JP2013149733A5 - - Google Patents
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- Publication number
- JP2013149733A5 JP2013149733A5 JP2012008102A JP2012008102A JP2013149733A5 JP 2013149733 A5 JP2013149733 A5 JP 2013149733A5 JP 2012008102 A JP2012008102 A JP 2012008102A JP 2012008102 A JP2012008102 A JP 2012008102A JP 2013149733 A5 JP2013149733 A5 JP 2013149733A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- single crystal
- silicon carbide
- silicon substrate
- crystal silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 57
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 45
- 229910052710 silicon Inorganic materials 0.000 claims description 45
- 239000010703 silicon Substances 0.000 claims description 45
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 39
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 39
- 239000000463 material Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
- 229920005591 polysilicon Polymers 0.000 claims 2
- 230000002040 relaxant effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012008102A JP6051524B2 (ja) | 2012-01-18 | 2012-01-18 | 半導体基板及び半導体基板の製造方法 |
| US13/735,444 US8847236B2 (en) | 2012-01-18 | 2013-01-07 | Semiconductor substrate and semiconductor substrate manufacturing method |
| CN201310013795.5A CN103219361B (zh) | 2012-01-18 | 2013-01-15 | 半导体基板及半导体基板的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012008102A JP6051524B2 (ja) | 2012-01-18 | 2012-01-18 | 半導体基板及び半導体基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013149733A JP2013149733A (ja) | 2013-08-01 |
| JP2013149733A5 true JP2013149733A5 (enExample) | 2015-03-05 |
| JP6051524B2 JP6051524B2 (ja) | 2016-12-27 |
Family
ID=48779367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012008102A Active JP6051524B2 (ja) | 2012-01-18 | 2012-01-18 | 半導体基板及び半導体基板の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8847236B2 (enExample) |
| JP (1) | JP6051524B2 (enExample) |
| CN (1) | CN103219361B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150072066A (ko) * | 2013-12-19 | 2015-06-29 | 서울바이오시스 주식회사 | 반도체 성장용 템플릿, 성장 기판 분리 방법 및 이를 이용한 발광소자 제조 방법 |
| JP2015192006A (ja) | 2014-03-28 | 2015-11-02 | セイコーエプソン株式会社 | 半導体ウェハー、受光センサー製造方法及び受光センサー |
| CN105576013B (zh) | 2014-10-31 | 2020-04-21 | 精工爱普生株式会社 | 带碳化硅膜基板及其制造方法、以及半导体装置 |
| US9362368B2 (en) | 2014-10-31 | 2016-06-07 | Seiko Epson Corporation | Substrate with silicon carbide film, method for producing substrate with silicon carbide film, and semiconductor device |
| JP6592961B2 (ja) * | 2015-05-19 | 2019-10-23 | セイコーエプソン株式会社 | 炭化ケイ素基板および炭化ケイ素基板の製造方法 |
| CN106504975B (zh) * | 2015-09-06 | 2019-12-27 | 中芯国际集成电路制造（天津）有限公司 | 提高关键尺寸精确性的方法 |
| CN108987250B (zh) * | 2017-06-02 | 2021-08-17 | 上海新昇半导体科技有限公司 | 衬底及其制作方法 |
| KR102331218B1 (ko) * | 2017-08-29 | 2021-12-02 | 마이크론 테크놀로지, 인크 | 고 밴드 갭 재료를 포함하는 스트링 드라이버들을 갖는 디바이스들 및 시스템들, 및 형성 방법들 |
| CN107946215A (zh) * | 2017-11-23 | 2018-04-20 | 长江存储科技有限责任公司 | 晶圆翘曲状态调整方法 |
| JP7129888B2 (ja) * | 2018-11-07 | 2022-09-02 | 東京エレクトロン株式会社 | 成膜方法及び半導体製造装置 |
| CN112908839B (zh) * | 2019-12-03 | 2021-10-01 | 上海积塔半导体有限公司 | 减少碳化硅晶圆弯曲度的方法 |
| WO2021217301A1 (zh) * | 2020-04-26 | 2021-11-04 | 苏州晶湛半导体有限公司 | 半导体结构的制作方法及半导体结构 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5335375A (en) * | 1976-09-13 | 1978-04-01 | Hitachi Ltd | Heating method |
| JPS6126227A (ja) * | 1984-07-16 | 1986-02-05 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JPS61225816A (ja) * | 1985-03-29 | 1986-10-07 | Sharp Corp | 化合物半導体装置の製造方法 |
| JPS6313324A (ja) * | 1986-07-03 | 1988-01-20 | Rohm Co Ltd | 基板の製造方法 |
| JPH01125917A (ja) * | 1987-11-11 | 1989-05-18 | Sharp Corp | 化合物半導体基板 |
| US5562770A (en) * | 1994-11-22 | 1996-10-08 | International Business Machines Corporation | Semiconductor manufacturing process for low dislocation defects |
| JP3880717B2 (ja) | 1997-12-19 | 2007-02-14 | Ｈｏｙａ株式会社 | 炭化珪素の製造方法 |
| EP1184897B8 (en) * | 1999-03-17 | 2006-10-11 | Mitsubishi Cable Industries, Ltd. | Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method |
| US6627974B2 (en) * | 2000-06-19 | 2003-09-30 | Nichia Corporation | Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate |
| JP3589200B2 (ja) * | 2000-06-19 | 2004-11-17 | 日亜化学工業株式会社 | 窒化物半導体基板及びその製造方法、並びにその窒化物半導体基板を用いた窒化物半導体素子 |
| JP3528814B2 (ja) * | 2001-05-02 | 2004-05-24 | 日亜化学工業株式会社 | 窒化物半導体から成る単体基板の製造方法 |
| JP2003218031A (ja) * | 2002-01-28 | 2003-07-31 | Toshiba Ceramics Co Ltd | 半導体ウェーハの製造方法 |
| EP1424409A4 (en) * | 2001-09-06 | 2009-04-15 | Covalent Materials Corp | SEMICONDUCTOR DISC AND METHOD FOR THE PRODUCTION THEREOF |
| JP2003113000A (ja) * | 2001-10-05 | 2003-04-18 | Hitachi Cable Ltd | 半導体エピタキシャルウェハ及びその製造方法 |
| JP4457576B2 (ja) * | 2003-05-08 | 2010-04-28 | 住友電気工業株式会社 | Ｉｉｉ−ｖ族化合物結晶およびその製造方法 |
| EP2104135B1 (en) * | 2008-03-20 | 2013-06-12 | Siltronic AG | A semiconductor wafer with a heteroepitaxial layer and a method for producing the wafer |
| EP2251897B1 (en) * | 2009-05-13 | 2016-01-06 | Siltronic AG | A method for producing a wafer comprising a silicon single crystal substrate having a front and a back side and a layer of SiGe deposited on the front side |
| JP2011171567A (ja) * | 2010-02-19 | 2011-09-01 | Elpida Memory Inc | 基板構造物の製造方法及び半導体装置の製造方法 |
-
2012
- 2012-01-18 JP JP2012008102A patent/JP6051524B2/ja active Active
-
2013
- 2013-01-07 US US13/735,444 patent/US8847236B2/en active Active
- 2013-01-15 CN CN201310013795.5A patent/CN103219361B/zh active Active
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