JP6928763B2 - マイクロ波プラズマによりナノワイヤの角を丸め、調整する方法 - Google Patents
マイクロ波プラズマによりナノワイヤの角を丸め、調整する方法 Download PDFInfo
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Description
この出願は、2015年11月3日に出願された米国仮特許出願番号第62/250,395号に関するものであり、この優先権を主張し、その全内容は、参照によって本願明細書に組み込まれる。
Claims (17)
- ナノワイヤの角を丸め、前記ナノワイヤを調整する方法であって、前記方法は、
処理チャンバ内に、ボイドによって互いに分離される複数のナノワイヤを提供するステップであって、前記複数のナノワイヤは、Siからなり、前記複数のナノワイヤは、高さ及び少なくとも実質的に直角の角を有する、ステップと、
酸化表面層を前記複数のナノワイヤ上に酸化マイクロ波プラズマを用いて形成するステップと、
前記酸化表面層を除去し、前記複数のナノワイヤの前記高さを調整し、前記角を丸める、除去するステップと、
前記複数のナノワイヤが所望の調整された高さ及び丸められた角を有するまで、前記形成するステップ及び前記除去するステップを少なくとも1回繰り返すステップと、
を含む方法。 - 前記酸化マイクロ波プラズマは、プラズマ励起したO2ガスを含む、
請求項1に記載の方法。 - 前記除去するステップは、化学的酸化物除去(COR)プロセスを含み、前記化学的酸化物除去(COR)プロセスは、
前記酸化表面層をHFガス及びNH3ガスに露出し、反応生成物を前記複数のナノワイヤ上に形成するステップと、
前記複数のナノワイヤを熱処理し、前記反応生成物を脱着させるステップと、
を含む、
請求項1に記載の方法。 - 前記酸化マイクロ波プラズマは、前記処理チャンバ内の1Torr以下のガス圧力を利用する、
請求項1に記載の方法。 - 前記酸化マイクロ波プラズマは、前記処理チャンバ内の1Torrより大きいガス圧力を利用する、
請求項1に記載の方法。 - マイクロ波プラズマによりナノワイヤの角を丸め、前記ナノワイヤを調整する方法であって、前記方法は、
処理チャンバ内に、ボイドによって互いに分離される複数のナノワイヤを提供するステップであって、前記複数のナノワイヤは、高さ及び少なくとも実質的に直角の角を有する、ステップと、
第1酸化表面層を前記複数のナノワイヤ上に、第1ガス圧力の第1酸化マイクロ波プラズマを用いて形成するステップと、
第2酸化表面層を前記複数のナノワイヤ上に、前記第1ガス圧力とは異なる第2ガス圧力の第2酸化マイクロ波プラズマを用いて形成するステップと、
前記第1酸化表面層及び前記第2酸化表面層を除去し、前記複数のナノワイヤの前記高さを調整し、前記角を丸める、除去するステップと、
前記複数のナノワイヤが所望の調整された高さ及び丸められた角を有するまで、前記形成するステップ及び前記除去するステップの各々を少なくとも1回繰り返すステップと、
を含む方法。 - 前記複数のナノワイヤは、Siからなる、
請求項6に記載の方法。 - 前記複数のナノワイヤは、Si、SiGe及び化合物半導体からなる群から選択される、
請求項6に記載の方法。 - 前記第1酸化マイクロ波プラズマ及び前記第2酸化マイクロ波プラズマは、プラズマ励起したO2ガスを含む、
請求項6に記載の方法。 - 前記除去するステップは、化学的酸化物除去(COR)プロセスを含み、前記化学的酸化物除去(COR)プロセスは、
前記第1酸化表面層及び前記第2酸化表面層をHFガス及びNH3ガスに露出し、反応生成物を前記複数のナノワイヤ上に形成するステップと、
前記複数のナノワイヤを熱処理し、前記反応生成物を脱着させるステップと、
を含む、
請求項6に記載の方法。 - 前記第1ガス圧力は、前記第2ガス圧力より低い、
請求項6に記載の方法。 - 前記第1ガス圧力は、1Torr以下であり、前記第2ガス圧力は、1Torrより大きい、
請求項6に記載の方法。 - マイクロ波プラズマによりナノワイヤの角を丸め、前記ナノワイヤを調整する方法であって、前記方法は、
処理チャンバ内に、ボイドによって互いに分離される複数のナノワイヤを提供するステップであって、前記複数のナノワイヤは、高さ及び少なくとも実質的に直角の角を有するステップと、
第1酸化表面層を前記複数のナノワイヤ上に、1Torr以下のガス圧力の第1酸化マイクロ波プラズマを用いて形成するステップと、
第2酸化表面層を前記複数のナノワイヤ上に、1Torrより大きい第2ガス圧力の第2酸化マイクロ波プラズマを用いて形成するステップと、
前記第1酸化表面層及び前記第2酸化表面層を除去し、前記複数のナノワイヤの前記高さを調整し、前記角を丸める、除去するステップと、
前記複数のナノワイヤが所望の調整高さ及び丸い角を有するまで、前記形成するステップ及び前記除去するステップの各々を少なくとも1回繰り返すステップと、
を含む方法。 - 前記複数のナノワイヤは、Siからなる、
請求項13に記載の方法。 - 前記複数のナノワイヤは、Si、SiGe及び化合物半導体からなる群から選択される、
請求項13に記載の方法。 - 前記第1酸化マイクロ波プラズマ及び前記第2酸化マイクロ波プラズマは、プラズマ励起したO2ガスを含む、
請求項13に記載の方法。 - 前記除去するステップは、化学的酸化物除去(COR)プロセスを含み、前記化学的酸化物除去(COR)プロセスは、
前記第1酸化表面層及び前記第2酸化表面層をHFガス及びNH3ガスに露出し、反応生成物を前記複数のナノワイヤ上に形成するステップと、
前記複数のナノワイヤを熱処理し、前記反応生成物を脱着させるステップと、
を含む、
請求項13に記載の方法。
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