JP2017212304A5 - - Google Patents
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- Publication number
- JP2017212304A5 JP2017212304A5 JP2016103716A JP2016103716A JP2017212304A5 JP 2017212304 A5 JP2017212304 A5 JP 2017212304A5 JP 2016103716 A JP2016103716 A JP 2016103716A JP 2016103716 A JP2016103716 A JP 2016103716A JP 2017212304 A5 JP2017212304 A5 JP 2017212304A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor region
- photoelectric conversion
- main surface
- conversion device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 133
- 238000006243 chemical reaction Methods 0.000 claims description 34
- 239000012535 impurity Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- 239000012212 insulator Substances 0.000 claims description 10
- 238000002955 isolation Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016103716A JP6711692B2 (ja) | 2016-05-24 | 2016-05-24 | 光電変換装置及び画像読み取り装置 |
| RU2017116607A RU2672765C2 (ru) | 2016-05-24 | 2017-05-12 | Устройство фотоэлектрического преобразования и устройство считывания изображения |
| TW106115855A TWI612652B (zh) | 2016-05-24 | 2017-05-12 | 光電轉換裝置及影像讀取裝置 |
| US15/599,140 US10103182B2 (en) | 2016-05-24 | 2017-05-18 | Photoelectric conversion apparatus and image reading apparatus |
| KR1020170063234A KR20170132679A (ko) | 2016-05-24 | 2017-05-23 | 광전 변환 장치 및 영상 판독 장치 |
| BR102017010780-9A BR102017010780A2 (pt) | 2016-05-24 | 2017-05-23 | Photoelectric conversion apparatus and image reading device |
| EP17172711.8A EP3249690B1 (en) | 2016-05-24 | 2017-05-24 | Photoelectric conversion apparatus and image reading apparatus |
| CN201710370871.6A CN107425029B (zh) | 2016-05-24 | 2017-05-24 | 光电转换装置和图像读取装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016103716A JP6711692B2 (ja) | 2016-05-24 | 2016-05-24 | 光電変換装置及び画像読み取り装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017212304A JP2017212304A (ja) | 2017-11-30 |
| JP2017212304A5 true JP2017212304A5 (https=) | 2019-06-13 |
| JP6711692B2 JP6711692B2 (ja) | 2020-06-17 |
Family
ID=58992647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016103716A Active JP6711692B2 (ja) | 2016-05-24 | 2016-05-24 | 光電変換装置及び画像読み取り装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10103182B2 (https=) |
| EP (1) | EP3249690B1 (https=) |
| JP (1) | JP6711692B2 (https=) |
| KR (1) | KR20170132679A (https=) |
| CN (1) | CN107425029B (https=) |
| BR (1) | BR102017010780A2 (https=) |
| RU (1) | RU2672765C2 (https=) |
| TW (1) | TWI612652B (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7157555B2 (ja) * | 2018-05-24 | 2022-10-20 | キヤノン株式会社 | 画像形成装置 |
| KR102889667B1 (ko) | 2021-02-26 | 2025-11-21 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 |
| JP2026002625A (ja) * | 2024-06-21 | 2026-01-08 | キヤノン株式会社 | 発光装置、表示装置、光電変換装置、電子機器、照明装置、移動体、および、発光装置の製造方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6472557A (en) * | 1987-09-11 | 1989-03-17 | Seiko Instr & Electronics | Image sensor |
| JP3311564B2 (ja) | 1995-11-29 | 2002-08-05 | 三洋電機株式会社 | 光半導体装置 |
| US6815791B1 (en) * | 1997-02-10 | 2004-11-09 | Fillfactory | Buried, fully depletable, high fill factor photodiodes |
| US6590242B1 (en) | 1999-02-25 | 2003-07-08 | Canon Kabushiki Kaisha | Light-receiving element and photoelectric conversion device |
| JP4241527B2 (ja) * | 1999-02-25 | 2009-03-18 | キヤノン株式会社 | 光電変換素子 |
| JP2001007380A (ja) | 1999-06-25 | 2001-01-12 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| TW494574B (en) * | 1999-12-01 | 2002-07-11 | Innotech Corp | Solid state imaging device, method of manufacturing the same, and solid state imaging system |
| JP2003249639A (ja) * | 2002-02-22 | 2003-09-05 | Sony Corp | 光電変換装置およびその製造方法ならびに固体撮像装置ならびにその製造方法 |
| JP4442157B2 (ja) * | 2003-08-20 | 2010-03-31 | ソニー株式会社 | 光電変換装置及び固体撮像装置 |
| JP4418720B2 (ja) * | 2003-11-21 | 2010-02-24 | キヤノン株式会社 | 放射線撮像装置及び方法、並びに放射線撮像システム |
| JP4873964B2 (ja) * | 2006-03-03 | 2012-02-08 | セイコーインスツル株式会社 | 光電変換装置およびイメージセンサ |
| US20070249138A1 (en) * | 2006-04-24 | 2007-10-25 | Micron Technology, Inc. | Buried dielectric slab structure for CMOS imager |
| JP2009218357A (ja) * | 2008-03-10 | 2009-09-24 | Panasonic Corp | 固体撮像素子 |
| JP5283965B2 (ja) * | 2008-05-09 | 2013-09-04 | キヤノン株式会社 | 光電変換装置及びそれを用いた撮像システム |
| JP5406537B2 (ja) * | 2009-01-13 | 2014-02-05 | キヤノン株式会社 | 光電変換装置、撮像システム、及び光電変換装置の製造方法 |
| JP2011124522A (ja) * | 2009-12-14 | 2011-06-23 | Canon Inc | 光電変換装置 |
| JP2012019056A (ja) * | 2010-07-07 | 2012-01-26 | Canon Inc | 固体撮像装置及び撮像システム |
| TWI621184B (zh) * | 2010-08-16 | 2018-04-11 | 半導體能源研究所股份有限公司 | 半導體裝置之製造方法 |
| JP5888985B2 (ja) * | 2011-02-09 | 2016-03-22 | キヤノン株式会社 | 光電変換素子、およびこれを用いた光電変換装置、撮像システム |
| JP2013021014A (ja) | 2011-07-07 | 2013-01-31 | Canon Inc | エネルギー線検出装置の製造方法 |
| TWI467751B (zh) * | 2011-12-12 | 2015-01-01 | Sony Corp | A solid-state imaging device, a driving method of a solid-state imaging device, and an electronic device |
| US9082905B2 (en) * | 2012-02-15 | 2015-07-14 | Texas Instruments Incorporated | Photodiode employing surface grating to enhance sensitivity |
| JP2014049575A (ja) * | 2012-08-30 | 2014-03-17 | Sony Corp | 撮像素子、撮像装置、製造装置および方法 |
| JP6232914B2 (ja) * | 2013-10-16 | 2017-11-22 | セイコーエプソン株式会社 | 半導体装置およびその製造方法 |
| KR102174650B1 (ko) * | 2013-10-31 | 2020-11-05 | 삼성전자주식회사 | 이미지 센서 |
-
2016
- 2016-05-24 JP JP2016103716A patent/JP6711692B2/ja active Active
-
2017
- 2017-05-12 TW TW106115855A patent/TWI612652B/zh active
- 2017-05-12 RU RU2017116607A patent/RU2672765C2/ru active
- 2017-05-18 US US15/599,140 patent/US10103182B2/en active Active
- 2017-05-23 KR KR1020170063234A patent/KR20170132679A/ko not_active Abandoned
- 2017-05-23 BR BR102017010780-9A patent/BR102017010780A2/pt not_active IP Right Cessation
- 2017-05-24 CN CN201710370871.6A patent/CN107425029B/zh active Active
- 2017-05-24 EP EP17172711.8A patent/EP3249690B1/en active Active
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