JP2013527603A5 - - Google Patents
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- JP2013527603A5 JP2013527603A5 JP2013506145A JP2013506145A JP2013527603A5 JP 2013527603 A5 JP2013527603 A5 JP 2013527603A5 JP 2013506145 A JP2013506145 A JP 2013506145A JP 2013506145 A JP2013506145 A JP 2013506145A JP 2013527603 A5 JP2013527603 A5 JP 2013527603A5
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- JP
- Japan
- Prior art keywords
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002184 metal Substances 0.000 claims 41
- 239000004065 semiconductor Substances 0.000 claims 37
- 239000002019 doping agent Substances 0.000 claims 24
- 238000000034 method Methods 0.000 claims 14
- 238000002955 isolation Methods 0.000 claims 3
- 125000006850 spacer group Chemical group 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000007943 implant Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/763,287 | 2010-04-20 | ||
| US12/763,287 US8193602B2 (en) | 2010-04-20 | 2010-04-20 | Schottky diode with control gate for optimization of the on state resistance, the reverse leakage, and the reverse breakdown |
| PCT/US2011/026213 WO2011133247A2 (en) | 2010-04-20 | 2011-02-25 | Schottky diode |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013527603A JP2013527603A (ja) | 2013-06-27 |
| JP2013527603A5 true JP2013527603A5 (enExample) | 2014-04-10 |
| JP5893003B2 JP5893003B2 (ja) | 2016-03-23 |
Family
ID=44787623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013506145A Active JP5893003B2 (ja) | 2010-04-20 | 2011-02-25 | ショットキー・ダイオード |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8193602B2 (enExample) |
| JP (1) | JP5893003B2 (enExample) |
| CN (1) | CN102870222B (enExample) |
| TW (1) | TWI563671B (enExample) |
| WO (1) | WO2011133247A2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103456773B (zh) * | 2012-05-30 | 2016-03-16 | 中芯国际集成电路制造(上海)有限公司 | 肖特基二极管及其制造方法 |
| US10069023B2 (en) * | 2013-01-18 | 2018-09-04 | Texas Instruments Incorporated | Optical sensor with integrated pinhole |
| US12382736B2 (en) | 2021-10-01 | 2025-08-05 | Texas Instruments Incorporated | Wide angle optical angle sensor |
| KR102854105B1 (ko) * | 2024-04-24 | 2025-09-04 | 서울과학기술대학교 산학협력단 | 쇼트키 장벽 다이오드 및 이를 포함하는 반도체 장치 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60201666A (ja) * | 1984-03-27 | 1985-10-12 | Nec Corp | 半導体装置 |
| JP3058040B2 (ja) * | 1995-01-18 | 2000-07-04 | 株式会社村田製作所 | 半導体装置 |
| DE69636818T2 (de) | 1995-06-19 | 2007-11-08 | Interuniversitair Micro-Elektronica Centrum Vzw | Verfahren zur selbst-justierten Herstellung von implantierten Gebieten |
| US6784489B1 (en) * | 1997-03-28 | 2004-08-31 | Stmicroelectronics, Inc. | Method of operating a vertical DMOS transistor with schottky diode body structure |
| US6399413B1 (en) | 2000-04-18 | 2002-06-04 | Agere Systems Guardian Corp. | Self aligned gated Schottky diode guard ring structures |
| US20050139860A1 (en) * | 2003-10-22 | 2005-06-30 | Snyder John P. | Dynamic schottky barrier MOSFET device and method of manufacture |
| JP2005209710A (ja) * | 2004-01-20 | 2005-08-04 | Hitachi Ulsi Systems Co Ltd | 半導体集積回路装置の製造方法 |
| US7544557B2 (en) | 2004-12-15 | 2009-06-09 | Tower Semiconductor Ltd. | Gate defined Schottky diode |
| JP4695402B2 (ja) * | 2005-01-26 | 2011-06-08 | パナソニック株式会社 | ショットキーバリアダイオードの製造方法 |
| JP2006310555A (ja) * | 2005-04-28 | 2006-11-09 | Nec Electronics Corp | 半導体装置およびその製造方法 |
| JP2006319096A (ja) * | 2005-05-12 | 2006-11-24 | Renesas Technology Corp | ショットキーバリアダイオード |
| KR100763848B1 (ko) | 2006-07-05 | 2007-10-05 | 삼성전자주식회사 | 쇼트키 다이오드 및 그 제조 방법 |
| KR100780967B1 (ko) | 2006-12-07 | 2007-12-03 | 삼성전자주식회사 | 고전압용 쇼트키 다이오드 구조체 |
| US8168466B2 (en) * | 2007-06-01 | 2012-05-01 | Semiconductor Components Industries, Llc | Schottky diode and method therefor |
| GB2451116A (en) * | 2007-07-20 | 2009-01-21 | X Fab Uk Ltd | Polysilicon devices |
| JP5085241B2 (ja) * | 2007-09-06 | 2012-11-28 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| US8338906B2 (en) * | 2008-01-30 | 2012-12-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Schottky device |
| US8207559B2 (en) | 2008-07-14 | 2012-06-26 | Texas Instruments Incorporated | Schottky junction-field-effect-transistor (JFET) structures and methods of forming JFET structures |
-
2010
- 2010-04-20 US US12/763,287 patent/US8193602B2/en active Active
-
2011
- 2011-02-25 WO PCT/US2011/026213 patent/WO2011133247A2/en not_active Ceased
- 2011-02-25 JP JP2013506145A patent/JP5893003B2/ja active Active
- 2011-02-25 CN CN201180020229.6A patent/CN102870222B/zh active Active
- 2011-03-21 TW TW100109483A patent/TWI563671B/zh active
-
2012
- 2012-06-01 US US13/486,166 patent/US8728920B2/en active Active
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