JP2018134710A - 基板の研磨装置および研磨方法 - Google Patents

基板の研磨装置および研磨方法 Download PDF

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Publication number
JP2018134710A
JP2018134710A JP2017031243A JP2017031243A JP2018134710A JP 2018134710 A JP2018134710 A JP 2018134710A JP 2017031243 A JP2017031243 A JP 2017031243A JP 2017031243 A JP2017031243 A JP 2017031243A JP 2018134710 A JP2018134710 A JP 2018134710A
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JP
Japan
Prior art keywords
polishing
substrate
polishing pad
drive mechanism
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017031243A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018134710A5 (enExample
Inventor
安田　穂積
Hozumi Yasuda
穂積 安田
小畠　厳貴
Itsuki Obata
厳貴 小畠
高橋　信行
Nobuyuki Takahashi
信行 高橋
卓 作川
Suguru Sakugawa
卓 作川
暢行 ▲高▼田
暢行 ▲高▼田
Nobuyuki Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2017031243A priority Critical patent/JP2018134710A/ja
Priority to TW107104944A priority patent/TW201900338A/zh
Priority to CN201810151773.8A priority patent/CN108453618A/zh
Priority to KR1020180019296A priority patent/KR20180097136A/ko
Priority to US15/900,140 priority patent/US20180236630A1/en
Priority to SG10201801373RA priority patent/SG10201801373RA/en
Publication of JP2018134710A publication Critical patent/JP2018134710A/ja
Publication of JP2018134710A5 publication Critical patent/JP2018134710A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/12—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving a contact wheel or roller pressing the belt against the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0084—Other grinding machines or devices the grinding wheel support being angularly adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP2017031243A 2017-02-22 2017-02-22 基板の研磨装置および研磨方法 Pending JP2018134710A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2017031243A JP2018134710A (ja) 2017-02-22 2017-02-22 基板の研磨装置および研磨方法
TW107104944A TW201900338A (zh) 2017-02-22 2018-02-12 基板的研磨裝置和基板處理系統
CN201810151773.8A CN108453618A (zh) 2017-02-22 2018-02-14 基板的研磨装置和基板的处理系统
KR1020180019296A KR20180097136A (ko) 2017-02-22 2018-02-19 기판의 연마 장치 및 연마 방법
US15/900,140 US20180236630A1 (en) 2017-02-22 2018-02-20 Substrate polisher and polishing method
SG10201801373RA SG10201801373RA (en) 2017-02-22 2018-02-20 Substrate polisher and polishing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017031243A JP2018134710A (ja) 2017-02-22 2017-02-22 基板の研磨装置および研磨方法

Publications (2)

Publication Number Publication Date
JP2018134710A true JP2018134710A (ja) 2018-08-30
JP2018134710A5 JP2018134710A5 (enExample) 2020-01-09

Family

ID=63166818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017031243A Pending JP2018134710A (ja) 2017-02-22 2017-02-22 基板の研磨装置および研磨方法

Country Status (6)

Country Link
US (1) US20180236630A1 (enExample)
JP (1) JP2018134710A (enExample)
KR (1) KR20180097136A (enExample)
CN (1) CN108453618A (enExample)
SG (1) SG10201801373RA (enExample)
TW (1) TW201900338A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109227388A (zh) * 2018-09-19 2019-01-18 大连理工大学 一种环抛机盘面修整系统及其工作方法
KR20200087674A (ko) 2019-01-11 2020-07-21 가부시키가이샤 에바라 세이사꾸쇼 기판 처리 장치 및 기판 처리 장치에서 부분 연마되어야 할 영역을 특정하는 방법
JP2020151801A (ja) * 2019-03-19 2020-09-24 キオクシア株式会社 研磨装置及び研磨方法
JP2024509181A (ja) * 2021-03-05 2024-02-29 アプライド マテリアルズ インコーポレイテッド 位置特異的ウエハ研磨用のローラ
JP7789793B2 (ja) 2021-03-05 2025-12-22 アプライド マテリアルズ インコーポレイテッド 位置特異的ウエハ研磨用のローラ

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Publication number Priority date Publication date Assignee Title
JP6884015B2 (ja) * 2017-03-22 2021-06-09 株式会社荏原製作所 基板の研磨装置および研磨方法
US11235454B2 (en) * 2019-01-14 2022-02-01 Dynabrade, Inc. Spring loaded adjustable head
TWI771668B (zh) * 2019-04-18 2022-07-21 美商應用材料股份有限公司 Cmp期間基於溫度的原位邊緣不對稱校正
TWI826280B (zh) 2019-11-22 2023-12-11 美商應用材料股份有限公司 在拋光墊中使用溝槽的晶圓邊緣不對稱校正
JP7442314B2 (ja) * 2019-12-24 2024-03-04 東京エレクトロン株式会社 基板処理装置、および基板処理方法
JP7387471B2 (ja) * 2020-02-05 2023-11-28 株式会社荏原製作所 基板処理装置および基板処理方法
JP7341918B2 (ja) * 2020-02-06 2023-09-11 株式会社荏原製作所 基板処理装置および基板処理方法
CN111482891A (zh) * 2020-04-20 2020-08-04 北京烁科精微电子装备有限公司 一种化学机械平坦化设备
JP7530237B2 (ja) * 2020-08-17 2024-08-07 キオクシア株式会社 研磨装置および研磨方法
JP7733487B2 (ja) * 2021-07-07 2025-09-03 株式会社荏原製作所 研磨装置および研磨方法
JP7764215B2 (ja) * 2021-11-22 2025-11-05 株式会社ディスコ クリープフィード研削装置
CN114012605B (zh) * 2022-01-05 2022-05-17 杭州众硅电子科技有限公司 一种抛光垫修整装置
KR20250038724A (ko) * 2022-07-14 2025-03-19 어플라이드 머티어리얼스, 인코포레이티드 페이스-업 연마에서의 두께 모니터링
CN116460667B (zh) * 2022-12-30 2023-11-07 北京创思工贸有限公司 氟化钙光学零件的加工方法

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JPH0811042A (ja) * 1994-06-30 1996-01-16 Nippondenso Co Ltd 平面研削加工方法
JPH08108360A (ja) * 1994-10-11 1996-04-30 Fuji Photo Film Co Ltd ガラス基板の研磨装置
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US3943666A (en) * 1974-07-31 1976-03-16 Dysan Corporation Method and apparatus for burnishing flexible recording material
US4347689A (en) * 1980-10-20 1982-09-07 Verbatim Corporation Method for burnishing
JPS59173555U (ja) * 1984-01-17 1984-11-20 株式会社ノリタケカンパニーリミテド 研削砥石を傾斜させた研削装置に用いられる傾斜フランジ
US4958463A (en) * 1988-06-06 1990-09-25 United Technologies Corporation Optical surface quality improving arrangement
JPH033765A (ja) * 1989-05-29 1991-01-09 Sony Corp 剛性基板の表面処理方法
JPH04322964A (ja) * 1991-04-22 1992-11-12 Amada Washino Co Ltd 研削制御装置
JPH06170713A (ja) * 1992-12-03 1994-06-21 Matsuda Seiki:Kk フイルム研磨材を用いた平面研磨装置
JPH07308852A (ja) * 1994-05-16 1995-11-28 Noritake Co Ltd 疵取り用研削装置
JPH0811042A (ja) * 1994-06-30 1996-01-16 Nippondenso Co Ltd 平面研削加工方法
JPH0947947A (ja) * 1994-08-30 1997-02-18 Seiko Seiki Co Ltd 研削装置、並びに研削方法、並びに半導体装置及び半導体基板の製造方法
JPH08108360A (ja) * 1994-10-11 1996-04-30 Fuji Photo Film Co Ltd ガラス基板の研磨装置
JPH10329015A (ja) * 1997-03-24 1998-12-15 Canon Inc 研磨装置および研磨方法
JPH11285978A (ja) * 1998-04-03 1999-10-19 Ebara Corp 砥石の保持構造及び研磨装置
JP2000263408A (ja) * 1999-03-15 2000-09-26 Canon Inc 研磨方法及び光学素子
JP2001353659A (ja) * 2000-06-16 2001-12-25 Okamoto Machine Tool Works Ltd 研磨ウエハの研磨合否判定方法
JP2003282493A (ja) * 2001-08-14 2003-10-03 Sony Corp 研磨装置および研磨方法
US20040147205A1 (en) * 2003-01-10 2004-07-29 Golzarian Reza M. Surface planarization
JP2005177925A (ja) * 2003-12-19 2005-07-07 Olympus Corp 研磨加工方法
JP2006305636A (ja) * 2005-04-01 2006-11-09 Sanshin Co Ltd 板状部材表面傷修復装置
JP2009190109A (ja) * 2008-02-13 2009-08-27 Lasertec Corp 基板保持装置及び基板加工装置
JP2009255181A (ja) * 2008-04-11 2009-11-05 Nikon Corp 研磨装置
US20130130593A1 (en) * 2011-10-21 2013-05-23 Strasbaugh Systems and methods of processing substrates

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109227388A (zh) * 2018-09-19 2019-01-18 大连理工大学 一种环抛机盘面修整系统及其工作方法
KR20200087674A (ko) 2019-01-11 2020-07-21 가부시키가이샤 에바라 세이사꾸쇼 기판 처리 장치 및 기판 처리 장치에서 부분 연마되어야 할 영역을 특정하는 방법
JP2020110871A (ja) * 2019-01-11 2020-07-27 株式会社荏原製作所 基板処理装置および基板処理装置において部分研磨されるべき領域を特定する方法
JP7145084B2 (ja) 2019-01-11 2022-09-30 株式会社荏原製作所 基板処理装置および基板処理装置において部分研磨されるべき領域を特定する方法
JP2020151801A (ja) * 2019-03-19 2020-09-24 キオクシア株式会社 研磨装置及び研磨方法
CN111716253A (zh) * 2019-03-19 2020-09-29 东芝存储器株式会社 研磨装置及研磨方法
JP7317532B2 (ja) 2019-03-19 2023-07-31 キオクシア株式会社 研磨装置及び研磨方法
JP2024509181A (ja) * 2021-03-05 2024-02-29 アプライド マテリアルズ インコーポレイテッド 位置特異的ウエハ研磨用のローラ
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JP7789793B2 (ja) 2021-03-05 2025-12-22 アプライド マテリアルズ インコーポレイテッド 位置特異的ウエハ研磨用のローラ

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