JP2016506081A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016506081A5 JP2016506081A5 JP2015550412A JP2015550412A JP2016506081A5 JP 2016506081 A5 JP2016506081 A5 JP 2016506081A5 JP 2015550412 A JP2015550412 A JP 2015550412A JP 2015550412 A JP2015550412 A JP 2015550412A JP 2016506081 A5 JP2016506081 A5 JP 2016506081A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- transistor device
- jfet
- conductivity type
- microns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005684 electric field Effects 0.000 claims 5
- 230000005669 field effect Effects 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/730,133 | 2012-12-28 | ||
| US13/730,133 US9530844B2 (en) | 2012-12-28 | 2012-12-28 | Transistor structures having reduced electrical field at the gate oxide and methods for making same |
| PCT/US2013/073093 WO2014105372A1 (en) | 2012-12-28 | 2013-12-04 | Semiconductor devices having reduced electric field at a gate oxide layer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016506081A JP2016506081A (ja) | 2016-02-25 |
| JP2016506081A5 true JP2016506081A5 (enExample) | 2017-01-26 |
| JP6475635B2 JP6475635B2 (ja) | 2019-02-27 |
Family
ID=49841838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015550412A Active JP6475635B2 (ja) | 2012-12-28 | 2013-12-04 | ゲート酸化膜層において電界を低下させた半導体デバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9530844B2 (enExample) |
| EP (2) | EP2939271B1 (enExample) |
| JP (1) | JP6475635B2 (enExample) |
| KR (1) | KR101735230B1 (enExample) |
| CN (1) | CN105103297B (enExample) |
| WO (1) | WO2014105372A1 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10115815B2 (en) | 2012-12-28 | 2018-10-30 | Cree, Inc. | Transistor structures having a deep recessed P+ junction and methods for making same |
| US9530844B2 (en) | 2012-12-28 | 2016-12-27 | Cree, Inc. | Transistor structures having reduced electrical field at the gate oxide and methods for making same |
| WO2014125586A1 (ja) * | 2013-02-13 | 2014-08-21 | 富士電機株式会社 | 半導体装置 |
| US10062749B2 (en) | 2013-06-18 | 2018-08-28 | Monolith Semiconductor Inc. | High voltage semiconductor devices and methods of making the devices |
| US9685550B2 (en) | 2014-12-26 | 2017-06-20 | Fairchild Semiconductor Corporation | Silicon carbide (SiC) device with improved gate dielectric shielding |
| CN105023939A (zh) * | 2015-04-08 | 2015-11-04 | 四川大学 | 一种新型的栅下阱结构4H-SiCMOSFET器件 |
| CN107275393A (zh) * | 2016-04-08 | 2017-10-20 | 株洲中车时代电气股份有限公司 | 碳化硅mosfet器件及其制备方法 |
| US10600871B2 (en) * | 2016-05-23 | 2020-03-24 | General Electric Company | Electric field shielding in silicon carbide metal-oxide-semiconductor (MOS) device cells using body region extensions |
| JP6593294B2 (ja) * | 2016-09-28 | 2019-10-23 | トヨタ自動車株式会社 | 半導体装置 |
| US11489069B2 (en) | 2017-12-21 | 2022-11-01 | Wolfspeed, Inc. | Vertical semiconductor device with improved ruggedness |
| US10615274B2 (en) | 2017-12-21 | 2020-04-07 | Cree, Inc. | Vertical semiconductor device with improved ruggedness |
| JP6981890B2 (ja) * | 2018-01-29 | 2021-12-17 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| CN108831835A (zh) * | 2018-06-22 | 2018-11-16 | 重庆平伟实业股份有限公司 | 功率半导体器件的形成方法 |
| CN109065623B (zh) * | 2018-06-22 | 2021-03-02 | 中国电子科技集团公司第五十五研究所 | 一种碳化硅金属氧化物半导体场效应晶体管及其制造方法 |
| CN110718452B (zh) | 2018-07-12 | 2025-04-08 | 创能动力科技有限公司 | 碳化硅器件及其制造方法 |
| US10818662B2 (en) * | 2018-09-19 | 2020-10-27 | Alpha And Omega Semiconductor (Cayman) Ltd. | Silicon carbide MOSFET with source ballasting |
| WO2021038787A1 (ja) * | 2019-08-29 | 2021-03-04 | 三菱電機株式会社 | 炭化珪素半導体装置、電力変換装置および炭化珪素半導体装置の製造方法 |
| US11728422B2 (en) * | 2019-11-14 | 2023-08-15 | Stmicroelectronics S.R.L. | Power MOSFET device having improved safe-operating area and on resistance, manufacturing process thereof and operating method thereof |
| CN110676173B (zh) * | 2019-12-03 | 2020-03-17 | 上海瞻芯电子科技有限公司 | 半导体器件结构及其形成方法 |
| CN113130647B (zh) * | 2019-12-30 | 2023-01-13 | 比亚迪半导体股份有限公司 | 碳化硅器件及其制备方法和半导体器件 |
| CN113140633B (zh) * | 2020-01-17 | 2022-05-24 | 张清纯 | 一种半导体器件及其制造方法 |
| IT202000015076A1 (it) | 2020-06-23 | 2021-12-23 | St Microelectronics Srl | Dispositivo elettronico in 4h-sic con prestazioni di corto circuito migliorate, e relativo metodo di fabbricazione |
| CN113838936B (zh) | 2020-06-23 | 2025-10-17 | 意法半导体股份有限公司 | 具有改善短路性能的4H-SiC电子器件及其制造方法 |
| KR102777182B1 (ko) * | 2020-07-24 | 2025-03-10 | 울프스피드, 인크. | 견고성이 향상된 수직형 sic 반도체 디바이스 |
| CN111933710B (zh) * | 2020-08-03 | 2023-04-07 | 株洲中车时代半导体有限公司 | 碳化硅器件的元胞结构、其制备方法及碳化硅器件 |
| EP4009375B1 (en) * | 2020-12-03 | 2024-03-06 | Hitachi Energy Ltd | Power semiconductor device and a method for producing a power semiconductor device |
| EP4064362A1 (en) * | 2021-03-22 | 2022-09-28 | Hitachi Energy Switzerland AG | Power semiconductor device |
| US11830943B2 (en) | 2021-07-26 | 2023-11-28 | Analog Power Conversion LLC | RF SiC MOSFET with recessed gate dielectric |
| CN113707722B (zh) * | 2021-10-26 | 2022-02-18 | 北京世纪金光半导体有限公司 | 基于自对准的半导体器件及其制作方法 |
| CN114023809B (zh) * | 2021-11-10 | 2025-03-21 | 飞锃半导体(上海)有限公司 | 半导体结构及其形成方法 |
| CN114464671B (zh) * | 2022-04-11 | 2022-07-01 | 江苏长晶浦联功率半导体有限公司 | 一种改善栅电容特性的超结mosfet |
| TWI818652B (zh) * | 2022-07-29 | 2023-10-11 | 鴻海精密工業股份有限公司 | 半導體裝置的製造方法 |
| EP4531109A1 (en) | 2023-09-29 | 2025-04-02 | Nexperia B.V. | Semiconductor device and method of manufacturing semiconductor device |
Family Cites Families (64)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DK157272C (da) | 1978-10-13 | 1990-04-30 | Int Rectifier Corp | Mosfet med hoej effekt |
| JPS60196975A (ja) | 1984-08-24 | 1985-10-05 | Nissan Motor Co Ltd | 縦型mosfet |
| US4803533A (en) | 1986-09-30 | 1989-02-07 | General Electric Company | IGT and MOSFET devices having reduced channel width |
| DE69029180T2 (de) * | 1989-08-30 | 1997-05-22 | Siliconix Inc | Transistor mit Spannungsbegrenzungsanordnung |
| JPH03142912A (ja) | 1989-10-30 | 1991-06-18 | Elna Co Ltd | 電解コンデンサ用アルミニウム箔のエッチング方法 |
| IT1247293B (it) | 1990-05-09 | 1994-12-12 | Int Rectifier Corp | Dispositivo transistore di potenza presentante una regione ultra-profonda, a maggior concentrazione |
| JPH04239718A (ja) | 1991-01-23 | 1992-08-27 | Toshiba Mach Co Ltd | 電子ビーム描画装置 |
| JP2750986B2 (ja) | 1992-10-27 | 1998-05-18 | 尚茂 玉蟲 | 分割ゲート型カソード短絡構造を有する絶縁ゲート静電誘導サイリスタ |
| JPH0778978A (ja) | 1993-09-07 | 1995-03-20 | Toyota Central Res & Dev Lab Inc | 縦型mos電界効果トランジスタ |
| US5474946A (en) | 1995-02-17 | 1995-12-12 | International Rectifier Corporation | Reduced mask process for manufacture of MOS gated devices |
| JP3272242B2 (ja) * | 1995-06-09 | 2002-04-08 | 三洋電機株式会社 | 半導体装置 |
| JP3385938B2 (ja) | 1997-03-05 | 2003-03-10 | 株式会社デンソー | 炭化珪素半導体装置及びその製造方法 |
| US6573534B1 (en) * | 1995-09-06 | 2003-06-03 | Denso Corporation | Silicon carbide semiconductor device |
| JP4075150B2 (ja) | 1998-03-20 | 2008-04-16 | 株式会社デンソー | 炭化珪素半導体装置及びその製造方法 |
| JP4047384B2 (ja) * | 1996-02-05 | 2008-02-13 | シーメンス アクチエンゲゼルシヤフト | 電界効果により制御可能の半導体デバイス |
| US6084268A (en) * | 1996-03-05 | 2000-07-04 | Semiconductor Components Industries, Llc | Power MOSFET device having low on-resistance and method |
| US5844259A (en) * | 1996-03-19 | 1998-12-01 | International Rectifier Corporation | Vertical conduction MOS controlled thyristor with increased IGBT area and current limiting |
| EP0865085A1 (en) * | 1997-03-11 | 1998-09-16 | STMicroelectronics S.r.l. | Insulated gate bipolar transistor with high dynamic ruggedness |
| US6031265A (en) | 1997-10-16 | 2000-02-29 | Magepower Semiconductor Corp. | Enhancing DMOS device ruggedness by reducing transistor parasitic resistance and by inducing breakdown near gate runners and termination area |
| DE19830332C2 (de) * | 1998-07-07 | 2003-04-17 | Infineon Technologies Ag | Vertikales Halbleiterbauelement mit reduziertem elektrischem Oberflächenfeld |
| JP2001077354A (ja) * | 1999-08-31 | 2001-03-23 | Miyazaki Oki Electric Co Ltd | 縦型絶縁ゲート半導体装置 |
| US6504176B2 (en) | 2000-04-06 | 2003-01-07 | Matshushita Electric Industrial Co., Ltd. | Field effect transistor and method of manufacturing the same |
| JP4029595B2 (ja) * | 2001-10-15 | 2008-01-09 | 株式会社デンソー | SiC半導体装置の製造方法 |
| JP4537646B2 (ja) * | 2002-06-14 | 2010-09-01 | 株式会社東芝 | 半導体装置 |
| US6940110B2 (en) * | 2002-11-29 | 2005-09-06 | Matsushita Electric Industrial Co., Ltd. | SiC-MISFET and method for fabricating the same |
| JP3637052B2 (ja) * | 2002-11-29 | 2005-04-06 | 松下電器産業株式会社 | SiC−MISFET及びその製造方法 |
| US7221010B2 (en) | 2002-12-20 | 2007-05-22 | Cree, Inc. | Vertical JFET limited silicon carbide power metal-oxide semiconductor field effect transistors |
| JP4049095B2 (ja) | 2003-12-25 | 2008-02-20 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
| JP4237086B2 (ja) | 2004-03-22 | 2009-03-11 | 関西電力株式会社 | 電圧制御型半導体装置 |
| US7661110B2 (en) | 2004-10-29 | 2010-02-09 | At&T Intellectual Property I, L.P. | Transaction tool management integration with change management |
| US7569900B2 (en) | 2004-11-16 | 2009-08-04 | Kabushiki Kaisha Toshiba | Silicon carbide high breakdown voltage semiconductor device |
| US7439583B2 (en) * | 2004-12-27 | 2008-10-21 | Third Dimension (3D) Semiconductor, Inc. | Tungsten plug drain extension |
| JP4930894B2 (ja) | 2005-05-13 | 2012-05-16 | サンケン電気株式会社 | 半導体装置 |
| US7504676B2 (en) * | 2006-05-31 | 2009-03-17 | Alpha & Omega Semiconductor, Ltd. | Planar split-gate high-performance MOSFET structure and manufacturing method |
| DE102006036347B4 (de) | 2006-08-03 | 2012-01-12 | Infineon Technologies Austria Ag | Halbleiterbauelement mit einer platzsparenden Randstruktur |
| US20080157117A1 (en) | 2006-12-28 | 2008-07-03 | Mcnutt Ty R | Insulated gate bipolar transistor with enhanced conductivity modulation |
| US8835987B2 (en) | 2007-02-27 | 2014-09-16 | Cree, Inc. | Insulated gate bipolar transistors including current suppressing layers |
| US8866150B2 (en) | 2007-05-31 | 2014-10-21 | Cree, Inc. | Silicon carbide power devices including P-type epitaxial layers and direct ohmic contacts |
| CN101569015B (zh) * | 2007-10-15 | 2011-01-05 | 松下电器产业株式会社 | 半导体装置及其制造方法 |
| US7989882B2 (en) | 2007-12-07 | 2011-08-02 | Cree, Inc. | Transistor with A-face conductive channel and trench protecting well region |
| US7795691B2 (en) | 2008-01-25 | 2010-09-14 | Cree, Inc. | Semiconductor transistor with P type re-grown channel layer |
| US8008747B2 (en) | 2008-02-28 | 2011-08-30 | Alpha & Omega Semiconductor, Ltd. | High power and high temperature semiconductor power devices protected by non-uniform ballasted sources |
| US8232558B2 (en) | 2008-05-21 | 2012-07-31 | Cree, Inc. | Junction barrier Schottky diodes with current surge capability |
| US7816229B2 (en) | 2008-09-30 | 2010-10-19 | Infineon Technologies Austria Ag | Semiconductor device with channel stop trench and method |
| US7829402B2 (en) | 2009-02-10 | 2010-11-09 | General Electric Company | MOSFET devices and methods of making |
| US8629509B2 (en) | 2009-06-02 | 2014-01-14 | Cree, Inc. | High voltage insulated gate bipolar transistors with minority carrier diverter |
| US8829614B2 (en) | 2009-08-31 | 2014-09-09 | Alpha And Omega Semiconductor Incorporated | Integrated Schottky diode in high voltage semiconductor device |
| JP5433352B2 (ja) * | 2009-09-09 | 2014-03-05 | 株式会社東芝 | 半導体装置の製造方法 |
| US8563986B2 (en) | 2009-11-03 | 2013-10-22 | Cree, Inc. | Power semiconductor devices having selectively doped JFET regions and related methods of forming such devices |
| JP2011204711A (ja) * | 2010-03-24 | 2011-10-13 | Toshiba Corp | 半導体装置およびその製造方法 |
| JP2011258635A (ja) * | 2010-06-07 | 2011-12-22 | Mitsubishi Electric Corp | 半導体装置 |
| IT1401754B1 (it) | 2010-08-30 | 2013-08-02 | St Microelectronics Srl | Dispositivo elettronico integrato e relativo metodo di fabbricazione. |
| US9472405B2 (en) | 2011-02-02 | 2016-10-18 | Rohm Co., Ltd. | Semiconductor power device and method for producing same |
| JP5687128B2 (ja) | 2011-05-06 | 2015-03-18 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JP2012243966A (ja) | 2011-05-20 | 2012-12-10 | Sumitomo Electric Ind Ltd | 半導体装置 |
| JP5869291B2 (ja) | 2011-10-14 | 2016-02-24 | 富士電機株式会社 | 半導体装置 |
| JP2014022708A (ja) | 2012-07-17 | 2014-02-03 | Yoshitaka Sugawara | 半導体装置とその動作方法 |
| CN104221152B (zh) | 2012-07-18 | 2017-10-10 | 富士电机株式会社 | 半导体装置以及半导体装置的制造方法 |
| CN102832248A (zh) * | 2012-09-10 | 2012-12-19 | 西安电子科技大学 | 基于半超结的碳化硅mosfet及制作方法 |
| US9530844B2 (en) | 2012-12-28 | 2016-12-27 | Cree, Inc. | Transistor structures having reduced electrical field at the gate oxide and methods for making same |
| US10115815B2 (en) | 2012-12-28 | 2018-10-30 | Cree, Inc. | Transistor structures having a deep recessed P+ junction and methods for making same |
| JP6219045B2 (ja) | 2013-03-22 | 2017-10-25 | 株式会社東芝 | 半導体装置およびその製造方法 |
| US20150263145A1 (en) | 2014-03-14 | 2015-09-17 | Cree, Inc. | Igbt structure for wide band-gap semiconductor materials |
| US20150311325A1 (en) | 2014-04-23 | 2015-10-29 | Cree, Inc. | Igbt structure on sic for high performance |
-
2012
- 2012-12-28 US US13/730,133 patent/US9530844B2/en active Active
-
2013
- 2013-12-04 CN CN201380068265.9A patent/CN105103297B/zh active Active
- 2013-12-04 EP EP13811320.4A patent/EP2939271B1/en active Active
- 2013-12-04 JP JP2015550412A patent/JP6475635B2/ja active Active
- 2013-12-04 EP EP21156949.6A patent/EP3840056A1/en active Pending
- 2013-12-04 KR KR1020157020113A patent/KR101735230B1/ko active Active
- 2013-12-04 WO PCT/US2013/073093 patent/WO2014105372A1/en not_active Ceased
-
2016
- 2016-11-07 US US15/344,735 patent/US10840367B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2016506081A5 (enExample) | ||
| JP5641131B2 (ja) | 半導体装置およびその製造方法 | |
| JP5864784B2 (ja) | 半導体装置及び半導体装置の製造方法 | |
| EP2755237A3 (en) | Trench MOS gate semiconductor device and method of fabricating the same | |
| JP2014225713A5 (enExample) | ||
| US20110303925A1 (en) | Semiconductor device and the method of manufacturing the same | |
| JP2013115433A5 (ja) | 半導体素子 | |
| JP2013165132A5 (enExample) | ||
| JP2014143419A5 (enExample) | ||
| JP7139678B2 (ja) | 炭化ケイ素半導体装置 | |
| JP2016529720A5 (enExample) | ||
| GB2569497A (en) | A power MOSFET with an integrated Schottky diode | |
| JP2014033200A5 (enExample) | ||
| EP2688104A4 (en) | SEMICONDUCTOR COMPONENT | |
| JP2012033731A5 (enExample) | ||
| WO2015141212A1 (ja) | 半導体装置 | |
| JP2019009308A5 (enExample) | ||
| JP2017508300A5 (enExample) | ||
| GB2577417A (en) | Super long channel device within VFET architecture | |
| US20170243971A1 (en) | Semiconductor device | |
| WO2012088774A1 (zh) | 一种soi型p-ldmos | |
| JP2010267762A5 (enExample) | ||
| JP2016528729A5 (enExample) | ||
| JP2016225343A (ja) | 半導体装置 | |
| JP6169985B2 (ja) | 半導体装置 |