JP2019080029A - 半導体パッケージ - Google Patents
半導体パッケージ Download PDFInfo
- Publication number
- JP2019080029A JP2019080029A JP2018044652A JP2018044652A JP2019080029A JP 2019080029 A JP2019080029 A JP 2019080029A JP 2018044652 A JP2018044652 A JP 2018044652A JP 2018044652 A JP2018044652 A JP 2018044652A JP 2019080029 A JP2019080029 A JP 2019080029A
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- Japan
- Prior art keywords
- semiconductor package
- core member
- hole
- disposed
- sidewall structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 194
- 239000008393 encapsulating agent Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 91
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- 208000032365 Electromagnetic interference Diseases 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
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- 239000010936 titanium Substances 0.000 description 8
- 239000011256 inorganic filler Substances 0.000 description 7
- 229910003475 inorganic filler Inorganic materials 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
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- 229910000859 α-Fe Inorganic materials 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
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- BNPSSFBOAGDEEL-UHFFFAOYSA-N albuterol sulfate Chemical compound OS(O)(=O)=O.CC(C)(C)NCC(O)C1=CC=C(O)C(CO)=C1.CC(C)(C)NCC(O)C1=CC=C(O)C(CO)=C1 BNPSSFBOAGDEEL-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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Abstract
Description
図1は電子機器システムの例を概略的に示すブロック図である。
一般に、半導体チップには、数多くの微細電気回路が集積されているが、それ自体が半導体完成品としての役割をすることはできず、外部からの物理的または化学的衝撃により損傷する可能性がある。したがって、半導体チップ自体をそのまま用いるのではなく、半導体チップをパッケージングして、パッケージ状態で電子機器などに用いている。
図3はファン−イン半導体パッケージのパッケージング前後を概略的に示した断面図であり、図4はファン−イン半導体パッケージのパッケージング過程を概略的に示した断面図である。
図7はファン−アウト半導体パッケージの概略的な形態を示した断面図である。
110 コア部材
110A 外部側壁構造物
110B 内部側壁構造物
110B' 第1内部側壁構造物
110B'' 第2内部側壁構造物
110HA 第1貫通孔
110HB 第2貫通孔
115a〜115c 第1〜第3金属層
120 半導体チップ
120P 接続パッド
125 受動部品
130 封止材
132 バックサイド金属層
133 バックサイドビア
140 連結部材
141 絶縁層
142 再配線層
143 ビア
150 パッシベーション層
160 アンダーバンプ金属層
170 電気連結構造体
180 パッシベーション層
Claims (27)
- 互いに反対に位置した第1面及び第2面を有し、再配線層を含む連結部材と、
前記連結部材の第1面に配置され、互いに離隔した第1及び第2貫通孔を有し、少なくとも前記第2貫通孔の内部表面に遮蔽層が配置されたコア部材と、
前記第1貫通孔内に配置され、前記再配線層に連結される接続パッドを有する半導体チップと、
前記第2貫通孔内に配置され、前記再配線層に連結される接続端子を有する少なくとも1つの受動部品と、
前記コア部材、前記半導体チップ、及び前記少なくとも1つの受動部品を封止する封止材と、
前記コア部材に内蔵された電磁バンドギャップ(electromagnetic bandgap:EBG)構造体と、を含む、半導体パッケージ。 - 前記コア部材は、
前記コア部材の外側を定義する外部側壁構造物と、
前記外部側壁構造物から内部空間に延び、前記内部空間を前記第1及び第2貫通孔に区分する内部側壁構造物と、を含む、請求項1に記載の半導体パッケージ。 - 前記電磁バンドギャップ構造体は、前記内部側壁構造物と連結される前記外部側壁構造物の領域に位置する、請求項2に記載の半導体パッケージ。
- 前記第2貫通孔は複数の第2貫通孔であり、
前記複数の第2貫通孔は、前記第1貫通孔を囲むように形成される、請求項2または3に記載の半導体パッケージ。 - 前記内部側壁構造物は、
前記第1貫通孔を囲む第1内部側壁構造物と、
前記第1内部側壁構造物と前記外部側壁構造物とを連結する第2内部側壁構造物と、を含む、請求項4に記載の半導体パッケージ。 - 前記電磁バンドギャップ構造体は、前記第2内部側壁構造物に位置する、請求項5に記載の半導体パッケージ。
- 前記電磁バンドギャップ構造体は、前記第2内部側壁構造物に連結される前記外部側壁構造物の領域に位置する、請求項5に記載の半導体パッケージ。
- 前記電磁バンドギャップ構造体は、繰り返して配列された複数のEBGセルを含む、請求項1から7のいずれか一項に記載の半導体パッケージ。
- 前記複数のEBGセルはそれぞれ、前記コア部材に形成された2層構造の導体パターンを含む、請求項8に記載の半導体パッケージ。
- 前記複数のEBGセルの少なくとも1つは、
前記コア部材の第1レベルに配置された第1導体パターンと、
前記コア部材の第2レベルに配置された一対の第2導体パターンと、
前記第2レベルで前記一対の第2導体パターンに連結され、前記第1導体パターンとは分離された複数のビアと、を含む、請求項9に記載の半導体パッケージ。 - 前記複数のEBGセルはそれぞれ、
前記コア部材の下面に配置された第1導体パターンと、
前記コア部材の上面に配置された第2導体パターンと、
前記コア部材の内部に配置された第3導体パターンと、を含む、請求項8に記載の半導体パッケージ。 - 前記遮蔽層は、
前記第2貫通孔の内部表面に配置された第1金属層と、
前記第1金属層と連結され、前記コア部材の上面及び下面にそれぞれ配置された第2及び第3金属層と、を含む、請求項1から11のいずれか一項に記載の半導体パッケージ。 - 前記連結部材は、
前記遮蔽層の第3金属層と連結される第1スタックビアを含む、請求項1から12のいずれか一項に記載の半導体パッケージ。 - 前記連結部材は、
前記半導体チップに対応する領域に位置した第2スタックビアを含む、請求項1から13のいずれか一項に記載の半導体パッケージ。 - 前記コア部材の上面に配置され、前記遮蔽層の第2金属層と連結される金属板をさらに含む、請求項1から14のいずれか一項に記載の半導体パッケージ。
- 互いに反対に位置した第1面及び第2面を有し、再配線層を含む連結部材と、
前記連結部材の第1面に配置され、第1貫通孔及び複数の第2貫通孔を有するコア部材と、
前記第1貫通孔の内部表面を除いた前記複数の第2貫通孔の内部表面に配置された電磁波遮蔽層と、
前記第1貫通孔内に配置され、前記再配線層に連結される接続パッドを有する半導体チップと、
前記複数の第2貫通孔にそれぞれ配置され、それぞれ前記再配線層に連結される接続端子を有する複数の受動部品と、を含み、
前記コア部材は、その外側を定義する外部側壁構造物と、前記第1貫通孔を囲む第1内部側壁構造物と、前記第1内部側壁構造物から前記外部側壁構造物に連結された第2内部側壁構造物と、を含み、
前記第2内部側壁構造物に連結された外部側壁構造物の領域に電磁バンドギャップ(EBG)構造体がさらに配置されている、半導体パッケージ。 - 前記コア部材は、
前記第1内部側壁構造物と前記外部側壁構造物との間に連結された複数の第2内部側壁構造物を含み、
複数の電磁バンドギャップ(EBG)構造体は、前記複数の第2内部側壁構造物のそれぞれに隣接した前記外部側壁構造物の各領域に配置される、請求項16に記載の半導体パッケージ。 - 前記コア部材は、前記第1内部側壁構造物と前記外部側壁構造物の間に連結された複数の第2内部側壁構造物を含み、
複数の電磁バンドギャップ(EBG)構造体はそれぞれ、前記複数の第2内部側壁構造物に配置される、請求項16または17に記載の半導体パッケージ。 - 前記連結部材と反対側に位置する前記コア部材の一面に配置され、前記電磁波遮蔽層と連結されたバックサイド金属層をさらに含む、請求項16から18のいずれか一項に記載の半導体パッケージ。
- 前記電磁波遮蔽層は前記再配線層のビアと電気的に連結される、請求項16から19のいずれか一項に記載の半導体パッケージ。
- 互いに反対に位置した第1面及び第2面を有し、再配線層を含む連結部材と、
前記連結部材の第1面に配置され、前記連結部材の第1面に位置する第1面及びその反対に位置する第2面を有し、上記第1面から第2面に延長する複数の貫通孔を有するコア部材と、を含み、
前記複数の貫通孔は、前記コア部材の側面から離隔した第1貫通孔と、前記第1貫通孔と前記コア部材の各側面との間に位置する少なくとも一つの第2貫通孔と、を含み、導電性金属層が前記少なくとも一つの第2貫通孔の内部表面に配置される、半導体パッケージ。 - 前記連結部材の再配線層は、前記第1貫通孔と前記少なくとも一つの第2貫通孔との間、前記第1貫通孔と前記連結部材の第2面に、電気的連結を提供する、請求項21に記載の半導体パッケージ。
- 前記第1貫通孔の内部表面には導電性金属層が形成されない、請求項21または22に記載の半導体パッケージ。
- 前記コア部材は、
前記コア部材の外側を定義する外部側壁構造物と、
前記少なくとも一つの第2貫通孔から前記第1貫通孔を区分する内部側壁構造物と、を含む、請求項21から23のいずれか一項に記載の半導体パッケージ。 - 前記内部側壁構造物の一部は前記外部側壁構造物に延び、
前記内部側壁構造物の一部に隣接する前記外部側壁構造物に内蔵された電磁バンドギャップ(EBG)構造体をさらに含む、請求項24に記載の半導体パッケージ。 - 前記内部側壁構造物に内蔵された電磁バンドギャップ(EBG)構造体をさらに含む、請求項24に記載の半導体パッケージ。
- 前記電磁バンドギャップ(EBG)構造体は、前記コア部材に形成された導電パターンを含み、且つ2層構造を有し、前記2層構造は層間にビアを含む、請求項26に記載の半導体パッケージ。
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JP2015097273A (ja) * | 2014-12-12 | 2015-05-21 | 株式会社東芝 | 回路基板および半導体部品 |
WO2016181954A1 (ja) * | 2015-05-11 | 2016-11-17 | 株式会社村田製作所 | 高周波モジュール |
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JPWO2020213122A1 (ja) * | 2019-04-18 | 2021-09-13 | 三菱電機株式会社 | 信号伝送回路 |
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WO2022014348A1 (ja) * | 2020-07-17 | 2022-01-20 | 株式会社村田製作所 | モジュールおよびその製造方法 |
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US10756023B2 (en) | 2020-08-25 |
TW201917864A (zh) | 2019-05-01 |
US20190122993A1 (en) | 2019-04-25 |
TWI694579B (zh) | 2020-05-21 |
JP6647333B2 (ja) | 2020-02-14 |
KR20190043913A (ko) | 2019-04-29 |
KR102019349B1 (ko) | 2019-09-09 |
CN109686723A (zh) | 2019-04-26 |
CN109686723B (zh) | 2023-04-07 |
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