JP2013080642A5 - - Google Patents

Download PDF

Info

Publication number
JP2013080642A5
JP2013080642A5 JP2011220606A JP2011220606A JP2013080642A5 JP 2013080642 A5 JP2013080642 A5 JP 2013080642A5 JP 2011220606 A JP2011220606 A JP 2011220606A JP 2011220606 A JP2011220606 A JP 2011220606A JP 2013080642 A5 JP2013080642 A5 JP 2013080642A5
Authority
JP
Japan
Prior art keywords
sample
unit
charged particle
space
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011220606A
Other languages
English (en)
Japanese (ja)
Other versions
JP5825964B2 (ja
JP2013080642A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011220606A external-priority patent/JP5825964B2/ja
Priority to JP2011220606A priority Critical patent/JP5825964B2/ja
Priority to CN201280048835.3A priority patent/CN103858204B/zh
Priority to PCT/JP2012/072290 priority patent/WO2013051357A1/ja
Priority to US14/349,630 priority patent/US8933400B2/en
Priority to KR1020147034116A priority patent/KR101589400B1/ko
Priority to KR1020147008793A priority patent/KR101566646B1/ko
Priority to DE112012003809.6T priority patent/DE112012003809B4/de
Publication of JP2013080642A publication Critical patent/JP2013080642A/ja
Publication of JP2013080642A5 publication Critical patent/JP2013080642A5/ja
Priority to US14/562,260 priority patent/US9236217B2/en
Publication of JP5825964B2 publication Critical patent/JP5825964B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011220606A 2011-10-05 2011-10-05 検査又は観察装置及び試料の検査又は観察方法 Expired - Fee Related JP5825964B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2011220606A JP5825964B2 (ja) 2011-10-05 2011-10-05 検査又は観察装置及び試料の検査又は観察方法
DE112012003809.6T DE112012003809B4 (de) 2011-10-05 2012-09-03 Untersuchungs- und Betrachtungsvorrichtung und Probenuntersuchungs- und Betrachtungsverfahren
PCT/JP2012/072290 WO2013051357A1 (ja) 2011-10-05 2012-09-03 検査又は観察装置及び試料の検査又は観察方法
US14/349,630 US8933400B2 (en) 2011-10-05 2012-09-03 Inspection or observation apparatus and sample inspection or observation method
KR1020147034116A KR101589400B1 (ko) 2011-10-05 2012-09-03 시료 관찰 방법
KR1020147008793A KR101566646B1 (ko) 2011-10-05 2012-09-03 검사 또는 관찰 장치 및 시료의 검사 또는 관찰 방법
CN201280048835.3A CN103858204B (zh) 2011-10-05 2012-09-03 检查或观察装置及试样的检查或观察方法
US14/562,260 US9236217B2 (en) 2011-10-05 2014-12-05 Inspection or observation apparatus and sample inspection or observation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011220606A JP5825964B2 (ja) 2011-10-05 2011-10-05 検査又は観察装置及び試料の検査又は観察方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015199039A Division JP6118870B2 (ja) 2015-10-07 2015-10-07 試料観察方法

Publications (3)

Publication Number Publication Date
JP2013080642A JP2013080642A (ja) 2013-05-02
JP2013080642A5 true JP2013080642A5 (enExample) 2014-05-29
JP5825964B2 JP5825964B2 (ja) 2015-12-02

Family

ID=48043525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011220606A Expired - Fee Related JP5825964B2 (ja) 2011-10-05 2011-10-05 検査又は観察装置及び試料の検査又は観察方法

Country Status (6)

Country Link
US (2) US8933400B2 (enExample)
JP (1) JP5825964B2 (enExample)
KR (2) KR101566646B1 (enExample)
CN (1) CN103858204B (enExample)
DE (1) DE112012003809B4 (enExample)
WO (1) WO2013051357A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5699023B2 (ja) * 2011-04-11 2015-04-08 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5825964B2 (ja) * 2011-10-05 2015-12-02 株式会社日立ハイテクノロジーズ 検査又は観察装置及び試料の検査又は観察方法
DE112014001109B4 (de) * 2013-04-12 2019-11-14 Hitachi High-Technologies Corporation Mit einem Strahl geladener Teilchen arbeitende Vorrichtung und Filterelement
CN105247650A (zh) * 2013-05-30 2016-01-13 株式会社日立高新技术 带电粒子束装置、试样观察方法
JP6302702B2 (ja) * 2014-02-27 2018-03-28 株式会社日立ハイテクノロジーズ 走査電子顕微鏡および画像生成方法
DE102014103360A1 (de) 2014-03-12 2015-09-17 Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh Vorrichtung für die korrelative Raster-Transmissionselektronenmikroskopie (STEM) und Lichtmikroskopie
JP6255305B2 (ja) * 2014-05-19 2017-12-27 株式会社レナ・システムズ 光学顕微装置
DE102014108331A1 (de) 2014-06-13 2015-12-17 Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung Spezifische Proteinmarkierung sowie Verfahren zur Identifizierung der statistischen Verteilung der Proteinstöchiometrie
DE102014108825A1 (de) * 2014-06-24 2015-12-24 Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung Vorrichtung und Verfahren für die stöchiometrische Analyse von Proben
CN105651696B (zh) * 2014-11-28 2019-05-14 财团法人工业技术研究院 检测仪器及其检测方法
US10177048B2 (en) * 2015-03-04 2019-01-08 Applied Materials Israel Ltd. System for inspecting and reviewing a sample
US10008361B2 (en) * 2015-04-28 2018-06-26 Hitachi High-Technologies Corporation Charged particle beam device and installation method
CN107710377B (zh) * 2015-06-29 2019-09-06 株式会社日立高新技术 试样高度调整方法及观察系统
CN107664834A (zh) * 2017-11-07 2018-02-06 西北农林科技大学 一种超声电机驱动的光学显微镜及其操作方法
US11294164B2 (en) 2019-07-26 2022-04-05 Applied Materials Israel Ltd. Integrated system and method
WO2021251026A1 (ja) * 2020-06-09 2021-12-16 国立研究開発法人物質・材料研究機構 観測対象ガスの観測装置及び観測対象イオンの観測方法並びに試料ホルダ
JP7493101B2 (ja) * 2021-04-13 2024-05-30 株式会社日立ハイテク 透過型電子顕微鏡

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6172363B1 (en) * 1996-03-05 2001-01-09 Hitachi, Ltd. Method and apparatus for inspecting integrated circuit pattern
JP2000228166A (ja) * 1999-02-05 2000-08-15 Horon:Kk 試料観察装置
US6563570B1 (en) * 1999-05-17 2003-05-13 Nikon Corporation Apparatus for evaluating a sample including a self-supporting thin film
US6407373B1 (en) * 1999-06-15 2002-06-18 Applied Materials, Inc. Apparatus and method for reviewing defects on an object
EP1116932A3 (de) 2000-01-14 2003-04-16 Leica Microsystems Wetzlar GmbH Messgerät und Verfahren zun Vermessen von Strukturen auf einem Substrat
FR2806527B1 (fr) * 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
US6891170B1 (en) * 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
JP2005026530A (ja) * 2003-07-04 2005-01-27 Jeol Ltd 試料ホルダ移動機構及び真空装置並びに荷電粒子ビーム装置
JP4528014B2 (ja) * 2004-04-05 2010-08-18 株式会社日立ハイテクノロジーズ 試料検査方法
JP2006147430A (ja) * 2004-11-22 2006-06-08 Hokkaido Univ 電子顕微鏡
TW200639901A (en) * 2005-05-09 2006-11-16 Li Bing Huan Device for operating gas in vacuum or low-pressure environment and for observation of the operation
EP2080014B1 (en) * 2006-10-24 2016-08-31 B-Nano Ltd. An interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
JP2008153086A (ja) 2006-12-19 2008-07-03 Jeol Ltd 試料検査装置及び試料検査方法並びに試料検査システム
EP2365321B1 (en) 2006-12-19 2013-10-02 JEOL Ltd. Sample inspection apparatus, sample inspection method, and sample inspection system
JP2008300354A (ja) * 2007-05-31 2008-12-11 Fei Co 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置
WO2010001399A1 (en) * 2008-07-03 2010-01-07 B-Nano A scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
JP2010080144A (ja) * 2008-09-25 2010-04-08 Lasertec Corp 複合型顕微鏡装置及び試料観察方法
JP2010230417A (ja) * 2009-03-26 2010-10-14 Jeol Ltd 試料の検査装置及び検査方法
CN201464332U (zh) * 2009-08-04 2010-05-12 山东理工大学 高安全性扫描电镜样品台
DE102010011898A1 (de) * 2010-03-18 2011-09-22 Carl Zeiss Nts Gmbh Inspektionssystem
CN101916706B (zh) * 2010-08-03 2013-09-04 深圳市金洲精工科技股份有限公司 一种扫描电镜样品台及扫描电镜
JP5707286B2 (ja) * 2011-09-21 2015-04-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。
JP5825964B2 (ja) * 2011-10-05 2015-12-02 株式会社日立ハイテクノロジーズ 検査又は観察装置及び試料の検査又は観察方法

Similar Documents

Publication Publication Date Title
JP2013080642A5 (enExample)
JP2012221766A5 (enExample)
JP2013251262A5 (enExample)
KR101514190B1 (ko) 하전 입자선 장치
JP5634030B2 (ja) 粒子光学装置用環境セル
US8710439B2 (en) Charged particle beam apparatus
JP5825964B2 (ja) 検査又は観察装置及び試料の検査又は観察方法
JP2013069443A5 (enExample)
JP2014038787A5 (enExample)
CN105518821B (zh) 带电粒子束装置以及试样图像取得方法
JP6302702B2 (ja) 走査電子顕微鏡および画像生成方法
JP5707286B2 (ja) 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。
JP2012160267A5 (enExample)
JP2009540512A5 (enExample)
JP6078637B2 (ja) 荷電粒子線装置およびフィルタ部材
WO2012008836A3 (en) Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
CN104584181A (zh) 带电粒子线装置及试样观察方法
KR101725139B1 (ko) 시료고정부가 연속 배열된 시료스테이지를 포함하는 전자현미경
KR101983029B1 (ko) 주사투과현미경(stem) 기능을 구비한 탈착가능 전자현미경용 시료실 장치 및 이를 포함하는 전자현미경
WO2013129196A1 (ja) 荷電粒子線装置及び荷電粒子線照射方法
JP2005222817A (ja) Ｘ線顕微鏡の機能を備えた走査電子顕微鏡
JP5976147B2 (ja) 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。
JP5919368B2 (ja) 荷電粒子線装置
JP5678134B2 (ja) 荷電粒子線装置
JP2016001629A (ja) 試料観察方法