JP2022182186A - アンダーバリアメタルとソルダー層とを含む構造体 - Google Patents
アンダーバリアメタルとソルダー層とを含む構造体 Download PDFInfo
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- JP2022182186A JP2022182186A JP2021089587A JP2021089587A JP2022182186A JP 2022182186 A JP2022182186 A JP 2022182186A JP 2021089587 A JP2021089587 A JP 2021089587A JP 2021089587 A JP2021089587 A JP 2021089587A JP 2022182186 A JP2022182186 A JP 2022182186A
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- 239000000956 alloy Substances 0.000 claims abstract description 17
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Images
Classifications
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- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
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Abstract
Description
下記組成で電気Ni浴を建浴した。また、めっき条件も併せて示す。
[組成]
スルファミン酸ニッケル(Ni2+として):50g/L
ホウ酸:40g/L
サッカリンナトリウム:2g/L
pH4.0
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Ni浴を建浴した。また、めっき条件も併せて示す。
[組成]
スルファミン酸ニッケル(Ni2+として):50g/L
ホウ酸:40g/L
サッカリンナトリウム:1g/L
pH4.0
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Ni浴を建浴した。また、めっき条件も併せて示す。
[組成]
スルファミン酸ニッケル(Ni2+として):50g/L
ホウ酸:40g/L
サッカリンナトリウム:0.70g/L
pH4.0
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Ni浴を建浴した。また、めっき条件も併せて示す。
[組成]
スルファミン酸ニッケル(Ni2+として):50g/L
ホウ酸:40g/L
サッカリンナトリウム:0.50g/L
pH4.0
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Ni浴を建浴した。また、めっき条件も併せて示す。
[組成]
スルファミン酸ニッケル(Ni2+として):50g/L
ホウ酸:40g/L
サッカリンナトリウム:0.20g/L
pH4.0
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):20g/L
塩化コバルト(Co2+として):80g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):100g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):45g/L
塩化コバルト(Co2+として):45g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):10g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):110g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):20g/L
塩化コバルト(Co2+として):80g/L
クエン酸:20g/L
ニトリロ三酢酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):30g/L
塩化コバルト(Co2+として):65g/L
クエン酸:20g/L
2-ヒドロキシエチルエチレンジアミン三酢酸:20g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
ニトリロ三酢酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
エチレンジアミン四酢酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):10g/L
クエン酸:20g/L
エチレンジアミン四酢酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
1-ナフトール-4-スルホン酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
メタクリル酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):100g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
トリエチレンテトラミン六酢酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):110g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
グリコールエーテルジアミン四酢酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
ホウ酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
グリオキシル酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
リンゴ酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
エタンスルホン酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
グルコン酸ナトリウム:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):100g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
アクリル酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
酒石酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
ピロリン酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
エチレンジアミン-N,N’-ジコハク酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
チオジグリコール酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
塩化鉄(Fe2+として):90g/L
塩化コバルト(Co2+として):20g/L
クエン酸:20g/L
スルホコハク酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
硫酸鉄(Fe2+として):40g/L
塩化コバルト(Co2+として):50g/L
クエン酸:20g/L
チオジグリコール酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
下記組成で電気Fe-Co浴を建浴した。また、めっき条件も併せて示す。
[組成]
スルファミン酸鉄(Fe2+として):40g/L
スルファミン酸コバルト(Co2+として):50g/L
クエン酸:20g/L
スルホコハク酸:10g/L
pH3.5
[めっき条件]
(ア)浴温:50℃
(イ)陰極電流密度
第1陰極電流密度:3A/dm2
めっき時間:約300秒
形成されためっき層の厚さ:3μm
S=UKM/3T
なお、上記式において、Sは内部応力、Uはストリップ開脚幅、Kはテストストリップのキャリブレーション定数、MはMファクター(析出物の弾性率/テストストリップ材の弾性率)、Tは析出物の膜厚である。
11 アンダーバリアメタル(UBM)
12 ソルダー層
13 金属間化合物
Claims (4)
- 基材と、
前記基材の上に形成されたソルダー層と、
前記基材とソルダー層との間に形成されたFeとCoとを含む合金層であるアンダーバリアメタルとを備え、
前記アンダーバリアメタルの内部応力は、260Mpa以下であることを特徴とする構造体。 - 前記アンダーバリアメタルは、Feを10%以上の質量比率で含むことを特徴とする請求項1に記載の構造体。
- 前記ソルダー層は、Sn層若しくはSn合金層、又はIn層若しくはIn合金層であることを特徴とする請求項1又は2に記載の構造体。
- 基材の上にめっき法によりアンダーバリアメタル及びソルダー層を順次形成して、アンダーバリアメタル及びソルダー層を含む構造体を製造する方法であって、
水と、少なくとも1つの鉄イオンの供給源と、少なくとも1つのコバルトイオンの供給源と、無機酸、アルカンスルホン酸及び前記酸の塩からなる群から選択される少なくとも1つの酸と、少なくとも1つの応力緩和剤とを含むめっき溶液を用いて、内部応力が260Mpaであるアンダーバリアメタルを形成するステップを含み、
前記めっき溶液は、前記応力緩和剤を0.5g/L~100g/Lの濃度で含むことを特徴とする構造体の製造方法。
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