JP2014111527A5 - - Google Patents

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JP2014111527A5
JP2014111527A5 JP2013243510A JP2013243510A JP2014111527A5 JP 2014111527 A5 JP2014111527 A5 JP 2014111527A5 JP 2013243510 A JP2013243510 A JP 2013243510A JP 2013243510 A JP2013243510 A JP 2013243510A JP 2014111527 A5 JP2014111527 A5 JP 2014111527A5
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group iii
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iii metal
wafer
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JP2013243510A 2012-11-26 2013-11-26 Ｉｉｉ族金属窒化物結晶およびその形成方法 Active JP6681133B2 (ja)

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US201261729975P 2012-11-26 2012-11-26
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JP2014111527A5 true JP2014111527A5 (enExample) 2017-01-26
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