JP2013219267A - パワーモジュール - Google Patents
パワーモジュール Download PDFInfo
- Publication number
- JP2013219267A JP2013219267A JP2012090004A JP2012090004A JP2013219267A JP 2013219267 A JP2013219267 A JP 2013219267A JP 2012090004 A JP2012090004 A JP 2012090004A JP 2012090004 A JP2012090004 A JP 2012090004A JP 2013219267 A JP2013219267 A JP 2013219267A
- Authority
- JP
- Japan
- Prior art keywords
- device chip
- power device
- electrode
- heat spreader
- dam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000679 solder Inorganic materials 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 239000000919 ceramic Substances 0.000 claims description 24
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 17
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 239000010949 copper Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 239000003822 epoxy resin Substances 0.000 claims description 7
- 229920000647 polyepoxide Polymers 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 238000005476 soldering Methods 0.000 abstract description 7
- 238000009413 insulation Methods 0.000 abstract description 2
- 229910052782 aluminium Inorganic materials 0.000 description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 20
- 230000006866 deterioration Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- 238000002474 experimental method Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000004382 potting Methods 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 229910000962 AlSiC Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/492—Bases or plates or solder therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/4005—Shape
- H01L2224/4009—Loop shape
- H01L2224/40095—Kinked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
- H01L2224/40139—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate with an intermediate bond, e.g. continuous strap daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/4901—Structure
- H01L2224/4903—Connectors having different sizes, e.g. different diameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73221—Strap and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73263—Layer and strap connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83399—Material
- H01L2224/834—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/83438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/83447—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/848—Bonding techniques
- H01L2224/84801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/171—Frame
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/183—Connection portion, e.g. seal
- H01L2924/18301—Connection portion, e.g. seal being an anchoring portion, i.e. mechanical interlocking between the encapsulation resin and another package part
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
Abstract
【解決手段】本発明に係るパワーモジュールは、外囲ケース1内部にパワーデバイスチップ5を配設し、パワーデバイスチップ5の電極を外囲ケース1と一体となった外部電極に接続したパワーモジュールであって、外囲ケース1内部に固定されたヒートスプレッダー3と、ヒートスプレッダー3の上にはんだ接合されたパワーデバイスチップ5と、ヒートスプレッダー3の上に、パワーデバイスチップを5囲んで形成された絶縁性のダム4と、一端はパワーデバイスチップ5の電極とはんだ接合され、他端はダム4の上面に固定された内部主電極7とを備え、外部電極10aと内部主電極7の前記他端は、ワイヤボンディングにより電気的に接続されることを特徴とする。
【選択図】図1
Description
<構成>
図1に本実施の形態に係るパワーモジュールの断面図を示す。本実施の形態のパワーモジュールは、外囲ケース1内部に配設されたヒートスプレッダー3上に電気的に接合されたパワーデバイスチップ5の各電極を、パワーモジュールと一体となった外部電極10a,外部電極10a奥側の外部電極(図示せず)および外部信号電極10bに接続したものである。
外囲ケース1には、インサート成型またはアウトサート成型により、外部電極10a、外部電極10aの奥側の外部電極、および外部信号電極10bが形成される。また、外囲ケース1下面には、ベース板2が取り付けられる。
本実施の形態におけるパワーモジュールは、外囲ケース1内部にパワーデバイスチップ5を配設し、パワーデバイスチップ5の電極を外囲ケース1と一体となった外部電極81に接続したパワーモジュールであって、外囲ケース1内部に固定されたヒートスプレッダー3と、ヒートスプレッダー3の上にはんだ接合されたパワーデバイスチップ5と、ヒートスプレッダー3の上に、パワーデバイスチップ5を囲んで形成された絶縁性のダム4と、一端はパワーデバイスチップ5の電極とはんだ接合され、他端はダム4の上面に固定された内部主電極7とを備え、外部電極81と内部主電極7の前記他端は、ワイヤボンディングにより電気的に接続されることを特徴とする。
図4に、本実施の形態に係るパワーモジュールの断面図を示す。本実施の形態では、実施の形態1(図1)のように、ヒートスプレッダー3上に直接太線アルミワイヤ9aをボンディングするのではなく、ヒートスプレッダー3上にはんだ接合した導電性の電極ブロック3aの上面にボンディングを行う。その他の構造は実施の形態1と同じであるので、説明を省略する。
本実施の形態のパワーモジュールにおいて、ダム4の外側のヒートスプレッダー3上に、内部主電極7の前記他端と同じ高さの導電性の電極ブロック3aが電気的に接合され、電極ブロック3aの上面と、外囲ケース1と一体となった外部電極10a奥側の外部電極は、ワイヤボンディングにより電気的に接続されることを特徴とする。
本実施の形態では、図1における、絶縁基板とヒートスプレッダー3の接合面、即ち金属パターン8bとヒートスプレッダー3の接合面において、金属パターン8bの外周部に予めソルダーレジスト21を施してから、はんだ接合を行う点が実施の形態1と異なる。それ以外は、実施の形態1と同じであるので、説明を省略する。
本実施の形態のパワーモジュールにおいて、絶縁基板の、ヒートスプレッダー3との接合面の外周部には、ソルダーレジスト21が施され、絶縁基板とヒートスプレッダー3ははんだ接合により固定され、前記外周部の幅21aは、1mm以上2mm以下であることを特徴とする。
Claims (5)
- 外囲ケース内部にパワーデバイスチップを配設し、前記パワーデバイスチップの電極を前記外囲ケースと一体となった外部電極に接続したパワーモジュールであって、
前記外囲ケース内部に固定されたヒートスプレッダーと、
前記ヒートスプレッダーの上にはんだ接合された前記パワーデバイスチップと、
前記ヒートスプレッダーの上に、前記パワーデバイスチップを囲んで形成された絶縁性のダムと、
一端は前記パワーデバイスチップの電極とはんだ接合され、他端は前記ダムの上面に固定された内部主電極と、
を備え、
前記外部電極と前記内部主電極の前記他端は、ワイヤボンディングにより電気的に接続されることを特徴とする、
パワーモジュール。 - 前記ダムは、前記パワーデバイスチップおよび前記パワーデバイスチップの前記電極と前記内部主電極との接合部よりも高く形成され、
前記ダム内側にエポキシ樹脂を充填して、前記パワーデバイスチップおよび前記パワーデバイスチップの前記電極と前記内部主電極のはんだ接合部が封止されることを特徴とする、
請求項1に記載のパワーモジュール。 - 前記ヒートスプレッダーは、前記外囲ケースの下面となるベース板の上に固定された絶縁基板上に固定され、
前記絶縁基板は、両面に金属パターンを備えたセラミック製絶縁板であり、
前記ヒートスプレッダーの材質は銅で、その厚みは1mm以上2mm以下であり、
前記ベース板の材質は銅で、その厚みは3.5mm以下であり、
前記セラミック製絶縁板の材質は窒化珪素で、その厚みは0.30mm以上0.35mm以下であり、
前記金属パターンの材質は銅で、その厚みは0.3mm以上0.5mm以下であることを特徴とする、
請求項1または2に記載のパワーモジュール。 - 前記ダムの外側の前記ヒートスプレッダー上に、前記内部主電極の前記他端と同じ高さの導電性の電極ブロックが電気的に接合され、
前記電極ブロックの上面と、前記外囲ケースと一体となった外部電極は、ワイヤボンディングにより電気的に接続されることを特徴とする、
請求項1〜3のいずれかに記載のパワーモジュール。 - 前記絶縁基板の、前記ヒートスプレッダーとの接合面の外周部には予めソルダーレジストが施され、
前記ソルダーレジストが施される前記外周部の幅は、1mm以上2mm以下であり、
前記ヒートスプレッダーは前記絶縁基板上に、はんだ接合により固定されることを特徴とする、
請求項1〜4のいずれかに記載のパワーモジュール。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012090004A JP5656907B2 (ja) | 2012-04-11 | 2012-04-11 | パワーモジュール |
DE102012224355.0A DE102012224355B4 (de) | 2012-04-11 | 2012-12-21 | Leistungsmodul |
US13/748,422 US8674492B2 (en) | 2012-04-11 | 2013-01-23 | Power module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012090004A JP5656907B2 (ja) | 2012-04-11 | 2012-04-11 | パワーモジュール |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013219267A true JP2013219267A (ja) | 2013-10-24 |
JP2013219267A5 JP2013219267A5 (ja) | 2014-07-03 |
JP5656907B2 JP5656907B2 (ja) | 2015-01-21 |
Family
ID=49232287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012090004A Active JP5656907B2 (ja) | 2012-04-11 | 2012-04-11 | パワーモジュール |
Country Status (3)
Country | Link |
---|---|
US (1) | US8674492B2 (ja) |
JP (1) | JP5656907B2 (ja) |
DE (1) | DE102012224355B4 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015222743A (ja) * | 2014-05-22 | 2015-12-10 | 三菱電機株式会社 | 半導体装置 |
JP2016051878A (ja) * | 2014-09-02 | 2016-04-11 | 三菱電機株式会社 | 電力用半導体装置 |
CN107204292A (zh) * | 2016-03-18 | 2017-09-26 | 富士电机株式会社 | 半导体装置及半导体装置的制造方法 |
JP6289583B1 (ja) * | 2016-10-24 | 2018-03-07 | 三菱電機株式会社 | 電力半導体装置 |
WO2019008828A1 (ja) * | 2017-07-03 | 2019-01-10 | 三菱電機株式会社 | 半導体装置 |
US10347593B2 (en) | 2017-04-17 | 2019-07-09 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing the semiconductor device |
CN111834350A (zh) * | 2019-04-18 | 2020-10-27 | 无锡华润安盛科技有限公司 | Ipm的封装方法以及ipm封装中的键合方法 |
US11189553B2 (en) | 2015-12-11 | 2021-11-30 | Amkor Technology Singapore Holding Pte. Ltd. | Wiring substrate, semiconductor package having the wiring substrate, and manufacturing method thereof |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5799974B2 (ja) * | 2013-05-23 | 2015-10-28 | 株式会社デンソー | 電子装置 |
JP6272213B2 (ja) * | 2014-11-26 | 2018-01-31 | 三菱電機株式会社 | 半導体装置 |
JP6309112B2 (ja) * | 2014-12-29 | 2018-04-11 | 三菱電機株式会社 | パワーモジュール |
JP6540324B2 (ja) * | 2015-07-23 | 2019-07-10 | 富士電機株式会社 | 半導体モジュール及び半導体モジュールの製造方法 |
DE102015216047A1 (de) * | 2015-08-21 | 2017-02-23 | Continental Automotive Gmbh | Schaltungsträger, Leistungselektronikanordnung mit einem Schaltungsträger |
DE102016000264B4 (de) | 2016-01-08 | 2022-01-05 | Infineon Technologies Ag | Halbleiterchipgehäuse, das sich lateral erstreckende Anschlüsse umfasst, und Verfahren zur Herstellung desselben |
CN107240581A (zh) * | 2016-03-29 | 2017-10-10 | 株式会社京浜 | 电力转换装置及电力转换装置的制造方法 |
CN107507808A (zh) * | 2017-08-23 | 2017-12-22 | 南京晟芯半导体有限公司 | 一种新型igbt模块封装结构 |
EP3627544A1 (de) * | 2018-09-20 | 2020-03-25 | Heraeus Deutschland GmbH & Co. KG | Substratanordnung zum verbinden mit zumindest einem elektronikbauteil und verfahren zum herstellen einer substratanordnung |
TWI726313B (zh) * | 2019-04-30 | 2021-05-01 | 作同 柯 | 功率半導體 |
EP3736854A1 (en) | 2019-05-06 | 2020-11-11 | Infineon Technologies AG | Power semiconductor module arrangement |
EP3736855A1 (en) | 2019-05-06 | 2020-11-11 | Infineon Technologies AG | Power semiconductor module arrangement and method for producing the same |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05235198A (ja) * | 1992-02-21 | 1993-09-10 | Nec Corp | リードレスチップキャリア |
JPH0730015A (ja) * | 1993-07-14 | 1995-01-31 | Hitachi Ltd | 半導体モジュール及びその製造方法 |
JPH09293801A (ja) * | 1996-04-26 | 1997-11-11 | Matsushita Electric Ind Co Ltd | モジュール部品 |
JP2003100987A (ja) * | 2001-09-20 | 2003-04-04 | Mitsubishi Electric Corp | 半導体装置 |
JP2004247623A (ja) * | 2003-02-17 | 2004-09-02 | Toshiba Corp | 半導体装置 |
JP2005116702A (ja) * | 2003-10-06 | 2005-04-28 | Fuji Electric Holdings Co Ltd | パワー半導体モジュール |
JP2007281498A (ja) * | 2007-05-28 | 2007-10-25 | Hitachi Metals Ltd | 半導体パワーモジュール |
JP2009289920A (ja) * | 2008-05-28 | 2009-12-10 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02260551A (ja) * | 1989-03-31 | 1990-10-23 | Seiko Epson Corp | 半導体装置 |
JP2799468B2 (ja) | 1989-11-30 | 1998-09-17 | イビデン株式会社 | フラットパッケージ |
JPH04320359A (ja) | 1991-04-19 | 1992-11-11 | Hitachi Ltd | 半導体装置 |
DE19914741A1 (de) * | 1999-03-31 | 2000-10-12 | Eupec Gmbh & Co Kg | Leistungshalbleitermodul |
JP2002110872A (ja) | 2000-09-27 | 2002-04-12 | Kyocera Corp | 配線基板および配線基板モジュール |
US8004075B2 (en) * | 2006-04-25 | 2011-08-23 | Hitachi, Ltd. | Semiconductor power module including epoxy resin coating |
JP2007335632A (ja) * | 2006-06-15 | 2007-12-27 | Toyota Industries Corp | 半導体装置 |
JP4760585B2 (ja) * | 2006-07-18 | 2011-08-31 | 三菱電機株式会社 | 電力用半導体装置 |
CN102576706B (zh) * | 2010-03-16 | 2015-07-22 | 富士电机株式会社 | 半导体器件 |
JP2012079914A (ja) * | 2010-10-01 | 2012-04-19 | Mitsubishi Electric Corp | パワーモジュールおよびその製造方法 |
CN103250242B (zh) * | 2010-11-25 | 2016-03-30 | 三菱电机株式会社 | 半导体装置以及半导体装置的制造方法 |
JP2013016629A (ja) | 2011-07-04 | 2013-01-24 | Mitsubishi Electric Corp | 半導体モジュール |
JP2013055150A (ja) * | 2011-09-01 | 2013-03-21 | Toshiba Corp | 半導体装置及びその製造方法 |
JP5606421B2 (ja) * | 2011-10-27 | 2014-10-15 | 株式会社日立製作所 | 銅ナノ粒子を用いた焼結性接合材料及びその製造方法及び電子部材の接合方法 |
-
2012
- 2012-04-11 JP JP2012090004A patent/JP5656907B2/ja active Active
- 2012-12-21 DE DE102012224355.0A patent/DE102012224355B4/de active Active
-
2013
- 2013-01-23 US US13/748,422 patent/US8674492B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05235198A (ja) * | 1992-02-21 | 1993-09-10 | Nec Corp | リードレスチップキャリア |
JPH0730015A (ja) * | 1993-07-14 | 1995-01-31 | Hitachi Ltd | 半導体モジュール及びその製造方法 |
JPH09293801A (ja) * | 1996-04-26 | 1997-11-11 | Matsushita Electric Ind Co Ltd | モジュール部品 |
JP2003100987A (ja) * | 2001-09-20 | 2003-04-04 | Mitsubishi Electric Corp | 半導体装置 |
JP2004247623A (ja) * | 2003-02-17 | 2004-09-02 | Toshiba Corp | 半導体装置 |
JP2005116702A (ja) * | 2003-10-06 | 2005-04-28 | Fuji Electric Holdings Co Ltd | パワー半導体モジュール |
JP2007281498A (ja) * | 2007-05-28 | 2007-10-25 | Hitachi Metals Ltd | 半導体パワーモジュール |
JP2009289920A (ja) * | 2008-05-28 | 2009-12-10 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015222743A (ja) * | 2014-05-22 | 2015-12-10 | 三菱電機株式会社 | 半導体装置 |
JP2016051878A (ja) * | 2014-09-02 | 2016-04-11 | 三菱電機株式会社 | 電力用半導体装置 |
US11189553B2 (en) | 2015-12-11 | 2021-11-30 | Amkor Technology Singapore Holding Pte. Ltd. | Wiring substrate, semiconductor package having the wiring substrate, and manufacturing method thereof |
US11908783B2 (en) | 2015-12-11 | 2024-02-20 | Amkor Technology Singapore Holding Pte. Ltd. | Wiring substrate, semiconductor package having the wiring substrate, and manufacturing method thereof |
CN107204292A (zh) * | 2016-03-18 | 2017-09-26 | 富士电机株式会社 | 半导体装置及半导体装置的制造方法 |
JP6289583B1 (ja) * | 2016-10-24 | 2018-03-07 | 三菱電機株式会社 | 電力半導体装置 |
JP2018073848A (ja) * | 2016-10-24 | 2018-05-10 | 三菱電機株式会社 | 電力半導体装置 |
US10347593B2 (en) | 2017-04-17 | 2019-07-09 | Mitsubishi Electric Corporation | Semiconductor device and method of manufacturing the semiconductor device |
US10790242B2 (en) | 2017-04-17 | 2020-09-29 | Mitsubishi Electric Corporation | Method of manufacturing a semiconductor device |
WO2019008828A1 (ja) * | 2017-07-03 | 2019-01-10 | 三菱電機株式会社 | 半導体装置 |
JP6461441B1 (ja) * | 2017-07-03 | 2019-01-30 | 三菱電機株式会社 | 半導体装置 |
CN111834350A (zh) * | 2019-04-18 | 2020-10-27 | 无锡华润安盛科技有限公司 | Ipm的封装方法以及ipm封装中的键合方法 |
Also Published As
Publication number | Publication date |
---|---|
DE102012224355A1 (de) | 2013-10-17 |
US20130270688A1 (en) | 2013-10-17 |
US8674492B2 (en) | 2014-03-18 |
JP5656907B2 (ja) | 2015-01-21 |
DE102012224355B4 (de) | 2016-06-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5656907B2 (ja) | パワーモジュール | |
JP6120704B2 (ja) | 半導体装置 | |
JP6300633B2 (ja) | パワーモジュール | |
JP4902560B2 (ja) | パワー半導体モジュール | |
JP5472498B2 (ja) | パワーモジュールの製造方法 | |
JP2013016629A (ja) | 半導体モジュール | |
JP2016018866A (ja) | パワーモジュール | |
JP2007311441A (ja) | パワー半導体モジュール | |
EP3026701B1 (en) | Power module and manufacturing method thereof | |
WO2014097798A1 (ja) | 半導体装置 | |
JP2015070107A (ja) | 半導体装置およびその製造方法 | |
JP5895220B2 (ja) | 半導体装置の製造方法 | |
JP6988345B2 (ja) | 半導体装置 | |
JP2005191071A (ja) | 半導体装置 | |
JP2011216564A (ja) | パワーモジュール及びその製造方法 | |
JP2010283053A (ja) | 半導体装置及びその製造方法 | |
JP6504962B2 (ja) | 電力用半導体装置 | |
JP6308780B2 (ja) | パワーモジュール | |
JP2012015222A (ja) | 半導体装置 | |
JP6124810B2 (ja) | パワーモジュール | |
JP2012156450A (ja) | 半導体装置および半導体装置の製造方法 | |
JP2017017109A (ja) | 半導体装置 | |
JP4096741B2 (ja) | 半導体装置 | |
JP2012248658A (ja) | 半導体装置 | |
JP2012209470A (ja) | 半導体装置、半導体装置モジュール及び半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140521 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140521 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20141020 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141028 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141125 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5656907 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |