TWI679425B - 用於測試頭之接觸式探針 - Google Patents

用於測試頭之接觸式探針 Download PDF

Info

Publication number
TWI679425B
TWI679425B TW104144231A TW104144231A TWI679425B TW I679425 B TWI679425 B TW I679425B TW 104144231 A TW104144231 A TW 104144231A TW 104144231 A TW104144231 A TW 104144231A TW I679425 B TWI679425 B TW I679425B
Authority
TW
Taiwan
Prior art keywords
contact
contact probe
layer
core
probe
Prior art date
Application number
TW104144231A
Other languages
English (en)
Chinese (zh)
Other versions
TW201629493A (zh
Inventor
克力帕吉賽佩
Giuseppe Crippa
Original Assignee
義大利商技術探測股份有限公司
Technoprobe S. P. A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 義大利商技術探測股份有限公司, Technoprobe S. P. A. filed Critical 義大利商技術探測股份有限公司
Publication of TW201629493A publication Critical patent/TW201629493A/zh
Application granted granted Critical
Publication of TWI679425B publication Critical patent/TWI679425B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW104144231A 2014-12-30 2015-12-29 用於測試頭之接觸式探針 TWI679425B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITMI20142286 2014-12-30
ITMI2014A002286 2014-12-30

Publications (2)

Publication Number Publication Date
TW201629493A TW201629493A (zh) 2016-08-16
TWI679425B true TWI679425B (zh) 2019-12-11

Family

ID=52633392

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104144231A TWI679425B (zh) 2014-12-30 2015-12-29 用於測試頭之接觸式探針

Country Status (9)

Country Link
US (1) US11131690B2 (enExample)
EP (1) EP3241028B1 (enExample)
JP (1) JP6759213B2 (enExample)
KR (2) KR102502965B1 (enExample)
CN (1) CN107257928B (enExample)
PH (1) PH12017501220B1 (enExample)
SG (1) SG11201704433TA (enExample)
TW (1) TWI679425B (enExample)
WO (1) WO2016107729A1 (enExample)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6221031B1 (ja) 2016-12-16 2017-11-01 日本電産リード株式会社 コンタクトプローブ及び電気接続治具
IT201700021397A1 (it) 2017-02-24 2018-08-24 Technoprobe Spa Testa di misura con migliorate proprietà in frequenza
JP7005939B2 (ja) * 2017-05-25 2022-01-24 日本電産リード株式会社 コンタクトプローブ
CN109425814B (zh) * 2017-09-01 2021-09-10 中华精测科技股份有限公司 探针组件及其探针结构
CN109425762B (zh) * 2017-09-01 2021-05-07 中华精测科技股份有限公司 探针组件及其探针结构
US20190103693A1 (en) * 2017-09-29 2019-04-04 Apple Inc. Electrical contacts having sacrificial layer for corrosion protection
US11262383B1 (en) 2018-09-26 2022-03-01 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US11973301B2 (en) 2018-09-26 2024-04-30 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US12181493B2 (en) 2018-10-26 2024-12-31 Microfabrica Inc. Compliant probes including dual independently operable probe contact elements including at least one flat extension spring, methods for making, and methods for using
US12078657B2 (en) 2019-12-31 2024-09-03 Microfabrica Inc. Compliant pin probes with extension springs, methods for making, and methods for using
PH12021551644A1 (en) * 2019-01-29 2022-05-23 Yokowo Seisakusho Kk Plunger and contact probe
US12000865B2 (en) 2019-02-14 2024-06-04 Microfabrica Inc. Multi-beam vertical probes with independent arms formed of a high conductivity metal for enhancing current carrying capacity and methods for making such probes
TWI714151B (zh) * 2019-07-01 2020-12-21 技鼎股份有限公司 探針頭及其導電探針
TWI822833B (zh) * 2019-08-15 2023-11-21 優顯科技股份有限公司 電子探測板、光電探測模組、與電子探測方法
IT201900024889A1 (it) * 2019-12-19 2021-06-19 Technoprobe Spa Sonda di contatto per applicazioni ad alta frequenza con migliorata portata di corrente
US11761982B1 (en) 2019-12-31 2023-09-19 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact and methods for making such probes
US12196781B2 (en) 2019-12-31 2025-01-14 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact, methods for making such probes, and methods for using such probes
US11867721B1 (en) 2019-12-31 2024-01-09 Microfabrica Inc. Probes with multiple springs, methods for making, and methods for using
US12196782B2 (en) 2019-12-31 2025-01-14 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact, methods for making such probes, and methods for using such probes
CN113109603A (zh) * 2020-01-13 2021-07-13 科磊股份有限公司 具有多个金属涂层的悬臂式探针
EP3862759B1 (de) * 2020-02-04 2022-05-11 Heraeus Deutschland GmbH & Co. KG Manteldraht und verfahren zur herstellung von manteldrähten
JP7605203B2 (ja) * 2020-03-19 2024-12-24 ニデックアドバンステクノロジー株式会社 接触端子、検査治具、および検査装置
CN111403937A (zh) * 2020-03-24 2020-07-10 东莞立德精密工业有限公司 金属端子及其制作方法
US11774467B1 (en) * 2020-09-01 2023-10-03 Microfabrica Inc. Method of in situ modulation of structural material properties and/or template shape
WO2022059070A1 (ja) * 2020-09-15 2022-03-24 日本電子材料株式会社 プローブカード
US12146898B2 (en) 2020-10-02 2024-11-19 Microfabrica Inc. Multi-beam probes with decoupled structural and current carrying beams and methods of making
KR102517778B1 (ko) * 2021-02-26 2023-04-04 (주)포인트엔지니어링 전기 전도성 접촉핀 어셈블리 및 그 제조방법
TW202244282A (zh) * 2021-03-26 2022-11-16 日商石福金屬興業股份有限公司 探測針用合金材料
KR102549551B1 (ko) * 2021-04-06 2023-06-29 (주)포인트엔지니어링 전기 전도성 접촉핀, 이를 구비하는 검사장치 및 전기 전도성 접촉핀의 제조방법
KR102577539B1 (ko) * 2021-04-09 2023-09-12 (주)포인트엔지니어링 전기 전도성 접촉핀 및 이의 제조방법
KR102321083B1 (ko) * 2021-07-21 2021-11-03 (주)새한마이크로텍 접촉 프로브
CN113507005A (zh) * 2021-08-10 2021-10-15 烟台艾睿光电科技有限公司 一种巡检机器人充电房及巡检机器人
CN114791517B (zh) * 2022-04-18 2025-06-03 苏州伊欧陆系统集成有限公司 一种低漏电耐高温陶瓷刀片测试探针
KR102763456B1 (ko) * 2022-05-11 2025-02-07 (주)티에스이 프로브 팁의 제조 방법 및 이에 의해 제조된 프로브 팁
TW202424495A (zh) * 2022-08-15 2024-06-16 美商微製造股份有限公司 具有解耦結構及電流乘載梁的多梁探針
EP4325227B1 (de) * 2022-08-16 2025-10-01 Heraeus Precious Metals GmbH & Co. KG Bandförmiger verbundwerkstoff für prüfnadeln
JP2024070404A (ja) * 2022-11-11 2024-05-23 株式会社日本マイクロニクス プローブおよび電気的接続装置
JP2024081055A (ja) * 2022-12-05 2024-06-17 株式会社日本マイクロニクス プローブおよび電気的接続装置
JP2024082419A (ja) * 2022-12-08 2024-06-20 株式会社日本マイクロニクス プローブ
JP2025117043A (ja) * 2024-01-30 2025-08-12 株式会社日本マイクロニクス プローブおよび電気的接続装置
CN120405195A (zh) * 2025-05-09 2025-08-01 芯卓科技(浙江)有限公司 测试探针、探针卡和测试探针制造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04351968A (ja) * 1991-05-29 1992-12-07 Vacuum Metallurgical Co Ltd プローブ
JPH11160355A (ja) * 1997-11-28 1999-06-18 Mitsubishi Materials Corp コンタクトプローブ
WO2000079293A1 (en) * 1999-06-22 2000-12-28 International Test Solutions, Inc. Probe device using superelastic probe elements
JP2003057266A (ja) * 2001-08-20 2003-02-26 Mitsubishi Materials Corp コンタクトプローブ及びその製造方法
EP2060921A1 (en) * 2007-11-16 2009-05-20 Technoprobe S.p.A Contact probe for testing head having vertical probes and related testing head for testing microstructure electric performance
CN100520414C (zh) * 2004-12-14 2009-07-29 株式会社爱德万测试 触针以及探针板
US20120176122A1 (en) * 2010-03-30 2012-07-12 Yoshihiro Hirata Contact probe, linked body of contact probes, and manufacturing methods thereof
CN103063883A (zh) * 2011-10-21 2013-04-24 东京毅力科创株式会社 探针卡用接触端子和探针卡

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3215452B2 (ja) * 1991-05-30 2001-10-09 真空冶金株式会社 電 極
KR100394205B1 (ko) * 1994-11-15 2003-08-06 폼팩터, 인크. 시험된 반도체 장치 및 시험된 반도체 장치의 제조방법
KR100266389B1 (ko) * 1995-05-26 2000-09-15 이고르 와이. 칸드로스 스프링 접점부를 구비한 대 기판을 정주시키기 위한 접점 캐리어(타일)
JP2000502810A (ja) * 1996-09-13 2000-03-07 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 支持面から突出した複数の個別絶縁プローブ・チップを有するプローブ構造、それを使用するための装置および製造方法
JP2002531915A (ja) * 1998-12-02 2002-09-24 フォームファクター，インコーポレイテッド リソグラフィ接触要素
JP3745184B2 (ja) * 1999-03-25 2006-02-15 株式会社東京カソード研究所 プローブカード用探針及びその製造方法
JP2001174482A (ja) 1999-12-21 2001-06-29 Toshiba Corp 電気的特性評価用接触針、プローブ構造体、プローブカード、および電気的特性評価用接触針の製造方法
JP2002131334A (ja) * 2000-10-24 2002-05-09 Nec Yamaguchi Ltd プローブ針、プローブカード、及びプローブカードの作製方法
JPWO2003005042A1 (ja) * 2001-07-02 2004-10-28 日本発条株式会社 導電性接触子
JP3833216B2 (ja) * 2001-09-24 2006-10-11 リカ デンシ アメリカ， インコーポレイテッド 電気的テストプローブ及びその製造方法
JP3837434B2 (ja) * 2003-06-20 2006-10-25 アルプス電気株式会社 接続装置
US20050227510A1 (en) * 2004-04-09 2005-10-13 Brown Dirk D Small array contact with precision working range
US20070200576A1 (en) * 2006-02-08 2007-08-30 Laurent Edward T Multi-layered probes
JP2007327854A (ja) * 2006-06-08 2007-12-20 Nidec-Read Corp 基板検査用治具及び基板検査装置
US7836587B2 (en) * 2006-09-21 2010-11-23 Formfactor, Inc. Method of repairing a contactor apparatus
TW200815763A (en) 2006-09-26 2008-04-01 Nihon Micronics Kabushiki Kaisha Electrical test probe and electrical test probe assembly
JP4783265B2 (ja) * 2006-11-02 2011-09-28 健 金子 コンタクトプローブ、及びコンタクトプローブの製造方法
JP4644723B2 (ja) 2008-03-31 2011-03-02 株式会社日立ハイテクノロジーズ ナノチューブ探針を有する測定装置
KR101064852B1 (ko) * 2010-05-24 2011-09-14 김재길 프로브 카드용 니들
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04351968A (ja) * 1991-05-29 1992-12-07 Vacuum Metallurgical Co Ltd プローブ
JPH11160355A (ja) * 1997-11-28 1999-06-18 Mitsubishi Materials Corp コンタクトプローブ
WO2000079293A1 (en) * 1999-06-22 2000-12-28 International Test Solutions, Inc. Probe device using superelastic probe elements
JP2003057266A (ja) * 2001-08-20 2003-02-26 Mitsubishi Materials Corp コンタクトプローブ及びその製造方法
CN100520414C (zh) * 2004-12-14 2009-07-29 株式会社爱德万测试 触针以及探针板
EP2060921A1 (en) * 2007-11-16 2009-05-20 Technoprobe S.p.A Contact probe for testing head having vertical probes and related testing head for testing microstructure electric performance
US20120176122A1 (en) * 2010-03-30 2012-07-12 Yoshihiro Hirata Contact probe, linked body of contact probes, and manufacturing methods thereof
CN103063883A (zh) * 2011-10-21 2013-04-24 东京毅力科创株式会社 探针卡用接触端子和探针卡

Also Published As

Publication number Publication date
SG11201704433TA (en) 2017-07-28
KR20170107465A (ko) 2017-09-25
KR20220153661A (ko) 2022-11-18
JP2018501490A (ja) 2018-01-18
WO2016107729A1 (en) 2016-07-07
JP6759213B2 (ja) 2020-09-23
CN107257928A (zh) 2017-10-17
EP3241028A1 (en) 2017-11-08
EP3241028B1 (en) 2020-02-05
KR102542154B1 (ko) 2023-06-13
US11131690B2 (en) 2021-09-28
US20170307657A1 (en) 2017-10-26
TW201629493A (zh) 2016-08-16
CN107257928B (zh) 2020-12-01
PH12017501220A1 (en) 2018-01-08
PH12017501220B1 (en) 2020-11-18
KR102502965B1 (ko) 2023-02-23

Similar Documents

Publication Publication Date Title
TWI679425B (zh) 用於測試頭之接觸式探針
US20170122980A1 (en) Contact probe for a testing head and corresponding manufacturing method
TWI679426B (zh) 微機電系統探針、製備其的方法以及使用微機電系統探針的測試裝置
TWI704352B (zh) 測試頭之接觸探針
KR102015798B1 (ko) 검사장치용 프로브
WO2018190194A1 (ja) 電気的接続装置
JP6872960B2 (ja) 電気的接続装置
JP2014112046A (ja) プローブ、プローブ組立体及びプローブカード
JP2012173263A (ja) 電気的接触子及び電気的接触子ユニット
TWI642940B (zh) 探針組件及其探針結構
TWI623751B (zh) 探針裝置及其矩形探針
KR101064852B1 (ko) 프로브 카드용 니들
JP4624372B2 (ja) 多層電気プローブ
TW202328690A (zh) 導電接觸探針以及具有其之測試元件
KR101018490B1 (ko) 프로브 카드용 니들
WO2024232152A1 (ja) プローブおよび電気的接続装置
ITMI20110896A1 (it) Sonda di contattatura per testa di misura