JP2021523555A - トランジスタ、トランジスタのアレイ、コンデンサと高さ方向に延伸するトランジスタと個別に含むメモリセルのアレイ、及びトランジスタのアレイを形成する方法 - Google Patents
トランジスタ、トランジスタのアレイ、コンデンサと高さ方向に延伸するトランジスタと個別に含むメモリセルのアレイ、及びトランジスタのアレイを形成する方法 Download PDFInfo
- Publication number
- JP2021523555A JP2021523555A JP2020560225A JP2020560225A JP2021523555A JP 2021523555 A JP2021523555 A JP 2021523555A JP 2020560225 A JP2020560225 A JP 2020560225A JP 2020560225 A JP2020560225 A JP 2020560225A JP 2021523555 A JP2021523555 A JP 2021523555A
- Authority
- JP
- Japan
- Prior art keywords
- array
- capacitor
- individual
- capacitor electrode
- transistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 172
- 230000015654 memory Effects 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 122
- 239000004065 semiconductor Substances 0.000 claims abstract description 67
- 239000012212 insulator Substances 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 29
- 239000004020 conductor Substances 0.000 claims description 17
- 239000011810 insulating material Substances 0.000 claims description 8
- 238000000059 patterning Methods 0.000 claims description 2
- 239000011800 void material Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- 239000002019 doping agent Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000003491 array Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0705—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type
- H01L27/0727—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
- H01L23/5283—Cross-sectional geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/4175—Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66666—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
- H10B12/0335—Making a connection between the transistor and the capacitor, e.g. plug
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
- H10B12/056—Making the transistor the transistor being a FinFET
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/315—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor with the capacitor higher than a bit line
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/48—Data lines or contacts therefor
- H10B12/482—Bit lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/48—Data lines or contacts therefor
- H10B12/488—Word lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78642—Vertical transistors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Geometry (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
幾つかの実施形態では、コンデンサと高さ方向に延伸するトランジスタとを個別に含むメモリセルのアレイであって、ワード線の行とデジット線の列とを含む該アレイは、アレイ内の個別のメモリセルの高さ方向に延伸するトランジスタのチャネル領域の下にあり、当該列内のトランジスタを相互接続するデジット線を含む個別の該列を含む。チャネル領域は、対向する側面の対を個別に含む。個々の行は、デジット線の上方にワード線を含む。ワード線は、トランジスタのチャネル領域の横方向に対向する面の対の内の一方を横方向に越えて、該一方に動作可能に横方向に隣接して延伸し、当該行内のトランジスタを相互接続する。当該行内のトランジスタのチャネル領域の横方向に対向する面の対の内の他方は、当該行内のワード線に動作可能に横方向に隣接せず、何れの他ワード線にも動作可能に横方向に隣接しない。アレイ内の個別のメモリセルのコンデンサは、トランジスタの内の1つの上部ソース/ドレイン領域に電気的に結合され、該上部ソース/ドレイン領域から高さ方向に上向きに延伸する第1のコンデンサ電極を個別に含む。高さ方向に延伸するコンデンサ絶縁体は、横方向に対向する面の対を含み、その内の1つは、第1のコンデンサ電極の側面に動作可能に隣接する。高さ方向に延伸する第2のコンデンサ電極は、横方向に対向する面の対を含み、その内の1つは、コンデンサ絶縁体の横方向に対向する他方の面に動作可能に隣接する。アレイ内の第2のコンデンサ電極は、コンデンサの線に水平方向に沿って延伸する、間隔を空けて長手方向に伸長する線である。個別の第2のコンデンサ電極の線は、コンデンサの当該線に長手方向に沿ってコンデンサにより共有される。
Claims (40)
- コンデンサと高さ方向に延伸するトランジスタとを個別に含むメモリセルのアレイであって、ワード線の行とデジット線の列とを含む前記アレイであって、
前記アレイ内の個別のメモリセルの高さ方向に延伸するトランジスタのチャネル領域の下にあり、当該列内の前記トランジスタを相互接続するデジット線を含む個別の前記列であって、前記チャネル領域は、対向する側面の対を個別に含む、前記列と、
前記デジット線の上方のワード線であって、前記トランジスタのチャネル領域の横方向に対向する面の前記対の内の一方を横方向に越え、前記一方に動作可能に横方向に隣接して延伸し、当該行内の前記トランジスタを相互接続する前記ワード線を含む個別の前記行であって、当該行内の前記トランジスタのチャネル領域の横方向に対向する面の前記対の内の他方は、当該行内の前記ワード線に動作可能に横方向に隣接せず、何れの他のワード線とも動作可能に横方向に隣接しない、前記行と、
前記アレイ内の前記個別のメモリセルのコンデンサであって、
前記トランジスタの内の1つの上部ソース/ドレイン領域に電気的に結合され、前記上部ソース/ドレイン領域から高さ方向に上向きに延伸する第1のコンデンサ電極と、
横方向に対向する面の対を含む高さ方向に延伸するコンデンサ絶縁体であって、前記コンデンサ絶縁体の前記横方向に対向する面の内の一方は、前記第1のコンデンサ電極の側面に動作可能に隣接する、前記コンデンサ絶縁体と、
横方向に対向する面の対を含む高さ方向に延伸する第2のコンデンサ電極であって、前記第2のコンデンサ電極の前記横方向に対向する面の内の一方は、前記コンデンサ絶縁体の前記横方向に対向する面の他方に動作可能に隣接し、前記アレイ内の前記第2のコンデンサ電極は、前記コンデンサの線に水平方向に沿って延伸する間隔が空いた長手方向に伸長する線であり、個別の前記第2のコンデンサ電極の線は、コンデンサの当該線に長手方向に沿ってコンデンサにより共有される、前記第2のコンデンサ電極と
を個別に含む、前記コンデンサと
を含む、アレイ。 - 前記コンデンサ絶縁体の前記横方向に対向する一方の面は、前記第1のコンデンサ電極の前記側面に直接接し、相互に直接接する最上部から底部までの、前記コンデンサ絶縁体の前記横方向に対向する一方の面と、前記第1のコンデンサ電極の前記側面との少なくとも大部分は、水平方向の断面において各々線形的に直線である、請求項1に記載のアレイ。
- 相互に直接接する最上部から底部までの、前記コンデンサ絶縁体の前記横方向に対向する一方の面と、前記第1のコンデンサ電極の前記側面との全ては、水平方向の断面において端から端まで各々線形的に直線である、請求項2に記載のアレイ。
- 前記第1のコンデンサ電極は、前記上部ソース/ドレイン領域の最上部面に直接接し、前記第1のコンデンサ電極は、前記上部ソース/ドレイン領域の最上部面に全ては直接接しない、請求項1に記載のアレイ。
- 前記第1のコンデンサ電極は、コンデンサの当該線に沿った長手方向に真隣の前記第1のコンデンサ電極の間の間隔の水平方向の距離よりも大きい水平方向の距離で、それらの個別の第2のコンデンサ電極の線に長手方向に沿って個別に延伸する、請求項1に記載のアレイ。
- 前記ワード線は相互に平行であり、前記第2のコンデンサ電極の線は、相互に及び前記ワード線に平行である、請求項1に記載のアレイ。
- 前記デジット線は相互に平行であり、前記第2のコンデンサ電極の線は、相互に平行であり、前記デジット線に平行ではない、請求項1に記載のアレイ。
- 前記メモリセルのティア内の前記メモリセルは、並進対称性を有し、個別の前記メモリセルは、1T−1Cであり、約1.0667F2の水平方向の面積を占め、“F”は、個別の前記第2のコンデンサ電極の線、前記コンデンサ絶縁体、及び前記第1のコンデンサ電極を通じて水平方向、横方向、及び直交方向に取られるメモリセルのピッチである、請求項1に記載のアレイ。
- 前記水平方向の面積は、1F×1.0667Fの矩形により水平方向に境界付けられる、請求項8に記載のアレイ。
- 横方向に真隣の前記ワード線の個別の対は、前記個別の第2のコンデンサ電極の線の直接下にある、それらの内の少なくとも一部分を有する、請求項1に記載のアレイ。
- 前記横方向に真隣のワード線の前記対は、前記横方向に真隣のワード線の各対内に個別の前記ワード線があるよりも、相互に更に横方向に離れてある、請求項10に記載のアレイ。
- 前記第2のコンデンサ電極の線は、前記個別のワード線よりも個別に幅広である、請求項1に記載のアレイ。
- 前記第2のコンデンサ電極の線は、前記個別のワード線の幅の個別に2倍を上回る、請求項12に記載のアレイ。
- 前記第2のコンデンサ電極の線は、前記個別のワード線の幅の個別に少なくとも5倍であるである、請求項13に記載のアレイ。
- 前記第2のコンデンサ電極は、前記個別のワード線の幅の個別に5倍未満である、請求項13に記載のアレイ。
- 前記第2のコンデンサ電極の線は、前記個別のデジット線よりも個別に幅広である、請求項1に記載のアレイ。
- 前記第2のコンデンサ電極の線は、前記個別のデジット線の幅の個別に2倍未満である、請求項16に記載のアレイ。
- 前記コンデンサ絶縁体は強誘電性である、請求項1に記載のアレイ。
- 前記トランジスタは、
少なくとも1つの直線の垂直断面内で略L型又は略反射L型であり、それによって、高さ方向に延伸するステムと、前記ステムの底部の上方の前記ステムの側壁から水平方向に延伸するベースとを有する半導体材料であって、前記ステムの前記半導体材料は、個別の前記上部ソース/ドレイン領域と前記個別の上部ソース/ドレイン領域の下方の個別の前記チャネル領域とを含む、前記半導体材料と、
(a)及び(b)の内の少なくとも1つであって、
(a):前記ステムの前記半導体材料は、前記チャネル領域の下に下部ソース/ドレイン領域を含み、
(b):前記ベースの前記半導体材料は、下部ソース/ドレイン領域を含む、
前記少なくとも1つと、
前記ステムの前記チャネル領域に動作可能に横方向に隣接するゲートであって、個別の前記ゲートは、個別の前記ワード線の個別の部分である、前記ゲートと
を個別に含む、請求項1に記載のアレイ。 - 横方向に真隣のトランジスタの個別の対であって、前記横方向に真隣のトランジスタの各対内の前記半導体材料の内の個別の一方は、前記少なくとも1つの直線の垂直断面内で略L型であり、前記横方向に真隣のトランジスタの各対内の前記半導体材料の個別の他方は、前記少なくとも1つの直線の垂直断面内で略反射L型である、前記対を含む、請求項19に記載のアレイ。
- 前記横方向に真隣のトランジスタの前記対は、前記横方向に真隣のトランジスタの各対内に個別の前記トランジスタがあるよりも、相互に更に横方向に離れてある、請求項20に記載のアレイ。
- コンデンサと高さ方向に延伸するトランジスタとを個別に含むメモリセルのアレイであって、ワード線の行とデジット線の列とを含む前記アレイであって、
前記アレイ内の個別のメモリセルの高さ方向に延伸するトランジスタのチャネル領域の下にあり、当該列内の前記トランジスタを相互接続するデジット線を含む個別の前記列であって、前記チャネル領域は、対向する側面の対を個別に含む、前記列と、
前記デジット線の上方のワード線であって、前記トランジスタのチャネル領域の横方向に対向する面の前記対の内の一方を横方向に越えて、前記一方に動作可能に横方向に隣接して延伸し、当該行内の前記トランジスタを相互接続する前記ワード線を含む個別の前記行であって、当該行内の前記トランジスタのチャネル領域の横方向に対向する面の前記対の内の他方は、当該行内の前記ワード線に動作可能に横方向に隣接せず、何れの他のワード線とも動作可能に横方向に隣接しない、前記行と、
前記アレイ内の前記個別のメモリセルのコンデンサであって、
前記トランジスタの内の1つの上部ソース/ドレイン領域の最上部面に直接接し、前記最上部面から高さ方向に上向きに延伸する第1のコンデンサ電極であって、前記上部ソース/ドレイン領域の前記最上部面の全てには直接接しない前記第1のコンデンサ電極と、
横方向に対向する面の対を含む高さ方向に延伸するコンデンサ絶縁体であって、前記コンデンサ絶縁体の前記横方向に対向する面の内の一方は、前記第1のコンデンサ電極の側面に動作可能に隣接する、前記コンデンサ絶縁体と、
横方向に対向する面の対を含む高さ方向に延伸する第2のコンデンサ電極であって、前記第2のコンデンサ電極の前記横方向に対向する面の内の一方は、前記コンデンサ絶縁体の前記横方向に対向する面の他方に動作可能に隣接する、前記第2のコンデンサ電極と
を個別に含む、前記コンデンサと
を含む、アレイ。 - 前記第1のコンデンサ電極は、前記上部ソース/ドレイン領域の最上部面の全ての内の半分未満に直接接する、請求項22に記載のアレイ。
- 前記第1のコンデンサ電極の最下部面の半分よりも多くは、前記上部ソース/ドレイン領域の最上部面に直接接する、請求項22に記載のアレイ。
- 前記メモリセルのティア内の前記メモリセルは、並進対称性を有し、個別の前記メモリセルは、1T−1Cであり、約1.0667F2の水平方向の面積を占め、“F”は、個別の前記第2のコンデンサ電極の線、前記コンデンサ絶縁体、及び前記第1のコンデンサ電極を通じて水平方向、横方向、及び直交方向に取られるメモリセルのピッチである、請求項22に記載のアレイ。
- 前記水平方向の面積は、1F×1.0667Fの矩形により水平方向に境界付けられる、請求項25に記載のアレイ。
- コンデンサと高さ方向に延伸するトランジスタとを個別に含むメモリセルのアレイであって、ワード線の行とデジット線の列とを含む前記アレイであって、
前記アレイ内の個別のメモリセルの高さ方向に延伸するトランジスタのチャネル領域の下にあり、当該列内の前記トランジスタを相互接続するデジット線を含む個別の前記列と、
前記デジット線の上方のワード線であって、前記トランジスタのチャネル領域の側面を横方向に越えて、前記側面に動作可能に横方向に隣接して延伸し、当該行内の前記トランジスタを相互接続する前記ワード線を含む個別の前記行と、
前記アレイ内の前記個別のメモリセルのコンデンサであって、
前記トランジスタの内の1つの上部ソース/ドレイン領域に電気的に結合し、前記上部ソース/ドレイン領域から高さ方向に上向きに延伸する第1のコンデンサ電極と、
横方向に対向する面の対を含む高さ方向に延伸するコンデンサ絶縁体であって、前記コンデンサ絶縁体の前記横方向に対向する面の内の一方は、前記第1のコンデンサ電極の側面に動作可能に隣接する、前記コンデンサ絶縁体と、
横方向に対向する面の対を含む高さ方向に延伸する第2のコンデンサ電極であって、前記第2のコンデンサ電極の前記横方向に対向する面の内の一方は、前記コンデンサ絶縁体の前記横方向に対向する面の他方に動作可能に隣接し、前記アレイ内の前記第2のコンデンサ電極は、前記コンデンサの線に水平方向に沿って延伸する間隔が空いた長手方向に伸長する線であり、個別の前記第2のコンデンサ電極の線は、コンデンサの当該線に長手方向に沿ってコンデンサにより共有される、前記第2のコンデンサ電極と
を個別に含む、前記コンデンサと、
前記個別の第2のコンデンサ電極の線の直接下にある、それらの内の少なくとも一部分を有する横方向に真隣の前記ワード線の個別の対と
を含む、アレイ。 - 前記横方向に真隣のワード線の前記対は、前記横方向に真隣のワード線の各対内に個別の前記ワード線があるよりも、相互に更に横方向に離れてある、請求項27に記載のアレイ。
- 前記メモリセルのティア内の前記メモリセルは、並進対称性を有し、個別の前記メモリセルは、1T−1Cであり、約1.0667F2の水平方向の面積を占め、“F”は、個別の前記第2のコンデンサ電極の線、前記コンデンサ絶縁体、及び前記第1のコンデンサ電極を通じて水平方向、横方向、及び直交方向に取られるメモリセルのピッチである、請求項27に記載のアレイ。
- 前記水平方向の面積は、1F×1.0667Fの矩形により水平方向に境界付けられる、請求項29に記載のアレイ。
- 少なくとも1つの直線の垂直断面内で略L型又は略反射L型であり、それによって、高さ方向に延伸するステムと、前記ステムの底部の上方の前記ステムの側壁から水平方向に延伸するベースとを有する半導体材料であって、前記ステムの前記半導体材料は、上部ソース/ドレイン領域とその下方のチャネル領域とを含む、前記半導体材料と、
(a)及び(b)の内の少なくとも1つであって、
(a):前記ステムの前記半導体材料は、前記チャネル領域の下方に下部ソース/ドレイン領域を含み、
(b):前記ベースの前記半導体材料は、下部ソース/ドレイン領域を含む、
前記少なくとも1つと、
前記ステムの前記チャネル領域に動作可能に横方向に隣接するゲートと
を含む、トランジスタ。 - (a)を含む、請求項31に記載のトランジスタ。
- (a)及び(b)の内の(a)のみを含む、請求項32に記載のトランジスタ。
- (b)を含む、請求項31に記載のトランジスタ。
- (a)及び(b)の内の(b)のみを含む、請求項34に記載のトランジスタ。
- (a)及び(b)を含む、請求項31に記載のトランジスタ。
- 個別の前記ゲートは、当該個別のワード線に沿った個別の前記トランジスタを相互接続する個別のワード線の個別の部分である、請求項31の前記トランジスタのアレイ。
- 横方向に真隣のトランジスタの個別の対であって、前記横方向に真隣のトランジスタの各対内の前記半導体材料の内の個別の一方は、少なくとも1つの直線の垂直断面内で略L型であり、前記横方向に真隣のトランジスタの各対内の前記半導体材料の個別の他方は、前記少なくとも1つの直線の垂直断面内で略反射L型である、前記対を含む、請求項37に記載のアレイ。
- 前記横方向に真隣のトランジスタの前記対は、前記横方向に真隣のトランジスタの各対内に個別の前記トランジスタがあるよりも、相互に更に横方向に離れてある、請求項38に記載のアレイ。
- トランジスタのアレイを形成する方法であって、
横方向に間隔が空き、高さ方向に突出し、長手方向に伸長するテンプレート線を基板の上方に形成することと、
横方向に真隣の前記テンプレート線の横方向に間にある空隙を充填しないように、前記テンプレート線の側壁に沿い、前記テンプレート線の横方向に間にある前記基板の上方に半導体材料を形成することと、
前記半導体材料を形成した後に、前記横方向に真隣のテンプレート線の横方向に間にある前記空隙の残りの体積を充填しないように、前記半導体材料の側壁に沿って、前記テンプレート線の横方向に間にある前記半導体材料の上方に絶縁材料を形成することと、
前記絶縁体材料を形成した後に、前記横方向に真隣のテンプレート線の横方向に間にある前記空隙内に、前記絶縁材料の側壁に沿って、前記テンプレート線の横方向に間にある前記絶縁材料の上方に導電性材料を形成することと、
前記横方向に真隣のテンプレート線の間にある2つのワード線を形成するためにそこから前記導電性材料の横方向の中央部分を除去することと、
個別の前記ワード線に沿って長手方向に間隔が空いた半導体材料の塊を形成するために前記半導体材料をパターニングすることであって、前記塊は、少なくとも1つの直線の垂直断面内で略L型又は略反射L型であり、それによって、高さ方向に延伸するステムと、前記ステムの底部の上方の前記ステムの側壁から水平方向に延伸するベースとを有し、前記ステムの前記半導体材料は、個別のトランジスタの上部ソース/ドレイン領域とその下方のチャネル領域とを最終的に含むことと、
(a)及び(b)の内の少なくとも1つであって、
(a):前記ステムの前記半導体材料は、前記個別のトランジスタの前記チャネル領域の下方に下部ソース/ドレイン領域を含み、
(b):前記ベースの前記半導体材料は、前記個別のトランジスタの下部ソース/ドレイン領域を含む、
前記少なくとも1つと、
前記個別のワード線は、前記個別のトランジスタの前記チャネル領域に動作可能に横方向に隣接し、当該個別のワード線に沿った前記トランジスタを相互接続することと
を含む、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/965,632 | 2018-04-27 | ||
US15/965,632 US10388658B1 (en) | 2018-04-27 | 2018-04-27 | Transistors, arrays of transistors, arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor, and methods of forming an array of transistors |
PCT/US2019/023886 WO2019209440A1 (en) | 2018-04-27 | 2019-03-25 | Transistors, arrays of transistors, arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor, and methods of forming an array of transistors |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021523555A true JP2021523555A (ja) | 2021-09-02 |
JP7035221B2 JP7035221B2 (ja) | 2022-03-14 |
Family
ID=67620568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020560225A Active JP7035221B2 (ja) | 2018-04-27 | 2019-03-25 | トランジスタ、トランジスタのアレイ、コンデンサと高さ方向に延伸するトランジスタと個別に含むメモリセルのアレイ、及びトランジスタのアレイを形成する方法 |
Country Status (7)
Country | Link |
---|---|
US (3) | US10388658B1 (ja) |
EP (1) | EP3776656A4 (ja) |
JP (1) | JP7035221B2 (ja) |
KR (1) | KR102424126B1 (ja) |
CN (1) | CN112106196A (ja) |
TW (2) | TWI748457B (ja) |
WO (1) | WO2019209440A1 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10431695B2 (en) | 2017-12-20 | 2019-10-01 | Micron Technology, Inc. | Transistors comprising at lease one of GaP, GaN, and GaAs |
US10825816B2 (en) * | 2017-12-28 | 2020-11-03 | Micron Technology, Inc. | Recessed access devices and DRAM constructions |
US10388658B1 (en) | 2018-04-27 | 2019-08-20 | Micron Technology, Inc. | Transistors, arrays of transistors, arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor, and methods of forming an array of transistors |
CN111863814A (zh) * | 2019-04-24 | 2020-10-30 | 王振志 | 动态随机存取存储器元件及其制造方法 |
US11672128B2 (en) | 2020-07-20 | 2023-06-06 | Micron Technology, Inc. | Methods of incorporating leaker devices into capacitor configurations to reduce cell disturb, and capacitor configurations incorporating leaker devices |
KR20220043981A (ko) | 2020-09-28 | 2022-04-06 | 삼성전자주식회사 | 반도체 메모리 장치 |
KR20220111772A (ko) * | 2021-02-01 | 2022-08-10 | 삼성전자주식회사 | 반도체 메모리 장치 |
US11706927B2 (en) * | 2021-03-02 | 2023-07-18 | Micron Technology, Inc. | Memory devices and methods of forming memory devices |
US20240179922A1 (en) * | 2021-04-20 | 2024-05-30 | Icleague Technology Co., Ltd. | Transistor and method for manufacturing same, semiconductor device and method for manufacturing same |
CN113506738A (zh) * | 2021-04-20 | 2021-10-15 | 芯盟科技有限公司 | T型双沟道晶体管及制造方法、半导体器件及制造方法 |
CN113506737B (zh) * | 2021-04-20 | 2023-07-14 | 芯盟科技有限公司 | 柱形晶体管及其制造方法、半导体器件及其制造方法 |
CN113506736B (zh) * | 2021-04-20 | 2024-03-19 | 芯盟科技有限公司 | L型晶体管及其制造方法、半导体器件及其制造方法 |
CN117397386A (zh) * | 2021-04-21 | 2024-01-12 | 无锡舜铭存储科技有限公司 | 铁电存储器及其制造方法 |
US11695072B2 (en) | 2021-07-09 | 2023-07-04 | Micron Technology, Inc. | Integrated assemblies and methods of forming integrated assemblies |
US20230014289A1 (en) * | 2021-07-19 | 2023-01-19 | Micron Technology, Inc. | Integrated Assemblies and Methods of Forming Integrated Assemblies |
US11917834B2 (en) | 2021-07-20 | 2024-02-27 | Micron Technology, Inc. | Integrated assemblies and methods of forming integrated assemblies |
KR20230026602A (ko) * | 2021-08-17 | 2023-02-27 | 삼성전자주식회사 | 반도체 메모리 장치 |
CN116981246A (zh) * | 2022-04-15 | 2023-10-31 | 华为技术有限公司 | 存储阵列及存储阵列的制备方法 |
KR20230154692A (ko) * | 2022-05-02 | 2023-11-09 | 삼성전자주식회사 | 반도체 장치 |
KR20240073322A (ko) * | 2022-11-18 | 2024-05-27 | 삼성전자주식회사 | 반도체 메모리 소자 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677432A (ja) * | 1991-12-06 | 1994-03-18 | Toshiba Corp | 半導体装置及びその製造方法 |
JPH06125058A (ja) * | 1992-10-12 | 1994-05-06 | Olympus Optical Co Ltd | 強誘電体膜を有する半導体メモリ装置 |
JP2003030999A (ja) * | 2001-07-18 | 2003-01-31 | Mitsubishi Electric Corp | 半導体記憶装置 |
JP2012182446A (ja) * | 2011-02-08 | 2012-09-20 | Semiconductor Energy Lab Co Ltd | 半導体メモリ装置および半導体メモリ装置の作製方法 |
Family Cites Families (94)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5266512A (en) | 1991-10-23 | 1993-11-30 | Motorola, Inc. | Method for forming a nested surface capacitor |
US5208172A (en) | 1992-03-02 | 1993-05-04 | Motorola, Inc. | Method for forming a raised vertical transistor |
US5256588A (en) | 1992-03-23 | 1993-10-26 | Motorola, Inc. | Method for forming a transistor and a capacitor for use in a vertically stacked dynamic random access memory cell |
TW297948B (en) | 1996-08-16 | 1997-02-11 | United Microelectronics Corp | Memory cell structure of DRAM |
TW427012B (en) | 1996-08-16 | 2001-03-21 | United Microelectronics Corp | The manufacturing method of double-combined capacitor DRAM cells |
JPH10242410A (ja) | 1996-12-26 | 1998-09-11 | Sony Corp | 半導体メモリセル及びその作製方法 |
US6297989B1 (en) * | 1999-02-26 | 2001-10-02 | Micron Technology, Inc. | Applications for non-volatile memory cells |
US6277687B1 (en) | 1999-06-01 | 2001-08-21 | Micron Technology, Inc. | Method of forming a pair of capacitors having a common capacitor electrode, method of forming DRAM circuitry, integrated circuitry and DRAM circuitry |
US6365453B1 (en) | 1999-06-16 | 2002-04-02 | Micron Technology, Inc. | Method and structure for reducing contact aspect ratios |
JP4083975B2 (ja) | 2000-12-11 | 2008-04-30 | 株式会社ルネサステクノロジ | 半導体装置 |
US6531727B2 (en) | 2001-02-09 | 2003-03-11 | Micron Technology, Inc. | Open bit line DRAM with ultra thin body transistors |
US6437401B1 (en) | 2001-04-03 | 2002-08-20 | Infineon Technologies Ag | Structure and method for improved isolation in trench storage cells |
JP2002318598A (ja) | 2001-04-20 | 2002-10-31 | Toshiba Corp | 情報再生装置、情報再生方法、情報記録媒体、情報記録装置、情報記録方法、および情報記録プログラム |
US6503796B1 (en) * | 2001-07-16 | 2003-01-07 | Taiwan Semiconductor Manufacturing Company | Method and structure for a top plate design for making capacitor-top-plate to bit-line-contact overlay margin |
US6737316B2 (en) | 2001-10-30 | 2004-05-18 | Promos Technologies Inc. | Method of forming a deep trench DRAM cell |
ITMI20020673A1 (it) | 2002-03-29 | 2003-09-29 | St Microelectronics Srl | Metodo e relativo circuito di accesso a locazioni di una memoria ferroelettrica |
US6710391B2 (en) | 2002-06-26 | 2004-03-23 | Texas Instruments Incorporated | Integrated DRAM process/structure using contact pillars |
US6853025B2 (en) | 2003-02-20 | 2005-02-08 | Infineon Technologies Aktiengesellschaft | Trench capacitor with buried strap |
US6893911B2 (en) | 2003-03-16 | 2005-05-17 | Infineon Technologies Aktiengesellschaft | Process integration for integrated circuits |
TW594935B (en) | 2003-05-23 | 2004-06-21 | Nanya Technology Corp | Method for manufacturing a memory device with vertical transistors and deep trench capacitors to prevent merging of buried strap out-diffusion regions |
US6777777B1 (en) | 2003-05-28 | 2004-08-17 | Newport Fab, Llc | High density composite MIM capacitor with flexible routing in semiconductor dies |
KR100818267B1 (ko) | 2003-10-27 | 2008-03-31 | 삼성전자주식회사 | 커패시터, 이를 구비한 반도체 소자 및 그 제조 방법 |
US7372091B2 (en) | 2004-01-27 | 2008-05-13 | Micron Technology, Inc. | Selective epitaxy vertical integrated circuit components |
US7518182B2 (en) * | 2004-07-20 | 2009-04-14 | Micron Technology, Inc. | DRAM layout with vertical FETs and method of formation |
US7285812B2 (en) | 2004-09-02 | 2007-10-23 | Micron Technology, Inc. | Vertical transistors |
US7442609B2 (en) | 2004-09-10 | 2008-10-28 | Infineon Technologies Ag | Method of manufacturing a transistor and a method of forming a memory device with isolation trenches |
DE102004043856A1 (de) * | 2004-09-10 | 2006-03-30 | Infineon Technologies Ag | Verfahren zur Herstellung einer Speicherzellenanordnung und Speicherzellenanordnung |
US7763513B2 (en) | 2005-09-09 | 2010-07-27 | Qimonda Ag | Integrated circuit device and method of manufacture |
KR100833182B1 (ko) | 2005-11-17 | 2008-05-28 | 삼성전자주식회사 | 수직채널 트랜지스터를 구비한 반도체 메모리장치 및 그제조 방법 |
US7772632B2 (en) | 2006-08-21 | 2010-08-10 | Micron Technology, Inc. | Memory arrays and methods of fabricating memory arrays |
US7956387B2 (en) | 2006-09-08 | 2011-06-07 | Qimonda Ag | Transistor and memory cell array |
US7859050B2 (en) | 2007-01-22 | 2010-12-28 | Micron Technology, Inc. | Memory having a vertical access device |
JP2008182083A (ja) * | 2007-01-25 | 2008-08-07 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
JP5613363B2 (ja) | 2007-09-20 | 2014-10-22 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | 半導体記憶装置及びその製造方法 |
US7851356B2 (en) * | 2007-09-28 | 2010-12-14 | Qimonda Ag | Integrated circuit and methods of manufacturing the same |
US7829410B2 (en) | 2007-11-26 | 2010-11-09 | Micron Technology, Inc. | Methods of forming capacitors, and methods of forming DRAM arrays |
WO2009096001A1 (ja) | 2008-01-29 | 2009-08-06 | Unisantis Electronics (Japan) Ltd. | 半導体記憶装置およびメモリ混載半導体装置、並びにそれらの製造方法 |
US8059471B2 (en) | 2008-02-12 | 2011-11-15 | Chip Memory Technology Inc. | Method and apparatus of operating a non-volatile DRAM |
US20100090263A1 (en) * | 2008-10-10 | 2010-04-15 | Qimonda Ag | Memory devices including semiconductor pillars |
KR20100062609A (ko) | 2008-12-02 | 2010-06-10 | 삼성전자주식회사 | 전기적 기계적 소자, 이를 포함하는 메모리 소자 및 이의 제조 방법 |
US9246093B2 (en) | 2009-07-01 | 2016-01-26 | Micron Technology, Inc. | Phase change memory cell with self-aligned vertical heater and low resistivity interface |
US8143121B2 (en) * | 2009-10-01 | 2012-03-27 | Nanya Technology Corp. | DRAM cell with double-gate fin-FET, DRAM cell array and fabrication method thereof |
JP5356970B2 (ja) * | 2009-10-01 | 2013-12-04 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 半導体装置 |
US9202921B2 (en) * | 2010-03-30 | 2015-12-01 | Nanya Technology Corp. | Semiconductor device and method of making the same |
KR101057746B1 (ko) | 2010-04-12 | 2011-08-19 | 매그나칩 반도체 유한회사 | 비휘발성 메모리 장치 및 그 제조방법 |
US8698306B2 (en) | 2010-05-20 | 2014-04-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Substrate contact opening |
US8603890B2 (en) | 2010-06-19 | 2013-12-10 | Sandisk Technologies Inc. | Air gap isolation in non-volatile memory |
US8361856B2 (en) | 2010-11-01 | 2013-01-29 | Micron Technology, Inc. | Memory cells, arrays of memory cells, and methods of forming memory cells |
KR101154006B1 (ko) | 2010-11-08 | 2012-06-07 | 에스케이하이닉스 주식회사 | 매몰 정션을 포함하는 수직형 트랜지스터 및 형성 방법 |
TWI415247B (zh) | 2010-12-15 | 2013-11-11 | Powerchip Technology Corp | 具有垂直通道電晶體的動態隨機存取記憶胞及陣列 |
KR20120069258A (ko) | 2010-12-20 | 2012-06-28 | 에스케이하이닉스 주식회사 | 반도체 소자의 수직형 메모리 셀 |
US8450175B2 (en) | 2011-02-22 | 2013-05-28 | Micron Technology, Inc. | Methods of forming a vertical transistor and at least a conductive line electrically coupled therewith |
KR101883668B1 (ko) | 2011-03-08 | 2018-08-01 | 삼성전자주식회사 | 금속성 스토리지 노드를 구비한 반도체 소자 제조방법. |
US8933491B2 (en) | 2011-03-29 | 2015-01-13 | Micron Technology, Inc. | Arrays of memory cells and methods of forming an array of vertically stacked tiers of memory cells |
US8530312B2 (en) | 2011-08-08 | 2013-09-10 | Micron Technology, Inc. | Vertical devices and methods of forming |
US9401363B2 (en) | 2011-08-23 | 2016-07-26 | Micron Technology, Inc. | Vertical transistor devices, memory arrays, and methods of forming vertical transistor devices |
US8633564B2 (en) | 2011-12-02 | 2014-01-21 | Micron Technology, Inc. | Semicondutor isolation structure |
US9312257B2 (en) | 2012-02-29 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9036391B2 (en) | 2012-03-06 | 2015-05-19 | Micron Technology, Inc. | Arrays of vertically-oriented transistors, memory arrays including vertically-oriented transistors, and memory cells |
KR20130103942A (ko) * | 2012-03-12 | 2013-09-25 | 에스케이하이닉스 주식회사 | 무접합 수직 게이트 트랜지스터를 갖는 반도체 소자 및 그 제조 방법 |
TWI479608B (zh) * | 2012-03-14 | 2015-04-01 | Rexchip Electronics Corp | Semiconductor element and method for manufacturing semiconductor element |
KR20130106159A (ko) * | 2012-03-19 | 2013-09-27 | 에스케이하이닉스 주식회사 | 매립비트라인을 구비한 반도체장치 및 제조 방법 |
JP6100071B2 (ja) | 2012-04-30 | 2017-03-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
TWI443779B (zh) * | 2012-05-14 | 2014-07-01 | Rexchip Electronics Corp | 半導體元件及其製造方法 |
US9240548B2 (en) * | 2012-05-31 | 2016-01-19 | Micron Technology, Inc. | Memory arrays and methods of forming an array of memory cells |
US9023723B2 (en) * | 2012-05-31 | 2015-05-05 | Applied Materials, Inc. | Method of fabricating a gate-all-around word line for a vertical channel DRAM |
US9006810B2 (en) | 2012-06-07 | 2015-04-14 | International Business Machines Corporation | DRAM with a nanowire access transistor |
US9006060B2 (en) | 2012-08-21 | 2015-04-14 | Micron Technology, Inc. | N-type field effect transistors, arrays comprising N-type vertically-oriented transistors, methods of forming an N-type field effect transistor, and methods of forming an array comprising vertically-oriented N-type transistors |
US9129896B2 (en) | 2012-08-21 | 2015-09-08 | Micron Technology, Inc. | Arrays comprising vertically-oriented transistors, integrated circuitry comprising a conductive line buried in silicon-comprising semiconductor material, methods of forming a plurality of conductive lines buried in silicon-comprising semiconductor material, and methods of forming an array comprising vertically-oriented transistors |
US9478550B2 (en) | 2012-08-27 | 2016-10-25 | Micron Technology, Inc. | Arrays of vertically-oriented transistors, and memory arrays including vertically-oriented transistors |
WO2014089795A1 (zh) | 2012-12-13 | 2014-06-19 | 中国科学院微电子研究所 | 一种垂直沟道型三维半导体存储器件及其制备方法 |
US20140231914A1 (en) | 2013-02-19 | 2014-08-21 | Applied Materials, Inc. | Fin field effect transistor fabricated with hollow replacement channel |
US9337210B2 (en) | 2013-08-12 | 2016-05-10 | Micron Technology, Inc. | Vertical ferroelectric field effect transistor constructions, constructions comprising a pair of vertical ferroelectric field effect transistors, vertical strings of ferroelectric field effect transistors, and vertical strings of laterally opposing pairs of vertical ferroelectric field effect transistors |
KR102085523B1 (ko) | 2013-10-02 | 2020-03-06 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
US9076686B1 (en) | 2014-01-10 | 2015-07-07 | Micron Technology, Inc. | Field effect transistor constructions and memory arrays |
KR102185547B1 (ko) | 2014-01-22 | 2020-12-02 | 삼성전자주식회사 | 수직형 메모리 장치 및 그 제조 방법 |
WO2015117222A1 (en) | 2014-02-05 | 2015-08-13 | Conversant Intellectual Property Management Inc. | A dram memory device with manufacturable capacitor |
US10128327B2 (en) | 2014-04-30 | 2018-11-13 | Stmicroelectronics, Inc. | DRAM interconnect structure having ferroelectric capacitors exhibiting negative capacitance |
KR102193685B1 (ko) | 2014-05-02 | 2020-12-21 | 삼성전자주식회사 | 수직 구조의 비휘발성 메모리 소자 |
KR102254183B1 (ko) | 2014-09-05 | 2021-05-24 | 삼성전자주식회사 | 디커플링 구조체 및 이를 구비하는 반도체 장치 |
US9397094B2 (en) * | 2014-09-25 | 2016-07-19 | International Business Machines Corporation | Semiconductor structure with an L-shaped bottom plate |
US9711524B2 (en) | 2015-01-13 | 2017-07-18 | Sandisk Technologies Llc | Three-dimensional memory device containing plural select gate transistors having different characteristics and method of making thereof |
KR102400184B1 (ko) | 2015-03-17 | 2022-05-20 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 및 이의 제조 방법 |
US9853211B2 (en) | 2015-07-24 | 2017-12-26 | Micron Technology, Inc. | Array of cross point memory cells individually comprising a select device and a programmable device |
US10355002B2 (en) * | 2016-08-31 | 2019-07-16 | Micron Technology, Inc. | Memory cells, methods of forming an array of two transistor-one capacitor memory cells, and methods used in fabricating integrated circuitry |
CN109155145B (zh) | 2016-08-31 | 2022-11-01 | 美光科技公司 | 存储器阵列 |
KR20180036879A (ko) | 2016-09-30 | 2018-04-10 | 삼성전자주식회사 | 정렬 키를 포함하는 반도체 소자 |
US10014305B2 (en) | 2016-11-01 | 2018-07-03 | Micron Technology, Inc. | Methods of forming an array comprising pairs of vertically opposed capacitors and arrays comprising pairs of vertically opposed capacitors |
US9761580B1 (en) | 2016-11-01 | 2017-09-12 | Micron Technology, Inc. | Methods of forming an array comprising pairs of vertically opposed capacitors and arrays comprising pairs of vertically opposed capacitors |
US10062745B2 (en) * | 2017-01-09 | 2018-08-28 | Micron Technology, Inc. | Methods of forming an array of capacitors, methods of forming an array of memory cells individually comprising a capacitor and a transistor, arrays of capacitors, and arrays of memory cells individually comprising a capacitor and a transistor |
US9837420B1 (en) | 2017-01-10 | 2017-12-05 | Micron Technology, Inc. | Arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor, methods of forming a tier of an array of memory cells, and methods of forming an array of memory cells individually comprising a capacitor and an elevationally-extending transistor |
US9935114B1 (en) | 2017-01-10 | 2018-04-03 | Micron Technology, Inc. | Methods of forming an array comprising pairs of vertically opposed capacitors and arrays comprising pairs of vertically opposed capacitors |
US9842839B1 (en) | 2017-01-12 | 2017-12-12 | Micron Technology, Inc. | Memory cell, an array of memory cells individually comprising a capacitor and a transistor with the array comprising rows of access lines and columns of digit lines, a 2T-1C memory cell, and methods of forming an array of capacitors and access transistors there-above |
US10388658B1 (en) | 2018-04-27 | 2019-08-20 | Micron Technology, Inc. | Transistors, arrays of transistors, arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor, and methods of forming an array of transistors |
-
2018
- 2018-04-27 US US15/965,632 patent/US10388658B1/en active Active
-
2019
- 2019-03-25 KR KR1020207034128A patent/KR102424126B1/ko active IP Right Grant
- 2019-03-25 CN CN201980030481.1A patent/CN112106196A/zh active Pending
- 2019-03-25 EP EP19793070.4A patent/EP3776656A4/en active Pending
- 2019-03-25 WO PCT/US2019/023886 patent/WO2019209440A1/en unknown
- 2019-03-25 JP JP2020560225A patent/JP7035221B2/ja active Active
- 2019-04-12 TW TW109116372A patent/TWI748457B/zh active
- 2019-04-12 TW TW108112850A patent/TWI715007B/zh active
- 2019-06-11 US US16/438,106 patent/US11145656B2/en active Active
-
2021
- 2021-02-09 US US17/171,827 patent/US11545492B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677432A (ja) * | 1991-12-06 | 1994-03-18 | Toshiba Corp | 半導体装置及びその製造方法 |
JPH06125058A (ja) * | 1992-10-12 | 1994-05-06 | Olympus Optical Co Ltd | 強誘電体膜を有する半導体メモリ装置 |
JP2003030999A (ja) * | 2001-07-18 | 2003-01-31 | Mitsubishi Electric Corp | 半導体記憶装置 |
JP2012182446A (ja) * | 2011-02-08 | 2012-09-20 | Semiconductor Energy Lab Co Ltd | 半導体メモリ装置および半導体メモリ装置の作製方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20200138412A (ko) | 2020-12-09 |
CN112106196A (zh) | 2020-12-18 |
WO2019209440A1 (en) | 2019-10-31 |
KR102424126B1 (ko) | 2022-07-22 |
JP7035221B2 (ja) | 2022-03-14 |
US20210183864A1 (en) | 2021-06-17 |
US10388658B1 (en) | 2019-08-20 |
US11545492B2 (en) | 2023-01-03 |
US11145656B2 (en) | 2021-10-12 |
EP3776656A4 (en) | 2021-09-01 |
TWI715007B (zh) | 2021-01-01 |
US20190333917A1 (en) | 2019-10-31 |
TWI748457B (zh) | 2021-12-01 |
EP3776656A1 (en) | 2021-02-17 |
TW202005055A (zh) | 2020-01-16 |
TW202044547A (zh) | 2020-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7035221B2 (ja) | トランジスタ、トランジスタのアレイ、コンデンサと高さ方向に延伸するトランジスタと個別に含むメモリセルのアレイ、及びトランジスタのアレイを形成する方法 | |
KR102378401B1 (ko) | 절연 재료와 메모리 셀들의 수직으로 교대되는 층들을 포함하는 메모리 어레이 및 메모리 어레이를 형성하는 방법 | |
US11244952B2 (en) | Array of capacitors, array of memory cells, methods of forming an array of capacitors, and methods of forming an array of memory cells | |
CN111048522A (zh) | 形成阵列的多个铁电场效晶体管及其形成方法 | |
US11877438B2 (en) | Array of memory cells | |
KR102407658B1 (ko) | 트랜지스터 및 트랜지스터를 형성하는 방법 | |
KR102359065B1 (ko) | 집적 회로 구성 | |
US11925031B2 (en) | Arrays of capacitors and arrays of memory cells | |
US11659716B2 (en) | Memory circuitry and methods of forming memory circuitry | |
US10978484B2 (en) | Methods used in forming an array of memory cells | |
US11563011B2 (en) | Integrated circuitry, memory circuitry, method used in forming integrated circuitry, and method used in forming memory circuitry | |
CN112106197A (zh) | 集成电路系统构造、dram构造以及用于形成集成电路系统构造的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201218 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201218 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210720 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211214 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20211216 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220120 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220201 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220302 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7035221 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |