JP2019203155A5 - - Google Patents

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Publication number
JP2019203155A5
JP2019203155A5 JP2018097404A JP2018097404A JP2019203155A5 JP 2019203155 A5 JP2019203155 A5 JP 2019203155A5 JP 2018097404 A JP2018097404 A JP 2018097404A JP 2018097404 A JP2018097404 A JP 2018097404A JP 2019203155 A5 JP2019203155 A5 JP 2019203155A5
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JP
Japan
Prior art keywords
shower plate
coupled plasma
capacitively coupled
forming apparatus
film forming
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JP2018097404A
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English (en)
Japanese (ja)
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JP2019203155A (ja
JP7126381B2 (ja
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Priority claimed from JP2018097404A external-priority patent/JP7126381B2/ja
Priority to JP2018097404A priority Critical patent/JP7126381B2/ja
Priority to KR1020207035556A priority patent/KR102571839B1/ko
Priority to CN201980031668.3A priority patent/CN112135925B/zh
Priority to US17/056,342 priority patent/US11578407B2/en
Priority to PCT/JP2019/015389 priority patent/WO2019225184A1/ja
Priority to TW108115835A priority patent/TW202006174A/zh
Publication of JP2019203155A publication Critical patent/JP2019203155A/ja
Publication of JP2019203155A5 publication Critical patent/JP2019203155A5/ja
Publication of JP7126381B2 publication Critical patent/JP7126381B2/ja
Application granted granted Critical
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JP2018097404A 2018-05-21 2018-05-21 成膜装置および成膜方法 Active JP7126381B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2018097404A JP7126381B2 (ja) 2018-05-21 2018-05-21 成膜装置および成膜方法
PCT/JP2019/015389 WO2019225184A1 (ja) 2018-05-21 2019-04-09 成膜装置および成膜方法
CN201980031668.3A CN112135925B (zh) 2018-05-21 2019-04-09 成膜装置和成膜方法
US17/056,342 US11578407B2 (en) 2018-05-21 2019-04-09 Film-forming apparatus and film-forming method
KR1020207035556A KR102571839B1 (ko) 2018-05-21 2019-04-09 성막 장치 및 성막 방법
TW108115835A TW202006174A (zh) 2018-05-21 2019-05-08 成膜裝置及成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018097404A JP7126381B2 (ja) 2018-05-21 2018-05-21 成膜装置および成膜方法

Publications (3)

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JP2019203155A JP2019203155A (ja) 2019-11-28
JP2019203155A5 true JP2019203155A5 (enExample) 2021-04-08
JP7126381B2 JP7126381B2 (ja) 2022-08-26

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JP2018097404A Active JP7126381B2 (ja) 2018-05-21 2018-05-21 成膜装置および成膜方法

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US (1) US11578407B2 (enExample)
JP (1) JP7126381B2 (enExample)
KR (1) KR102571839B1 (enExample)
CN (1) CN112135925B (enExample)
TW (1) TW202006174A (enExample)
WO (1) WO2019225184A1 (enExample)

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