JP2018501490A5 - - Google Patents
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- Publication number
- JP2018501490A5 JP2018501490A5 JP2017535369A JP2017535369A JP2018501490A5 JP 2018501490 A5 JP2018501490 A5 JP 2018501490A5 JP 2017535369 A JP2017535369 A JP 2017535369A JP 2017535369 A JP2017535369 A JP 2017535369A JP 2018501490 A5 JP2018501490 A5 JP 2018501490A5
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- inner coating
- contact probe
- core
- probe according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011247 coating layer Substances 0.000 claims 18
- 239000000523 sample Substances 0.000 claims 13
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 8
- 239000004020 conductor Substances 0.000 claims 7
- 229910052763 palladium Inorganic materials 0.000 claims 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 239000011241 protective layer Substances 0.000 claims 3
- 229910052703 rhodium Inorganic materials 0.000 claims 3
- 239000010948 rhodium Substances 0.000 claims 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims 3
- 229910000531 Co alloy Inorganic materials 0.000 claims 2
- 239000002313 adhesive film Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims 1
- 229910001096 P alloy Inorganic materials 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910001092 metal group alloy Inorganic materials 0.000 claims 1
- 239000012811 non-conductive material Substances 0.000 claims 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI20142286 | 2014-12-30 | ||
| ITMI2014A002286 | 2014-12-30 | ||
| PCT/EP2015/079544 WO2016107729A1 (en) | 2014-12-30 | 2015-12-14 | Contact probe for testing head |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018501490A JP2018501490A (ja) | 2018-01-18 |
| JP2018501490A5 true JP2018501490A5 (enExample) | 2020-06-25 |
| JP6759213B2 JP6759213B2 (ja) | 2020-09-23 |
Family
ID=52633392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017535369A Active JP6759213B2 (ja) | 2014-12-30 | 2015-12-14 | テストヘッド用コンタクトプローブ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US11131690B2 (enExample) |
| EP (1) | EP3241028B1 (enExample) |
| JP (1) | JP6759213B2 (enExample) |
| KR (2) | KR102502965B1 (enExample) |
| CN (1) | CN107257928B (enExample) |
| PH (1) | PH12017501220B1 (enExample) |
| SG (1) | SG11201704433TA (enExample) |
| TW (1) | TWI679425B (enExample) |
| WO (1) | WO2016107729A1 (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6221031B1 (ja) | 2016-12-16 | 2017-11-01 | 日本電産リード株式会社 | コンタクトプローブ及び電気接続治具 |
| IT201700021397A1 (it) | 2017-02-24 | 2018-08-24 | Technoprobe Spa | Testa di misura con migliorate proprietà in frequenza |
| JP7005939B2 (ja) * | 2017-05-25 | 2022-01-24 | 日本電産リード株式会社 | コンタクトプローブ |
| CN109425814B (zh) * | 2017-09-01 | 2021-09-10 | 中华精测科技股份有限公司 | 探针组件及其探针结构 |
| CN109425762B (zh) * | 2017-09-01 | 2021-05-07 | 中华精测科技股份有限公司 | 探针组件及其探针结构 |
| US20190103693A1 (en) * | 2017-09-29 | 2019-04-04 | Apple Inc. | Electrical contacts having sacrificial layer for corrosion protection |
| US11262383B1 (en) | 2018-09-26 | 2022-03-01 | Microfabrica Inc. | Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making |
| US11973301B2 (en) | 2018-09-26 | 2024-04-30 | Microfabrica Inc. | Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making |
| US12181493B2 (en) | 2018-10-26 | 2024-12-31 | Microfabrica Inc. | Compliant probes including dual independently operable probe contact elements including at least one flat extension spring, methods for making, and methods for using |
| US12078657B2 (en) | 2019-12-31 | 2024-09-03 | Microfabrica Inc. | Compliant pin probes with extension springs, methods for making, and methods for using |
| PH12021551644A1 (en) * | 2019-01-29 | 2022-05-23 | Yokowo Seisakusho Kk | Plunger and contact probe |
| US12000865B2 (en) | 2019-02-14 | 2024-06-04 | Microfabrica Inc. | Multi-beam vertical probes with independent arms formed of a high conductivity metal for enhancing current carrying capacity and methods for making such probes |
| TWI714151B (zh) * | 2019-07-01 | 2020-12-21 | 技鼎股份有限公司 | 探針頭及其導電探針 |
| TWI822833B (zh) * | 2019-08-15 | 2023-11-21 | 優顯科技股份有限公司 | 電子探測板、光電探測模組、與電子探測方法 |
| IT201900024889A1 (it) * | 2019-12-19 | 2021-06-19 | Technoprobe Spa | Sonda di contatto per applicazioni ad alta frequenza con migliorata portata di corrente |
| US11761982B1 (en) | 2019-12-31 | 2023-09-19 | Microfabrica Inc. | Probes with planar unbiased spring elements for electronic component contact and methods for making such probes |
| US12196781B2 (en) | 2019-12-31 | 2025-01-14 | Microfabrica Inc. | Probes with planar unbiased spring elements for electronic component contact, methods for making such probes, and methods for using such probes |
| US11867721B1 (en) | 2019-12-31 | 2024-01-09 | Microfabrica Inc. | Probes with multiple springs, methods for making, and methods for using |
| US12196782B2 (en) | 2019-12-31 | 2025-01-14 | Microfabrica Inc. | Probes with planar unbiased spring elements for electronic component contact, methods for making such probes, and methods for using such probes |
| CN113109603A (zh) * | 2020-01-13 | 2021-07-13 | 科磊股份有限公司 | 具有多个金属涂层的悬臂式探针 |
| EP3862759B1 (de) * | 2020-02-04 | 2022-05-11 | Heraeus Deutschland GmbH & Co. KG | Manteldraht und verfahren zur herstellung von manteldrähten |
| JP7605203B2 (ja) * | 2020-03-19 | 2024-12-24 | ニデックアドバンステクノロジー株式会社 | 接触端子、検査治具、および検査装置 |
| CN111403937A (zh) * | 2020-03-24 | 2020-07-10 | 东莞立德精密工业有限公司 | 金属端子及其制作方法 |
| US11774467B1 (en) * | 2020-09-01 | 2023-10-03 | Microfabrica Inc. | Method of in situ modulation of structural material properties and/or template shape |
| WO2022059070A1 (ja) * | 2020-09-15 | 2022-03-24 | 日本電子材料株式会社 | プローブカード |
| US12146898B2 (en) | 2020-10-02 | 2024-11-19 | Microfabrica Inc. | Multi-beam probes with decoupled structural and current carrying beams and methods of making |
| KR102517778B1 (ko) * | 2021-02-26 | 2023-04-04 | (주)포인트엔지니어링 | 전기 전도성 접촉핀 어셈블리 및 그 제조방법 |
| TW202244282A (zh) * | 2021-03-26 | 2022-11-16 | 日商石福金屬興業股份有限公司 | 探測針用合金材料 |
| KR102549551B1 (ko) * | 2021-04-06 | 2023-06-29 | (주)포인트엔지니어링 | 전기 전도성 접촉핀, 이를 구비하는 검사장치 및 전기 전도성 접촉핀의 제조방법 |
| KR102577539B1 (ko) * | 2021-04-09 | 2023-09-12 | (주)포인트엔지니어링 | 전기 전도성 접촉핀 및 이의 제조방법 |
| KR102321083B1 (ko) * | 2021-07-21 | 2021-11-03 | (주)새한마이크로텍 | 접촉 프로브 |
| CN113507005A (zh) * | 2021-08-10 | 2021-10-15 | 烟台艾睿光电科技有限公司 | 一种巡检机器人充电房及巡检机器人 |
| CN114791517B (zh) * | 2022-04-18 | 2025-06-03 | 苏州伊欧陆系统集成有限公司 | 一种低漏电耐高温陶瓷刀片测试探针 |
| KR102763456B1 (ko) * | 2022-05-11 | 2025-02-07 | (주)티에스이 | 프로브 팁의 제조 방법 및 이에 의해 제조된 프로브 팁 |
| TW202424495A (zh) * | 2022-08-15 | 2024-06-16 | 美商微製造股份有限公司 | 具有解耦結構及電流乘載梁的多梁探針 |
| EP4325227B1 (de) * | 2022-08-16 | 2025-10-01 | Heraeus Precious Metals GmbH & Co. KG | Bandförmiger verbundwerkstoff für prüfnadeln |
| JP2024070404A (ja) * | 2022-11-11 | 2024-05-23 | 株式会社日本マイクロニクス | プローブおよび電気的接続装置 |
| JP2024081055A (ja) * | 2022-12-05 | 2024-06-17 | 株式会社日本マイクロニクス | プローブおよび電気的接続装置 |
| JP2024082419A (ja) * | 2022-12-08 | 2024-06-20 | 株式会社日本マイクロニクス | プローブ |
| JP2025117043A (ja) * | 2024-01-30 | 2025-08-12 | 株式会社日本マイクロニクス | プローブおよび電気的接続装置 |
| CN120405195A (zh) * | 2025-05-09 | 2025-08-01 | 芯卓科技(浙江)有限公司 | 测试探针、探针卡和测试探针制造方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04351968A (ja) * | 1991-05-29 | 1992-12-07 | Vacuum Metallurgical Co Ltd | プローブ |
| JP3215452B2 (ja) * | 1991-05-30 | 2001-10-09 | 真空冶金株式会社 | 電 極 |
| KR100394205B1 (ko) * | 1994-11-15 | 2003-08-06 | 폼팩터, 인크. | 시험된 반도체 장치 및 시험된 반도체 장치의 제조방법 |
| KR100266389B1 (ko) * | 1995-05-26 | 2000-09-15 | 이고르 와이. 칸드로스 | 스프링 접점부를 구비한 대 기판을 정주시키기 위한 접점 캐리어(타일) |
| JP2000502810A (ja) * | 1996-09-13 | 2000-03-07 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 支持面から突出した複数の個別絶縁プローブ・チップを有するプローブ構造、それを使用するための装置および製造方法 |
| JP3458684B2 (ja) * | 1997-11-28 | 2003-10-20 | 三菱マテリアル株式会社 | コンタクトプローブ |
| JP2002531915A (ja) * | 1998-12-02 | 2002-09-24 | フォームファクター,インコーポレイテッド | リソグラフィ接触要素 |
| JP3745184B2 (ja) * | 1999-03-25 | 2006-02-15 | 株式会社東京カソード研究所 | プローブカード用探針及びその製造方法 |
| WO2000079293A1 (en) * | 1999-06-22 | 2000-12-28 | International Test Solutions, Inc. | Probe device using superelastic probe elements |
| JP2001174482A (ja) | 1999-12-21 | 2001-06-29 | Toshiba Corp | 電気的特性評価用接触針、プローブ構造体、プローブカード、および電気的特性評価用接触針の製造方法 |
| JP2002131334A (ja) * | 2000-10-24 | 2002-05-09 | Nec Yamaguchi Ltd | プローブ針、プローブカード、及びプローブカードの作製方法 |
| JPWO2003005042A1 (ja) * | 2001-07-02 | 2004-10-28 | 日本発条株式会社 | 導電性接触子 |
| JP2003057266A (ja) * | 2001-08-20 | 2003-02-26 | Mitsubishi Materials Corp | コンタクトプローブ及びその製造方法 |
| JP3833216B2 (ja) * | 2001-09-24 | 2006-10-11 | リカ デンシ アメリカ, インコーポレイテッド | 電気的テストプローブ及びその製造方法 |
| JP3837434B2 (ja) * | 2003-06-20 | 2006-10-25 | アルプス電気株式会社 | 接続装置 |
| US20050227510A1 (en) * | 2004-04-09 | 2005-10-13 | Brown Dirk D | Small array contact with precision working range |
| EP1717590A4 (en) * | 2004-12-14 | 2008-10-01 | Advantest Corp | CONTACT PIN, PROBE CARD USING SAME AND ELECTRONIC DEVICE TESTING APPARATUS |
| US20070200576A1 (en) * | 2006-02-08 | 2007-08-30 | Laurent Edward T | Multi-layered probes |
| JP2007327854A (ja) * | 2006-06-08 | 2007-12-20 | Nidec-Read Corp | 基板検査用治具及び基板検査装置 |
| US7836587B2 (en) * | 2006-09-21 | 2010-11-23 | Formfactor, Inc. | Method of repairing a contactor apparatus |
| TW200815763A (en) | 2006-09-26 | 2008-04-01 | Nihon Micronics Kabushiki Kaisha | Electrical test probe and electrical test probe assembly |
| JP4783265B2 (ja) * | 2006-11-02 | 2011-09-28 | 健 金子 | コンタクトプローブ、及びコンタクトプローブの製造方法 |
| EP2060921A1 (en) * | 2007-11-16 | 2009-05-20 | Technoprobe S.p.A | Contact probe for testing head having vertical probes and related testing head for testing microstructure electric performance |
| JP4644723B2 (ja) | 2008-03-31 | 2011-03-02 | 株式会社日立ハイテクノロジーズ | ナノチューブ探針を有する測定装置 |
| US20120176122A1 (en) * | 2010-03-30 | 2012-07-12 | Yoshihiro Hirata | Contact probe, linked body of contact probes, and manufacturing methods thereof |
| KR101064852B1 (ko) * | 2010-05-24 | 2011-09-14 | 김재길 | 프로브 카드용 니들 |
| JP2013088389A (ja) * | 2011-10-21 | 2013-05-13 | Tokyo Electron Ltd | プローブカード用接触端子及びプローブカード |
| WO2014087906A1 (ja) * | 2012-12-04 | 2014-06-12 | 日本電子材料株式会社 | 電気的接触子 |
-
2015
- 2015-12-14 KR KR1020177021268A patent/KR102502965B1/ko active Active
- 2015-12-14 WO PCT/EP2015/079544 patent/WO2016107729A1/en not_active Ceased
- 2015-12-14 EP EP15823139.9A patent/EP3241028B1/en active Active
- 2015-12-14 JP JP2017535369A patent/JP6759213B2/ja active Active
- 2015-12-14 CN CN201580070711.9A patent/CN107257928B/zh active Active
- 2015-12-14 KR KR1020227037896A patent/KR102542154B1/ko active Active
- 2015-12-14 SG SG11201704433TA patent/SG11201704433TA/en unknown
- 2015-12-29 TW TW104144231A patent/TWI679425B/zh active
-
2017
- 2017-06-29 PH PH12017501220A patent/PH12017501220B1/en unknown
- 2017-06-30 US US15/640,097 patent/US11131690B2/en active Active
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