JP2014089936A5 - - Google Patents

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Publication number
JP2014089936A5
JP2014089936A5 JP2012240751A JP2012240751A JP2014089936A5 JP 2014089936 A5 JP2014089936 A5 JP 2014089936A5 JP 2012240751 A JP2012240751 A JP 2012240751A JP 2012240751 A JP2012240751 A JP 2012240751A JP 2014089936 A5 JP2014089936 A5 JP 2014089936A5
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JP
Japan
Prior art keywords
electron beam
sample
beam microscope
sample holder
microscope according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012240751A
Other languages
English (en)
Japanese (ja)
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JP5875500B2 (ja
JP2014089936A (ja
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Publication date
Application filed filed Critical
Priority to JP2012240751A priority Critical patent/JP5875500B2/ja
Priority claimed from JP2012240751A external-priority patent/JP5875500B2/ja
Priority to PCT/JP2013/078807 priority patent/WO2014069325A1/ja
Publication of JP2014089936A publication Critical patent/JP2014089936A/ja
Publication of JP2014089936A5 publication Critical patent/JP2014089936A5/ja
Application granted granted Critical
Publication of JP5875500B2 publication Critical patent/JP5875500B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012240751A 2012-10-31 2012-10-31 電子ビーム顕微装置 Active JP5875500B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012240751A JP5875500B2 (ja) 2012-10-31 2012-10-31 電子ビーム顕微装置
PCT/JP2013/078807 WO2014069325A1 (ja) 2012-10-31 2013-10-24 電子ビーム顕微装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012240751A JP5875500B2 (ja) 2012-10-31 2012-10-31 電子ビーム顕微装置

Publications (3)

Publication Number Publication Date
JP2014089936A JP2014089936A (ja) 2014-05-15
JP2014089936A5 true JP2014089936A5 (enExample) 2015-11-05
JP5875500B2 JP5875500B2 (ja) 2016-03-02

Family

ID=50627234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012240751A Active JP5875500B2 (ja) 2012-10-31 2012-10-31 電子ビーム顕微装置

Country Status (2)

Country Link
JP (1) JP5875500B2 (enExample)
WO (1) WO2014069325A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6421041B2 (ja) * 2015-01-13 2018-11-07 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US11152189B2 (en) * 2020-03-18 2021-10-19 Fei Company Method and system for plasma assisted low vacuum charged-particle microscopy
DE112021007286T5 (de) * 2021-05-17 2024-01-25 Hitachi High-Tech Corporation Probenhalter und analysesystem
JP2023051864A (ja) * 2021-09-30 2023-04-11 エフ イー アイ カンパニ モジュール式超高真空電子顕微鏡

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420657A (en) * 1977-07-18 1979-02-16 Hitachi Ltd Sample processor for scanning electron microscope and its similar device
JPS5938701B2 (ja) * 1979-04-10 1984-09-18 株式会社国際精工 二段試料台を備えた走査型電子顕微鏡
JPS6237326Y2 (enExample) * 1980-11-06 1987-09-24
JPS60189854A (ja) * 1984-03-10 1985-09-27 Shimadzu Corp 試料交換装置
JPH0357000Y2 (enExample) * 1985-07-12 1991-12-25
JPH0614460B2 (ja) * 1987-05-22 1994-02-23 日本電子株式会社 電子顕微鏡等における試料装置
JPH04286843A (ja) * 1991-03-18 1992-10-12 Hitachi Ltd 走査形電子顕微鏡及びその類似装置の可動絞り装置
JPH04306547A (ja) * 1991-04-02 1992-10-29 Fujitsu Ltd 電子顕微鏡用試料ホルダおよび真空装置用ロードロック機構
JPH09167591A (ja) * 1995-12-15 1997-06-24 Hitachi Ltd 走査透過電子顕微鏡
JP4178741B2 (ja) * 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
JP4769828B2 (ja) * 2008-02-28 2011-09-07 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置
JP5147567B2 (ja) * 2008-06-27 2013-02-20 株式会社日立ハイテクノロジーズ 電子分光器を有する透過型電子顕微鏡装置，試料ホルダ，試料台及びスペクトル像の取得方法
EP2182544A1 (en) * 2008-10-31 2010-05-05 FEI Company Charged-particle optical system with dual specimen loading options
JP5244730B2 (ja) * 2009-07-31 2013-07-24 株式会社日立ハイテクノロジーズ 低真空走査電子顕微鏡

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