JP2015122488A5 - - Google Patents
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- Publication number
- JP2015122488A5 JP2015122488A5 JP2014236874A JP2014236874A JP2015122488A5 JP 2015122488 A5 JP2015122488 A5 JP 2015122488A5 JP 2014236874 A JP2014236874 A JP 2014236874A JP 2014236874 A JP2014236874 A JP 2014236874A JP 2015122488 A5 JP2015122488 A5 JP 2015122488A5
- Authority
- JP
- Japan
- Prior art keywords
- nanowire
- parallel
- nanowires
- gate trench
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002070 nanowire Substances 0.000 claims 30
- 125000006850 spacer group Chemical group 0.000 claims 14
- 239000000463 material Substances 0.000 claims 9
- 238000000034 method Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- 238000000059 patterning Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13198829 | 2013-12-20 | ||
| EP13198829.7 | 2013-12-20 | ||
| EP14151285.5 | 2014-01-15 | ||
| EP14151285.5A EP2887399B1 (en) | 2013-12-20 | 2014-01-15 | A method for manufacturing a transistor device and associated device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015122488A JP2015122488A (ja) | 2015-07-02 |
| JP2015122488A5 true JP2015122488A5 (enExample) | 2017-10-26 |
| JP6266495B2 JP6266495B2 (ja) | 2018-01-24 |
Family
ID=49880511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014236874A Active JP6266495B2 (ja) | 2013-12-20 | 2014-11-21 | トランジスタデバイスの製造方法および関連するデバイス |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9257539B2 (enExample) |
| EP (1) | EP2887399B1 (enExample) |
| JP (1) | JP6266495B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3050111A4 (en) * | 2013-09-27 | 2017-06-07 | Intel Corporation | Improved cladding layer epitaxy via template engineering for heterogeneous integration on silicon |
| WO2017079470A1 (en) * | 2015-11-03 | 2017-05-11 | Tokyo Electron Limited | Method of corner rounding and trimming of nanowires by microwave plasma |
| US9748334B1 (en) * | 2016-02-18 | 2017-08-29 | International Business Machines Corporation | Fabrication of nanomaterial T-gate transistors with charge transfer doping layer |
| JP2019508899A (ja) * | 2016-03-11 | 2019-03-28 | アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ | 垂直ナノ構造を取り囲むターゲット層を配設する方法 |
| EP3369702A1 (en) * | 2017-03-03 | 2018-09-05 | IMEC vzw | Internal spacers for nanowire semiconductor devices |
| CN108735809B (zh) * | 2017-04-13 | 2021-08-17 | 中芯国际集成电路制造(北京)有限公司 | 一种半导体器件及其制造方法和电子装置 |
| US10461152B2 (en) * | 2017-07-10 | 2019-10-29 | Globalfoundries Inc. | Radio frequency switches with air gap structures |
| US10833153B2 (en) | 2017-09-13 | 2020-11-10 | Globalfoundries Inc. | Switch with local silicon on insulator (SOI) and deep trench isolation |
| US10446643B2 (en) | 2018-01-22 | 2019-10-15 | Globalfoundries Inc. | Sealed cavity structures with a planar surface |
| US10461194B2 (en) | 2018-03-23 | 2019-10-29 | International Business Machines Corporation | Threshold voltage control using channel digital etch |
| US11410872B2 (en) | 2018-11-30 | 2022-08-09 | Globalfoundries U.S. Inc. | Oxidized cavity structures within and under semiconductor devices |
| US10923577B2 (en) | 2019-01-07 | 2021-02-16 | Globalfoundries U.S. Inc. | Cavity structures under shallow trench isolation regions |
| US11127816B2 (en) | 2020-02-14 | 2021-09-21 | Globalfoundries U.S. Inc. | Heterojunction bipolar transistors with one or more sealed airgap |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100499159B1 (ko) | 2003-02-28 | 2005-07-01 | 삼성전자주식회사 | 리세스 채널을 갖는 반도체장치 및 그 제조방법 |
| JP4796329B2 (ja) * | 2004-05-25 | 2011-10-19 | 三星電子株式会社 | マルチ−ブリッジチャンネル型ｍｏｓトランジスタの製造方法 |
| US7319252B2 (en) * | 2004-06-28 | 2008-01-15 | Intel Corporation | Methods for forming semiconductor wires and resulting devices |
| US7488650B2 (en) * | 2005-02-18 | 2009-02-10 | Infineon Technologies Ag | Method of forming trench-gate electrode for FinFET device |
| JP2006269975A (ja) * | 2005-03-25 | 2006-10-05 | Toshiba Corp | 半導体装置及びその製造方法 |
| US7279375B2 (en) * | 2005-06-30 | 2007-10-09 | Intel Corporation | Block contact architectures for nanoscale channel transistors |
| JP4970997B2 (ja) * | 2006-03-30 | 2012-07-11 | パナソニック株式会社 | ナノワイヤトランジスタの製造方法 |
| US7923337B2 (en) * | 2007-06-20 | 2011-04-12 | International Business Machines Corporation | Fin field effect transistor devices with self-aligned source and drain regions |
| CN101960570A (zh) * | 2008-02-26 | 2011-01-26 | Nxp股份有限公司 | 制造半导体器件的方法和半导体器件 |
| JP5391688B2 (ja) * | 2008-12-26 | 2014-01-15 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法と半導体装置 |
| CN101853882B (zh) * | 2009-04-01 | 2016-03-23 | 台湾积体电路制造股份有限公司 | 具有改进的开关电流比的高迁移率多面栅晶体管 |
| US8422273B2 (en) * | 2009-05-21 | 2013-04-16 | International Business Machines Corporation | Nanowire mesh FET with multiple threshold voltages |
| US8637359B2 (en) * | 2011-06-10 | 2014-01-28 | International Business Machines Corporation | Fin-last replacement metal gate FinFET process |
| US9006087B2 (en) * | 2013-02-07 | 2015-04-14 | International Business Machines Corporation | Diode structure and method for wire-last nanomesh technologies |
| US8900951B1 (en) * | 2013-09-24 | 2014-12-02 | International Business Machines Corporation | Gate-all-around nanowire MOSFET and method of formation |
-
2014
- 2014-01-15 EP EP14151285.5A patent/EP2887399B1/en active Active
- 2014-11-21 JP JP2014236874A patent/JP6266495B2/ja active Active
- 2014-12-10 US US14/566,073 patent/US9257539B2/en active Active
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