JP6759213B2 - テストヘッド用コンタクトプローブ - Google Patents

テストヘッド用コンタクトプローブ Download PDF

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Publication number
JP6759213B2
JP6759213B2 JP2017535369A JP2017535369A JP6759213B2 JP 6759213 B2 JP6759213 B2 JP 6759213B2 JP 2017535369 A JP2017535369 A JP 2017535369A JP 2017535369 A JP2017535369 A JP 2017535369A JP 6759213 B2 JP6759213 B2 JP 6759213B2
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JP
Japan
Prior art keywords
coating layer
inner coating
contact
core
contact probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017535369A
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English (en)
Japanese (ja)
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JP2018501490A (ja
JP2018501490A5 (enExample
Inventor
ジュゼッペ クリッパ
ジュゼッペ クリッパ
Original Assignee
テクノプローベ エス．ピー．エー．
テクノプローベ エス．ピー．エー．
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by テクノプローベ エス．ピー．エー．, テクノプローベ エス．ピー．エー． filed Critical テクノプローベ エス．ピー．エー．
Publication of JP2018501490A publication Critical patent/JP2018501490A/ja
Publication of JP2018501490A5 publication Critical patent/JP2018501490A5/ja
Application granted granted Critical
Publication of JP6759213B2 publication Critical patent/JP6759213B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2017535369A 2014-12-30 2015-12-14 テストヘッド用コンタクトプローブ Active JP6759213B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI20142286 2014-12-30
ITMI2014A002286 2014-12-30
PCT/EP2015/079544 WO2016107729A1 (en) 2014-12-30 2015-12-14 Contact probe for testing head

Publications (3)

Publication Number Publication Date
JP2018501490A JP2018501490A (ja) 2018-01-18
JP2018501490A5 JP2018501490A5 (enExample) 2020-06-25
JP6759213B2 true JP6759213B2 (ja) 2020-09-23

Family

ID=52633392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017535369A Active JP6759213B2 (ja) 2014-12-30 2015-12-14 テストヘッド用コンタクトプローブ

Country Status (9)

Country Link
US (1) US11131690B2 (enExample)
EP (1) EP3241028B1 (enExample)
JP (1) JP6759213B2 (enExample)
KR (2) KR102502965B1 (enExample)
CN (1) CN107257928B (enExample)
PH (1) PH12017501220B1 (enExample)
SG (1) SG11201704433TA (enExample)
TW (1) TWI679425B (enExample)
WO (1) WO2016107729A1 (enExample)

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KR102517778B1 (ko) * 2021-02-26 2023-04-04 (주)포인트엔지니어링 전기 전도성 접촉핀 어셈블리 및 그 제조방법
TW202244282A (zh) * 2021-03-26 2022-11-16 日商石福金屬興業股份有限公司 探測針用合金材料
KR102549551B1 (ko) * 2021-04-06 2023-06-29 (주)포인트엔지니어링 전기 전도성 접촉핀, 이를 구비하는 검사장치 및 전기 전도성 접촉핀의 제조방법
KR102577539B1 (ko) * 2021-04-09 2023-09-12 (주)포인트엔지니어링 전기 전도성 접촉핀 및 이의 제조방법
KR102321083B1 (ko) * 2021-07-21 2021-11-03 (주)새한마이크로텍 접촉 프로브
CN113507005A (zh) * 2021-08-10 2021-10-15 烟台艾睿光电科技有限公司 一种巡检机器人充电房及巡检机器人
CN114791517B (zh) * 2022-04-18 2025-06-03 苏州伊欧陆系统集成有限公司 一种低漏电耐高温陶瓷刀片测试探针
KR102763456B1 (ko) * 2022-05-11 2025-02-07 (주)티에스이 프로브 팁의 제조 방법 및 이에 의해 제조된 프로브 팁
TW202424495A (zh) * 2022-08-15 2024-06-16 美商微製造股份有限公司 具有解耦結構及電流乘載梁的多梁探針
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Also Published As

Publication number Publication date
SG11201704433TA (en) 2017-07-28
KR20170107465A (ko) 2017-09-25
KR20220153661A (ko) 2022-11-18
JP2018501490A (ja) 2018-01-18
WO2016107729A1 (en) 2016-07-07
TWI679425B (zh) 2019-12-11
CN107257928A (zh) 2017-10-17
EP3241028A1 (en) 2017-11-08
EP3241028B1 (en) 2020-02-05
KR102542154B1 (ko) 2023-06-13
US11131690B2 (en) 2021-09-28
US20170307657A1 (en) 2017-10-26
TW201629493A (zh) 2016-08-16
CN107257928B (zh) 2020-12-01
PH12017501220A1 (en) 2018-01-08
PH12017501220B1 (en) 2020-11-18
KR102502965B1 (ko) 2023-02-23

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