维力传感器及其制备方法 |
CN115265885A (zh) * | 2022-08-03 | 2022-11-01 | 东北电力大学 | 可测量多维力大小、方向、作用点的环形装置及测量方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3270260A (en) * | 1963-11-18 | 1966-08-30 | Measurement Systems Inc | Stick-operated diaphragm control |
US4431935A (en) * | 1981-09-15 | 1984-02-14 | Rockwell International Corporation | Sensor structure incorporating multiple piezoelectric generators |
JPS6034295A (ja) * | 1983-08-03 | 1985-02-21 | 株式会社日立製作所 | 皮膚感覚センサ |
US4719538A (en) * | 1986-12-02 | 1988-01-12 | Cox John D | Force responsive capacitive transducer |
US4745812A (en) * | 1987-03-25 | 1988-05-24 | The United States Of America As Represented By The Secretary Of The Army | Triaxial tactile sensor |
WO1988008521A1 (en) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Force and moment detector using resistor |
EP0316498B1 (de) * | 1987-11-09 | 1992-03-04 | Vibro-Meter Sa | Accelerometer |
EP0461265B1 (de) * | 1989-12-28 | 1995-05-10 | Wacoh Corporation | Beschleunigungssensoren |
US5421213A (en) * | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
EP0537347B1 (de) * | 1991-03-30 | 1997-01-22 | OKADA, Kazuhiro | Beschleunigungssensor mit Selbsttest |
JP3141954B2 (ja) * | 1991-07-17 | 2001-03-07 | 株式会社ワコー | 圧電素子を用いた力・加速度・磁気のセンサ |
-
1991
- 1991-10-25 JP JP03306587A patent/JP3027457B2/ja not_active Expired - Lifetime
-
1992
- 1992-10-13 US US07/960,545 patent/US5343765A/en not_active Expired - Fee Related
- 1992-10-23 EP EP92118221A patent/EP0538899B1/de not_active Expired - Lifetime
- 1992-10-23 DE DE69219721T patent/DE69219721D1/de not_active Expired - Lifetime
-
1994
- 1994-05-26 US US08/249,817 patent/US5392658A/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6257017B1 (ja) * | 2017-09-26 | 2018-01-10 | 株式会社トライフォース・マネジメント | 力覚センサ |
JP2019060704A (ja) * | 2017-09-26 | 2019-04-18 | 株式会社トライフォース・マネジメント | 力覚センサ |
JP2019060834A (ja) * | 2017-11-30 | 2019-04-18 | 株式会社トライフォース・マネジメント | 力覚センサ |
Also Published As
Publication number | Publication date |
---|---|
DE69219721D1 (de) | 1997-06-19 |
US5392658A (en) | 1995-02-28 |
US5343765A (en) | 1994-09-06 |
EP0538899B1 (de) | 1997-05-14 |
EP0538899A3 (en) | 1993-07-07 |
JPH05118942A (ja) | 1993-05-14 |
EP0538899A2 (de) | 1993-04-28 |
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