JP2017168765A - 基板収納容器 - Google Patents
基板収納容器 Download PDFInfo
- Publication number
- JP2017168765A JP2017168765A JP2016054768A JP2016054768A JP2017168765A JP 2017168765 A JP2017168765 A JP 2017168765A JP 2016054768 A JP2016054768 A JP 2016054768A JP 2016054768 A JP2016054768 A JP 2016054768A JP 2017168765 A JP2017168765 A JP 2017168765A
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- JP
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- Prior art keywords
- contact
- contact portion
- wafer
- storage container
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 title claims abstract description 30
- 238000003860 storage Methods 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 8
- 230000003068 static effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 65
- 239000004696 Poly ether ether ketone Substances 0.000 description 4
- 239000002216 antistatic agent Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229920002530 polyetherether ketone Polymers 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67396—Closed carriers characterised by the presence of antistatic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
図1は、本発明に係る基板収納容器の一実施の形態であるウェーハ収納容器1を示す斜視図である。本実施形態のウェーハ収納容器1は、半導体ウェーハの製造プロセスやその後の半導体デバイスの製造プロセスなど、たとえばウェーハの洗浄・乾燥・検査といった半導体ウェーハを取り扱う工程において、複数のウェーハを収納して搬送するための、いわゆるカセットケースである。本実施形態のウェーハ収納容器1は、図1に示すように、複数枚のウェーハWの収納が可能な容器本体11と、容器本体11内に設けられたウェーハを保持するためのラック12と、容器本体11の開口部11aに着脱自在に装着可能で、この開口部11aを開閉する蓋体(不図示)とを備える。
11…容器本体
11A…上面
11B…底面
11C…前面
11D…背面
11E,11F…側面
12…ラック
12a,12b…ウェーハ保持体
11a…開口部
13…接触部分
14…非接触部分
15…把持部
Claims (6)
- 内部に基板が収納される絶縁性の容器であって、
前記容器以外の物体を前記容器の少なくとも一つの外面に接触させた場合に、当該一つの外面に、前記物体と接触する接触部分と前記物体と接触しない非接触部分とが形成され、
前記接触部分の面積が、前記接触部分の面積と前記非接触部分の面積との総和に対して40%以下とされている基板収納容器。 - 前記物体と接触する少なくとも一つの外面の表面抵抗値が、1×1011Ω以上である請求項1に記載の基板収納容器。
- 前記接触部分が凸部であり、前記非接触部分が前記凸部に対して相対的な凹部である請求項1又は2に記載の基板収納容器。
- 前記物体と接触する外面が、六面体又は円柱体の一つの外面である請求項1〜3のいずれか一項に記載の基板収納容器。
- 前記物体と接触する外面が、前記六面体又は前記円柱体の一つの外面に設けられた特定の接触面である請求項1〜3のいずれか一項に記載の基板収納容器。
- 前記基板は、半導体ウェーハ、フォトマスク、ガラス基板及びハードディスクを含む請求項1〜5のいずれか一項に記載の基板収納容器。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016054768A JP6772498B2 (ja) | 2016-03-18 | 2016-03-18 | 基板収納容器 |
KR1020187018924A KR102235404B1 (ko) | 2016-03-18 | 2016-12-14 | 기판 수납 용기 |
PCT/JP2016/087177 WO2017158972A1 (ja) | 2016-03-18 | 2016-12-14 | 基板収納容器 |
US16/084,369 US11011400B2 (en) | 2016-03-18 | 2016-12-14 | Substrate-storing container |
CN201680083743.7A CN108886009B (zh) | 2016-03-18 | 2016-12-14 | 基板收纳容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016054768A JP6772498B2 (ja) | 2016-03-18 | 2016-03-18 | 基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017168765A true JP2017168765A (ja) | 2017-09-21 |
JP6772498B2 JP6772498B2 (ja) | 2020-10-21 |
Family
ID=59851432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016054768A Active JP6772498B2 (ja) | 2016-03-18 | 2016-03-18 | 基板収納容器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11011400B2 (ja) |
JP (1) | JP6772498B2 (ja) |
KR (1) | KR102235404B1 (ja) |
CN (1) | CN108886009B (ja) |
WO (1) | WO2017158972A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020027530A1 (ko) | 2018-08-02 | 2020-02-06 | 주식회사 정석케미칼 | 자기장 발생 방법과 자기장을 이용한 차선 감지 방법, 이를 이용한 자동차 |
Citations (10)
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JPH02124890U (ja) * | 1989-03-22 | 1990-10-15 | ||
JPH057680U (ja) * | 1991-02-19 | 1993-02-02 | 新亜産業株式会社 | ウエーハ収納容器 |
JPH06216226A (ja) * | 1993-01-18 | 1994-08-05 | Oki Electric Ind Co Ltd | 半導体装置用緩衝部材 |
JP2000043954A (ja) * | 1998-07-30 | 2000-02-15 | Toppan Printing Co Ltd | 紙製断熱容器 |
JP2006044713A (ja) * | 2004-08-03 | 2006-02-16 | Yodogawa Hu-Tech Kk | ガラス基板搬送用ボックス |
JP2006315695A (ja) * | 2005-05-10 | 2006-11-24 | Shin Etsu Polymer Co Ltd | 固定キャリア |
JP2008270281A (ja) * | 2007-04-16 | 2008-11-06 | Shin Etsu Polymer Co Ltd | 基板収納容器及びそのハンドル |
JP2009124063A (ja) * | 2007-11-19 | 2009-06-04 | Shin Etsu Polymer Co Ltd | リテーナ及び基板収納容器 |
WO2011102318A1 (ja) * | 2010-02-19 | 2011-08-25 | 信越ポリマー株式会社 | 基板収納容器 |
JP2015520946A (ja) * | 2012-05-04 | 2015-07-23 | インテグリス・インコーポレーテッド | ウェーハを支える交換可能なバックストップ |
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US6875282B2 (en) * | 2001-05-17 | 2005-04-05 | Ebara Corporation | Substrate transport container |
CN100449682C (zh) | 2001-05-17 | 2009-01-07 | 株式会社荏原制作所 | 衬底传送容器 |
KR100927923B1 (ko) * | 2001-11-27 | 2009-11-19 | 엔테그리스, 아이엔씨. | 도어에 의해 구현되는 접지 경로를 포함하는 전방 개방웨이퍼 캐리어 |
JP2004179312A (ja) * | 2002-11-26 | 2004-06-24 | Shin Etsu Handotai Co Ltd | 密閉容器の取り扱い方法及びクリーン手袋 |
WO2006087894A1 (ja) | 2005-02-03 | 2006-08-24 | Shin-Etsu Polymer Co., Ltd. | 固定キャリア、固定キャリアの製造方法、固定キャリアの使用方法、及び基板収納容器 |
KR100772845B1 (ko) * | 2006-06-21 | 2007-11-02 | 삼성전자주식회사 | 반도체 디바이스 제조설비에서의 웨이퍼 수납장치 |
JP2008021744A (ja) | 2006-07-11 | 2008-01-31 | Shin Etsu Polymer Co Ltd | 半導体ウェーハ収納容器 |
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KR20090039779A (ko) * | 2006-07-17 | 2009-04-22 | 커먼웰쓰 사이언티픽 앤드 인더스트리얼 리서치 오가니제이션 | 태양열 에너지를 이용한 co₂포집 |
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JP5115388B2 (ja) | 2008-07-31 | 2013-01-09 | 株式会社Sumco | ウェーハ搬送容器 |
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2016
- 2016-03-18 JP JP2016054768A patent/JP6772498B2/ja active Active
- 2016-12-14 WO PCT/JP2016/087177 patent/WO2017158972A1/ja active Application Filing
- 2016-12-14 KR KR1020187018924A patent/KR102235404B1/ko active IP Right Grant
- 2016-12-14 CN CN201680083743.7A patent/CN108886009B/zh active Active
- 2016-12-14 US US16/084,369 patent/US11011400B2/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02124890U (ja) * | 1989-03-22 | 1990-10-15 | ||
JPH057680U (ja) * | 1991-02-19 | 1993-02-02 | 新亜産業株式会社 | ウエーハ収納容器 |
JPH06216226A (ja) * | 1993-01-18 | 1994-08-05 | Oki Electric Ind Co Ltd | 半導体装置用緩衝部材 |
JP2000043954A (ja) * | 1998-07-30 | 2000-02-15 | Toppan Printing Co Ltd | 紙製断熱容器 |
JP2006044713A (ja) * | 2004-08-03 | 2006-02-16 | Yodogawa Hu-Tech Kk | ガラス基板搬送用ボックス |
JP2006315695A (ja) * | 2005-05-10 | 2006-11-24 | Shin Etsu Polymer Co Ltd | 固定キャリア |
JP2008270281A (ja) * | 2007-04-16 | 2008-11-06 | Shin Etsu Polymer Co Ltd | 基板収納容器及びそのハンドル |
JP2009124063A (ja) * | 2007-11-19 | 2009-06-04 | Shin Etsu Polymer Co Ltd | リテーナ及び基板収納容器 |
WO2011102318A1 (ja) * | 2010-02-19 | 2011-08-25 | 信越ポリマー株式会社 | 基板収納容器 |
JP2015520946A (ja) * | 2012-05-04 | 2015-07-23 | インテグリス・インコーポレーテッド | ウェーハを支える交換可能なバックストップ |
Also Published As
Publication number | Publication date |
---|---|
US11011400B2 (en) | 2021-05-18 |
KR20180090329A (ko) | 2018-08-10 |
US20190080946A1 (en) | 2019-03-14 |
WO2017158972A1 (ja) | 2017-09-21 |
KR102235404B1 (ko) | 2021-04-01 |
JP6772498B2 (ja) | 2020-10-21 |
CN108886009B (zh) | 2023-07-07 |
CN108886009A (zh) | 2018-11-23 |
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