JP6956660B2 - クリーニング方法及び成膜装置 - Google Patents
クリーニング方法及び成膜装置 Download PDFInfo
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- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/45523—Pulsed gas flow or change of composition over time
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02057—Cleaning during device manufacture
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67017—Apparatus for fluid treatment
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- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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Description
本発明の実施形態に係るクリーニング方法が適用可能な成膜装置について、バッチ式の縦型熱処理装置を例に挙げて説明する。図1は、本発明の実施形態に係る縦型熱処理装置の一例を示す断面図である。図2は、図1の縦型熱処理装置の処理容器を説明するための図である。
また、金属酸化膜や金属窒化膜の場合は、例えば塩化水素(HCl)であってよい。
(第1実施形態)
第1実施形態に係るクリーニング方法の一例について説明する。第1実施形態に係るクリーニング方法は、例えば制御部110が縦型熱処理装置1の各部の動作を制御することによって実施される。図3は、第1実施形態に係るクリーニング方法の一例を示すフローチャートである。図4は、成膜処理を説明するためのタイムチャートである。
第2実施形態に係るクリーニング方法の一例について説明する。第2実施形態に係るクリーニング方法は、例えば制御部110が縦型熱処理装置1の各部の動作を制御することによって実施される。図5は、第2実施形態に係るクリーニング方法の一例を示すフローチャートである。
第3実施形態に係るクリーニング方法の一例について説明する。第3実施形態に係るクリーニング方法は、例えば制御部110が縦型熱処理装置1の各部の動作を制御することによって実施される。図6は、第3実施形態に係るクリーニング方法の一例を示すフローチャートである。
34 処理容器
44 内管
46 外管
76 ガスノズル
78 ガスノズル
110 制御部
Claims (14)
- 成膜装置の処理容器内に原料ガスと前記原料ガスと反応して反応生成物を生成可能な反応ガスとを供給して基板に反応生成物の膜を形成する成膜処理を行った後に実施する成膜装置のクリーニング方法であって、
前記成膜処理において、前記処理容器内に堆積する第1の膜と前記処理容器内に前記原料ガスを供給する原料ガス供給部内に堆積する第2の膜とが異種の膜となるように制御し、
前記成膜処理の後、前記処理容器内に前記原料ガス供給部から前記第1の膜に対する前記第2の膜のエッチング選択比が1より大きいクリーニングガスを供給し、前記原料ガス供給部内に堆積した前記第2の膜をエッチングして除去するクリーニング処理を実施し、
前記クリーニング処理の後、前記処理容器内に堆積した前記第1の膜の表面状態を、前記クリーニング処理の前の状態に近づける表面制御処理を実施する、
クリーニング方法。 - 前記成膜処理において、前記反応ガスを供給する際、前記原料ガス供給部から不活性ガスを供給する、
請求項1に記載のクリーニング方法。 - 前記成膜処理において、前記原料ガスの供給を開始するに先立って、前記原料ガス供給部から不活性ガスの供給を開始する、
請求項1又は2に記載のクリーニング方法。 - 前記成膜処理において、前記原料ガスを供給する際、前記原料ガス供給部から前記原料ガスと不活性ガスとを同時に供給する、
請求項1乃至3のいずれか一項に記載のクリーニング方法。 - 前記不活性ガスの流量は、前記原料ガスの流量よりも大きい、
請求項4に記載のクリーニング方法。 - 前記成膜処理において、前記原料ガス供給部から不活性ガスを常時供給する、
請求項1に記載のクリーニング方法。 - 前記不活性ガスは、前記原料ガスよりも上流側から供給される、
請求項2乃至6のいずれか一項に記載のクリーニング方法。 - 前記クリーニング処理は、前記成膜処理が1回行われるごとに実施される、
請求項1乃至7のいずれか一項に記載のクリーニング方法。 - 前記クリーニング処理は、前記成膜処理が複数回行われるごとに実施される、
請求項1乃至7のいずれか一項に記載のクリーニング方法。 - 前記原料ガスは、シリコン含有ガスであり、
前記反応ガスは、酸化ガスであり、
前記クリーニングガスは、F2、Cl2、NF3、ClF3のいずれかのガスである、
請求項1乃至9のいずれか一項に記載のクリーニング方法。 - 前記表面制御処理は、前記処理容器内に酸素含有ガスを供給する処理である、
請求項10に記載のクリーニング方法。 - 前記原料ガスは、シリコン含有ガスであり、
前記反応ガスは、窒化ガスであり、
前記クリーニングガスは、F2、Cl2、NF3、ClF3のいずれかのガスである、
請求項1乃至9のいずれか一項に記載のクリーニング方法。 - 前記表面制御処理は、前記処理容器内に窒素含有ガスを供給する処理である、
請求項12に記載のクリーニング方法。 - 基板を収容する処理容器と、
前記処理容器内に原料ガスを供給する原料ガス供給部と、
前記処理容器内に前記原料ガスと反応して反応生成物の膜を生成可能な反応ガスを供給する反応ガス供給部と、
前記原料ガス供給部及び前記反応ガス供給部を制御する制御部と、
を有し、
前記制御部は、
前記基板に前記反応生成物の膜を形成する成膜処理において、前記処理容器内に堆積する第1の膜と前記原料ガス供給部に堆積する第2の膜とが異種の膜となるように制御し、
前記成膜処理の後、前記処理容器内に前記原料ガス供給部から前記第1の膜に対する前記第2の膜のエッチング選択比が1より大きいクリーニングガスを供給し、前記原料ガス供給部内に堆積した前記第2の膜をエッチングして除去するクリーニング処理を実施するように制御し、
前記クリーニング処理の後、前記処理容器内に堆積した前記第1の膜の表面状態を、前記クリーニング処理の前の状態に近づける表面制御処理を実施するように制御する、
成膜装置。
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JP2018051286A JP6956660B2 (ja) | 2018-03-19 | 2018-03-19 | クリーニング方法及び成膜装置 |
KR1020190027422A KR102468533B1 (ko) | 2018-03-19 | 2019-03-11 | 클리닝 방법 및 성막 장치 |
US16/354,619 US11786946B2 (en) | 2018-03-19 | 2019-03-15 | Cleaning method and film forming apparatus |
CN201910207469.5A CN110284120B (zh) | 2018-03-19 | 2019-03-19 | 清洗方法和成膜装置 |
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JP7236975B2 (ja) * | 2019-10-08 | 2023-03-10 | 東京エレクトロン株式会社 | 制御装置、処理装置及び制御方法 |
TW202315966A (zh) | 2021-07-06 | 2023-04-16 | 荷蘭商Asm Ip私人控股有限公司 | 化學氣相沉積爐、及沉積氮化矽層之方法 |
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US5609721A (en) * | 1994-03-11 | 1997-03-11 | Fujitsu Limited | Semiconductor device manufacturing apparatus and its cleaning method |
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