JP2015526900A - 電流リミッタが組み込まれた半導体電子部品 - Google Patents
電流リミッタが組み込まれた半導体電子部品 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 39
- 239000000463 material Substances 0.000 claims description 51
- 230000015556 catabolic process Effects 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 108091006146 Channels Proteins 0.000 description 39
- 239000011810 insulating material Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- -1 k> 4 Chemical compound 0.000 description 3
- 230000004083 survival effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 102100032047 Alsin Human genes 0.000 description 1
- 101710187109 Alsin Proteins 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 1
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
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Abstract
Description
Claims (36)
- 第1の降伏電圧、第1のオン抵抗及び第1の最大電流レベルを有し、ソース電極、ゲート電極及びドレイン電極を備えるデプレッションモードトランジスタと、
第2の降伏電圧、第2のオン抵抗及び第2の最大電流レベルを有し、ソース電極、ゲート電極及びドレイン電極を備えるエンハンスメントモードトランジスタとを備え、
前記デプレッションモードトランジスタのソース電極は、前記エンハンスメントモードトランジスタのドレイン電極に電気的に接続され、前記デプレッションモードトランジスタのゲート電極は、前記エンハンスメントモードトランジスタのソース電極に電気的にされ、
前記第2のオン抵抗は、前記第1のオン抵抗より小さく、前記第2の最大電流レベルは、前記第1の最大電流レベルより低い電子部品。 - 前記第2の降伏電圧は、前記第1の降伏電圧より低い請求項1記載の電子部品。
- 前記デプレッションモードトランジスタは、高電圧デバイスであり、前記エンハンスメントモードトランジスタは、低電圧デバイスである請求項2記載の電子部品。
- 前記電子部品は、単一の高電圧エンハンスメントモードトランジスタと実質的に同様に機能するように構成されている請求項2記載の電子部品。
- 前記電子部品の最大電流レベルは、前記エンハンスメントモードトランジスタの最大電流レベルと略々同じ又はこれより低い請求項1記載の電子部品。
- 前記エンハンスメントモードトランジスタのオン抵抗は、前記デプレッションモードトランジスタのオン抵抗の半分未満である請求項1記載の電子部品。
- 前記エンハンスメントモードトランジスタの最大電流レベルは、前記デプレッションモードトランジスタの最大電流レベルの半分未満である請求項6記載の電子部品。
- 前記エンハンスメントモードトランジスタの最大電流レベルは、約35A以下である請求項1記載の電子部品。
- 前記デプレッションモードトランジスタの最大電流レベルは、約60A以上である請求項8記載の電子部品。
- 前記エンハンスメントモードトランジスタは、シリコンデバイスである請求項1記載の電子部品。
- 前記デプレッションモードトランジスタは、III−Nデバイスである請求項1記載の電子部品。
- 前記エンハンスメントモードトランジスタは、シリコンデバイス又はIII−Nデバイスである請求項11記載の電子部品。
- 前記デプレッションモードトランジスタのゲート電極は、前記エンハンスメントモードトランジスタのソース電極に電気的に接続されている請求項1記載の電子部品。
- 前記エンハンスメントモードトランジスタは、半導体材料を更に備え、前記半導体材料と前記エンハンスメントモードトランジスタのゲートとの間にチャネル空乏誘電体を備える請求項1記載の電子部品。
- 第1の降伏電圧及び第1の最大電流レベルを有し、ソース電極、ゲート電極、ドレイン電極、半導体材料層及び前記半導体層内のチャネルを備えるデプレッションモードトランジスタと、
第2の降伏電圧及び第2の最大電流レベルを有し、ソース電極、ゲート電極及びドレイン電極を備えるエンハンスメントモードトランジスタとを備え、
前記デプレッションモードトランジスタのソース電極は、前記エンハンスメントモードトランジスタのドレイン電極に電気的に接続され、前記デプレッションモードトランジスタのゲート電極は、前記エンハンスメントモードトランジスタのソース電極に電気的にされ、
前記デプレッションモードトランジスタのソース電極に対して、前記デプレッションモードトランジスタのゲート電極に0Vが印加されたとき、前記デプレッションモードトランジスタのゲート領域におけるチャネルの伝導率又は荷電密度が、前記デプレッションモードトランジスタのアクセス領域におけるチャネルの伝導率又は荷電密度より小さい電子部品。 - 前記第1の最大電流レベルは、前記第2の最大電流レベルより低い請求項15記載の電子部品。
- 前記第2の降伏電圧は、前記第1の降伏電圧より小さい請求項16記載の電子部品。
- 前記デプレッションモードトランジスタは、高電圧デバイスであり、前記エンハンスメントモードトランジスタは、低電圧デバイスである請求項17記載の電子部品。
- 前記電子部品は、単一の高電圧エンハンスメントモードトランジスタと実質的に同様に機能するように構成されている請求項17記載の電子部品。
- 前記デプレッションモードトランジスタは、III−Nデバイスである請求項15記載の電子部品。
- 前記エンハンスメントモードトランジスタは、シリコンデバイス又はIII−Nデバイスである請求項19記載の電子部品。
- 前記デプレッションモードトランジスタの半導体材料層は、前記ゲート領域において凹んでいる請求項15記載の電子部品。
- 前記デプレッションモードトランジスタのゲート電極は、前記エンハンスメントモードトランジスタのソース電極に電気的に接続されている請求項15記載の電子部品。
- 第1の降伏電圧及び第1の最大電流レベルを有し、ソース電極、ゲート電極、ドレイン電極、前記ソース電極とドレイン電極との間のゲート領域及び前記ゲート領域の両側の複数のアクセス領域を含む半導体材料層、並びに前記半導体材料層内のチャネルを備えるデプレッションモードトランジスタと、
第2の降伏電圧及び第2の最大電流レベルを有し、ソース電極、ゲート電極及びドレイン電極を備えるエンハンスメントモードトランジスタとを備え、
前記デプレッションモードトランジスタのソース電極は、前記エンハンスメントモードトランジスタのドレイン電極に電気的に接続され、前記デプレッションモードトランジスタのゲート電極は、前記エンハンスメントモードトランジスタのソース電極に電気的にされ、
前記デプレッションモードトランジスタは、前記ゲート領域内に1つ以上の絶縁領域を備え、前記1つ以上の絶縁領域は、前記デプレッションモードトランジスタのアクセス抵抗を実質的に増加させることなく、前記1つ以上の絶縁領域を欠いている同様のデバイスに比べて前記第1の最大電流レベルを低下させるように構成され、
前記第1の最大電流レベルは、前記第2の最大電流レベルより低い電子部品。 - 前記第2の降伏電圧は、前記第1の降伏電圧より低い請求項24記載の電子部品。
- 前記デプレッションモードトランジスタは、高電圧デバイスであり、前記エンハンスメントモードトランジスタは、低電圧デバイスである請求項24記載の電子部品。
- 前記電子部品は、単一の高電圧エンハンスメントモードトランジスタと実質的に同様に機能するように構成されている請求項24記載の電子部品。
- 前記デプレッションモードトランジスタは、III−Nデバイスである請求項24記載の電子部品。
- 前記エンハンスメントモードトランジスタは、シリコンデバイス又はIII−Nデバイスである請求項28記載の電子部品。
- 前記デプレッションモードトランジスタのゲート電極は、前記エンハンスメントモードトランジスタのソース電極に電気的に接続されている請求項24記載の電子部品。
- 前記1つ以上の絶縁領域は、ドーパントを含む請求項24記載の電子部品。
- 前記ドーパントは、Mg、Al及びFeからなるグループから選択される請求項30記載の電子部品。
- 前記1つ以上の絶縁領域は、前記チャネル内の遮蔽体を構成する請求項24記載の電子部品。
- 前記1つ以上の絶縁領域は、前記半導体材料層のゲート領域に形成された凹部を含む請求項24記載の電子部品。
- 前記凹部は、チャネルを介して形成されている請求項34記載の電子部品。
- 請求項24記載の電子部品を動作させる方法において、
前記エンハンスメントモードトランジスタのソース電極に対して前記エンハンスメントモードトランジスタのゲート電極に正電圧を印加し、前記エンハンスメントモードトランジスタのソース電極に対して前記デプレッションモードトランジスタのドレイン電極に実質的な正電圧を印加して、前記エンハンスメントモードトランジスタのソース電極と前記デプレッションモードトランジスタのドレイン電極との間に前記電子部品の最大電流レベルの電流を流し、前記電子部品の最大電流レベルが、前記第1の最大電流レベル以下である方法。
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US13/550,445 US8803246B2 (en) | 2012-07-16 | 2012-07-16 | Semiconductor electronic components with integrated current limiters |
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PCT/US2013/050722 WO2014014939A2 (en) | 2012-07-16 | 2013-07-16 | Semiconductor electronic components with integrated current limiters |
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US7965126B2 (en) | 2008-02-12 | 2011-06-21 | Transphorm Inc. | Bridge circuits and their components |
US8742460B2 (en) * | 2010-12-15 | 2014-06-03 | Transphorm Inc. | Transistors with isolation regions |
TWI508281B (zh) * | 2011-08-01 | 2015-11-11 | Murata Manufacturing Co | Field effect transistor |
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US20140299940A1 (en) | 2014-10-09 |
WO2014014939A2 (en) | 2014-01-23 |
US8803246B2 (en) | 2014-08-12 |
CN104737294A (zh) | 2015-06-24 |
US9171910B2 (en) | 2015-10-27 |
WO2014014939A3 (en) | 2014-03-13 |
US20160043078A1 (en) | 2016-02-11 |
US9443849B2 (en) | 2016-09-13 |
US20140015066A1 (en) | 2014-01-16 |
CN104737294B (zh) | 2017-05-31 |
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