CN107257928B - 用于测试头的接触探针 - Google Patents

用于测试头的接触探针 Download PDF

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Publication number
CN107257928B
CN107257928B CN201580070711.9A CN201580070711A CN107257928B CN 107257928 B CN107257928 B CN 107257928B CN 201580070711 A CN201580070711 A CN 201580070711A CN 107257928 B CN107257928 B CN 107257928B
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CN
China
Prior art keywords
contact
core
inner coating
contact probe
multilayer structure
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CN201580070711.9A
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English (en)
Chinese (zh)
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CN107257928A (zh
Inventor
朱塞佩·克里帕
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Technoprobe SpA
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Technoprobe SpA
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Publication of CN107257928A publication Critical patent/CN107257928A/zh
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Publication of CN107257928B publication Critical patent/CN107257928B/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN201580070711.9A 2014-12-30 2015-12-14 用于测试头的接触探针 Active CN107257928B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI2014A002286(102014902319648) 2014-12-30
ITMI20142286 2014-12-30
PCT/EP2015/079544 WO2016107729A1 (en) 2014-12-30 2015-12-14 Contact probe for testing head

Publications (2)

Publication Number Publication Date
CN107257928A CN107257928A (zh) 2017-10-17
CN107257928B true CN107257928B (zh) 2020-12-01

Family

ID=52633392

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580070711.9A Active CN107257928B (zh) 2014-12-30 2015-12-14 用于测试头的接触探针

Country Status (9)

Country Link
US (1) US11131690B2 (enExample)
EP (1) EP3241028B1 (enExample)
JP (1) JP6759213B2 (enExample)
KR (2) KR102502965B1 (enExample)
CN (1) CN107257928B (enExample)
PH (1) PH12017501220B1 (enExample)
SG (1) SG11201704433TA (enExample)
TW (1) TWI679425B (enExample)
WO (1) WO2016107729A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240167125A1 (en) * 2021-03-26 2024-05-23 Ishifuku Metal Industry Co., Ltd. Alloy material for probe pins

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KR102517778B1 (ko) * 2021-02-26 2023-04-04 (주)포인트엔지니어링 전기 전도성 접촉핀 어셈블리 및 그 제조방법
KR102549551B1 (ko) * 2021-04-06 2023-06-29 (주)포인트엔지니어링 전기 전도성 접촉핀, 이를 구비하는 검사장치 및 전기 전도성 접촉핀의 제조방법
KR102577539B1 (ko) * 2021-04-09 2023-09-12 (주)포인트엔지니어링 전기 전도성 접촉핀 및 이의 제조방법
KR102321083B1 (ko) * 2021-07-21 2021-11-03 (주)새한마이크로텍 접촉 프로브
CN113507005A (zh) * 2021-08-10 2021-10-15 烟台艾睿光电科技有限公司 一种巡检机器人充电房及巡检机器人
CN114791517B (zh) * 2022-04-18 2025-06-03 苏州伊欧陆系统集成有限公司 一种低漏电耐高温陶瓷刀片测试探针
KR102763456B1 (ko) 2022-05-11 2025-02-07 (주)티에스이 프로브 팁의 제조 방법 및 이에 의해 제조된 프로브 팁
TW202424495A (zh) * 2022-08-15 2024-06-16 美商微製造股份有限公司 具有解耦結構及電流乘載梁的多梁探針
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Publication number Priority date Publication date Assignee Title
US20240167125A1 (en) * 2021-03-26 2024-05-23 Ishifuku Metal Industry Co., Ltd. Alloy material for probe pins

Also Published As

Publication number Publication date
TW201629493A (zh) 2016-08-16
PH12017501220A1 (en) 2018-01-08
TWI679425B (zh) 2019-12-11
KR20170107465A (ko) 2017-09-25
JP2018501490A (ja) 2018-01-18
US20170307657A1 (en) 2017-10-26
EP3241028B1 (en) 2020-02-05
KR102542154B1 (ko) 2023-06-13
WO2016107729A1 (en) 2016-07-07
KR102502965B1 (ko) 2023-02-23
SG11201704433TA (en) 2017-07-28
CN107257928A (zh) 2017-10-17
PH12017501220B1 (en) 2020-11-18
EP3241028A1 (en) 2017-11-08
JP6759213B2 (ja) 2020-09-23
US11131690B2 (en) 2021-09-28
KR20220153661A (ko) 2022-11-18

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