JP2013069443A5 - - Google Patents

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Publication number
JP2013069443A5
JP2013069443A5 JP2011205499A JP2011205499A JP2013069443A5 JP 2013069443 A5 JP2013069443 A5 JP 2013069443A5 JP 2011205499 A JP2011205499 A JP 2011205499A JP 2011205499 A JP2011205499 A JP 2011205499A JP 2013069443 A5 JP2013069443 A5 JP 2013069443A5
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JP
Japan
Prior art keywords
charged particle
particle beam
casing
sample
thin film
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Application number
JP2011205499A
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English (en)
Japanese (ja)
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JP2013069443A (ja
JP5707286B2 (ja
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Priority claimed from JP2011205499A external-priority patent/JP5707286B2/ja
Priority to JP2011205499A priority Critical patent/JP5707286B2/ja
Priority to KR1020157010657A priority patent/KR20150052355A/ko
Priority to PCT/JP2012/067035 priority patent/WO2013042425A1/ja
Priority to DE112012003182.2T priority patent/DE112012003182B4/de
Priority to US14/235,892 priority patent/US9165741B2/en
Priority to CN201280041170.3A priority patent/CN103782364B/zh
Priority to KR1020147004411A priority patent/KR101542022B1/ko
Priority to KR1020157032618A priority patent/KR101589426B1/ko
Publication of JP2013069443A publication Critical patent/JP2013069443A/ja
Publication of JP2013069443A5 publication Critical patent/JP2013069443A5/ja
Publication of JP5707286B2 publication Critical patent/JP5707286B2/ja
Application granted granted Critical
Priority to US14/850,085 priority patent/US9673020B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011205499A 2011-09-21 2011-09-21 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。 Active JP5707286B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2011205499A JP5707286B2 (ja) 2011-09-21 2011-09-21 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。
CN201280041170.3A CN103782364B (zh) 2011-09-21 2012-07-04 带电粒子线装置、带电粒子线装置的调整方法及试样的检查或试样的观察方法
KR1020157032618A KR101589426B1 (ko) 2011-09-21 2012-07-04 하전 입자선 장치, 하전 입자선 장치의 조정 방법, 및 시료의 검사 또는 시료의 관찰 방법
PCT/JP2012/067035 WO2013042425A1 (ja) 2011-09-21 2012-07-04 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法
DE112012003182.2T DE112012003182B4 (de) 2011-09-21 2012-07-04 Ladungsteilchenstrahlvorrichtung
US14/235,892 US9165741B2 (en) 2011-09-21 2012-07-04 Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
KR1020157010657A KR20150052355A (ko) 2011-09-21 2012-07-04 하전 입자선 장치, 하전 입자선 장치의 조정 방법, 및 시료의 검사 또는 시료의 관찰 방법
KR1020147004411A KR101542022B1 (ko) 2011-09-21 2012-07-04 하전 입자선 장치, 하전 입자선 장치의 조정 방법, 및 시료의 관찰 방법
US14/850,085 US9673020B2 (en) 2011-09-21 2015-09-10 Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011205499A JP5707286B2 (ja) 2011-09-21 2011-09-21 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015028147A Division JP5976147B2 (ja) 2015-02-17 2015-02-17 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。

Publications (3)

Publication Number Publication Date
JP2013069443A JP2013069443A (ja) 2013-04-18
JP2013069443A5 true JP2013069443A5 (enExample) 2013-10-03
JP5707286B2 JP5707286B2 (ja) 2015-04-30

Family

ID=47914206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011205499A Active JP5707286B2 (ja) 2011-09-21 2011-09-21 荷電粒子線装置、荷電粒子線装置の調整方法、および試料の検査若しくは試料の観察方法。

Country Status (6)

Country Link
US (2) US9165741B2 (enExample)
JP (1) JP5707286B2 (enExample)
KR (3) KR101589426B1 (enExample)
CN (1) CN103782364B (enExample)
DE (1) DE112012003182B4 (enExample)
WO (1) WO2013042425A1 (enExample)

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Publication number Priority date Publication date Assignee Title
JP5699023B2 (ja) * 2011-04-11 2015-04-08 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5825964B2 (ja) * 2011-10-05 2015-12-02 株式会社日立ハイテクノロジーズ 検査又は観察装置及び試料の検査又は観察方法
JP6207824B2 (ja) * 2012-10-01 2017-10-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ
DE112014001109B4 (de) * 2013-04-12 2019-11-14 Hitachi High-Technologies Corporation Mit einem Strahl geladener Teilchen arbeitende Vorrichtung und Filterelement
JP6169703B2 (ja) * 2013-08-23 2017-07-26 株式会社日立ハイテクノロジーズ 隔膜取付部材および荷電粒子線装置
GB201317026D0 (en) * 2013-09-25 2013-11-06 Oxford Instr Nanotechnology Tools Ltd X-ray analysis in air
JP6047508B2 (ja) * 2014-01-27 2016-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料画像取得方法、およびプログラム記録媒体
JP2016213155A (ja) * 2015-05-13 2016-12-15 大日本印刷株式会社 試料収容セル
KR101682521B1 (ko) * 2015-05-15 2016-12-06 참엔지니어링(주) 시료 관찰 장치, 커버 어셈블리 및 시료 관찰 방법
KR101723922B1 (ko) * 2015-05-15 2017-04-10 참엔지니어링(주) 시료 관찰 장치 및 커버 어셈블리
JP6097863B2 (ja) * 2016-05-16 2017-03-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料画像取得方法、およびプログラム記録媒体
EP3616230B1 (en) * 2017-04-27 2023-08-02 King Abdullah University Of Science And Technology Transmission electron microscope sample alignment system and method
KR101954328B1 (ko) * 2017-05-16 2019-03-06 (주)코셈 고분해능 주사전자현미경
KR102207711B1 (ko) * 2018-12-28 2021-01-26 참엔지니어링(주) 시료 관찰 장치 및 방법
JP7259891B2 (ja) 2021-06-23 2023-04-18 株式会社Ｎｈｖコーポレーション 電子線照射装置及び電子線照射装置のメンテナンス方法
KR102854784B1 (ko) * 2025-05-15 2025-09-03 (주)코셈 대기압 전자현미경의 bse 이미지를 이용하여 다중창 초박막과 샘플 사이의 안전거리를 감지 및 제어하는 방법

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JPH0538526Y2 (enExample) * 1987-08-28 1993-09-29
JPH02138900A (ja) * 1988-11-18 1990-05-28 Nikon Corp 電子線透過窓
JPH05234552A (ja) 1992-02-21 1993-09-10 Elionix Kk 走査電子顕微鏡
JPH06242299A (ja) * 1993-02-18 1994-09-02 Nissin High Voltage Co Ltd 照射窓
JP2889147B2 (ja) * 1995-03-01 1999-05-10 株式会社神戸製鋼所 大気圧下測定用イオンビーム分析装置のイオンビーム出口窓
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JP5253800B2 (ja) 2007-12-26 2013-07-31 日本電子株式会社 試料保持体及び観察・検査方法並びに観察・検査装置
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