JP6763274B2 - 成膜装置、成膜装置のクリーニング方法及び記憶媒体 - Google Patents
成膜装置、成膜装置のクリーニング方法及び記憶媒体 Download PDFInfo
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Description
真空雰囲気が形成される処理容器内に設けられ、前記基板が載置される載置部と、
前記載置部に対向する対向面部と、当該対向面部に開口する複数のガス吐出口と、を備える処理ガス吐出部と、
前記処理容器内に形成された膜を除去するためのクリーニングガスを供給するクリーニングガス供給部と、
前記処理容器内に供給された処理ガス及び前記クリーニングガスの各々のプラズマ化に共用されるプラズマ化機構と、
前記プラズマ化機構により前記クリーニングガスのプラズマ化が行われる間に前記処理ガス吐出部に接続される排気路を排気する排気機構と、
前記排気路に設けられたタンクと、
前記排気路において前記タンクと前記処理ガス吐出部との間に設けられ、前記タンク内の圧力を低下させるために閉じられ、次いでプラズマ化した前記クリーニングガスを前記処理容器内から前記処理ガス吐出部を介して前記タンクに引き込むために開かれるバルブと、
を備えることを特徴とする。
クリーニングガス供給部から処理容器内に形成された膜を除去するためのクリーニングガスを供給する工程と、
前記処理容器内に供給された処理ガス及びクリーニングガスに共用されるプラズマ化機構により、当該クリーニングガスをプラズマ化する工程と、
前記プラズマ化機構により前記クリーニングガスのプラズマ化が行われる間に排気機構により、前記処理容器内に前記処理ガスを吐出する処理ガス吐出部に接続されると共にタンクが設けられた排気路を排気する工程と、
前記排気路において前記タンクと前記処理ガス吐出部との間に設けられるバルブを、前記タンク内の圧力を低下させるために閉じる工程と、
次いでプラズマ化した前記クリーニングガスを前記処理容器内から前記処理ガス吐出部を介して前記タンクに引き込むために前記バルブを開く工程と、
を備えることを特徴とする。
前記コンピュータプログラムは、上記の成膜装置のクリーニング方法を実施することを特徴とする。
続いて、本発明に関連して行われた評価試験について説明する。評価試験1として、シミュレーションにより上記の成膜装置1において、バルブV2を閉じた状態から開いた状態に切り替えたときに、処理空間40からタンク62を設けたガス供給管61へ流れるガスの積算流量の経時変化を測定した。このバルブV2を閉じた状態から開いた状態に切り替える瞬間を開放瞬間とすると、開放瞬間におけるガス供給管61のバルブV2の上流側、下流側は1Torr(133.3Pa)、6Torr(800Pa)に夫々設定した。また、比較試験1としてシミュレーションにより、成膜装置において処理空間40からガス供給管61へ流れるガスの積算流量の経時変化を測定した。ただしこの比較試験1で用いた成膜装置ではタンク62が設けられていない。この差違を除いて、比較試験1の条件は評価試験1の条件と同様である。
W ウエハ
1 成膜装置
10 制御部
18 圧力調整機構
31 載置部
43 シャワーヘッド
47 高周波電源
61 ガス供給管
62 タンク
64 排気管
Claims (10)
- プラズマ化した処理ガスを基板に供給することで成膜を行う成膜装置において、
真空雰囲気が形成される処理容器内に設けられ、前記基板が載置される載置部と、
前記載置部に対向する対向面部と、当該対向面部に開口する複数のガス吐出口と、を備える処理ガス吐出部と、
前記処理容器内に形成された膜を除去するためのクリーニングガスを供給するクリーニングガス供給部と、
前記処理容器内に供給された処理ガス及び前記クリーニングガスの各々のプラズマ化に共用されるプラズマ化機構と、
前記プラズマ化機構により前記クリーニングガスのプラズマ化が行われる間に前記処理ガス吐出部に接続される排気路を排気する排気機構と、
前記排気路に設けられたタンクと、
前記排気路において前記タンクと前記処理ガス吐出部との間に設けられ、前記タンク内の圧力を低下させるために閉じられ、次いでプラズマ化した前記クリーニングガスを前記処理容器内から前記処理ガス吐出部を介して前記タンクに引き込むために開かれるバルブと、
を備えることを特徴とする成膜装置。 - 前記処理ガス吐出部は、原料ガスと、前記処理ガスであると共に前記原料ガスと反応して反応生成物を形成する反応ガスとを交互に前記基板に供給して当該基板に成膜を行い、
前記タンクは前記原料ガスを前記処理ガス吐出部に供給する供給路に設けられ、当該供給路が前記排気路として兼用されていることを特徴とする請求項1記載の成膜装置。 - 前記処理ガス吐出部は、前記原料ガスと、前記処理ガスであると共に前記原料ガスと反応して反応生成物を形成する前記反応ガスとを交互に前記基板に供給して当該基板に成膜を行い、
前記タンクは前記反応ガスを前記処理ガス吐出部に供給する供給路に設けられ、当該供給路が前記排気路として兼用されていることを特徴とする請求項2記載の成膜装置。 - 前記プラズマ化機構により前記クリーニングガスのプラズマ化が行われる間、前記バルブが閉じた状態から開いた状態へ、開いた状態から閉じた状態へ夫々複数回切り替わることを特徴とする請求項1ないし3のいずれか一つに記載の成膜装置。
- 前記プラズマ化機構は、前記処理ガス吐出部、前記載置部に各々設けられる電極間に高周波電力を供給して容量結合プラズマを形成するための高周波電源を備えたことを特徴とする請求項1ないし4のいずれか一つに記載の成膜装置。
- 前記クリーニングガスのプラズマ化が行われる間、成膜処理時に排気が行われる排気口からの排気を行うことを特徴とする請求項1ないし5のいずれか一つに記載の成膜装置。
- 前記排気口に接続される排気路に設けられる圧力計を用いて、前記バルブの開閉が制御されることを特徴とする請求項6記載の成膜装置。
- 前記クリーニングガスのプラズマ化が行われる間、前記バルブは開かれてから予め設定された時間が経過すると閉じられ、閉じられてから予め設定された時間が経過すると開かれることを特徴とする請求項1ないし7のいずれか一つに記載の成膜装置。
- プラズマ化した処理ガスを基板に供給することで成膜を行う成膜装置のクリーニング方法において、
クリーニングガス供給部から処理容器内に形成された膜を除去するためのクリーニングガスを供給する工程と、
前記処理容器内に供給された処理ガス及びクリーニングガスに共用されるプラズマ化機構により、当該クリーニングガスをプラズマ化する工程と、
前記プラズマ化機構により前記クリーニングガスのプラズマ化が行われる間に排気機構により、前記処理容器内に前記処理ガスを吐出する処理ガス吐出部に接続されると共にタンクが設けられた排気路を排気する工程と、
前記排気路において前記タンクと前記処理ガス吐出部との間に設けられるバルブを、前記タンク内の圧力を低下させるために閉じる工程と、
次いでプラズマ化した前記クリーニングガスを前記処理容器内から前記処理ガス吐出部を介して前記タンクに引き込むために前記バルブを開く工程と、
を備えることを特徴とする成膜装置のクリーニング方法。 - 基板に対して成膜処理を行う成膜装置に用いられるコンピュータプログラムが記憶された記憶媒体であって、
前記コンピュータプログラムは、請求項9記載の成膜装置のクリーニング方法を実施することを特徴とする記憶媒体。
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